JPH02242137A - Double refraction analysis apparatus - Google Patents

Double refraction analysis apparatus

Info

Publication number
JPH02242137A
JPH02242137A JP6279389A JP6279389A JPH02242137A JP H02242137 A JPH02242137 A JP H02242137A JP 6279389 A JP6279389 A JP 6279389A JP 6279389 A JP6279389 A JP 6279389A JP H02242137 A JPH02242137 A JP H02242137A
Authority
JP
Japan
Prior art keywords
light
analyzer
axis
sample
linearly polarized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6279389A
Other languages
Japanese (ja)
Other versions
JP2780998B2 (en
Inventor
Tomoyuki Fukazawa
深沢 知行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jasco Corp
Original Assignee
Japan Spectroscopic Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Spectroscopic Co Ltd filed Critical Japan Spectroscopic Co Ltd
Priority to JP6279389A priority Critical patent/JP2780998B2/en
Publication of JPH02242137A publication Critical patent/JPH02242137A/en
Application granted granted Critical
Publication of JP2780998B2 publication Critical patent/JP2780998B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Abstract

PURPOSE:To achieve an expansion of a measurable range by arranging a polarizer, a phase difference modulation means, an analyzer and an output adjustable photodetector to compute a phase delay from amplitudes of two kinds of frequencies contained in outputs thereof and an azimuth of a sample orientation. CONSTITUTION:Monochromatic light of a light source 10 is turned to a linearly polarized light with an analyzer 12 and passed through a vibrator with a voltage of fHz applied with a PEW controller 16 of an optically elastic modulation element 14 having an optical axis at 45 deg. to an X axis to cause a phase difference between X-axis and Y-axis components. The modulation light is passed through a transparent sample 20 held on a rotary stage 18 to be turned to a linearly polarized light with an analyzer 24 with a direction of transmission axis thereof at 45 deg. to the X axis to detect an intensity of light with a photomultiplier 26, an output of which is supplied to a preamplifier 28, an FHz amplifier 36 and a 2fHz amplifier 38 to determine a phase delay at an irradiation point P with a microcomputer 46 from amplitudes and an orientation azimuth theta of the sample via synchronous rectifiers 40 and 42 and a multiplexer 44.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は複屈折解析装置に係り、特に、高分子フィルム
や液晶フィルム等の複屈折の比較的大きい試料の解析に
好適な複屈折解析装置に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a birefringence analyzer, and in particular, a birefringence analyzer suitable for analyzing samples with relatively large birefringence such as polymer films and liquid crystal films. Regarding.

[従来の技術] 従来の複屈折解析装置では、逆正弦関数から複屈折にお
ける位相遅れを求めていたので、位相遅れは一π/2〜
π/2の範囲でしか求めることができなかった。したが
って、高分子フィルムのように延伸によって容易に配向
が生じるような、上記範囲を越える位相遅れの比較的大
きい試料を測定対象とすることができなかった。
[Prior art] Conventional birefringence analyzers calculate the phase lag in birefringence from an arc sine function, so the phase lag is between 1π/2 and 1π/2.
It could only be determined within the range of π/2. Therefore, it has not been possible to measure samples with relatively large phase delays exceeding the above range, such as polymer films, which are easily oriented by stretching.

[発明が解決しようとする課題] 本発明の目的は、上記問題点に鑑み、測定可能な位相遅
れの範囲の広い複屈折解析装置を提供することにある。
[Problems to be Solved by the Invention] In view of the above-mentioned problems, an object of the present invention is to provide a birefringence analysis device that can measure a wide range of phase delays.

