JPH02226790A - Drying apparatus for substrate - Google Patents

Drying apparatus for substrate

Info

Publication number
JPH02226790A
JPH02226790A JP4763689A JP4763689A JPH02226790A JP H02226790 A JPH02226790 A JP H02226790A JP 4763689 A JP4763689 A JP 4763689A JP 4763689 A JP4763689 A JP 4763689A JP H02226790 A JPH02226790 A JP H02226790A
Authority
JP
Japan
Prior art keywords
conveyor
magazine
substrates
drying oven
drying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4763689A
Other languages
Japanese (ja)
Inventor
Tokuaki Eguchi
江口 徳昭
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4763689A priority Critical patent/JPH02226790A/en
Publication of JPH02226790A publication Critical patent/JPH02226790A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To make an apparatus small-sized and compact, and improve drying efficiency by a method wherein substrates are piled up, accommodated in a drying furnace and dried. CONSTITUTION:Substrates 4 on which circuit patterns are printed are carried forward by a conveyer 6; by a sending-in apparatus 16, the substrates are piled and accommodated, one by one, in a magazine 3 which is arranged on an elevating stand 13 and ascends by every pitch. The magazine 3 is transferred on a conveyer 2 by a transferring apparatus 17, and carried in a drying furnace 1 by the conveyer 2. The substrates 4 in the magazine 3 are dried. The magazine 3 carried out from the drying furnace 1 is transferred on an elevating stand 22 of a second transferring apparatus 20 by a transferring apparatus 23. The elevating stand 22 descends by every pitch, and a sending-out apparatus 24 is synchronously driven. Thereby, the substrates 4 in the magazine 3 are transferred on a carrying-out conveyer 7 one by one, and sent to the next process by the conveyer 7. The magazine 3 which has become empty is transferred on a feedback conveyer 8 by a transferring apparatus 25, and again transferred on the elevating stand 13.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、回路パターンが印刷された基板の乾燥装置に
関するものであって、基板をマガジ?ンに段積収納し、
このマガジンを循環させながら、基板を乾燥するように
したものである。
DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention relates to a drying device for a board on which a circuit pattern is printed. Store them in stacks,
The substrates are dried while circulating this magazine.

(従来の技術) 印刷装置により回路パターンが印刷された基板は、乾燥
装置へ送られ、回路パターンを乾燥した後、次の工程へ
送られる。第4図は従来の乾燥装置の平面図であって、
IOQは乾燥炉、101は乾燥炉100内を走行する搬
送コンベヤ、102は回路パターンが印刷された基板1
03を乾燥炉lOOへ向って搬送する搬入コンベヤ、1
°04は前ストックコンベヤ、105は後ストックコン
ベヤ、106は乾燥が終了した基板103を次の工程へ
搬出する搬出コンベヤ、107〜110は基板103を
各コンベヤから各コンベヤへ転送するためのシリンダ等
から成る転送装置である。
(Prior Art) A board on which a circuit pattern has been printed by a printing device is sent to a drying device, and after drying the circuit pattern, it is sent to the next process. FIG. 4 is a plan view of a conventional drying device,
IOQ is a drying oven, 101 is a conveyor running inside the drying oven 100, and 102 is a substrate 1 on which a circuit pattern is printed.
03 toward the drying oven lOO, an inlet conveyor, 1
04 is a front stock conveyor, 105 is a rear stock conveyor, 106 is a carry-out conveyor for carrying out the dried substrate 103 to the next process, 107 to 110 are cylinders for transferring the substrate 103 from each conveyor to each conveyor, etc. It is a transfer device consisting of.

