JPH0225719A - Optical interference signal extractor - Google Patents

Optical interference signal extractor

Info

Publication number
JPH0225719A
JPH0225719A JP63176809A JP17680988A JPH0225719A JP H0225719 A JPH0225719 A JP H0225719A JP 63176809 A JP63176809 A JP 63176809A JP 17680988 A JP17680988 A JP 17680988A JP H0225719 A JPH0225719 A JP H0225719A
Authority
JP
Japan
Prior art keywords
light
optical
measured
interference signal
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63176809A
Other languages
Japanese (ja)
Other versions
JP2714644B2 (en
Inventor
Naoharu Niki
尚治 仁木
Aaru Pauritsuku Jiyon
ジヨン アール.パウリツク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP63176809A priority Critical patent/JP2714644B2/en
Publication of JPH0225719A publication Critical patent/JPH0225719A/en
Application granted granted Critical
Publication of JP2714644B2 publication Critical patent/JP2714644B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To eliminate noise based on an optical power fluctuation which a light beam to be measured by providing a second light receiving device for detecting optical power of the light beam to be measured in addition to a light receiving device for receiving an interference light, and dividing an optical interference signal by a photodetecting signal obtained by said second light receiving device. CONSTITUTION:The title device is provided with the second light receiving device for detecting optical power of a light beam to be measured 11. When a light source 10 is excited by a commercial power source, noise of 50 to 60Hz or 100 to 120Hz is mixed in. Also, in the case of DC lighting, it is accompanied by the optical power fluctuation of a low frequency generated by a power supply voltage fluctuation of a DC power source. This optical power fluctuation is fetched as a signal SB outputted from the second light receiving device 40. Subsequently, an optical interference signal SA outputted from a first light receiving device 30 and the detecting signal SB outputted from the second light receiving device 40 are applied to a divider 50, and an interference signal SC is outputted. As for this interference signal SC, its S/N is satisfactory, and a wavelength distribution of the light beam to be measured 11 can be derived exactly.

Description

【発明の詳細な説明】 「産業上の利用分野」 この発明は被測定光の波長分布等を測定する場合に用い
られる光干渉信号抽出装置に関する。
DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to an optical interference signal extraction device used for measuring wavelength distribution of light to be measured.

「従来の技術」 第4図に従来用いられている光干渉信号抽出装置を示す
。図中10は被測定光を射出する光源、20は光路差を
掃引することができろ光干渉計を示す。この例ではマイ
ケルソン干渉計を示すがその他にファブリペロ干渉計を
用いることもできる。
"Prior Art" FIG. 4 shows a conventionally used optical interference signal extraction device. In the figure, reference numeral 10 indicates a light source that emits light to be measured, and reference numeral 20 indicates an optical interferometer capable of sweeping the optical path difference. Although a Michelson interferometer is shown in this example, a Fabry-Perot interferometer can also be used.

マイケルソン干渉計20は分波及び合波動作を行うハー
フミラ−21と、固定光路24を形成するための固定ミ
ラー22と、可変光路25を形成するための可動ミラー
23とによって構成される。
The Michelson interferometer 20 is composed of a half mirror 21 for performing demultiplexing and multiplexing operations, a fixed mirror 22 for forming a fixed optical path 24, and a movable mirror 23 for forming a variable optical path 25.

光源10から出射された被測定光11はハーフミラ−2
1によって固定光路24と可変光路25とに分波され、
固定光路24と可動光路25を通った光は再びハーフミ
ラ−21によって合波され、その合波された光は受光器
30で電気信号に変換される。
The light to be measured 11 emitted from the light source 10 is passed through the half mirror 2
1 into a fixed optical path 24 and a variable optical path 25,
The light passing through the fixed optical path 24 and the movable optical path 25 is combined again by the half mirror 21, and the combined light is converted into an electrical signal by the optical receiver 30.

