JPH02267216A - Vacuum heat treatment furnace - Google Patents

Vacuum heat treatment furnace

Info

Publication number
JPH02267216A
JPH02267216A JP8868089A JP8868089A JPH02267216A JP H02267216 A JPH02267216 A JP H02267216A JP 8868089 A JP8868089 A JP 8868089A JP 8868089 A JP8868089 A JP 8868089A JP H02267216 A JPH02267216 A JP H02267216A
Authority
JP
Japan
Prior art keywords
chamber
cooling
gas
treated
cooling chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8868089A
Other languages
Japanese (ja)
Inventor
Takeo Kato
丈夫 加藤
Masao Kawamura
正雄 河村
Makoto Yoshiizumi
良 吉泉
Shin Sudo
須藤 慎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP8868089A priority Critical patent/JPH02267216A/en
Publication of JPH02267216A publication Critical patent/JPH02267216A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To uniformly cool a material to be treated with scarcely developed strains by providing a vacuum heat treatment furnace composed of a cooling chamber, in which the cooling gas flows, and a rotating mechanism for cooling while rotating the heated material to be treated at high temp. in this cooling chamber. CONSTITUTION:Compressed air is introduced into a cylinder body 22 and the air cylinder is driven to heat the material 15 to be treated, set in the heating chamber 1 to prescribed temp. Successively, the material 15 to be treated is set between guide plates 9a and 9b in the cooling chamber 2. After that, a gate valve 3 is closed and gas is introduced 16 into the chamber 2 to attain 600-2000Torr pressure in the chamber 2. Then, after introducing the gas, an air motor 28 is driven and the material 15 to be treated is rotated in the chamber 2, and also a fan 7 for cooling circulation is driven to circulate the gas in the chamber 2. During this, after exhausting the gas cooled with a heat exchanger 8 from a fan 7, the gas is passed through between right and left side walls in the chamber 2 and the guide plates 9a, 9b and blasted against the material 15 to be treated during rotation in the chamber 2 to cool the material 15 to be treated at high temp. state.

Description

【発明の詳細な説明】 (産業上の利用分野) この発明は、加熱室で加熱された被処理物を冷却室で回
転させながら冷却する真空熱処理炉に関するものである
DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a vacuum heat treatment furnace in which a workpiece heated in a heating chamber is cooled while being rotated in a cooling chamber.

(従来の技術) 従来の真空熱処理炉は、第6図及び第7図に示されてい
る。これらの図において、加熱室lと冷却室2とが仕切
弁3を介して上下に連接され、その加熱室1内にはヒー
タ4及び断熱材5が配設されている。冷却室2は前方に
開閉扉6が設けられているが、冷却室2の後方側壁には
冷却循環用ファン7が取付けられ、冷却循環用ファン7
の入口には熱交換器8が設けられている。冷却循環用フ
ァン7より吐出された気体を冷却室2内で循環させるた
め、案内板9a、9bが冷却室2の左右側壁とそれぞれ
所定の間隔をおいて配設されている。
(Prior Art) A conventional vacuum heat treatment furnace is shown in FIGS. 6 and 7. In these figures, a heating chamber 1 and a cooling chamber 2 are vertically connected via a gate valve 3, and a heater 4 and a heat insulating material 5 are disposed within the heating chamber 1. The cooling chamber 2 is provided with an opening/closing door 6 at the front, and a cooling circulation fan 7 is attached to the rear side wall of the cooling chamber 2.
A heat exchanger 8 is provided at the inlet. In order to circulate the gas discharged from the cooling circulation fan 7 within the cooling chamber 2, guide plates 9a and 9b are arranged at predetermined intervals from the left and right side walls of the cooling chamber 2, respectively.

