JPH0187538U - - Google Patents
Info
- Publication number
- JPH0187538U JPH0187538U JP18470287U JP18470287U JPH0187538U JP H0187538 U JPH0187538 U JP H0187538U JP 18470287 U JP18470287 U JP 18470287U JP 18470287 U JP18470287 U JP 18470287U JP H0187538 U JPH0187538 U JP H0187538U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- misalignment
- linear side
- patterns
- semiconductor substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 230000001154 acute effect Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 15
- 230000008719 thickening Effects 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18470287U JPH0187538U (enExample) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18470287U JPH0187538U (enExample) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0187538U true JPH0187538U (enExample) | 1989-06-09 |
Family
ID=31476043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18470287U Pending JPH0187538U (enExample) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0187538U (enExample) |
-
1987
- 1987-12-02 JP JP18470287U patent/JPH0187538U/ja active Pending