JPH0223113A - Sheet-like article transportation equipment - Google Patents

Abstract

PURPOSE:To make a stop of the titled equipment in an exact position in a semi-conductor device production process by forming stages on a transfer passage with the upper surface of each of the stage opposing to a stopper. CONSTITUTION:A staged part 11 is formed on a transfer passage part as the upper part of the staged part 11 opposes to a stopper 10. The distance between the staged part 11 and the stopper 10 is set approximately equal to that of a lead frame 1. A cover 6 has a downwards oriented air blow hole 12 formed at slightly lower position of the staged part 11 and an air nozzle 13 opposes to the air blow hole 12. In such constitution the lead frame 1 is carried until restricted by a projecting stopper 10, and retracted. When a detector not illustrated in the drawing detects the stop, a transfer air nozzle 8 is stopped. The lead frame 1 is blasted with air from the air nozzle 13 into the area between the stopper 10 and the staged part 11. So the exact stop position may be realized.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a plate-like object conveying device, and particularly to a technique for continuously conveying a plate-like object along a flat conveyance path while spraying fluid. , relates to a technique that is effective when used to transport lead frames in the manufacturing process of semiconductor devices.

[Conventional technology]

When transporting lead frames from the pellet bonding process to the wire bonding process in the semiconductor device manufacturing process, the lead frames are continuously transported by sliding them along a flat transport path while blowing air onto the lead frames. Air conveyor is used. In such an air conveyor, when a conveyed lead frame is stopped at a desired location, a stopper is protruded from the desired end of the conveyance path, and the lead frame is brought into contact with the stopper and stopped. is being carried out.

An example of a technique for conveying plate-shaped objects is ``Introduction to Automatic Self-Reliance of Electronic Components,'' published by Nikkan Kogyo Shimbun, July 30, 1980, pages 48 to 50.

[Problem to be solved by the invention]

However, the present inventor discovered that in such an air conditioner, there is a problem in that the lead frame, which is conveyed at high speed by the air, hits the stopper and bounces, so it does not stop at the correct position. revealed by.

SUMMARY OF THE INVENTION An object of the present invention is to provide a plate-like object conveying device that can stop an object to be conveyed at an appropriate position.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

(Means for Solving the Problems) Representative inventions disclosed in this application will be summarized as follows.

In other words, the plate is configured such that the plate-like object is conveyed along a flat conveyance path while being sprayed with fluid, and the plate-like object is stopped by contacting a stopper at the end of the conveyance path. In the shaped object conveying device, a stepped portion is formed at the terminal end of the conveying path so as to face the stopper on an upstream side thereof.

[Effect]

According to the above-mentioned means, when the plate-shaped object that is being transported at high speed by the fluid comes into contact with the stopper and bounces, it falls into the stepped part of the transport path, so that it cannot be placed in the correct position corresponding to the stopper. It will be stopped properly.

〔Example〕

FIG. 1 is an enlarged partial vertical cross-sectional view showing a lead frame conveying device according to an embodiment of the present invention, and FIG. 2 is a plan view thereof.

In this embodiment, the plate-like object conveying device according to the present invention is configured to convey the lead frame 1 from a pellet bonder (not shown) to a wire bonder (not shown),
It is equipped with a transport rail 2.

The conveyance rail 2 is laid approximately horizontally from the terminal end of the feeder device in the pellet bonder to the start end of the feeder device in the wire bonder, and a conveyance path 3 is formed in a substantially channel shape on the rail 2. TI! The i-feeding path 3 includes a runway section 4 and a guide section 5. The runway section 4 has a width approximately equal to that of the glued frame 1 for the transported object, and is elongated. is the runway section 4
The lead frame 1 is erected on both sides of the runway section 4 to prevent it from falling off the runway section 4.

A cover 6 is fixed to the transport path 3 so as to cover the upper part of the runway section 4, and a plurality of air blowing lowers are installed on the cover 6 and are arranged at approximately equal intervals in the longitudinal direction. ing. Conveying air nozzles 8 are arranged on the cover 6 so as to face the air blowing lower, respectively.
This nozzle 8 is configured to blow out air 9 as a fluid obliquely downward in the feeding direction.

A stopper 10 is installed at the terminal end of the conveyor rail 2, that is, at the starting end of the feeder device of the wire bonder, and by moving up and down, the stopper 10 projects into the runway section 4 from the bottom to the top. It is configured.

In this embodiment, a stepped portion 11 is provided on the runway portion 4.
is formed so as to face the stopper 10 at an upstream position thereof, and the distance from the stepped portion 11 to the stopper 10 is set to be approximately equal to the length of the lead frame 1.

Further, the cover 6 has a downward air outlet 12 at a stepped portion 11.
The outlet 12 is provided with a downward air nozzle 13 so as to blow out air 14 vertically downward. Furthermore, the conveyance path 3
An air vent 15 is provided in the runway section 4 so as to face the air outlet 12.