冷却循環用ファン7の出口にはファン用整風板lOa、
10bが設けられ、また案内板9a、9bの端部と開閉
扉6との間には被処理物用整風板lla、llbがそれ
ぞれ設けられている。冷却室2外の下方には昇降用シリ
ンダ12が垂直に取付けられ、昇降用シリンダ12のロ
ッド(図示せず)と連結された昇降棒13が上方に垂直
に伸びている。昇降棒13の上端には台14が水平に固
定され、その台14の上に被処理物15が置かれている
。なお、16は冷却室2内にガスを導入するガス導入口
、17は昇降棒12に固定された遮蔽板である。
At the outlet of the cooling circulation fan 7, there is a fan air conditioning plate lOa,
10b, and between the ends of the guide plates 9a, 9b and the opening/closing door 6, air conditioning plates lla and llb for the object to be processed are provided, respectively. An elevating cylinder 12 is vertically installed below outside the cooling chamber 2, and an elevating rod 13 connected to a rod (not shown) of the elevating cylinder 12 extends vertically upward. A table 14 is horizontally fixed to the upper end of the lifting rod 13, and a workpiece 15 is placed on the table 14. Note that 16 is a gas inlet for introducing gas into the cooling chamber 2, and 17 is a shielding plate fixed to the lifting rod 12.

したがって、上記装置を用いて、被処理物15を加熱す
る場合には、昇降用シリンダ12を駆動して、昇降棒1
3を上方に移動させ、被処理物15を加熱室l内に配置
してから、ヒータ4で被処理物15を所定の温度に加熱
する。加熱後、冷却する場合には、昇降用シリンダ12
を駆動して、昇降棒13を下方に移動させ、被処理物1
5を冷却室2の案内板8aと案内板8bとの間に配置し
、そして、仕切弁3を閉めてから、ガス導入口16より
冷却室2内にガスを導入して、冷却室2内の圧力を所定
の圧力範囲にし、その後、冷却循環用ファン7を駆動し
て、冷却室2内にガスを循環させる。ガスの循環は、第
7図の矢印で示されるように、熱交換に8で冷却された
ガスは冷却循環用ファン7より吐出されてから、冷却室
2の左右側壁と案内板9a、9bとの間を通過し、その
後、被処理物用整風板11a、flbで流れ方向を変え
てから、静止している被処理物15にあたり、被処理物
15を冷却するようになる。
Therefore, when heating the workpiece 15 using the above device, the lifting cylinder 12 is driven and the lifting rod 1 is heated.
3 is moved upward and the object to be processed 15 is placed in the heating chamber l, and then the object to be processed 15 is heated to a predetermined temperature by the heater 4. When cooling after heating, the lifting cylinder 12
is driven to move the lifting rod 13 downward, and the workpiece 1 is moved downward.
5 is placed between the guide plate 8a and the guide plate 8b of the cooling chamber 2, and after closing the gate valve 3, gas is introduced into the cooling chamber 2 from the gas inlet 16, and the inside of the cooling chamber 2 is The pressure is set within a predetermined pressure range, and then the cooling circulation fan 7 is driven to circulate gas within the cooling chamber 2. As shown by the arrows in FIG. 7, the gas circulation is carried out after the gas cooled in the heat exchanger 8 is discharged from the cooling circulation fan 7, and then passes between the left and right side walls of the cooling chamber 2 and the guide plates 9a, 9b. After that, the flow direction is changed by the air conditioning plates 11a and flb for the object to be processed, and then the object to be processed 15, which is stationary, is cooled.

(発明が解決しようとする課題) 従来の真空熱処理炉において、冷却室2内の圧力を60
0〜700Torrして被処理物15を冷却する場合に
は、冷却速度が遅いため、焼き入れのできない鋼種があ
ったり、あるいは小さいものしか冷却できない等の問題
があった。
(Problem to be solved by the invention) In a conventional vacuum heat treatment furnace, the pressure inside the cooling chamber 2 is
When the workpiece 15 is cooled at 0 to 700 Torr, the cooling rate is slow, so there are problems such as some steel types cannot be hardened or only small objects can be cooled.

この問題を解消するために、冷却室2内の圧力を大気圧
以上に加圧(7て被処理物15を冷却すると、冷却速度
が速(なって、今まで焼き入れのできなかった鋼種にも
焼き入れができ、更に、大きいものも冷却できるように
なったが、冷却中に被処理物15の温度差が場所によっ
て生じ、被処理物15が変形したりする等の聞届が発生
するようになった。
In order to solve this problem, if the pressure inside the cooling chamber 2 is increased to above atmospheric pressure (7) and the workpiece 15 is cooled, the cooling rate becomes faster (and the steel types that could not be hardened until now can be heated). Although it has become possible to harden large objects and cool large objects, differences in temperature of the object 15 occur depending on the location during cooling, resulting in problems such as deformation of the object 15. It became so.