ハーフミラ−21において合波される際に固定光路24
を通った光と可変光路25を通った光は光路差の違いに
よって位相差が与えられ、その位相差の違いによって干
渉を起こす。光の干渉は可動ミラ〜23の動きに同期し
て発生する。よって、光干渉計20から出力される光は
干渉光になっており、この干渉光を受光器30で電気信
号に変換することによって第5図に示すような干渉信号
を得ることができる。この干渉信号を周波数分析するこ
とにより被測定光11のスペクトラムを描かせることが
できる。
Fixed optical path 24 when multiplexed in half mirror 21
The light passing through the variable optical path 25 and the light passing through the variable optical path 25 are given a phase difference due to the difference in optical path difference, and this difference in phase causes interference. Light interference occurs in synchronization with the movement of the movable mirror 23. Therefore, the light output from the optical interferometer 20 is interference light, and by converting this interference light into an electrical signal by the light receiver 30, an interference signal as shown in FIG. 5 can be obtained. By frequency-analyzing this interference signal, the spectrum of the light to be measured 11 can be drawn.

「発明が解決しようとする課題」 第5図に示した干渉信号は被測定光11の光パワーが安
定している場合の波形を示す。このように被測定光11
の光パワーが安定している場合はSN比のよい干渉信号
を得ることができる。
"Problem to be Solved by the Invention" The interference signal shown in FIG. 5 shows a waveform when the optical power of the light to be measured 11 is stable. In this way, the light to be measured 11
If the optical power is stable, an interference signal with a good S/N ratio can be obtained.

これに対し、被測定光11の光パワーが第6図に示すよ
うに変動している場合は、干渉信号のSN比が悪くなり
、従って、周波数分析してスペクトラムを描かせた場合
に、そのスペクトラムに被測定光11が持つ光パワーの
変動成分もスペクトラムとして表示され、被測定光11
の波長分布を正確に測定することができない欠点がある
On the other hand, if the optical power of the light to be measured 11 fluctuates as shown in Fig. 6, the S/N ratio of the interference signal becomes poor, and therefore, when the spectrum is drawn by frequency analysis, the The fluctuation component of the optical power of the light to be measured 11 is also displayed as a spectrum, and the light to be measured 11
The disadvantage is that it is not possible to accurately measure the wavelength distribution of

この発明の目的は、被測定光が持つ光パワー変動に基づ
く雑音を除去することができる光干渉抽出装置を提供す
るにある。
An object of the present invention is to provide an optical interference extraction device that can remove noise based on optical power fluctuations of light to be measured.

「課題を解決するための手段」 この発明では、干渉光を受光する受光器とは別に、被測
定光の光パワーを検出する第2受光器を設け、この第2
受光器で得られる受光信号で光干渉信号を除算する構成
としたものである。
"Means for Solving the Problem" In the present invention, a second light receiver that detects the optical power of the light to be measured is provided separately from the light receiver that receives the interference light, and the second light receiver that detects the optical power of the light to be measured is provided.
The configuration is such that the optical interference signal is divided by the light reception signal obtained by the light receiver.

この発明の構成によれば、第2受光器で受光した受光信
号は被測定光の光パワーの変動信号として扱うことがで
きる。従って、この受光信号によって光干渉信号を除算
することによって光干渉信号から被測定光の光パワーの
変動を除去することができる。
According to the configuration of the present invention, the light reception signal received by the second light receiver can be treated as a fluctuation signal of the optical power of the light to be measured. Therefore, by dividing the optical interference signal by this received light signal, fluctuations in the optical power of the light to be measured can be removed from the optical interference signal.

よって、この発明の光干渉信号抽出装置によればSN比
のよい光干渉信号を得ることができ、光の波長分布を正
確に測定することができる光スペクトラムアナライザを
提供できる。
Therefore, according to the optical interference signal extraction device of the present invention, it is possible to obtain an optical interference signal with a good signal-to-noise ratio, and it is possible to provide an optical spectrum analyzer that can accurately measure the wavelength distribution of light.