Next, the action will be explained.

The lead frame I, on which pellet bonding has been completed in the pellet bonder, is fed to the starting end of the lead frame conveying device according to the above structure by the feeder device of the pellet bonder. When the lead frame 1 is fed and the restraint of the feeder device is cut off, the lead frame 1 passes through the conveying air nozzle 8.
Since the wire 9 is blown with air 9, the wire is transported along the transport path 3 toward the wire bonder. That is, the lead frame 1 is guided by the guide section 5 while sliding on the runway section 4 and is conveyed to the terminal end thereof.

On the other hand, when conveyance of the lead frame 1 is started, the stopper 10 is moved upward and automatically projected onto the runway section 4. Therefore, the lead frame 1 that has been conveyed at high speed to the end of the conveyance path 3 comes into contact with this stopper 10. Due to the reaction upon this collision, the lead frame 1 bounces and retreats in the opposite direction to the conveying direction. At this time,
When the air blowing operation of the conveyance air nozzle 8 is automatically stopped by a detection device (not shown) that detects when the lead frame 1 has been conveyed to the end, the lead frame 1 bounces and is stuck in the retracted position. The rules stop.

However, in this embodiment, since the step portion 11 is formed in the conveyance path 3 so as to face the stopper 10, the lead frame 1 is always regularly stopped at a regular position.

That is, even if the lead frame 1 bounces and attempts to retreat due to the reaction upon contact with the stopper 1O, the retreat is prevented by the step portion 11 facing the stopper 10, so that the stopper 10 and the step M portion 1 work prevent the lead frame from moving backward. The lead frame 1 will definitely be stopped at the position where it is. At this time, since downward air 14 is blown vertically downward from the air nozzle 13 onto the lead frame 1, the lead frame 1 is forcibly dropped into the stepped portion 11.

After the lead frame 1 has been appropriately stopped at the proper position in this manner, when the stopper 10 is retracted from the runway portion 4, the lead frame 1 is fed to the wire bonder by the feeder device π of the wire bonder.

Thereafter, by repeating the above-mentioned operation, the lead frames 1 are sequentially conveyed.

According to the embodiment described above, the following effects can be obtained.

(1) By forming a stepped portion at the end of the conveyance path so as to face the stopper on the upstream side that stops the plate-shaped object as the conveyed object upon contact, when the conveyed object collides with the stopper. Since it is possible to prevent the object from moving backward due to bounce by dropping it onto the stepped portion, the object to be transported can be properly stopped at a predetermined position.

(2) By installing a downward air nozzle near the stepped portion, it is possible to blow downward air onto the transported object and force the transported object into the stepped portion.
The effect of 1) can be further ensured.

(3) By always stopping the object to be transported at a predetermined position, the operating efficiency of the equipment can be increased, and the transport speed of the object can be increased.

Although the invention made by the present inventor has been specifically explained based on Examples above, the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. For example, the downward air nozzle may be omitted in some cases.

The specific structure of the conveyance path, stopper, etc. is not limited to the structure of the above-mentioned embodiments, but is desirably selected as appropriate depending on the conditions.

The conveying air nozzle is not limited to being configured to blow air diagonally downward in the conveying direction, but may be configured to blow air diagonally upward in the conveying direction.

The cover may be omitted in some cases.

In the above explanation, the invention made by the present inventor was mainly explained in the case where it was applied to the technology for joining and conveying lead frames between the pellet bonding process and the wire bonding process, which is the field of application that formed the background of the invention. Not limited to, other processes,
For example, it can be used for sewing and transporting lead frames from the lead frame cutting process to the bullet bonding process, from the wire bonding process to the package forming process, and from the package forming process to the outer lead cutting process. However, the present invention can be applied to all techniques for transporting plate-like objects such as masks and printed wiring boards.

〔Effect of the invention〕

A brief explanation of the effects obtained by typical inventions disclosed in this application is as follows.

By forming a stepped portion at the end of the conveyance path so as to face the stopper that stops the plate-shaped object as the conveyed object on the upstream side, the bounce caused by the bounce of the conveyed object when it comes into contact with the stopper can be prevented. Since it is possible to prevent the object from moving backward by dropping it into the stepped portion, the object to be transported can be properly stopped at a predetermined position.

[Brief explanation of the drawing]

FIG. 1 is an enlarged partial vertical cross-sectional view showing a lead frame conveying device according to an embodiment of the present invention, and FIG. 2 is a plan view thereof.

Claims (1)

[Claims] 1. A plate-like object is conveyed along a flat conveyance path while being sprayed with fluid, and is stopped by contacting a stopper at the end of the conveyance path. What is claimed is: 1. A plate-like object conveying apparatus comprising: a stepped portion formed at a terminal end of said conveying path so as to face said stopper on an upstream side thereof; 2. The plate-like object conveyance device according to claim 1, wherein a fluid outlet is provided directly above the vicinity of the stepped portion so as to blow out fluid toward the conveyance path.