印刷装置(図外)により回路パターンが印刷された基板
103は、コンベヤ102により1枚づつ乾燥炉lOO
へ向って搬送される。しかしながら1枚づつ乾燥炉10
0に送り込むのでは乾燥能率があがらないため、乾燥炉
100とコンベヤ102の間に前ストックコンベヤ10
4を設け、このコンベヤ104から複数枚(本例では3
枚)の基板103を、転送装置108により同時にコン
ベヤ101に転送し、これらの基板103を並送しなが
ら乾燥炉100により乾燥し、乾燥が終了した基板10
3は、−旦後スドックコンベヤ105上にストックし、
転送装置110により1枚づつ搬出コンベヤ106に転
送するようになっている。
The substrates 103 on which a circuit pattern has been printed by a printing device (not shown) are transferred one by one to a drying oven lOO by a conveyor 102.
transported towards. However, the drying oven 10
Since the drying efficiency cannot be improved if the feed is carried out at zero, the front stock conveyor 10
4 is provided, and a plurality of sheets (3 in this example) are delivered from this conveyor 104.
1) of substrates 103 are simultaneously transferred to the conveyor 101 by the transfer device 108, and while these substrates 103 are being conveyed in parallel, they are dried in the drying oven 100, and the dried substrates 10 are
3 is stocked on the post-dock conveyor 105,
The transfer device 110 transfers the sheets one by one to the discharge conveyor 106.

また印刷装置により基板103に印刷された回路パター
ンの表面には凹凸を生じやすいものであり、印刷後直ち
に基板103を乾燥炉100に入れて乾燥させると、凹
凸のある回路パターンはそのまま乾燥固化する。したが
って印刷装置から乾燥炉100に基板103を送る迄の
間に、回路パターンの凹凸をレベル化させるための一定
の時間稼ぎをしなければならないものであるが、上記従
来装置は、前ストックコンベヤ104により基板103
を搬送しながらこの時間稼ぎをし、その間に回路パター
ンの凹凸をレベル化させるようになっていた。
Further, the surface of the circuit pattern printed on the substrate 103 by a printing device is likely to have unevenness, so if the substrate 103 is placed in the drying oven 100 immediately after printing and dried, the uneven circuit pattern will dry and solidify as it is. . Therefore, before sending the substrate 103 from the printing device to the drying oven 100, it is necessary to buy a certain amount of time to level out the unevenness of the circuit pattern. The substrate 103
This time was gained by transporting the circuit pattern, and during this time the unevenness of the circuit pattern was leveled.

(発明が解決しようとする課題) 上記のように複数個の基板103をコンベヤ101によ
り並送しながら乾燥を行うようにすれば、それだけ乾燥
能率が向上する利点があるが、その一方で乾燥炉100
の横巾Wが大きくなって乾燥炉100がきわめて大型化
し、また前後にストックコンベヤ104,105を設け
ることから、装置全体の横巾りもきわめて大きくなり、
大きな設置スペースを必要とする問題があった。
(Problems to be Solved by the Invention) Drying a plurality of substrates 103 while conveying them in parallel on the conveyor 101 as described above has the advantage of improving drying efficiency, but on the other hand, 100
The width W of the drying oven 100 becomes extremely large, and since the stock conveyors 104 and 105 are provided at the front and rear, the width of the entire device also becomes extremely large.
There was a problem that a large installation space was required.

したがって本発明は、上記従来装置の問題を解消した乾
燥装置、すなわち小型コンパクトで乾燥能率が高い基板
の乾燥装置を提供することを目的とする。
Therefore, an object of the present invention is to provide a drying apparatus that solves the problems of the conventional apparatus, that is, a small and compact substrate drying apparatus that has high drying efficiency.