「実施例」 第1図にこの発明の一実施例を示す。"Example" FIG. 1 shows an embodiment of the present invention.

第1図において第4図と対応する部分には同一符号を付
し、その重複する部分の説明は省略するが、この発明に
おいては被測定光11の光パワーを検出する第2受光器
40を設ける。つまり、被測定光11を射出する光源1
0と光干渉計20との間にハーフミラ−12を設け、こ
のハーフミラ−12によって光干渉計20に与える光の
一部を分岐させ、この分岐した光を第2受光器40に受
光させるように構成した場合を示す。
In FIG. 1, parts corresponding to those in FIG. 4 are given the same reference numerals, and explanations of the overlapping parts are omitted. establish. In other words, the light source 1 that emits the light to be measured 11
0 and the optical interferometer 20, a part of the light given to the optical interferometer 20 is branched by the half mirror 12, and this branched light is received by the second light receiver 40. Shows the case where it is configured.

第2受光器40から出力される信号SBは被測定光11
の光パワー変動を表わす信号である。つまり、光源10
が商用電源で励起されている場合には50乃至60Hz
或いは100乃至120Hzの雑音が混入する。また、
直流点灯の場合には、直流電源の電源電圧変動等によっ
て発生する低い周波数の光パワー変動が伴う。この光パ
ワー変動を第2受光器40から出力される信号SBとし
て取出す。
The signal SB output from the second light receiver 40 is the light 11 to be measured.
This is a signal representing the optical power fluctuation of . In other words, the light source 10
50 to 60Hz when excited by commercial power
Alternatively, noise of 100 to 120 Hz is mixed. Also,
In the case of DC lighting, low frequency optical power fluctuations occur due to fluctuations in the power supply voltage of the DC power supply. This optical power fluctuation is extracted as a signal SB output from the second light receiver 40.

第1受光器30から出力される光干渉信号SAと、第2
受光器40から出力される検出信号SBを除算器50に
与え、除算器50においてSA/SBを演算する。
The optical interference signal SA output from the first optical receiver 30 and the second
The detection signal SB output from the light receiver 40 is applied to a divider 50, and the divider 50 calculates SA/SB.

第2図Aに示す光干渉信号SAには第2図Bに示す被測
定光11の変動成分SBが含まれているから、除算器5
0の出力には変動成分SBが除去された第2図Cに示す
干渉信号SCが出力される。
Since the optical interference signal SA shown in FIG. 2A includes the fluctuation component SB of the measured light 11 shown in FIG. 2B, the divider 5
The interference signal SC shown in FIG. 2C from which the fluctuation component SB has been removed is output as the output of 0.

この干渉信号SCはSN比がよく、被測定光11の波長
分布を正確に求めることができる。
This interference signal SC has a good signal-to-noise ratio, and the wavelength distribution of the light to be measured 11 can be accurately determined.

第3図はこの発明の他の実施例を示す。この実施例では
被測定光11の他に基準源60から基準光61を与える
。この基準光源60は1例えばヘリウム−ネオンレーザ
のように狭スペクトル特性を持つ光を用いる。基準光6
1も光干渉計20の内部では固定光路24と可変光路2
5を通ってノ・−フミラー21で合波され干渉光として
取出され、受光器62に受光される。
FIG. 3 shows another embodiment of the invention. In this embodiment, in addition to the light to be measured 11, a reference light 61 is provided from a reference source 60. The reference light source 60 uses light having narrow spectrum characteristics, such as a helium-neon laser. Reference light 6
1 also has a fixed optical path 24 and a variable optical path 2 inside the optical interferometer 20.
5, is combined by a nof mirror 21, extracted as interference light, and received by a light receiver 62.

