JPH07231026A - Semiconductor device and conveying method for semiconductor device - Google Patents

Semiconductor device and conveying method for semiconductor device

Info

Publication number
JPH07231026A
JPH07231026A JP6019231A JP1923194A JPH07231026A JP H07231026 A JPH07231026 A JP H07231026A JP 6019231 A JP6019231 A JP 6019231A JP 1923194 A JP1923194 A JP 1923194A JP H07231026 A JPH07231026 A JP H07231026A
Authority
JP
Japan
Prior art keywords
semiconductor device
air
package
rail
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP6019231A
Other languages
Japanese (ja)
Inventor
Shigeru Saito
茂 齋藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyushu Fujitsu Electronics Ltd
Fujitsu Ltd
Original Assignee
Kyushu Fujitsu Electronics Ltd
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyushu Fujitsu Electronics Ltd, Fujitsu Ltd filed Critical Kyushu Fujitsu Electronics Ltd
Priority to JP6019231A priority Critical patent/JPH07231026A/en
Publication of JPH07231026A publication Critical patent/JPH07231026A/en
Withdrawn legal-status Critical Current

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  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE:To perform smooth conveyance without creating jamming on a conveying rail or deformation of lead wires during conveyance with respect to semiconductor devices sealed and packaged with resins particularly semiconductor devices and their conveying method in which the bottom portion of the package is brought into contact with a sloped conveying rail and descends by its dead weight. CONSTITUTION:A semiconductor element is sealed with a resin and lead terminals connected to electrodes of the semiconductor element are extended to the outside of the resin thereby packaging the semiconductor device; and an air flowing groove 4 generating the flow of constant air during movement is formed at the bottom of a package 2. Also, in a semiconductor device conveying method for conveying it to a predetermined position by lowering the device by its dead weight on a sloped conveying rail, air is jetted from the surface of a conveyor rail 15, air is sent to the air flowing groove 4 formed at the bottom surface of the package 2 of a semiconductor device 1, and the semiconductor device 1 is floated and carried while generating a constant air flow.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、樹脂封止されてパッケ
ージ化されてなる半導体装置、特にパッケージ底面部分
を傾斜する搬送レール上に接触させて自重による下降で
搬送させるような半導体装置およびその搬送方法に関す
る。複数の半導体装置を順次搬送レールを介して所定位
置に搬送するにあたっては、途中で詰まることなく円滑
な搬送が行われることが要求されている。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device packaged in a resin and packaged, and more particularly to a semiconductor device in which the bottom surface of the package is brought into contact with an inclined transport rail and is transported by descending by its own weight. Concerning the transportation method. When sequentially transporting a plurality of semiconductor devices to a predetermined position via the transport rail, it is required that smooth transport be performed without jamming in the middle.

【0002】[0002]

【従来の技術】従来の半導体装置、及びその搬送方法を
図6を参照しながら説明する。図6は、従来の半導体装
置を示す斜視図であり、傾斜する搬送レール上を移動し
ている状態を示している。一般的な半導体装置は、保護
のために半導体素子が樹脂による封止によりパッケージ
化されており、半導体素子の電極部に接続されているリ
ード端子がパッケージ外部に導出されてプリント基板等
との接続を行う構成とされている。
2. Description of the Related Art A conventional semiconductor device and its carrying method will be described with reference to FIG. FIG. 6 is a perspective view showing a conventional semiconductor device, showing a state in which the semiconductor device is moving on an inclined transport rail. In general semiconductor devices, semiconductor elements are packaged by resin sealing for protection, and lead terminals connected to the electrodes of the semiconductor elements are led out of the package and connected to a printed circuit board, etc. It is configured to do.

