JPH0226225U - - Google Patents
Info
- Publication number
- JPH0226225U JPH0226225U JP10383288U JP10383288U JPH0226225U JP H0226225 U JPH0226225 U JP H0226225U JP 10383288 U JP10383288 U JP 10383288U JP 10383288 U JP10383288 U JP 10383288U JP H0226225 U JPH0226225 U JP H0226225U
- Authority
- JP
- Japan
- Prior art keywords
- directions
- pattern
- center
- width
- intervals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 12
- 238000007689 inspection Methods 0.000 claims description 6
- 238000005530 etching Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 5
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10383288U JPH0226225U (enExample) | 1988-08-04 | 1988-08-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10383288U JPH0226225U (enExample) | 1988-08-04 | 1988-08-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0226225U true JPH0226225U (enExample) | 1990-02-21 |
Family
ID=31335011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10383288U Pending JPH0226225U (enExample) | 1988-08-04 | 1988-08-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0226225U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06202311A (ja) * | 1993-01-07 | 1994-07-22 | Toshiba Corp | 合せずれ測定方法 |
-
1988
- 1988-08-04 JP JP10383288U patent/JPH0226225U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06202311A (ja) * | 1993-01-07 | 1994-07-22 | Toshiba Corp | 合せずれ測定方法 |
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