JPS6355533U - - Google Patents
Info
- Publication number
- JPS6355533U JPS6355533U JP14941286U JP14941286U JPS6355533U JP S6355533 U JPS6355533 U JP S6355533U JP 14941286 U JP14941286 U JP 14941286U JP 14941286 U JP14941286 U JP 14941286U JP S6355533 U JPS6355533 U JP S6355533U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- layers
- dimensional accuracy
- layer side
- alignment correction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14941286U JPS6355533U (enExample) | 1986-09-29 | 1986-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14941286U JPS6355533U (enExample) | 1986-09-29 | 1986-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6355533U true JPS6355533U (enExample) | 1988-04-14 |
Family
ID=31064595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14941286U Pending JPS6355533U (enExample) | 1986-09-29 | 1986-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6355533U (enExample) |
-
1986
- 1986-09-29 JP JP14941286U patent/JPS6355533U/ja active Pending