【0003】従来の半導体装置31のパッケージ32
は、図6に示すように略方形をしており、その底面を搬
送レール35に接触させながら所定位置に搬送する。搬
送レール35は、パッケージ32の底面と接触すると共
に、側面部で半導体装置31のリード端子33をガイド
する凸部35aを有している。また、図示していないが
パッケージ32上面をガイドする凹部を備えるものもあ
る。
A package 32 of a conventional semiconductor device 31
6 has a substantially rectangular shape as shown in FIG. 6, and conveys it to a predetermined position while its bottom surface is in contact with the conveyance rail 35. The transport rail 35 has a convex portion 35a that comes into contact with the bottom surface of the package 32 and guides the lead terminal 33 of the semiconductor device 31 at the side surface portion. Further, although not shown, there is a package having a recess for guiding the upper surface of the package 32.

【0004】従来は、上記のような構造で傾斜している
搬送レール35に複数の半導体装置31を送り込み、例
えば試験装置等の所定位置に順次搬送するような半導体
装置の搬送方法を採用している。
Conventionally, a semiconductor device transfer method has been adopted in which a plurality of semiconductor devices 31 are sent to the transfer rails 35 having the above-described structure and sequentially transferred to a predetermined position such as a test device. There is.

【0005】[0005]

【発明が解決しようとする課題】以上説明した従来の半
導体装置及び搬送方法によれば、半導体装置31のパッ
ケージ32底面と搬送レール35との摩擦力が大きいこ
と、またこの摩擦力に関連して搬送レール35内での半
導体装置31のぶれ等が生ずることによって、半導体装
置が斜めになった状態で搬送されることがある。
According to the conventional semiconductor device and the transportation method described above, the frictional force between the bottom surface of the package 32 of the semiconductor device 31 and the transportation rail 35 is large, and the frictional force is related to this. The semiconductor device 31 may be transported in an inclined state due to the shake of the semiconductor device 31 in the transport rail 35 or the like.

【0006】このように斜めの状態になると、円滑な搬
送ができないばかりか、搬送レール35内で半導体装置
31が完全に詰まってしまうことがある。また、パッケ
ージ32外部に導出しているリード端子33が搬送レー
ル35と接触することによって、リード端子33が変形
するといった課題が発生する。本発明は、以上の課題を
解決して、半導体装置の搬送レール内での詰まり、及び
リード端子の変形のない円滑な搬送を行うことを目的と
している。
[0006] In such an inclined state, not only smooth transportation cannot be performed, but also the semiconductor device 31 may be completely clogged in the transportation rail 35. Further, when the lead terminal 33 led out of the package 32 comes into contact with the transport rail 35, there arises a problem that the lead terminal 33 is deformed. An object of the present invention is to solve the above problems and to perform smooth transportation without jamming of the semiconductor device in the transportation rail and deformation of the lead terminals.

【0007】[0007]

【課題を解決するための手段】上記課題を解決するため
の本発明は、半導体素子が樹脂封止され該半導体素子の
電極に接続されるリード端子が樹脂外部に導出すること
でパッケージ化されてなる半導体装置において、移動時
に一定の空気の流れを発生させる空気流通溝4がパッケ
ージ2の底面に形成されていることを特徴としている。
According to the present invention for solving the above-mentioned problems, a semiconductor element is packaged by resin-sealing and lead terminals connected to electrodes of the semiconductor element are led out of the resin. In this semiconductor device, an air circulation groove 4 for generating a constant air flow during movement is formed on the bottom surface of the package 2.

【0008】また、傾斜する搬送レール上を自重によっ
て下降させることで所定位置に搬送する半導体装置の搬
送方法において、搬送レール15表面より空気を噴出し
て、半導体装置1のパッケージ2底面に形成される空気
流通溝4に空気を送り込むことにより、半導体装置1を
浮上させると共に、空気流通溝4での一定の空気の流れ
を発生させながら搬送することを特徴としている。
Further, in the method of transporting a semiconductor device in which a slanted transport rail is lowered by its own weight to transport the semiconductor device to a predetermined position, air is ejected from the surface of the transport rail 15 to be formed on the bottom surface of the package 2 of the semiconductor device 1. The semiconductor device 1 is floated by sending air into the air circulation groove 4 and is conveyed while generating a constant air flow in the air circulation groove 4.