器の出力に含まれる直流成分の値が一定になるように該
光検出器の出力を調節する手段と、該試料をその光照射
点を中心として回転させる試料回転手段と、該光検出器
の出力に含まれる周波数fHzの信号成分の振幅A、を
検出する手段と、該光検出器の出力に含まれる周波数2
fHzの信号成分の振幅Allを検出する手段と、該試
料を回転したときの該振幅A、及びA v tの値を求
めて位相遅れを演算する手段と、を備えている。
means for adjusting the output of the photodetector so that the value of the DC component included in the output of the photodetector is constant; sample rotation means for rotating the sample around its light irradiation point; means for detecting the amplitude A of a signal component of a frequency fHz included in the output;
The apparatus includes means for detecting the amplitude All of the fHz signal component, and means for calculating the phase delay by determining the amplitude A and A v t when the sample is rotated.

[課題を解決するための手段] この目的を達成するために、本発明に係る複屈折解析装
置では、入射単色光を直線偏光にする偏光子と、該直線
偏光をその偏光面と±45°なす偏光面の直線偏光成分
に分解した場合に該両成分の位相差を周波数rで変化さ
せて左右楕円(円は楕円に含まれる)偏光を交互に生成
する位相差変調手段と、該変調光が試料を透過した後に
入射されこれを直線偏光にする検光子と、該検光子を通
った直線偏光の強度を検出する光検出器と、該光検出[
作用] 振幅A+、Af+は、位相遅れをΔ、基準面(偏光子の
透過軸を通り光進行方向に平行な面)に対する試料の配
向の方位角をθとし、アンプのゲインを調整して最大値
を1に規格化すると、それぞれ次式で表わすことができ
る。
[Means for Solving the Problems] In order to achieve this object, the birefringence analyzer according to the present invention includes a polarizer that converts incident monochromatic light into linearly polarized light, and a polarizer that converts the linearly polarized light into ±45° with respect to its polarization plane. phase difference modulation means for alternately generating left and right elliptical (circle included in the ellipse) polarized light by changing the phase difference between the two components at a frequency r when the light is decomposed into linearly polarized light components with a plane of polarization; an analyzer that enters the light after passing through the sample and converts it into linearly polarized light; a photodetector that detects the intensity of the linearly polarized light that has passed through the analyzer;
Effect] Amplitudes A+ and Af+ are maximized by adjusting the gain of the amplifier, where Δ is the phase delay and θ is the azimuth angle of the sample orientation with respect to the reference plane (a plane that passes through the transmission axis of the polarizer and is parallel to the direction of light propagation). When the values are normalized to 1, they can be expressed by the following equations.

A t= sinΔ+cos2θ    −・−(1)
A tr−8in”(Δ/2)・51n40・・・(2
)従って、例えば、自振幅の最大値の比Rは、R= s
inΔ/sin”(Δ/2) = tan(Δ/2)/
2 −  ・−(、()となり、−π〜πの範囲で位相
遅れを求めることができる。
A t= sinΔ+cos2θ −・−(1)
A tr-8in” (Δ/2)・51n40...(2
) Therefore, for example, the ratio R of the maximum value of self-amplitude is R=s
inΔ/sin” (Δ/2) = tan(Δ/2)/
2 − ·−(, (), and the phase delay can be obtained in the range of −π to π.

振幅A r、 A w rのθに関する微分値の最大値
の比についても上記同様の結論が得られる。
The same conclusion as above can be obtained regarding the ratio of the maximum values of the differential values of the amplitudes A r and A wr with respect to θ.

[実施例コ 以下、図面に基づいて本発明の詳細な説明する。[Example code] Hereinafter, the present invention will be described in detail based on the drawings.

(1)−実施例 第1図は複屈折解析装置の構成を示す。(1)-Example FIG. 1 shows the configuration of a birefringence analyzer.

光源10から放射された単色光は、偏光子I2を通って
直線偏光にされ、次いで光弾性変調素子(PEM)+ 
4を通る。
The monochromatic light emitted from the light source 10 is linearly polarized through a polarizer I2 and then passed through a photoelastic modulator (PEM)+
Pass through 4.

