JPH0226176B2 - - Google Patents

Info

Publication number
JPH0226176B2
JPH0226176B2 JP56016593A JP1659381A JPH0226176B2 JP H0226176 B2 JPH0226176 B2 JP H0226176B2 JP 56016593 A JP56016593 A JP 56016593A JP 1659381 A JP1659381 A JP 1659381A JP H0226176 B2 JPH0226176 B2 JP H0226176B2
Authority
JP
Japan
Prior art keywords
sample gas
gas flow
particles
nozzle
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56016593A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57131036A (en
Inventor
Tamio Hoshina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rion Co Ltd
Original Assignee
Rion Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rion Co Ltd filed Critical Rion Co Ltd
Priority to JP56016593A priority Critical patent/JPS57131036A/ja
Publication of JPS57131036A publication Critical patent/JPS57131036A/ja
Publication of JPH0226176B2 publication Critical patent/JPH0226176B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/075—Investigating concentration of particle suspensions by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP56016593A 1981-02-06 1981-02-06 Light scattering type floating particle counting Granted JPS57131036A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56016593A JPS57131036A (en) 1981-02-06 1981-02-06 Light scattering type floating particle counting

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56016593A JPS57131036A (en) 1981-02-06 1981-02-06 Light scattering type floating particle counting

Publications (2)

Publication Number Publication Date
JPS57131036A JPS57131036A (en) 1982-08-13
JPH0226176B2 true JPH0226176B2 (enrdf_load_stackoverflow) 1990-06-07

Family

ID=11920570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56016593A Granted JPS57131036A (en) 1981-02-06 1981-02-06 Light scattering type floating particle counting

Country Status (1)

Country Link
JP (1) JPS57131036A (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59202044A (ja) * 1983-05-02 1984-11-15 Dan Sangyo Kk エアゾル観測用霧箱
JP3205413B2 (ja) * 1993-02-15 2001-09-04 株式会社日立製作所 微粒子計測装置及び微粒子計測方法
JP4849626B2 (ja) * 2007-01-16 2012-01-11 東京エレクトロン株式会社 パーティクルモニタシステム及び基板処理装置
JP2018512563A (ja) * 2015-03-27 2018-05-17 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． センサデバイス及び方法
JP2020523601A (ja) * 2017-06-21 2020-08-06 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 粒子センサ及び粒子感知方法
EP3444587A1 (en) * 2017-08-14 2019-02-20 Koninklijke Philips N.V. Particle sensor and particle sensing method
US10921224B2 (en) * 2017-11-14 2021-02-16 Aerodyne Microsystems Inc. Thermophoretic particle detection system with variable channel geometry

Also Published As

Publication number Publication date
JPS57131036A (en) 1982-08-13

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