JPH02231808A - Electrode structure of crystal resonator - Google Patents
Electrode structure of crystal resonatorInfo
- Publication number
- JPH02231808A JPH02231808A JP5252989A JP5252989A JPH02231808A JP H02231808 A JPH02231808 A JP H02231808A JP 5252989 A JP5252989 A JP 5252989A JP 5252989 A JP5252989 A JP 5252989A JP H02231808 A JPH02231808 A JP H02231808A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- crystal resonator
- recessed part
- present
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 27
- 239000002184 metal Substances 0.000 claims abstract description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 4
- 238000000151 deposition Methods 0.000 abstract description 2
- 238000000206 photolithography Methods 0.000 abstract description 2
- 238000001312 dry etching Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 238000001039 wet etching Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は５ ０ Ｍ Ｈ ｚ以十．の高周波を出力する
水晶振動子に関し、特に特性を低下させることなく電極
パターンの断線を防止した水晶振動子の電極構造に関す
る。DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention is applicable to 50 MHz or more. The present invention relates to a crystal resonator that outputs high-frequency waves, and particularly relates to an electrode structure of a crystal resonator that prevents disconnection of electrode patterns without degrading characteristics.
（従来の技術）
高周波の基本波を出力する水晶振動子としては．ＡＴカ
ット板を薄く加下した厚味ずぺり振動干ドのものを用い
るのが一般的であるが、従来の製造方法では４０μｍ程
度に薄く加工するのが限界であり、従って発振周波数も
４ ０ Ｍ Ｈ ｚが最高である。また、ＳＡＷ共振子
によれば高周波化は容易であるが、温度特性の点におい
てＡ Ｔ力・ント振動子に劣っている。(Prior technology) As a crystal oscillator that outputs a high frequency fundamental wave. It is common to use thick, vibration-dried AT-cut plates that are thinly pressed, but with conventional manufacturing methods, the limit of processing the plate to a thickness of about 40 μm is the limit, and therefore the oscillation frequency is also 40 μm. MHz is the highest. Further, although it is easy to increase the frequency using a SAW resonator, it is inferior to an AT resonator in terms of temperature characteristics.
従って、高周波振動子でありながらＡ Ｔカットの振動
子並みの温度特性のものを得るために例えば第４図ｆａ
） ｆｂ） ．第５図ｆａ） ｌ）に示す如き構成
の振動子が開発されている。Therefore, in order to obtain temperature characteristics similar to those of an AT-cut vibrator even though it is a high-frequency vibrator, for example,
) fb) . A vibrator having the configuration shown in FIG. 5 fa) l) has been developed.
これらの従来例は水晶板１の中央部の両面または片面に
ドライエッグーング又はウゴットエッグ−ングによって
凹所２を形成して薄肉の振動部３を設けるとともに各面
１．に平而図に示すような形状の電極パターン（励振用
電極）５、６を蒸着等により形成している、，
この各電極パターン５、６は中央の主電極５ａ６ａと，
各主電極５ａ．６ａから外径方向へ延出されたリート線
５ｂ．６ｂとを有しているが、凹所２底面の主電極５ａ
，６ａから凹所の段差をへて伸びるリード線５ｂ．６ａ
は細幅であるため、製造時等に断線を起こし易く、製造
時の歩留りが悪いと．いつり題があった。In these conventional examples, a recess 2 is formed on both sides or one side of the central portion of a crystal plate 1 by dry egging or grogging, and a thin vibrating section 3 is provided on each side. Electrode patterns (excitation electrodes) 5 and 6 having shapes as shown in the diagram are formed by vapor deposition, etc. Each electrode pattern 5 and 6 has a main electrode 5a6a in the center,
Each main electrode 5a. Riet wire 5b extending from 6a in the outer diameter direction. 6b, but the main electrode 5a on the bottom of the recess 2
, 6a extending through the step of the recess. 6a
Because the wire is narrow, wire breakage is likely to occur during manufacturing, resulting in poor yield during manufacturing. There was a problem.
（発明の目的）
本発明はＬ述したごとき従来の水晶振動子が有する問題
を解決すべくなされたものであって、５０ＭＨｚ以．Ｉ
：．の高周波を得ることのできるＡＴカット水晶振動子
において、振動子面の凹所から平坦面にかけて形成され
る電極部の断線を防止した水晶振動子の電極構造を提供
することを目的とする。(Object of the Invention) The present invention has been made to solve the problems of conventional crystal resonators as described above. I
:． An object of the present invention is to provide an electrode structure for an AT-cut crystal resonator capable of obtaining a high frequency wave, which prevents disconnection of an electrode portion formed from a recess on a resonator surface to a flat surface.