そのため、被処理物15が小物の場合には、被処理物1
5の冷却室2内に置かれている位置によって、冷却不良
により、被処理物15の一部に焼き入れ不良が発生して
いた。また、被処理物15が長尺物である場合には、温
度差による変形が大きく、使用不可になっていた。
Therefore, when the object 15 to be processed is a small item, the object 15 to be processed is
Depending on the position in the cooling chamber 2 of No. 5, quenching failure occurred in a part of the workpiece 15 due to insufficient cooling. Furthermore, when the object 15 to be processed is a long object, it is greatly deformed due to temperature differences, making it unusable.

この発明は、従来の問題を解決して、被処理物を均一に
冷却して、被処理物の歪みを少なくすること等を可能に
する真空熱処理炉を提供することを目的とするものであ
る。
An object of the present invention is to provide a vacuum heat treatment furnace that solves the conventional problems and makes it possible to uniformly cool a workpiece and reduce distortion of the workpiece. .

(課題を解決するための手段) 上記目的を達成するために、この発明の真空熱処理炉は
、冷却されたガスの流れる冷却室と、加熱されて高温度
になっている被処理物を上記冷却室内で回転させる回転
機構とを備え、上記被処理物を上記冷却室で回転させな
がら上記ガスで冷却することを特徴とするものである。
(Means for Solving the Problems) In order to achieve the above object, the vacuum heat treatment furnace of the present invention has a cooling chamber through which cooled gas flows, and a workpiece that has been heated to a high temperature. The apparatus is characterized in that it includes a rotation mechanism that rotates the object indoors, and cools the object to be processed with the gas while rotating it in the cooling chamber.

(作用) この発明においては、被処理物を冷却室で回転させなが
らガスで冷却するようにしているので、被処理物が均一
に冷却されるようになる。
(Function) In this invention, since the object to be processed is cooled with gas while being rotated in the cooling chamber, the object to be processed can be uniformly cooled.

(実施例) 以下、この発明の実施例について図面を参照しながら説
明する。
(Example) Hereinafter, an example of the present invention will be described with reference to the drawings.

第1図〜第3図はこの発明の実施例を示している。第1
図及び第2図において、従来の装置を示す第6図及び第
7図と同一符号はこれらと同一につき説明を省略するが
、この発明の実施例は、従来の装置に用いられている昇
降用シリンダ12の代りに、昇降機構と回転機構とを備
えた搬送装置20を用いている点において、従来の装置
と相違している。そこで、この発明の実施例に用いられ
ている搬送装置20の詳細は第3図に示されている。同
図において、エアシリンダ21の筒状シリンダ本体22
内には、筒状の昇降軸23に固定されたピストン24が
摺動自在に配設され、そして、筒状の昇降軸23内には
、その両端部のベアリング25によって軸支された回転
軸26が同心軸上に設けられている。回転軸26の一端
部は昇降棒13と結合されているが、他端部はフランチ
27を介して、エアモータ28と直結された回転軸29
の一端部と離脱自在に連結されている。クラッチ27は
、昇降軸23のストロークが0になったとき、回転軸2
6の一端部に固定されたクラッチ板27aの四部に遊嵌
されたビン27bがバネ27cによって弾圧され、エア
モータ28と直結された回転軸29の一端部に固定され
た回転板27dの穴27eに入り、噛み合うような構造
になっている。そのため、回転軸26の他端部が、クラ
ソチ27を介して、エアモータ28と直結された回転軸
29の一端部に連結されているときに、エアモータ28
を駆動させると、回転軸29、回転軸26、昇降棒13
、台14及び被処理物15が冷却室2内で回転するよう
になる。
1 to 3 show embodiments of this invention. 1st
In FIGS. 6 and 2, the same reference numerals as those in FIGS. 6 and 7 showing the conventional device are the same, and the explanation will be omitted. This device differs from conventional devices in that a conveying device 20 equipped with an elevating mechanism and a rotating mechanism is used instead of the cylinder 12. Therefore, details of the conveying device 20 used in the embodiment of the present invention are shown in FIG. In the figure, a cylindrical cylinder body 22 of an air cylinder 21 is shown.
A piston 24 fixed to a cylindrical elevating shaft 23 is slidably disposed inside the cylindrical elevating shaft 23, and a rotating shaft pivotally supported by bearings 25 at both ends thereof is disposed inside the cylindrical elevating shaft 23. 26 are provided on the concentric axis. One end of the rotating shaft 26 is connected to the lifting rod 13, and the other end is connected to a rotating shaft 29 directly connected to the air motor 28 via a flange 27.
It is removably connected to one end of the. When the stroke of the lifting shaft 23 becomes 0, the clutch 27 closes the rotating shaft 2.
A pin 27b loosely fitted into four parts of a clutch plate 27a fixed to one end of the clutch plate 27a is pressed by a spring 27c, and is inserted into a hole 27e of a rotating plate 27d fixed to one end of a rotating shaft 29 directly connected to an air motor 28. The structure is such that they fit together and fit together. Therefore, when the other end of the rotating shaft 26 is connected to one end of the rotating shaft 29 that is directly connected to the air motor 28 via the clamp 27, the air motor 28
When driven, the rotating shaft 29, the rotating shaft 26, and the lifting rod 13
, the table 14 and the workpiece 15 begin to rotate within the cooling chamber 2.