ここで、第2図に示すxYz直交座標系において、Z方
向を光進行方向とし、偏光子12の透過軸方位をX方向
とすると、光弾性変調索子14はその光学軸方位がX軸
と45′をなすように配置されている。
Here, in the xYz orthogonal coordinate system shown in FIG. 2, if the Z direction is the light traveling direction and the transmission axis direction of the polarizer 12 is the X direction, then the optical axis direction of the photoelastic modulator 14 is the 45'.

第1図において、PE輩コントローラ16から供給され
るfHzの交流電圧V。5in(2πrt)を光弾性変
調素子14の振動子の電極板間に印加すると、偏光子1
2を通った直線偏光のX軸成分とY軸成分間に位相差δ
−6゜5in(2πrt>が生ずる。この周波数fは例
えば50kllzである。また、電圧振幅V。
In FIG. 1, an alternating current voltage V of fHz is supplied from the PE controller 16. When 5 inches (2πrt) is applied between the electrode plates of the vibrator of the photoelastic modulation element 14, the polarizer 1
Phase difference δ between the X-axis component and Y-axis component of linearly polarized light passing through 2
−6°5in (2πrt>) occurs. This frequency f is, for example, 50 kllz. Also, the voltage amplitude V.

は、好ましくは、位相差振幅6゜がJ、C6,)= 0
、すなわちδ。= 2.405となるように調整する。
Preferably, the phase difference amplitude 6° is J, C6,)=0
, i.e. δ. = 2.405.

ここに、joは0次のベッセル関数を示す。Here, jo indicates a zero-order Bessel function.

光弾性変調索子14からの変調光は、ステージ18に保
持された透明な試料20、例えば高分子フィルムを通る
。このステージI8は、ステーノコントローラ22によ
り、光照射点での複屈折率の位相遅れを求めるために試
料20の光照射点Pを中心としてたとえばl°刻みで9
0”回転され、またこの位相遅れの分布を得るためにス
テージ18の中心軸Cの回りに例えば5°刻みで36o
°回転され、かつ、中心軸Cから光照射点Pまでの距離
rが例えばIIIIm刻みで変えられる。
Modulated light from the photoelastic modulator 14 passes through a transparent sample 20, such as a polymer film, held on a stage 18. This stage I8 is operated by the steno controller 22 in steps of 1°, for example, with the light irradiation point P of the sample 20 as the center in order to obtain the phase delay of the birefringence at the light irradiation point.
0", and in order to obtain this phase delay distribution, the stage 18 is rotated by 36 degrees, for example, in 5 degree increments around the central axis C of the stage 18.
degree, and the distance r from the central axis C to the light irradiation point P is changed, for example, in steps of IIIm.

試料20を通った光は、第2図に示す如く、透過軸方位
がX軸に対し45°の検光子24を通って直線偏光にさ
れ、その光強度が光電子増倍管26により検出される。
As shown in FIG. 2, the light passing through the sample 20 passes through an analyzer 24 whose transmission axis is oriented at 45° with respect to the X-axis, and is converted into linearly polarized light, whose light intensity is detected by a photomultiplier tube 26. .

光電子増倍管26の出力は、プリアンプ28により電流
/電圧変換され、次いで直流アンプ30により直流成分
のみが取り出されて電圧増幅され、電源32の制御端子
に供給される。電源32は、直流アンプ30の出力が一
定になるように、光電子増倍管26に印加するダイノー
ド電圧を調節する。
The output of the photomultiplier tube 26 is subjected to current/voltage conversion by a preamplifier 28 , and then only a DC component is extracted and voltage amplified by a DC amplifier 30 and is supplied to a control terminal of a power supply 32 . The power supply 32 adjusts the dynode voltage applied to the photomultiplier tube 26 so that the output of the DC amplifier 30 is constant.