(課題を解決するための手段) このために本発明は、乾燥炉と、この乾燥炉内を基板が
段積されたマガジンを搬送する搬送コンベヤと、この搬
送コンベヤへ向って゛回路パターンが印刷された基板を
搬送する搬入コンベヤと、乾燥が終了した基板を次工程
へ搬出する搬出コンベヤと、乾燥炉から搬出されたマガ
ジンを乾燥炉の入口側へ帰還させる帰還コンベヤと、こ
の帰還コンベヤから上記搬送コンベヤへマガジンを転送
する第1の転送装置と、上記搬入コンベヤからこのマガ
ジンに基板を送入する送入装置と、上記搬送コンベヤか
ら帰還コンベヤへマガジンを転送する第2の転送装置と
、乾燥が終了したマガジン内の基板を、上記搬出コンベ
ヤへ送出する送出装置とから基板の乾燥装置を構成して
いる。
(Means for Solving the Problems) To this end, the present invention includes a drying oven, a conveyor for conveying a magazine stacked with substrates inside the drying oven, and a circuit pattern printed on the conveyor. an inlet conveyor that conveys the dried substrates, an unloading conveyor that conveys the dried substrates to the next process, a return conveyor that returns the magazine taken out from the drying oven to the entrance side of the drying oven, and the above-mentioned conveyance from this return conveyor. A first transfer device that transfers the magazine to the conveyor, a feed device that feeds the substrate from the carry-in conveyor to the magazine, a second transfer device that transfers the magazine from the transfer conveyor to the return conveyor, and a drying device. A substrate drying device is constituted by a sending device that sends out the finished substrates in the magazine to the above-mentioned carrying out conveyor.

(作用) 上記構成において、搬入コンベヤにより送られてきた基
板は、送入装置により1枚づつマガジンに段積収納され
、その間に回路パターンのレベル化の時間稼ぎを行う。
(Function) In the above configuration, the boards sent by the carry-in conveyor are stacked and stored one by one in the magazine by the feed device, and during this time, time is gained for leveling the circuit pattern.

次にマガジンは搬送コンベヤにより乾燥炉内へ送られ、
これに収納された基板は乾燥される。乾燥が終了して乾
燥炉から搬出されたマガジン内の基板は、送出装置によ
り1枚づつ搬出コンベヤに搬出され、次工程へ送られる
。また空となったマガジンは、帰還コンベヤにより乾燥
炉の入口側へ戻され、上記作業が繰り返される。
Next, the magazine is sent to a drying oven by a conveyor,
The substrates housed in this are dried. After drying, the substrates in the magazine are carried out from the drying oven, and are carried out one by one by a delivery device to a delivery conveyor, and sent to the next process. Furthermore, the empty magazine is returned to the entrance side of the drying oven by the return conveyor, and the above operation is repeated.

(実施例) 次に、図面を参照しながら本発明の詳細な説明する。(Example) Next, the present invention will be described in detail with reference to the drawings.

第1図は基板の乾燥装置の斜視図、第2図は同側面図で
あって、1は乾燥炉、2はその内部を通る搬送コンベヤ
である。3は基板4が段積収納されるマガジンであって
、fil送j:/ベヤ2により搬送されて乾燥炉1内を
通り、基板4に印刷された回路パターンは乾燥される。
FIG. 1 is a perspective view of the substrate drying apparatus, and FIG. 2 is a side view of the same, in which 1 is a drying oven and 2 is a conveyor passing through the drying oven. Reference numeral 3 denotes a magazine in which substrates 4 are stacked and stored, and are transported by a file feeder 2 and passed through a drying oven 1, where the circuit patterns printed on the substrates 4 are dried.

5は乾燥炉1の上部に設けられたヒータである。5 is a heater provided at the top of the drying oven 1.

6は搬送コンベヤ2の前方に設けられた搬入コンベヤで
あって、印刷装置(図外)により回路パターンが印刷さ
れた基板4を、1枚づつ乾燥炉lへ向って搬送する。7
は搬送コンベヤ2の後方に設けられた搬出コンベヤであ
って、乾燥が終了した基[4を、1枚づつ次の工程へ向
って搬送する。8は乾燥炉lの下方に設けられた帰還コ
ンベヤであって、基板4が搬出コンベヤ7へ搬出されて
空となったマガジン3を、乾燥炉lの入口側へ帰還させ
る。
Reference numeral 6 denotes a carry-in conveyor provided in front of the conveyor 2, which conveys the substrates 4 on which circuit patterns are printed by a printing device (not shown) one by one toward the drying oven l. 7
is a discharge conveyor provided behind the conveyor 2, which conveys the dried substrates one by one toward the next process. Reference numeral 8 denotes a return conveyor provided below the drying oven l, which returns the magazine 3, which has been emptied after the substrates 4 have been carried out to the carry-out conveyor 7, to the entrance side of the drying oven l.