なお、第3図において、30は圧縮空気の導入口、31
はピストン24の衝撃を緩和するための通路、32は逆
止弁、33はベアリングである。
In addition, in FIG. 3, 30 is a compressed air inlet, 31
32 is a check valve, and 33 is a bearing.

したがって、上記実施例を用いて、被処理物15を加熱
する場合には、筒状シリンダ本体22内に圧縮空気を導
入して、エアシリンダ21を駆動して、昇降棒13を上
方に移動させ、被処理物15を加熱室l内に配置してか
ら、ヒータ4で被処理物15を所定の温度に加熱する。
Therefore, when heating the workpiece 15 using the above embodiment, compressed air is introduced into the cylindrical cylinder body 22, the air cylinder 21 is driven, and the lifting rod 13 is moved upward. After placing the workpiece 15 in the heating chamber l, the workpiece 15 is heated to a predetermined temperature by the heater 4.

加熱後、冷却する場合には、エアシリンダ21を駆動し
て、昇降軸23を移動させ、回転軸26の他端部と、エ
アモータ28と直結された回転軸29の一端部とを、ク
ラッチ27を介して連結し、そして、被処理物】5を冷
却室2の案内板8aと案内板8bとの間に配置する。そ
の後、仕切弁3を閉め、ガス導入口16より、冷却室2
内の圧力が600〜2200To r rになるまで、
冷却室2内にガスを導入する。ガスの導入後、エアモー
タ28を駆動させ、被処理物15を冷却室2内で回転さ
せると共に、冷却循環用ファン7を駆動して、冷却室2
内にガスを循環させる。ガスの循環した流れは、第2図
の矢印で示されるように、熱交換器8で冷却されたガス
は冷却循環用ファン7より吐出されてから、冷却室2の
左右側壁と案内板9a、9bとの間を通過し、その後、
被処理物用整風板11a、llbで流れ方向を変え、冷
却室2内で回転している被処理物15にあたり、高温度
になっている被処理物15を冷却するようになる。
When cooling after heating, the air cylinder 21 is driven to move the lift shaft 23, and the other end of the rotary shaft 26 and one end of the rotary shaft 29 directly connected to the air motor 28 are connected to the clutch 27. and the object to be processed [5] is placed between the guide plates 8a and 8b of the cooling chamber 2. After that, the gate valve 3 is closed, and the cooling chamber 2 is opened from the gas inlet 16.
Until the internal pressure reaches 600 to 2200 Torr,
Gas is introduced into the cooling chamber 2. After introducing the gas, the air motor 28 is driven to rotate the workpiece 15 in the cooling chamber 2, and the cooling circulation fan 7 is driven to cool the cooling chamber 2.
circulate gas inside. As shown by the arrows in FIG. 2, the gas is cooled by the heat exchanger 8 and discharged from the cooling circulation fan 7, and then passes through the left and right side walls of the cooling chamber 2, the guide plate 9a, 9b, and then
The flow direction is changed by the air conditioning plates 11a and 11b for the workpiece, and the workpiece 15 rotating in the cooling chamber 2 is cooled to a high temperature.