一方、プリアンプ28の出力は、r II Z交流アン
プ36及び2r11□交流アンプ38に供給され、それ
ぞれ、周波数fHz、2f[1,の交流成分のみが取り
出されて電圧増幅され、fHz同期整流器40.2「H
2同期整流器42へ供給される。fil、同期整流器4
0.2fHz同期整流器42の制御端子1.− let
、PEMコントローラI6からそれぞれr tl z同
期パルス及び2 rnz同期パルスが供給される。fH
z同期整流器40 、2fllZ同期整流器42はそれ
ぞれfez交流アンプ36.2 r II z交流アン
プ38から供給される交流電圧を同期整流して各交流成
分の振幅を得、これをマルチプレクサ44へ供給する。
On the other hand, the output of the preamplifier 28 is supplied to an r II Z AC amplifier 36 and a 2r11□ AC amplifier 38, in which only AC components of frequencies fHz and 2f[1, respectively, are taken out and voltage amplified, and then sent to an fHz synchronous rectifier 40. 2 "H
2 synchronous rectifier 42. fil, synchronous rectifier 4
0.2 fHz synchronous rectifier 42 control terminal 1. - let
, a r tl z synchronization pulse and a 2 rnz synchronization pulse from the PEM controller I6, respectively. fH
The z synchronous rectifier 40 and the 2fllZ synchronous rectifier 42 each synchronously rectify the AC voltage supplied from the fez AC amplifier 36.2 r II z AC amplifier 38 to obtain the amplitude of each AC component, and supply this to the multiplexer 44 .

マルチプレクサ44は、マイクロコンピュータ46から
供給される制御信号に基づいて、fHz同期整流器40
の出力と2 r If z同期整流器42の出力とを交
互にA/D変換器48へ供給する。A/D変換器48は
これをデジタル変換してマイクロコンピュータ46に供
給する。
The multiplexer 44 connects the fHz synchronous rectifier 40 based on a control signal supplied from the microcomputer 46.
and the output of the 2 r If z synchronous rectifier 42 are alternately supplied to the A/D converter 48 . The A/D converter 48 converts this into digital data and supplies it to the microcomputer 46.

マイクロコンピュータ46は、A/D変換器48から供
給されるデータを読み込み、上式(1)、(2)に基づ
いて振幅Af.A21を求め(振幅は交流アンプ36.
38のゲインの調整により規格化されている)、0を変
化させてこれらの最大値を求め、上式(3)に基づいて
照射点Pでの位相遅れΔを求め、これをステージコント
ローラ22から供給される試料20の照射点Pの位置座
標に対応させてプリンタ50に供給し、記録する。
The microcomputer 46 reads the data supplied from the A/D converter 48 and calculates the amplitude Af. based on the above equations (1) and (2). Find A21 (amplitude is AC amplifier 36.
(normalized by adjusting the gain of 38), the maximum value of these is determined by changing 0, the phase delay Δ at the irradiation point P is determined based on the above equation (3), and this is sent from the stage controller 22. The supplied sample 20 is supplied to the printer 50 and recorded in correspondence with the positional coordinates of the irradiation point P.

このような処理を、各測定点(r+、φ1)について繰
り返すことにより試料20上の位相遅れ分布が得られる
By repeating such processing for each measurement point (r+, φ1), a phase lag distribution on the sample 20 is obtained.

(2)試験例 第3図は、上記実施例装置により測定した、ある照射点
の振幅A、、Af、のグラフである。
(2) Test Example FIG. 3 is a graph of the amplitudes A, Af, of a certain irradiation point, measured by the apparatus of the above embodiment.

試料20はポリプロピレンのフィルムであり、θは1゛
刻みで80〜θ。+100°の範囲である。
Sample 20 is a polypropylene film, and θ is 80 to θ in 1° increments. The range is +100°.

[発明の効果] 以上説明した如く、本発明に係る複屈折解析装置によれ
ば、従来の2倍の範囲で位相遅れを測定することができ
るという優れた効果を奏し、高分子フィルムや液晶フィ
ルム等の複屈折の比較的大きい試料の解析に寄与すると
ころが大きい。
[Effects of the Invention] As explained above, the birefringence analyzer according to the present invention has an excellent effect of being able to measure phase retardation in a range twice that of the conventional method, and can be used for polymer films and liquid crystal films. It greatly contributes to the analysis of samples with relatively large birefringence, such as.