基準光源60として狭スペクトル特性の光を射出する光
源を用いることによって受光器61から出力される光干
渉信号SDは振幅値が可動ミラー23の動きに対して大
きく変動しない信号を得ることができる。この基準光干
渉信号をN゛逓倍器62に与え、N避′倍した信号をサ
ンプリングクロックとして取出し、このサンプリングク
ロックをAD変換器31及び41に与え、被測定光11
の干渉光と、被測定光11の光パワー変動の検出信号を
AD変換器41に与え、これらAD変換器31と41で
AD変換したディジタルデータSAとSBを除算器50
に入力し、SA/SBを演算する。
By using a light source that emits light with narrow spectrum characteristics as the reference light source 60, it is possible to obtain a signal whose amplitude value does not vary greatly with the movement of the movable mirror 23 in the optical interference signal SD output from the light receiver 61. This reference optical interference signal is applied to the N multiplier 62, the signal multiplied by N is taken out as a sampling clock, and this sampling clock is applied to the AD converters 31 and 41,
The interference light and the detection signal of the optical power fluctuation of the light to be measured 11 are given to the AD converter 41, and the digital data SA and SB which are AD-converted by these AD converters 31 and 41 are sent to the divider 50.
and calculate SA/SB.

なお、この例では光干渉信号SAに係数boを乗算した
場合を示す。この係数boは例えば光干渉計20内にお
いて固定光路24と可変光路25の光路差がゼロの近傍
における被測定光11の光パワーの値または光路差がゼ
ロの点を中心にその前後の区間の光パワーの平均値とす
ることができる。
Note that this example shows a case where the optical interference signal SA is multiplied by a coefficient bo. This coefficient bo is, for example, the value of the optical power of the measured light 11 in the vicinity of zero optical path difference between the fixed optical path 24 and the variable optical path 25 in the optical interferometer 20, or the value of the optical power of the measured light 11 in the vicinity of the optical path difference between the fixed optical path 24 and the variable optical path 25, or the area before and after the point where the optical path difference is zero. It can be an average value of optical power.

結果として、この例では時間の経過と共に刻々変化する
雑音成分SBと光路差ゼロ点付近の光パワー1)++の
比を光干渉信号SAに乗算したことと等価となる。
As a result, in this example, this is equivalent to multiplying the optical interference signal SA by the ratio of the noise component SB, which changes every moment with the passage of time, and the optical power 1)++ near the zero optical path difference point.

このようにAD変換した後に除算動作を行っても変動成
分を除去することができる。
Even if a division operation is performed after AD conversion in this manner, the fluctuation component can be removed.

なお、この実施例では除算回路50から出力される信号
sCを周波数分析器51と、包絡線検波器52に与え、
周波数分析器51の出力によって被測定光11の光スペ
クトラムを表示器53に表示させ、また包絡線検波器5
2の出力によって表示器54に可干渉性の有無を表示さ
せる構成を付加した場合を示す。
In this embodiment, the signal sC output from the division circuit 50 is applied to the frequency analyzer 51 and the envelope detector 52,
The output of the frequency analyzer 51 causes the optical spectrum of the light to be measured 11 to be displayed on the display 53, and the envelope detector 5
A case is shown in which a configuration is added to display the presence or absence of coherence on the display 54 based on the output of step 2.

また、A、 D変換器4JのAD変換出力を表示器55
に表示させることによって被測定光11の振幅変動を観
測することができる。
In addition, the AD conversion output of the A and D converters 4J is displayed on the display 55.
It is possible to observe the amplitude fluctuation of the light to be measured 11 by displaying the .

「発明の効果」 以上説明したように、この発明によれば被測定光11の
光パワーが変動していても、その変動成分を除去して光
スペクトラムを測定することができる。
"Effects of the Invention" As described above, according to the present invention, even if the optical power of the light to be measured 11 fluctuates, the optical spectrum can be measured by removing the fluctuation component.

