JPS61125168U - - Google Patents
Info
- Publication number
- JPS61125168U JPS61125168U JP731885U JP731885U JPS61125168U JP S61125168 U JPS61125168 U JP S61125168U JP 731885 U JP731885 U JP 731885U JP 731885 U JP731885 U JP 731885U JP S61125168 U JPS61125168 U JP S61125168U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- particulate matter
- tip
- introducing
- supply device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013618 particulate matter Substances 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP731885U JPH0226934Y2 (enrdf_load_stackoverflow) | 1985-01-24 | 1985-01-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP731885U JPH0226934Y2 (enrdf_load_stackoverflow) | 1985-01-24 | 1985-01-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61125168U true JPS61125168U (enrdf_load_stackoverflow) | 1986-08-06 |
| JPH0226934Y2 JPH0226934Y2 (enrdf_load_stackoverflow) | 1990-07-20 |
Family
ID=30485559
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP731885U Expired JPH0226934Y2 (enrdf_load_stackoverflow) | 1985-01-24 | 1985-01-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226934Y2 (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006045589A (ja) * | 2004-07-30 | 2006-02-16 | Ulvac Japan Ltd | 成膜材料供給装置 |
| KR100607048B1 (ko) | 2004-09-24 | 2006-08-01 | 두산디앤디 주식회사 | 증착장치용 자동 시편공급기 |
-
1985
- 1985-01-24 JP JP731885U patent/JPH0226934Y2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006045589A (ja) * | 2004-07-30 | 2006-02-16 | Ulvac Japan Ltd | 成膜材料供給装置 |
| KR100607048B1 (ko) | 2004-09-24 | 2006-08-01 | 두산디앤디 주식회사 | 증착장치용 자동 시편공급기 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0226934Y2 (enrdf_load_stackoverflow) | 1990-07-20 |
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