【図面の簡単な説明】[Brief explanation of drawings]

第1図及び第2図は本発明の一実施例に係り、第1図は
複屈折解析装置のブロック図、第2図は光学系配置図で
ある。 第3図は試験例に係り、ある光照射点での0に対する振
幅Ar、Af.のグラフである。 図中 IOは光源 12は偏光子 +4は光弾性変調素子 16はPEMコントローラ 18はステージ 20は試料 22はステージコノトローラ 24は検光子 26は光電子増倍管 28はプリアンプ 30は直流アンプ 32は電源 36はfHz交流アンプ 38 let 2 fllz交流アンプ40はf II
 Z同期整流器 42は2 fHz同期整流器 44はマルチプレクサ 46はマイクロコンピュータ 48はA/D変換器
1 and 2 relate to one embodiment of the present invention, in which FIG. 1 is a block diagram of a birefringence analyzer, and FIG. 2 is an optical system layout diagram. FIG. 3 relates to a test example, and shows the amplitude Ar, Af, relative to 0 at a certain light irradiation point. This is a graph of In the figure, IO is the light source 12, the polarizer +4 is the photoelastic modulator 16, the PEM controller 18 is the stage 20, the sample 22 is the stage controller 24, the analyzer 26 is the photomultiplier tube 28, the preamplifier 30 is the DC amplifier 32 is the power supply 36 is fHz AC amplifier 38 let 2 flz AC amplifier 40 is f II
The Z synchronous rectifier 42 is a 2 fHz synchronous rectifier 44 is a multiplexer 46, and the microcomputer 48 is an A/D converter.

Claims (1)

【特許請求の範囲】 入射単色光を直線偏光にする偏光子(12)と、該直線
偏光をその偏光面と±45°なす偏光面の直線偏光成分
に分解した場合に、該両成分の位相差を周波数fで変化
させて左右楕円偏光を交互に生成する位相差変調手段(
14、16)と、該変調光が試料(20)を透過した後
に入射され、これを直線偏光にする検光子(24)と、 該検光子(24)を通った直線偏光の強度を検出する光
検出器(26)と、 該光検出器の出力に含まれる直流成分の値が一定になる
ように該光検出器の出力を調節する手段(28〜32)
と、 該試料をその光照射点を中心として回転させる試料回転
手段(18、22)と、 を備えた複屈折解析装置において、 該光検出器(26)の出力に含まれる周波数fHzの信
号成分の振幅A_fを検出する手段(28、36、40
、44、48)と、 該光検出器(26)の出力に含まれる周波数2fHzの
信号成分の振幅A_2_fを検出する手段(28、38
、42、44、48)と、 該試料を回転したときの該振幅A_f及びA_2_fの
値を求めて位相遅れを演算する手段(46)と、を有す
ることを特徴とする複屈折解析装置。
[Claims] A polarizer (12) that converts incident monochromatic light into linearly polarized light; and a polarizer (12) that converts incident monochromatic light into linearly polarized light; Phase difference modulation means (
14, 16), an analyzer (24) into which the modulated light enters after passing through the sample (20) and converts it into linearly polarized light; and an analyzer (24) that detects the intensity of the linearly polarized light that has passed through the analyzer (24). a photodetector (26); and means (28 to 32) for adjusting the output of the photodetector so that the value of the DC component included in the output of the photodetector is constant.
and a sample rotation means (18, 22) for rotating the sample around its light irradiation point, in a birefringence analyzer comprising: a signal component with a frequency fHz included in the output of the photodetector (26). means for detecting the amplitude A_f (28, 36, 40
, 44, 48) and means (28, 38) for detecting the amplitude A_2_f of a signal component with a frequency of 2 fHz included in the output of the photodetector (26).
, 42, 44, 48); and means (46) for calculating the phase delay by calculating the values of the amplitudes A_f and A_2_f when the sample is rotated.
JP6279389A 1989-03-15 1989-03-15 Birefringence analyzer Expired - Lifetime JP2780998B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6279389A JP2780998B2 (en) 1989-03-15 1989-03-15 Birefringence analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6279389A JP2780998B2 (en) 1989-03-15 1989-03-15 Birefringence analyzer

