JPS63114000U - - Google Patents
Info
- Publication number
- JPS63114000U JPS63114000U JP645987U JP645987U JPS63114000U JP S63114000 U JPS63114000 U JP S63114000U JP 645987 U JP645987 U JP 645987U JP 645987 U JP645987 U JP 645987U JP S63114000 U JPS63114000 U JP S63114000U
- Authority
- JP
- Japan
- Prior art keywords
- zone plate
- fresnel zone
- linear fresnel
- linear
- locations
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP645987U JPS63114000U (enExample) | 1987-01-19 | 1987-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP645987U JPS63114000U (enExample) | 1987-01-19 | 1987-01-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63114000U true JPS63114000U (enExample) | 1988-07-22 |
Family
ID=30789000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP645987U Pending JPS63114000U (enExample) | 1987-01-19 | 1987-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63114000U (enExample) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008002939A (ja) * | 2006-06-22 | 2008-01-10 | Nippon Telegr & Teleph Corp <Ntt> | Ｘ線集光レンズ |
| JP2009047430A (ja) * | 2007-08-13 | 2009-03-05 | Nippon Telegr & Teleph Corp <Ntt> | Ｘ線集光レンズ |
| JP2009121904A (ja) * | 2007-11-14 | 2009-06-04 | Nippon Telegr & Teleph Corp <Ntt> | Ｘ線集光レンズ |
| JP2009169255A (ja) * | 2008-01-18 | 2009-07-30 | Nsk Ltd | 露光装置及び基板の製造方法ならびにマスク |
-
1987
- 1987-01-19 JP JP645987U patent/JPS63114000U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008002939A (ja) * | 2006-06-22 | 2008-01-10 | Nippon Telegr & Teleph Corp <Ntt> | Ｘ線集光レンズ |
| JP2009047430A (ja) * | 2007-08-13 | 2009-03-05 | Nippon Telegr & Teleph Corp <Ntt> | Ｘ線集光レンズ |
| JP2009121904A (ja) * | 2007-11-14 | 2009-06-04 | Nippon Telegr & Teleph Corp <Ntt> | Ｘ線集光レンズ |
| JP2009169255A (ja) * | 2008-01-18 | 2009-07-30 | Nsk Ltd | 露光装置及び基板の製造方法ならびにマスク |
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