JPH0221544U - - Google Patents
Info
- Publication number
- JPH0221544U JPH0221544U JP10106188U JP10106188U JPH0221544U JP H0221544 U JPH0221544 U JP H0221544U JP 10106188 U JP10106188 U JP 10106188U JP 10106188 U JP10106188 U JP 10106188U JP H0221544 U JPH0221544 U JP H0221544U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- piston
- rotary
- vacuum
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 4
- 238000005070 sampling Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 3
- 238000007789 sealing Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Sampling And Sample Adjustment (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10106188U JPH0221544U (enExample) | 1988-07-29 | 1988-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10106188U JPH0221544U (enExample) | 1988-07-29 | 1988-07-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0221544U true JPH0221544U (enExample) | 1990-02-13 |
Family
ID=31329709
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10106188U Pending JPH0221544U (enExample) | 1988-07-29 | 1988-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0221544U (enExample) |
-
1988
- 1988-07-29 JP JP10106188U patent/JPH0221544U/ja active Pending
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