次に、第4図に示すような直径40wφ、長さ1000
關の被処理物15を作成し、この発明の実施例の装置で
、被処理物15を回転しながら冷却したときの歪みと、
従来の装置で、被処理物15を静止して冷却したときの
歪みとの比較を第5図に示している。第5図において、
横軸は被処理物15の一端面からの距離を示し、縦軸は
歪みを示している。この第5図からもわかるように、被
処理物15を回転しながら冷却したときの歪みは、静止
して冷却したときの歪みに比べて小さくなる。
Next, as shown in Fig. 4, the diameter is 40 wφ and the length is 1000 mm.
Distortion caused when a related workpiece 15 is created and cooled while rotating with the apparatus of the embodiment of this invention,
FIG. 5 shows a comparison with the distortion when the object 15 to be processed is cooled stationary using a conventional apparatus. In Figure 5,
The horizontal axis indicates the distance from one end surface of the object to be processed 15, and the vertical axis indicates the distortion. As can be seen from FIG. 5, the distortion when the workpiece 15 is cooled while rotating is smaller than the distortion when it is cooled stationary.

ところで、上記実施例では、エアモータ28を使用して
いるが、この代りに、電気モータ等の回転機を使用して
もよい。又、上記実施例では、加熱室lと冷却室2とを
上下に連接しているが、この代りに、加熱室と冷却室と
を横に水平に連接してもよい。更に、上記実施例では、
加熱室lと冷却室2とがそれぞれ別個に存在しているが
、この代りに、加熱室と冷却室とが兼用になった一室構
造のものであってもよい。更にその上、冷却室の圧力は
2200Torr以上であってもよい。
Incidentally, in the above embodiment, the air motor 28 is used, but a rotating machine such as an electric motor may be used instead. Further, in the above embodiment, the heating chamber 1 and the cooling chamber 2 are vertically connected to each other, but instead of this, the heating chamber and the cooling chamber may be horizontally connected to each other. Furthermore, in the above embodiment,
Although the heating chamber 1 and the cooling chamber 2 are provided separately, the heating chamber 1 and the cooling chamber 2 may alternatively be of a single-room structure in which the heating chamber and the cooling chamber are combined. Furthermore, the pressure in the cooling chamber may be greater than or equal to 2200 Torr.

(発明の効果) この発明によれば、被処理物を冷却室で回転させながら
冷却するようにしているので、被処理物は全て同じ温度
履歴を経て冷却される。そのため、被処理物は均一に冷
却されるようになる。
(Effects of the Invention) According to the present invention, since the objects to be processed are cooled while being rotated in the cooling chamber, all the objects to be processed are cooled through the same temperature history. Therefore, the object to be processed is cooled uniformly.

そこで、具体的には、次のようになる。Therefore, specifically, it is as follows.

■焼き入れのできる鋼種が広がる。■A wide range of steel types that can be hardened.

■長尺物等の大物での歪みを小さくすることができ、そ
のため、後加工が不要になる。
■Distortion on large items such as long items can be reduced, which eliminates the need for post-processing.

■小物を冷却室に大量に入れても、配置による冷却不良
をなくすることができる。
■Even if a large number of small items are placed in the cooling chamber, cooling defects due to placement can be eliminated.

■冷却速度を落とさずに冷却でき、しかも後加工等が不
要になるため、処理工程の短縮化ができ、省エネルギー
化が図られる。
■ Cooling can be done without slowing down the cooling rate, and post-processing is not required, so processing steps can be shortened and energy can be saved.

【図面の簡単な説明】[Brief explanation of drawings]