11は搬入コンベヤ6と搬送コンベヤ2及び帰還コンベ
ヤ8の間に設けられたりフタ−から成るマガジン3の第
1の転送装置であって、直立したガイド部12と、この
ガイド部12に沿ってピッチ昇降する昇降台13から成
っている。
Reference numeral 11 denotes a first transfer device for the magazine 3, which is provided between the carry-in conveyor 6, the transfer conveyor 2, and the return conveyor 8, and is composed of a lid. It consists of a lifting platform 13 that moves up and down.

14は帰還コンベヤ8の終端部に設けられたシリンダか
ら成る移送装置、14aはその往復ロッドであって、ロ
ッド14aがマガジン3を後から押すことにより、マガ
ジン3を帰還コンベヤ8から昇降台13上に移送する。
14 is a transfer device consisting of a cylinder provided at the terminal end of the return conveyor 8; 14a is a reciprocating rod thereof; when the rod 14a pushes the magazine 3 from behind, the magazine 3 is moved from the return conveyor 8 onto the lifting platform 13; Transfer to.

9は、マガジン3が、ロッド14aよりも前方へ進行す
る際に、ロッド14aがその進行の邪魔にならないよう
に、移送装置14をコンベヤ8に対して前進後退させる
ためのシリンダである。
Reference numeral 9 denotes a cylinder for moving the transfer device 14 forward and backward relative to the conveyor 8 so that the rod 14a does not get in the way when the magazine 3 advances forward beyond the rod 14a.

16は供給コンベヤ6の終端部に設けられたシリンダか
ら成る送入装置、16aはその往復ロッドであって、ロ
ッド16aが往復動することにより、昇降台13に載っ
てピッチ上昇するマガジン3内に、コンペ欠6により送
られてきた基板4を1枚づつ送り込む、10は送入装置
16をコンベヤ6に対して前進後退させるためのシリン
ダであって、ロッド16aが基板4の進行の邪魔になら
ないように、これをコンベヤ6から退去させるものであ
る。17は転送装置11の側方に設けられたシリンダか
ら成る移送装置であって、そのロッド17aが突没する
ことにより、基板4が段積収納された昇降台13上のマ
ガジン3を、搬送コンベヤ2上へ移送スる。
16 is a feeding device consisting of a cylinder provided at the terminal end of the supply conveyor 6, and 16a is a reciprocating rod thereof.As the rod 16a reciprocates, the magazine 3 is placed on the lifting platform 13 and moves up in pitch. , feeds the substrates 4 sent by the competition cutout 6 one by one. 10 is a cylinder for moving the feeding device 16 forward and backward with respect to the conveyor 6, so that the rod 16a does not get in the way of the advancement of the substrates 4. This is to remove it from the conveyor 6. Reference numeral 17 denotes a transfer device consisting of a cylinder provided on the side of the transfer device 11, and when the rod 17a protrudes and retracts, the magazine 3 on the elevating table 13 on which the substrates 4 are stacked is transferred to the transfer conveyor. 2 Move up.

