JPH0226176B2 - - Google Patents
Info
- Publication number
- JPH0226176B2 JPH0226176B2 JP56016593A JP1659381A JPH0226176B2 JP H0226176 B2 JPH0226176 B2 JP H0226176B2 JP 56016593 A JP56016593 A JP 56016593A JP 1659381 A JP1659381 A JP 1659381A JP H0226176 B2 JPH0226176 B2 JP H0226176B2
- Authority
- JP
- Japan
- Prior art keywords
- sample gas
- gas flow
- particles
- nozzle
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002245 particle Substances 0.000 claims description 25
- 238000000149 argon plasma sintering Methods 0.000 claims description 7
- 238000000034 method Methods 0.000 claims description 7
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 3
- 238000001089 thermophoresis Methods 0.000 claims 1
- 239000000443 aerosol Substances 0.000 description 12
- 238000005259 measurement Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/02—Investigating particle size or size distribution
- G01N15/0205—Investigating particle size or size distribution by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
- G01N15/06—Investigating concentration of particle suspensions
- G01N15/075—Investigating concentration of particle suspensions by optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
Landscapes
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56016593A JPS57131036A (en) | 1981-02-06 | 1981-02-06 | Light scattering type floating particle counting |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP56016593A JPS57131036A (en) | 1981-02-06 | 1981-02-06 | Light scattering type floating particle counting |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57131036A JPS57131036A (en) | 1982-08-13 |
JPH0226176B2 true JPH0226176B2 (fr) | 1990-06-07 |
Family
ID=11920570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP56016593A Granted JPS57131036A (en) | 1981-02-06 | 1981-02-06 | Light scattering type floating particle counting |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57131036A (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59202044A (ja) * | 1983-05-02 | 1984-11-15 | Dan Sangyo Kk | エアゾル観測用霧箱 |
JP3205413B2 (ja) * | 1993-02-15 | 2001-09-04 | 株式会社日立製作所 | 微粒子計測装置及び微粒子計測方法 |
JP4849626B2 (ja) * | 2007-01-16 | 2012-01-11 | 東京エレクトロン株式会社 | パーティクルモニタシステム及び基板処理装置 |
WO2016156035A1 (fr) * | 2015-03-27 | 2016-10-06 | Koninklijke Philips N.V. | Protection de capteur optique de particules contre des dépôts particulaires par thermophorèse |
EP3444587A1 (fr) * | 2017-08-14 | 2019-02-20 | Koninklijke Philips N.V. | Capteur de particules et procédé de détection de particules |
US10816445B2 (en) | 2017-06-21 | 2020-10-27 | Koninklijke Philips N.V. | Particle sensor and particle sensing method |
US11047777B2 (en) * | 2017-11-14 | 2021-06-29 | Aerodyne Microsystems Inc. | Thermophoretic particle concentrator |
-
1981
- 1981-02-06 JP JP56016593A patent/JPS57131036A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS57131036A (en) | 1982-08-13 |
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