Publications (2)

Publication Number Publication Date
JPH02242137A true JPH02242137A (en) 1990-09-26
JP2780998B2 JP2780998B2 (en) 1998-07-30

Family

ID=13210586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6279389A Expired - Lifetime JP2780998B2 (en) 1989-03-15 1989-03-15 Birefringence analyzer

Country Status (1)

Country Link
JP (1) JP2780998B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007046943A (en) * 2005-08-08 2007-02-22 Tokyo Univ Of Agriculture & Technology Observation device, observation method, measuring method of angle of faraday rotation, measuring method of faraday ellipticity, measuring method of angle of carr rotation and measuring method of carr ellipticity
CN100378445C (en) * 2004-12-28 2008-04-02 中国科学院上海光学精密机械研究所 Intelligent synthesized measuring apparatus for half wave voltage of extinction ratio in crystal, and phase delay of wave plate
JP2012202812A (en) * 2011-03-25 2012-10-22 Jasco Corp Circular dichroism measuring apparatus and method for measuring circular dichroism

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100378445C (en) * 2004-12-28 2008-04-02 中国科学院上海光学精密机械研究所 Intelligent synthesized measuring apparatus for half wave voltage of extinction ratio in crystal, and phase delay of wave plate
JP2007046943A (en) * 2005-08-08 2007-02-22 Tokyo Univ Of Agriculture & Technology Observation device, observation method, measuring method of angle of faraday rotation, measuring method of faraday ellipticity, measuring method of angle of carr rotation and measuring method of carr ellipticity
JP2012202812A (en) * 2011-03-25 2012-10-22 Jasco Corp Circular dichroism measuring apparatus and method for measuring circular dichroism

Also Published As

Publication number Publication date
JP2780998B2 (en) 1998-07-30

Similar Documents

Publication Publication Date Title
WO2014189967A2 (en) Polarization properties imaging systems
US6738137B2 (en) Measurement of waveplate retardation using a photoelastic modulator
WO2013185264A1 (en) Device and method for measuring phase delay distribution and fast axis azimuth distribution in real time
EP1397651B1 (en) Birefringence measurement at deep-ultraviolet wavelengths
US4521111A (en) Apparatus for measurement of molecular orientation
US3741661A (en) Universal polarimeter
US5319194A (en) Apparatus for measuring birefringence without employing rotating mechanism
JPH0470582B2 (en)
PL175028B1 (en) Method of measuring circular dichroism, optical rotation and absorption spectrum
TW201638575A (en) Calibration method and device for broad-band achromatic composite wave plate and corresponding measurement system
JPH02242137A (en) Double refraction analysis apparatus
JP3341928B2 (en) Dichroic dispersion meter
JP2780988B2 (en) Spectropolarimeter
JP3340145B2 (en) Stork meter
JPS6342212B2 (en)
JP3554374B2 (en) Polarimeter
JP2004184225A (en) Double refraction measuring instrument, method for detecting axial orientation of double refraction sample and method for calibrating the instrument
JP2789575B2 (en) Birefringence measurement device
JP2672414B2 (en) Reference signal generator for lock-in amplifier
JPS62267625A (en) Ellipsometer
JP2005283552A (en) Birefringence measurement device and birefringence measurement method
JP2001337035A (en) Measuring instrument
JPS63148108A (en) Ellipsometer
JPH05164789A (en) Dc ammeter
JPH06229909A (en) Measuring apparatus for polarized dichroism

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080515

Year of fee payment: 10

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090515

Year of fee payment: 11

EXPY Cancellation because of completion of term