（発明の概要）
上述の目的を達成するため、本発明に係る水晶振動子の
電極構造は、片面のみに四所を形成した板状の水晶振動
子において、
該凹所形成面全面に電極金属を蒸着して全面電極とした
ものである。(Summary of the Invention) In order to achieve the above-mentioned object, the electrode structure of the crystal resonator according to the present invention is such that the electrode structure of the crystal resonator according to the present invention is such that the electrode structure of the crystal resonator according to the present invention is such that, in a plate-shaped crystal resonator in which four points are formed on only one side, electrode metal is provided on the entire surface where the recesses are formed. is vapor-deposited to form an electrode on the entire surface.
（実施例）
以下、添付図面に示した実施例に基づいて本発？を詳細
に説明する。(Example) The following is a description of the present invention based on the example shown in the attached drawings. will be explained in detail.
第１図（ａ）及び（ｂ）は本発明の一実施例に係る水晶
■振動子の平面図及びそのＡ−Ａ断面図であり、水晶板
１１の片面にドライエッヂング或はウェットエッチング
によって四所１２を形成するとともに、凹所形成面はそ
の全面に電極ｌ４を蒸着形成する一方、平坦な他面には
従来と同様の電極パターン１６をフォトリソグラフ法に
より形成する。FIGS. 1(a) and 1(b) are a plan view and an A-A cross-sectional view of a crystal resonator according to an embodiment of the present invention. At the same time, an electrode 14 is formed by vapor deposition on the entire surface of the recess formation surface, while an electrode pattern 16 similar to the conventional one is formed on the other flat surface by photolithography.
平坦な面の全面に電極１４を蒸着形成することによって
四所１２の段差部における電極の断線を防止することが
できる。By vapor depositing the electrode 14 over the entire flat surface, disconnection of the electrode at the four stepped portions 12 can be prevented.
次に、第２図（ａ）及び（ｂ）は第４図、第５図の従来
の振動子の振動部３及び本発明の振動子の振動部１８夫
々における振動エネルギー分布図である。まず同図（ａ
） １方に示す従来の振動子は薄肉の振動部３のト下両
面に同・形状の電極が配置されており，振動エネルギー
分布は電極の寸法がエネルギー封じ込めに最適な場合に
は同図（ａ）下方に示す如き値を示す。Next, FIGS. 2(a) and 2(b) are vibration energy distribution diagrams in the vibrating part 3 of the conventional vibrator shown in FIGS. 4 and 5 and the vibrating part 18 of the vibrator of the present invention, respectively. First, the same figure (a
) In the conventional vibrator shown on the one hand, electrodes of the same shape are arranged on both sides of the bottom of the thin vibrating part 3, and the vibration energy distribution is as shown in the same figure ( a) Show values as shown below.
同図（ｂ）上方に示す本発明の電極構造においては全面
蒸着構造の電極ｌ４は質量付加が皆無であるため実質的
に水晶部分と同一・であり、振動エネルギーは１・部電
極１６の面積に大きく依存することとなる。このため、
振動エネルギー分布は同図（ｂ）の下方に示すようにエ
ネルギー封じ込めが充分な状態となり、振動子の特性に
は全く影響を及ばずことがない。In the electrode structure of the present invention shown in the upper part of FIG. It will depend heavily on For this reason,
As shown in the lower part of the figure (b), the vibration energy distribution is in a state where the energy is sufficiently contained, and the characteristics of the vibrator are not affected at all.
このように本発明によれば、段差部分に積層した電極部
分に断線を生じることなく、許容周波数の振動子（或は
フィルター）を、振動部分の厚みを調整することによっ
て容易に製造することができる１，
なお，上記実施例は本発明の適用例の−例に過ぎず，例
えば第３図（ａ） （ｂｌ に示すように平坦面側に
２以上の電極パターン１６を設けることによってモノリ
シック・クリスタル・フィルタとしてもよい。更に本発
明の水晶振動子は凹所な有した片面を全面電極とするた
め、該水晶振動子の片面はマスク等により被覆すること
なく蒸着加工することができ蒸着工程を簡単化ずること
ができる。As described above, according to the present invention, a vibrator (or filter) with an allowable frequency can be easily manufactured by adjusting the thickness of the vibrating portion without causing disconnection in the electrode portion laminated on the stepped portion. It should be noted that the above embodiment is only an example of the application of the present invention, and for example, as shown in FIG. It may also be used as a crystal filter.Furthermore, since the crystal oscillator of the present invention has one side with a recess as a full-surface electrode, one side of the quartz crystal oscillator can be vapor-deposited without being covered with a mask or the like. can be simplified.
尚、上記実施例では水晶振動子を中心として説明したが
、本発明は圧電振動子一般に適用可能である。It should be noted that although the above embodiments have been mainly described with reference to a crystal resonator, the present invention is applicable to piezoelectric resonators in general.
（発明の効果）
以上のように本発明によれば、５０ＭＨｚ以上の高周波
を得ることのできるＡＴカット水晶振動子において，振
動子面の凹所から平坦面にかけて形成される電極部の断
線を防市するのみならず、電極蒸着工程を簡単化するう
えで著しい効果を発揮する。(Effects of the Invention) As described above, according to the present invention, in an AT-cut crystal resonator capable of obtaining high frequencies of 50 MHz or more, disconnection of the electrode portion formed from the recess on the resonator surface to the flat surface can be prevented. It not only improves performance, but also has a remarkable effect in simplifying the electrode deposition process.