【0009】[0009]

【作用】上記本発明の半導体装置及びその搬送方法によ
れば、搬送レールと半導体装置のパッケージとの接触面
が少なくなり摩擦力が弱くなると共に、半導体装置のパ
ッケージ底面の空気流通溝を空気が流通して半導体装置
周辺に安定した空気の流れを発生させることから、半導
体装置の直進性が高まり、搬送レール内での半導体装置
のぶれ等が抑えられる。
According to the semiconductor device and the method of carrying the same of the present invention described above, the contact surface between the carrying rail and the package of the semiconductor device is reduced and the frictional force is weakened. Since a stable air flow is generated around the semiconductor device while circulating, the straightness of the semiconductor device is enhanced, and the shake of the semiconductor device in the transport rail is suppressed.

【0010】従って、半導体装置は搬送レールに対して
常時平行な状態となり、円滑な搬送を行うことができる
と共に、リード端子の変形も防止することができる。
Therefore, the semiconductor device is always in parallel with the carrier rail, so that the semiconductor device can be carried smoothly and the deformation of the lead terminals can be prevented.

【0011】[0011]

【実施例】以下に、本発明の半導体装置及びその搬送方
法の実施例を説明する。図1(a)(b)は、本発明の
半導体装置の第一実施例を説明する下方部からの斜視
図、及び底面図であり、図2は図1の半導体装置の搬送
状態を示す断面図である。
Embodiments of the semiconductor device and the method of carrying the same according to the present invention will be described below. 1 (a) and 1 (b) are a bottom perspective view and a bottom view for explaining a first embodiment of a semiconductor device of the present invention, and FIG. 2 is a cross-sectional view showing a carrying state of the semiconductor device of FIG. It is a figure.

【0012】本実施例の半導体装置1は、従来同様リー
ド端子3が外部に導出されるように樹脂により封止され
ており、図1から明らかなようにパッケージ2の底面に
は、空気流通溝4が形成されている。この空気流通溝4
は、搬送方向の前方から後方に連通しており、その後方
部分は二股に別れて2か所から空気が流出するようにな
っている。
In the semiconductor device 1 of this embodiment, the lead terminals 3 are sealed with resin so as to be led out to the outside as in the conventional case, and as is apparent from FIG. 4 are formed. This air circulation groove 4
Communicates from the front to the rear in the transport direction, and the rear part thereof is divided into two parts so that the air flows out from two parts.

【0013】本実施例の半導体装置1は、図2に示すよ
うに傾斜する搬送レール5上に供給され、その上方から
半導体装置1自らの自重によって試験装置等の所定位置
へと搬送される。太矢印で示す方向に搬送されるのに対
して、パッケージ2底面の空気流通溝4には、細矢印で
示すような空気の流れが発生して、半導体装置1の円滑
な搬送を可能にする。
The semiconductor device 1 of the present embodiment is supplied onto an inclined carrier rail 5 as shown in FIG. 2, and is conveyed from above to a predetermined position such as a test device by the weight of the semiconductor device 1 itself. While the semiconductor device 1 is transported in the direction indicated by the thick arrow, an air flow as indicated by the thin arrow is generated in the air circulation groove 4 on the bottom surface of the package 2 to enable the semiconductor device 1 to be transported smoothly. .

【0014】即ち、パッケージ2底面の空気流通溝4が
存在することによって、その前方より空気を取り込ん
で、後方の2か所に別れる溝から流出することで、半導
体装置1内、及び周囲に安定した空気の流れが発生し
て、搬送中の半導体装置1のぶれを抑える。空気流通溝
4の流出側が二股に別れているのは、パッケージ2後方
の空気の流れを安定したものにするためであり、一か所
からでの空気の流出では空気の流れが不安定となり、半
導体装置1の後方部分がぶれることになる。
That is, the presence of the air circulation groove 4 on the bottom surface of the package 2 allows air to be taken in from the front side and flow out from the two grooves separated in the rear side, thereby stabilizing the inside and the periphery of the semiconductor device 1. The generated air flow suppresses the shake of the semiconductor device 1 during transportation. The outflow side of the air circulation groove 4 is bifurcated in order to stabilize the air flow in the rear of the package 2, and the outflow of air from one location makes the air flow unstable. The rear portion of the semiconductor device 1 will shake.