20は、コンベヤ2.8と搬出コンベヤ70間に設けら
れた第2の転送装置であって、ガイド部21と昇降台2
2から成っている。23は搬送コンベヤ2の終端部に設
けられたシリンダから成る移送装置、23aはその往復
ロッドであって、乾燥炉1から搬出されたマガジン3を
ロッド23aにより後押しして、これをコンベヤ2から
昇降台22上へ移送する。19は上記シリンダ15と同
様のシリンダであって、ロッド23aがマガジン3の進
行の邪魔にならないように、移送装置23をコンベヤ2
に対して前進後退させるものである。24は転送装置2
0の側方゛に設けられたシリンダから成る送出装置であ
って、そのロッド24aが突没することにより、昇降台
22上に載ってピッチ下降するマガジン3内の基板4を
、搬出コンベヤ7に1枚づつ送り出す。25は転送装置
20の下部側方に設けられたシリンダから成る移送装置
であって、そのロッド25aが突没することにより、基
板4が送出されて空になったマガジン3を、昇降台22
から帰還コンベヤ8上に転送する。
20 is a second transfer device provided between the conveyor 2.8 and the carry-out conveyor 70, and includes a guide section 21 and a lifting platform 2.
It consists of 2. 23 is a transfer device consisting of a cylinder provided at the end of the conveyor 2; 23a is a reciprocating rod thereof; the magazine 3 carried out from the drying oven 1 is backed by the rod 23a, and is moved up and down from the conveyor 2; Transfer it to the table 22. Reference numeral 19 is a cylinder similar to the cylinder 15 described above, and the transfer device 23 is connected to the conveyor 2 so that the rod 23a does not interfere with the advancement of the magazine 3.
It moves forward and backward against the object. 24 is transfer device 2
This is a delivery device consisting of a cylinder provided on the side of the magazine 3, and when its rod 24a protrudes and retracts, the board 4 in the magazine 3, which is placed on the lifting platform 22 and is lowered in pitch, is transferred to the delivery conveyor 7. Send out one piece at a time. Reference numeral 25 denotes a transfer device consisting of a cylinder provided at the lower side of the transfer device 20, and when the rod 25a protrudes and retracts, the substrate 4 is sent out and the empty magazine 3 is transferred to the elevator platform 22.
from there onto the return conveyor 8.

第3図はマガジン3の斜視図であって、このマガジン3
は箱形であり、通風性が良いように、細長い長板を枠形
に組み立てて形成されており、その内部には、基板4を
段積するためのリブ15が複数段設けられている。この
ように基板4をマガジン3に段積収納し、このマガジン
3を順路を循環させながら、基板4に印刷された回路パ
ターンの乾燥を行うようにすれば、乾燥炉1の横巾Wや
装置全体の横巾を小さくして、全体をコンパクトに構成
できる。
FIG. 3 is a perspective view of the magazine 3.
is box-shaped and is formed by assembling long and thin plates into a frame shape for good ventilation, and a plurality of ribs 15 for stacking the substrates 4 are provided inside the box. By storing the circuit boards 4 in stacks in the magazine 3 in this way and drying the circuit pattern printed on the board 4 while circulating the magazine 3, the width W of the drying oven 1 and the device By reducing the overall width, the overall structure can be made compact.

本装置・は上記のような構成より成り、次に全体の動作
の説明を行う。
This apparatus has the above-mentioned configuration, and the overall operation will be explained next.

印刷装置(図外)により回路パターンが印刷された基板
4は、搬入コンベヤ6により前方へ搬送され、送入装置
16により、昇降台13上にあってピンチ上昇するマガ
ジン3内に1枚づつ段積収納される。このようにしてマ
ガジン3の内部に基板4が満杯収納される間に、回路パ
ターンの表面の凹凸はレベル化する。
The substrates 4 on which the circuit patterns have been printed by a printing device (not shown) are transported forward by a carry-in conveyor 6, and are stacked one by one into a magazine 3 that is placed on a lift table 13 and lifted by a pinch. It is stored in piles. In this way, while the magazine 3 is fully loaded with substrates 4, the surface irregularities of the circuit patterns become level.