第１図（ａｌ （ｂｌ は本発明の水晶振動子の−・
実施例の平面図及びそのＡ−Ａ断面図、第２図（ａ）及
び（ｂｌ は従来の振動子と本発明の振動子の振動エネ
ルギー分布の説明図、第３図（ａｔ及び（ｂ）は本発明
の他の実施例の平面図及び本発明の他の実施例の平面図
及びＢ−Ｂ断面図、第４図（ａ） ｌｂ）、第５図（
ａ） （ｂ）は従来例の構成説明図である。
１・・・水晶板 ２・・・凹所 ５、６・・・電極パタ
ーン（励振用電極） ５ａ．６ａ・・・主電極 ５ｂ
，６ｂ・・・リート線
ｌ１・・・水晶扱 １２・・・凹所
ｌ４・・・電極 １６・・・電極パターンｌ８・・・振
動部
特許出願人 東洋通信機株式会社FIG. 1 (al (bl is -) of the crystal resonator of the present invention
A plan view of the embodiment and its A-A sectional view, FIGS. 2(a) and (bl) are explanatory diagrams of the vibration energy distribution of the conventional vibrator and the vibrator of the present invention, and FIGS. 3(at and (b)) are a plan view of another embodiment of the present invention, a plan view and a BB sectional view of another embodiment of the present invention, FIG.
a) and (b) are diagrams illustrating the configuration of a conventional example. 1... Crystal plate 2... Recess 5, 6... Electrode pattern (excitation electrode) 5a. 6a...Main electrode 5b
, 6b...Leet wire l1...Crystal handling 12...Recess l4...Electrode 16...Electrode pattern l8...Vibration part patent applicant Toyo Tsushinki Co., Ltd.
Claims (2)
いて、 該凹所形成面全面に電極金属を蒸着して全面電極とした
ことを特徴とする水晶振動子の電極構造。(1) An electrode structure for a crystal resonator, which is a plate-shaped crystal resonator having recesses formed only on one side, characterized in that an electrode metal is vapor-deposited over the entire surface on which the recesses are formed to form an entire electrode.
の平坦面に電極を複数形成したモノリシック・クリスタ
ル・フィルタ構造の水晶振動子。(2) A crystal resonator having a monolithic crystal filter structure in which a plurality of electrodes are formed on a flat surface opposite to the recess forming surface of the crystal resonator according to the first aspect.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05252989A JP3185982B2 (en) | 1989-03-03 | 1989-03-03 | Electrode structure of piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP05252989A JP3185982B2 (en) | 1989-03-03 | 1989-03-03 | Electrode structure of piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02231808A true JPH02231808A (en) | 1990-09-13 |
| JP3185982B2 JP3185982B2 (en) | 2001-07-11 |
Family
ID=12917281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP05252989A Expired - Lifetime JP3185982B2 (en) | 1989-03-03 | 1989-03-03 | Electrode structure of piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3185982B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005094410A (en) * | 2003-09-18 | 2005-04-07 | Toyo Commun Equip Co Ltd | Structure of piezoelectric vibrator and manufacturing method thereof |
| EP1568655A1 (en) * | 2002-12-03 | 2005-08-31 | Sony Corporation | Micromachine and method of producing the same |
| JP2006108949A (en) * | 2004-10-01 | 2006-04-20 | Nippon Dempa Kogyo Co Ltd | Crystal-controlled oscillator |
| JP2014030126A (en) * | 2012-07-31 | 2014-02-13 | Kyocera Crystal Device Corp | Crystal device |
-
1989
- 1989-03-03 JP JP05252989A patent/JP3185982B2/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1568655A1 (en) * | 2002-12-03 | 2005-08-31 | Sony Corporation | Micromachine and method of producing the same |
| EP1568655A4 (en) * | 2002-12-03 | 2006-12-06 | Sony Corp | Micromachine and method of producing the same |
| US7212081B2 (en) | 2002-12-03 | 2007-05-01 | Sony Corporation | Micromachine and method of producing the same |
| JP2005094410A (en) * | 2003-09-18 | 2005-04-07 | Toyo Commun Equip Co Ltd | Structure of piezoelectric vibrator and manufacturing method thereof |
| JP4506135B2 (en) * | 2003-09-18 | 2010-07-21 | エプソントヨコム株式会社 | Piezoelectric vibrator |
| JP2006108949A (en) * | 2004-10-01 | 2006-04-20 | Nippon Dempa Kogyo Co Ltd | Crystal-controlled oscillator |
| JP4558433B2 (en) * | 2004-10-01 | 2010-10-06 | 日本電波工業株式会社 | Crystal oscillator |
| JP2014030126A (en) * | 2012-07-31 | 2014-02-13 | Kyocera Crystal Device Corp | Crystal device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3185982B2 (en) | 2001-07-11 |
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