【0015】以上説明した半導体装置の構造にすること
によって、搬送レール5上では常に半導体装置1は平行
な状態を保ち、詰まることのない円滑な搬送が可能とな
り、リード端子3も搬送レール5に接触しないため、変
形ろることがない。次に、本発明の半導体装置の第二実
施例を図3により説明する。図3は第二実施例の半導体
装置の底面図であり、パッケージに形成される空気流通
溝の形状が第一実施例と異なっている。
By adopting the structure of the semiconductor device described above, the semiconductor device 1 can always be kept in parallel on the carrier rail 5, and the carrier can be carried smoothly without clogging, and the lead terminals 3 can also be carried on the carrier rail 5. It does not touch, so it does not deform. Next, a second embodiment of the semiconductor device of the present invention will be described with reference to FIG. FIG. 3 is a bottom view of the semiconductor device of the second embodiment, and the shape of the air circulation groove formed in the package is different from that of the first embodiment.

【0016】本実施例の半導体装置11は、そのパッケ
ージ12底面の空気流通溝14が、搬送方向に対する前
方、後方の両方が二股に別れた形状となっており、その
中間部分で連結した状態となっている。即ち、搬送方向
に対してその前後が対称形状になっていることから、搬
送レール上に供給する場合にその方向を考慮する必要が
ないため、供給作業が容易となる。また、方向を途中で
変えるような搬送を行う場合においても、対応すること
ができ、安定した空気の流れを作ることができる。
In the semiconductor device 11 of this embodiment, the air circulation groove 14 on the bottom surface of the package 12 has a bifurcated shape in both the front and the rear with respect to the carrying direction, and is connected at the intermediate portion. Has become. That is, since the front and rear sides are symmetrical with respect to the transport direction, it is not necessary to consider the direction when feeding on the transport rail, and therefore the feeding work becomes easy. Further, even in the case where the conveyance is performed while changing the direction on the way, it is possible to deal with the situation, and a stable air flow can be created.

【0017】更に、確実な搬送を行うための方法を、図
4を参照しながら説明する。以上説明した実施例におい
て、半導体装置は傾斜する搬送レール上を自重のみによ
り搬送されているが、更に確実な搬送を行うための方法
を以下に説明する。図4は、本発明の搬送方法を説明す
るための断面図であり、図1の半導体装置1を搬送して
いる状態を示している。
Further, a method for performing reliable conveyance will be described with reference to FIG. In the embodiment described above, the semiconductor device is carried on the tilted carrying rail only by its own weight, but a method for carrying out more reliable carrying will be described below. FIG. 4 is a cross-sectional view for explaining the carrying method of the present invention, showing a state where the semiconductor device 1 of FIG. 1 is being carried.

【0018】図4において、搬送レール15はその内部
に空気供給管16を有しており、この空気供給管16に
所定の圧力で空気を供給することによって、搬送レール
15の表面から空気が噴出される。所定位置に搬送する
半導体装置1を搬送レール15の上方に送ると共に、搬
送レール15の空気供給管16に空気を供給することに
より、自重によって下降する半導体装置1はパッケージ
2底面の空気流通溝4に供給管16からの空気を受け、
わずかに浮上する。
In FIG. 4, the carrier rail 15 has an air supply pipe 16 therein, and by supplying air to the air supply pipe 16 at a predetermined pressure, air is jetted from the surface of the carrier rail 15. To be done. The semiconductor device 1 which is transported to a predetermined position is sent to above the transport rail 15 and air is supplied to the air supply pipe 16 of the transport rail 15, so that the semiconductor device 1 that descends by its own weight is the air circulation groove 4 on the bottom surface of the package 2. Receives air from the supply pipe 16,
Slightly surface.