基板4が満杯収納されたマガジン3は、移送装置17に
より搬送コンベヤ2上へ移送され、このコンベヤ2によ
り乾燥炉1内を搬送されて、マガジン3内の基板4は乾
燥される。乾燥炉lから搬出されたマガジン3は、移送
装置23により第2の転送装置20の昇降台22上へ転
送される0次に昇降台22はピッチ下降し、これと同期
して送出装置24が駆動することにより、マガジン3内
の基板4は1枚づつ搬出コンベヤ7へ転送され、このコ
ンベヤ7により次の工程へ送られる。また空となったマ
ガジン3は、移送装置25により帰還コンベヤ8上へ移
送され、再度第1の転送装置11の昇降台13へ転送さ
れて、上記動作が繰り返される。
The magazine 3 full of substrates 4 is transferred onto the transfer conveyor 2 by the transfer device 17, and is transferred by the conveyor 2 through the drying oven 1, and the substrates 4 in the magazine 3 are dried. The magazine 3 carried out from the drying oven 1 is transferred by the transfer device 23 onto the lifting table 22 of the second transfer device 20. Next, the lifting table 22 is lowered in pitch, and in synchronization with this, the sending device 24 is moved. By driving, the substrates 4 in the magazine 3 are transferred one by one to the carry-out conveyor 7, and sent to the next process by this conveyor 7. Also, the empty magazine 3 is transferred onto the return conveyor 8 by the transfer device 25, and transferred again to the lifting platform 13 of the first transfer device 11, and the above operation is repeated.

(発明の効果) 以上のように本発明は、基板をマガジンに段積収納した
うえで乾燥炉により乾燥するようにしているので、乾燥
炉の横巾や装置全体の横巾を小さ(して、乾燥装置全体
をコンパクトに構成し、かつ乾燥能率を向上することが
できる。
(Effects of the Invention) As described above, the present invention stores the substrates in stacks in a magazine and then dries them in the drying oven. , the entire drying device can be configured compactly, and the drying efficiency can be improved.

また搬入コンベヤにより送られてきた基板を、送入装置
により1枚づつマガジンに収納する間の時間を、印刷直
後の回路パターンのレベル化のための時間として活用す
ることができる。
Further, the time during which the boards sent by the carry-in conveyor are stored one by one in the magazine by the feeding device can be utilized as time for leveling the circuit pattern immediately after printing.

【図面の簡単な説明】[Brief explanation of the drawing]

図は本発明の実施例を示すものであって、第1図は基板
の乾燥装置の全体斜視図、第2図は同側面図、第3図は
マガジンの斜視図、第4図は従来装置の平面図である。 l・・・乾燥炉 2・・・搬送コンベヤ 3・・・マガジン 4・・・基板 6・・・搬入コンベヤ 7・・・搬出コンベヤ 8・・・帰還コンベヤ 11・・・第1の転送装置 16・・・送入装置 20・・・第2の転送装置 24・・・送出装置
The drawings show an embodiment of the present invention, in which Fig. 1 is an overall perspective view of a substrate drying device, Fig. 2 is a side view of the same, Fig. 3 is a perspective view of a magazine, and Fig. 4 is a conventional device. FIG. l... Drying oven 2... Transfer conveyor 3... Magazine 4... Board 6... Carrying in conveyor 7... Carrying out conveyor 8... Return conveyor 11... First transfer device 16 ... Sending device 20 ... Second transfer device 24 ... Sending device

Claims (1)