第1図〜第3図はこの発明の実施例を示しており、第1
図は装置全体の構成を示す断面図、第2図は第1図のI
−I線より切断した断面図、第3図は搬送装置の断面図
である。第4図は直径40鶴φ、長さ1000mmの被
処理物の斜視図、第5図は第4図に示される被処理物を
回転しながら冷却したときの歪みと、静止して冷却した
ときの歪みとの比較を示す説明図である。第6図は従来
の装置全体の構成を示す断面図、第7図は第6図の■−
■線より切断した断面図である。 図中、 l・・・・・加熱室 2・・・・・冷却室 7・・・・・冷却循環用ファン 8・・・・・熱交換器 13・・・・・昇降棒 I4・・・・・ム 15・・・・・被処理物 20・・・・・搬送装置 2】・・・・・エアシリンダ 23・・・・・昇降軸 24・・・・・ピストン 26・・・・・回転軸 27・・・・・クラッチ 2日・・・・・エアモータ 29・・・・・回転軸 なお、図中、同一符号は同−又は相当部分を示している
。 特許出願人 日本真空技術株式会社 第1 図 第4 図 ネ亀刈理#勿の一縞面力゛らの詭省飯 第6 閃
1 to 3 show embodiments of this invention, and the first
The figure is a sectional view showing the overall configuration of the device, and Figure 2 is I of Figure 1.
A cross-sectional view taken along line -I, and FIG. 3 is a cross-sectional view of the conveying device. Fig. 4 is a perspective view of a workpiece with a diameter of 40 φ and a length of 1000mm, and Fig. 5 shows the distortion when the workpiece shown in Fig. 4 is cooled while rotating, and when it is cooled stationary. FIG. 3 is an explanatory diagram showing a comparison with distortion of Fig. 6 is a cross-sectional view showing the overall configuration of the conventional device, and Fig. 7 is the - of Fig. 6.
■It is a sectional view taken along the line. In the figure, l... Heating chamber 2... Cooling chamber 7... Cooling circulation fan 8... Heat exchanger 13... Lifting rod I4... 15...Workpiece 20...Transport device 2]...Air cylinder 23...Elevating shaft 24...Piston 26... Rotating shaft 27...Clutch 2nd...Air motor 29...Rotating shaft In the drawings, the same reference numerals indicate the same or corresponding parts. Patent Applicant: Japan Vacuum Technology Co., Ltd. Figure 1 Figure 4 Figure Nekame Kariri #Nano's Striped Side Force, etc.'s Puzzling Meal Part 6 Flash

Claims (1)

【特許請求の範囲】[Claims] 1、冷却されたガスの流れる冷却室と、加熱されて高温
度になっている被処理物を上記冷却室内で回転させる回
転機構とを備え、上記被処理物を上記冷却室で回転させ
ながら上記ガスで冷却することを特徴とする真空熱処理
炉。
1. A cooling chamber through which a cooled gas flows, and a rotation mechanism that rotates a heated object to be processed in the cooling chamber, and rotates the object to be processed in the cooling chamber. A vacuum heat treatment furnace characterized by cooling with gas.
JP8868089A 1989-04-08 1989-04-08 Vacuum heat treatment furnace Pending JPH02267216A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8868089A JPH02267216A (en) 1989-04-08 1989-04-08 Vacuum heat treatment furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8868089A JPH02267216A (en) 1989-04-08 1989-04-08 Vacuum heat treatment furnace

Publications (1)

Publication Number Publication Date
JPH02267216A true JPH02267216A (en) 1990-11-01

Family

ID=13949546

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8868089A Pending JPH02267216A (en) 1989-04-08 1989-04-08 Vacuum heat treatment furnace

Country Status (1)

Country Link
JP (1) JPH02267216A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0621345A1 (en) * 1993-04-19 1994-10-26 Hauzer Holding B.V. Process and device for heat-treating workpieces
JPH1129821A (en) * 1997-07-11 1999-02-02 Ntn Corp Carburizing and quenching device
JP2008045200A (en) * 2005-04-28 2008-02-28 Aisin Aw Co Ltd Method for cooling steel member
JP2009185349A (en) * 2008-02-07 2009-08-20 Ihi Corp Multichamber heat treatment furnace
JP2010145046A (en) * 2008-12-19 2010-07-01 Mitsubishi Heavy Ind Ltd Vacuum heat treatment furnace and heat treatment object supporting device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61243115A (en) * 1985-04-18 1986-10-29 Daido Steel Co Ltd Vacuum heat treatment device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61243115A (en) * 1985-04-18 1986-10-29 Daido Steel Co Ltd Vacuum heat treatment device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0621345A1 (en) * 1993-04-19 1994-10-26 Hauzer Holding B.V. Process and device for heat-treating workpieces
JPH1129821A (en) * 1997-07-11 1999-02-02 Ntn Corp Carburizing and quenching device
JP2008045200A (en) * 2005-04-28 2008-02-28 Aisin Aw Co Ltd Method for cooling steel member
JP2009185349A (en) * 2008-02-07 2009-08-20 Ihi Corp Multichamber heat treatment furnace
JP2010145046A (en) * 2008-12-19 2010-07-01 Mitsubishi Heavy Ind Ltd Vacuum heat treatment furnace and heat treatment object supporting device

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