【0019】空気供給管16からの空気は、空気流通溝
4の後方から流出して、一定の空気の流れを発生させ
る。以上のように、半導体装置1を浮上させると共に、
一定の空気の流れを発生させた状態での搬送が行われる
ため、半導体装置1のパッケージ2底面と搬送レール1
5との摩擦力を極めて小さくでき、且つ一定の空気の流
れを作ることができるため、振動やぶれのない安定した
搬送が可能となる。
The air from the air supply pipe 16 flows out from the rear of the air circulation groove 4 to generate a constant air flow. As described above, while the semiconductor device 1 is levitated,
Since the transfer is performed in a state where a constant air flow is generated, the bottom surface of the package 2 of the semiconductor device 1 and the transfer rail 1
Since the frictional force with 5 can be made extremely small and a constant flow of air can be created, stable transportation without vibration or shaking is possible.

【0020】このように空気供給によって浮上させる搬
送方法を採用する場合に、好適となる半導体装置の実施
例を説明する。図5は本発明の半導体装置の第三実施例
を説明するための底面図である。本実施例の半導体装置
21は、そのパッケージ22底面の空気流通溝24が、
搬送方向に対する前方、後方に連通しておらず、後方の
みに抜けるように構成されている。本実施例の半導体装
置21によれば、図4によって説明した空気供給を行う
場合、空気流通溝24の前方部分で供給される空気を十
分に受けて浮上し、その後後方に空気を流出させる。
A preferred embodiment of the semiconductor device will be described in the case of adopting the transportation method of levitating by supplying air as described above. FIG. 5 is a bottom view for explaining the third embodiment of the semiconductor device of the present invention. In the semiconductor device 21 of this embodiment, the air circulation groove 24 on the bottom surface of the package 22 is
It is configured so that it does not communicate with the front and the rear with respect to the transport direction, but only comes out in the rear. According to the semiconductor device 21 of the present embodiment, when the air supply described with reference to FIG. 4 is performed, the air supplied in the front portion of the air circulation groove 24 is sufficiently received and levitated, and then the air is discharged to the rear.

【0021】このため、半導体装置21の浮上作用及び
空気の流れによる安定性が増し、より円滑な搬送を実現
することができる。
Therefore, the floating effect of the semiconductor device 21 and the stability due to the flow of air are increased, and a smoother transfer can be realized.

【0022】[0022]

【効果】以上説明した本発明によれば、搬送レールと半
導体装置のパッケージ底面との接触面が少なくなること
で摩擦力が弱くなると共に、半導体装置のパッケージ底
面の空気流通溝を空気が流通して半導体装置周辺に安定
した空気の流れを発生させることから、半導体装置の直
進性が高まるため、搬送レール内での半導体装置のぶれ
等が抑えられる。
According to the present invention described above, since the contact surface between the carrier rail and the bottom surface of the package of the semiconductor device is reduced, the frictional force is weakened, and the air flows through the air circulation groove on the bottom surface of the package of the semiconductor device. Since a stable air flow is generated around the semiconductor device, the straightness of the semiconductor device is enhanced, so that the shake of the semiconductor device in the transport rail can be suppressed.

【0023】従って、半導体装置は搬送レールに対して
常時平行な状態となり、円滑な搬送を行うことができる
と共に、リード端子の変形も防止することができる。
Therefore, the semiconductor device is always in parallel with the carrier rail, so that the semiconductor device can be carried smoothly and the deformation of the lead terminals can be prevented.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の半導体装置の第一実施例を説明するた
めの斜視図及び底面図である。
FIG. 1 is a perspective view and a bottom view for explaining a first embodiment of a semiconductor device of the present invention.

【図2】本発明の半導体装置の搬送状態を示す断面図で
ある。
FIG. 2 is a cross-sectional view showing a transportation state of the semiconductor device of the present invention.

【図3】本発明の半導体装置の第二実施例を説明するた
めの底面図である。
FIG. 3 is a bottom view for explaining the second embodiment of the semiconductor device of the present invention.