【特許請求の範囲】[Claims]  乾燥炉と、この乾燥炉内を基板が段積されたマガジン
を搬送する搬送コンベヤと、この搬送コンベヤへ向って
回路パターンが印刷された基板を搬送する搬入コンベヤ
と、乾燥が終了した基板を次工程へ搬出する搬出コンベ
ヤと、乾燥炉から搬出されたマガジンを乾燥炉の入口側
へ帰還させる帰還コンベヤと、この帰還コンベヤから上
記搬送コンベヤへマガジンを転送する第1の転送装置と
、上記搬入コンベヤからこのマガジンに基板を送入する
送入装置と、上記搬送コンベヤから帰還コンベヤへマガ
ジンを転送する第2の転送装置と、乾燥が終了したマガ
ジン内の基板を、上記搬出コンベヤへ送出する送出装置
とから成ることを特徴とする基板の乾燥装置。
A drying oven, a transport conveyor that transports a magazine stacked with boards inside the drying oven, an input conveyor that transports boards on which circuit patterns are printed to the transport conveyor, and a transport conveyor that transports boards printed with circuit patterns to the drying oven. A carry-out conveyor for carrying out the magazine carried out to the process, a return conveyor for returning the magazine carried out from the drying oven to the entrance side of the drying oven, a first transfer device for transferring the magazine from the return conveyor to the above-mentioned transport conveyor, and the above-mentioned carry-in conveyor. A feeding device that feeds the substrate from the magazine to the magazine, a second transferring device that transfers the magazine from the transport conveyor to the return conveyor, and a feeding device that sends the substrate in the magazine that has been dried to the carrying out conveyor. A substrate drying device comprising:
JP4763689A 1989-02-28 1989-02-28 Drying apparatus for substrate Pending JPH02226790A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4763689A JPH02226790A (en) 1989-02-28 1989-02-28 Drying apparatus for substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4763689A JPH02226790A (en) 1989-02-28 1989-02-28 Drying apparatus for substrate

Publications (1)

Publication Number Publication Date
JPH02226790A true JPH02226790A (en) 1990-09-10

Family

ID=12780720

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4763689A Pending JPH02226790A (en) 1989-02-28 1989-02-28 Drying apparatus for substrate

Country Status (1)

Country Link
JP (1) JPH02226790A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05115826A (en) * 1991-10-30 1993-05-14 Hitachi Chem Co Ltd Drying method and drying device for plate coated with coating material
WO1998048601A1 (en) * 1997-04-24 1998-10-29 Ciba Specialty Chemicals Holding Inc. Process and apparatus for the treatment of flat-form material, especially of printed circuit boards
EP1041865A2 (en) * 1999-04-02 2000-10-04 Gisulfo Baccini Device to produce multi-layer electronic circuits
WO2009001379A1 (en) * 2007-06-26 2008-12-31 Afco C.V. Drying apparatus and method for silicon-based electronic circuits
CN101826576A (en) * 2010-04-12 2010-09-08 中国电子科技集团公司第四十五研究所 Automatic drying chain transmission system for solar cell
KR20210095001A (en) * 2020-01-22 2021-07-30 가부시키가이샤 쇼와 Pallet-dewatering system

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05115826A (en) * 1991-10-30 1993-05-14 Hitachi Chem Co Ltd Drying method and drying device for plate coated with coating material
WO1998048601A1 (en) * 1997-04-24 1998-10-29 Ciba Specialty Chemicals Holding Inc. Process and apparatus for the treatment of flat-form material, especially of printed circuit boards
EP1041865A2 (en) * 1999-04-02 2000-10-04 Gisulfo Baccini Device to produce multi-layer electronic circuits
EP1041865A3 (en) * 1999-04-02 2001-05-23 Gisulfo Baccini Device to produce multi-layer electronic circuits
WO2009001379A1 (en) * 2007-06-26 2008-12-31 Afco C.V. Drying apparatus and method for silicon-based electronic circuits
JP2010536001A (en) * 2007-06-26 2010-11-25 アフコ・コマンディテール・フェンノートシャップ Apparatus and method for drying silicon-based electronic circuits
CN101826576A (en) * 2010-04-12 2010-09-08 中国电子科技集团公司第四十五研究所 Automatic drying chain transmission system for solar cell
KR20210095001A (en) * 2020-01-22 2021-07-30 가부시키가이샤 쇼와 Pallet-dewatering system

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