JPH0222991Y2 - - Google Patents
Info
- Publication number
- JPH0222991Y2 JPH0222991Y2 JP9232984U JP9232984U JPH0222991Y2 JP H0222991 Y2 JPH0222991 Y2 JP H0222991Y2 JP 9232984 U JP9232984 U JP 9232984U JP 9232984 U JP9232984 U JP 9232984U JP H0222991 Y2 JPH0222991 Y2 JP H0222991Y2
- Authority
- JP
- Japan
- Prior art keywords
- container
- centrifugal
- centrifuge
- mounting
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 claims description 30
- 239000011521 glass Substances 0.000 claims description 25
- 239000011248 coating agent Substances 0.000 claims description 11
- 238000000576 coating method Methods 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000000843 powder Substances 0.000 claims description 8
- 239000007788 liquid Substances 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 235000019441 ethanol Nutrition 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Formation Of Insulating Films (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9232984U JPS617031U (ja) | 1984-06-18 | 1984-06-18 | 半導体ウエ−ハの粉末ガラス塗布装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9232984U JPS617031U (ja) | 1984-06-18 | 1984-06-18 | 半導体ウエ−ハの粉末ガラス塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS617031U JPS617031U (ja) | 1986-01-16 |
| JPH0222991Y2 true JPH0222991Y2 (https=) | 1990-06-21 |
Family
ID=30649029
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9232984U Granted JPS617031U (ja) | 1984-06-18 | 1984-06-18 | 半導体ウエ−ハの粉末ガラス塗布装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS617031U (https=) |
-
1984
- 1984-06-18 JP JP9232984U patent/JPS617031U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS617031U (ja) | 1986-01-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4431423A (en) | Cell washing apparatus having radially inwardly directed retaining arms | |
| US8282759B2 (en) | Method of making a composite swing bucket centrifuge rotor | |
| US4987687A (en) | Rotary wafer drier | |
| GB1352981A (en) | Gyroscopic devices | |
| JPH0222991Y2 (https=) | ||
| CN111206225A (zh) | 3d蒸镀的公自转镀锅结构 | |
| KR101390241B1 (ko) | 기판의 스윙 코팅장치 및 이를 이용한 스윙 코팅방법 | |
| CN207258029U (zh) | 一种茶叶自动包装装置 | |
| JPH0665594B2 (ja) | 吊荷の方位角制御装置 | |
| TW202018108A (zh) | 3d蒸鍍之公自轉鍍鍋結構 | |
| CN208340968U (zh) | 一种医学检验用离心设备 | |
| JPS63310629A (ja) | 回転式練和機 | |
| JPS6254922A (ja) | レジスト塗布装置 | |
| JP2924690B2 (ja) | 膜形成装置 | |
| CN212290967U (zh) | 载料机构及处理设备 | |
| JPH10112495A (ja) | 基板保持体 | |
| CN220444098U (zh) | 一种用于分离细胞的离心机 | |
| JPH0316278Y2 (https=) | ||
| JP2564912Y2 (ja) | 回転式基板処理装置 | |
| JPH046206Y2 (https=) | ||
| JPH0528760Y2 (https=) | ||
| JPS6245378A (ja) | 塗布装置 | |
| JPS61104627A (ja) | 半導体遠心乾燥装置 | |
| JPH0613136U (ja) | 半導体製造装置に於ける半導体ウエハー保持機構 | |
| JPH07288226A (ja) | スピンチャックおよび処理液塗布方法 |