【図4】本発明の搬送方法を説明するための断面図であ
る。
FIG. 4 is a cross-sectional view for explaining the carrying method of the present invention.

【図5】本発明の半導体装置の第三実施例を説明するた
めの底面図である。
FIG. 5 is a bottom view for explaining the third embodiment of the semiconductor device of the present invention.

【図6】従来の半導体装置及びその搬送方法を説明する
ための斜視図である。
FIG. 6 is a perspective view for explaining a conventional semiconductor device and a method of carrying the same.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 半導体素子が樹脂封止され該半導体素子
の電極に接続されるリード端子が樹脂外部に導出するこ
とでパッケージ化されてなる半導体装置において、 移動時に一定の空気の流れを発生させる空気流通溝
(4)がパッケージ(2)の底面に形成されていること
を特徴とする半導体装置。
1. In a semiconductor device in which a semiconductor element is sealed with a resin and lead terminals connected to electrodes of the semiconductor element are led out of the resin to be packaged, a constant air flow is generated during movement. A semiconductor device, wherein an air circulation groove (4) is formed on the bottom surface of the package (2).
【請求項2】 前記空気流通溝(4)は、空気流出側が
少なくとも二股に別れていることを特徴とする請求項1
記載の半導体装置。
2. The air flow groove (4) is divided into at least two branches on the air outflow side.
The semiconductor device described.
【請求項3】 前記空気流通溝(4)は、空気流入側及
び空気流出側が少なくとも二股に別れており、中間部分
で連結されていることを特徴とする請求項2記載の半導
体装置。
3. The semiconductor device according to claim 2, wherein the air circulation groove (4) is divided into at least two branches on the air inflow side and the air outflow side, and is connected at an intermediate portion.
【請求項4】 傾斜する搬送レール上を自重によって下
降させることで所定位置に搬送する半導体装置の搬送方
法において、 搬送レール(15)表面より空気を噴出して、半導体装
置(1)のパッケージ(2)底面に形成される空気流通
溝(4)に空気を送り込むことにより、半導体装置
(1)を浮上させると共に、一定の空気の流れを発生さ
せながら搬送することを特徴とする半導体装置の搬送方
法。
4. A method of transporting a semiconductor device in which a slanted transport rail is lowered by its own weight to transport the semiconductor device to a predetermined position, in which air is jetted from the surface of the transport rail (15) to package the semiconductor device (1) ( 2) Transporting a semiconductor device characterized in that the semiconductor device (1) is levitated by feeding air into an air circulation groove (4) formed on the bottom surface and is transported while generating a constant air flow. Method.
JP6019231A 1994-02-16 1994-02-16 Semiconductor device and conveying method for semiconductor device Withdrawn JPH07231026A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6019231A JPH07231026A (en) 1994-02-16 1994-02-16 Semiconductor device and conveying method for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6019231A JPH07231026A (en) 1994-02-16 1994-02-16 Semiconductor device and conveying method for semiconductor device

Publications (1)

Publication Number Publication Date
JPH07231026A true JPH07231026A (en) 1995-08-29

Family

ID=11993617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6019231A Withdrawn JPH07231026A (en) 1994-02-16 1994-02-16 Semiconductor device and conveying method for semiconductor device

Country Status (1)

Country Link
JP (1) JPH07231026A (en)

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JP2015062036A (en) * 2015-01-06 2015-04-02 株式会社アドバンテスト Electronic component transfer device, electronic component handling device and electronic component testing device
US9340361B2 (en) 2011-12-28 2016-05-17 Advantest Corporation Electronic device transfer apparatus, electronic device handling apparatus, and electronic device testing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9340361B2 (en) 2011-12-28 2016-05-17 Advantest Corporation Electronic device transfer apparatus, electronic device handling apparatus, and electronic device testing apparatus
US9586760B2 (en) 2011-12-28 2017-03-07 Advantest Corporation Electronic component transfer shuttle
JP2015062036A (en) * 2015-01-06 2015-04-02 株式会社アドバンテスト Electronic component transfer device, electronic component handling device and electronic component testing device

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