よって、被測定光が持つ光パワー変動が混入しない光ス
ペクトラムを表示することができるため正しい光スペク
トラムの測定を行うことができる。
Therefore, it is possible to display an optical spectrum that is not mixed with optical power fluctuations of the light to be measured, so that accurate optical spectrum measurements can be performed.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の一実施例を説明するためのブロック
図、第2図はこの発明の詳細な説明するための波形図、
第3図はこの発明の変形実施例を説明するためのブロッ
ク図、第4図は従来の技術を説明するためのブロック図
、第5図及び第6図は光干渉信号の波形を説明するため
の波形図である。 IO=被測定光源、11;被測定光、20:光干渉計、
21:ハーフミラ−22:固定ミラ23;可動ミラー 
24:固定光路、25:可変光路、30:第1受光器、
40:第2受光器、50:除算器。 坩 1 固
FIG. 1 is a block diagram for explaining an embodiment of the present invention, FIG. 2 is a waveform diagram for explaining the invention in detail,
FIG. 3 is a block diagram for explaining a modified embodiment of the present invention, FIG. 4 is a block diagram for explaining the conventional technique, and FIGS. 5 and 6 are for explaining the waveform of an optical interference signal. FIG. IO=light source to be measured, 11; light to be measured, 20: optical interferometer,
21: Half mirror 22: Fixed mirror 23; Movable mirror
24: fixed optical path, 25: variable optical path, 30: first light receiver,
40: second light receiver, 50: divider. Crucible 1 hard

Claims (1)

【特許請求の範囲】[Claims] (1)A、光路差を掃引可能な光干渉計と、 B、この光干渉計の出力光を電気信号に変換する第1受
光器と、 C、上記光干渉計に入力される被測定光の光量を電気信
号に変換する第2受光器と、 D、上記第1受光器の出力信号を上記第2受光器の出力
信号で除算する除算器と、 を具備して成る光干渉抽出装置。
(1) A. An optical interferometer capable of sweeping the optical path difference; B. A first light receiver that converts the output light of this optical interferometer into an electrical signal; C. Measured light input to the optical interferometer. An optical interference extraction device comprising: a second light receiver that converts the amount of light of the first light receiver into an electrical signal; D. a divider that divides the output signal of the first light receiver by the output signal of the second light receiver.
JP63176809A 1988-07-15 1988-07-15 Optical spectrum analyzer Expired - Lifetime JP2714644B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63176809A JP2714644B2 (en) 1988-07-15 1988-07-15 Optical spectrum analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63176809A JP2714644B2 (en) 1988-07-15 1988-07-15 Optical spectrum analyzer

Publications (2)

Publication Number Publication Date
JPH0225719A true JPH0225719A (en) 1990-01-29
JP2714644B2 JP2714644B2 (en) 1998-02-16

Family

ID=16020219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63176809A Expired - Lifetime JP2714644B2 (en) 1988-07-15 1988-07-15 Optical spectrum analyzer

Country Status (1)

Country Link
JP (1) JP2714644B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0415026U (en) * 1990-05-23 1992-02-06
CN105043241A (en) * 2015-05-29 2015-11-11 北方民族大学 Contrast type anti-interference corner reflector laser interferometer, calibration method and measurement method
CN105043244A (en) * 2015-05-29 2015-11-11 北方民族大学 Contrast type anti-interference micro-motion corner reflector laser interferometer, calibration method and measurement method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0222502A (en) * 1988-07-11 1990-01-25 Kowa Co Optical interference measuring instrument

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0222502A (en) * 1988-07-11 1990-01-25 Kowa Co Optical interference measuring instrument

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0415026U (en) * 1990-05-23 1992-02-06
CN105043241A (en) * 2015-05-29 2015-11-11 北方民族大学 Contrast type anti-interference corner reflector laser interferometer, calibration method and measurement method
CN105043244A (en) * 2015-05-29 2015-11-11 北方民族大学 Contrast type anti-interference micro-motion corner reflector laser interferometer, calibration method and measurement method

Also Published As

Publication number Publication date
JP2714644B2 (en) 1998-02-16

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