JPH02214517A - Device for recovering solvent-containing gas - Google Patents

Abstract

PURPOSE:To increase the recovery efficiency of the entire recovery device without increasing the load of a concentrator even if the recovery efficiency of a solvent recovery means is low by returning the waste gas from the recovery means to a circulating line. CONSTITUTION:Rotors 1 consisting of a honeycomb formed body of activated carbon are unidirectionally rotated around the center of rotation parallel to the gas passing direction. A means 7 for supplying a dil. solvent-contg. gas and a cooling means 1b are also provided. The gas to be introduced into the rotor 1 is heated by a heating means 14 set in a line 12 for circulating and supplying the regenerated gas to the rotor 1. A solvent is recovered from a concd. solvent gas by a solvent recovery means 32. The waste gas from the means 32 is supplied as a regenerating gas by a regenerating gas supply means 33 on the upstream side of the heating means 14 in the line 12. Furthermore, a part of the regenerated gas is extracted from a position on the upstream side of the regenerating gas supply position of the means 33 to the line 12 and supplied to the means 32 by a concd. gas supply means 15.

Description

[Detailed Description of the Invention] [Industrial Field of Application] The present invention relates to a solvent-containing gas recovery device for concentrating a low-concentration solvent-containing gas into a high-concentration solvent-containing gas through the adsorption and desorption action of activated carbon, and then recovering the solvent. , relates to a solvent-containing gas recovery device suitable for use when the recovery rate of the solvent recovery means is low.

[Prior Art] Recently, air pollution caused by fluorocarbon gas has been attracting attention as a serious problem, and therefore, there are attempts to regulate the emission of fluorocarbon gas. As a technology for dealing with this fluorocarbon gas emission regulation, there is a fluorocarbon gas recovery device that attempts to recover and reuse the fluorocarbon gas that was previously released into the atmosphere.

Therefore, the fluorocarbon gas in the exhaust gas is either cooled as it is in a recovery device, or concentrated using a conventional activated carbon fluidized bed or activated carbon fixed bed, then cooled and recovered, or absorbed into oil and purified and recovered. Ta. However, according to this method, the CFC gas in the exhaust gas is generally at a low concentration, so the recovery equipment has to be enlarged, or
Otherwise, there is a problem that the recovery rate is extremely low and it cannot be put to practical use. Therefore, as a pretreatment for recovering the fluorocarbon gas, measures have been taken to condense the gas containing a low concentration of fluorocarbons.

This conventional device for concentrating components in gas is
There is one disclosed in No. 167430. In this technique, the sheet-like adsorption member is placed inside the cylinder so that a large number of ventilation holes formed by bending the sheet-like adsorption member into a wave shape are parallel to the axis of rotation of the cylinder, and the adsorption gas is The cylindrical body is rotated so that the cylindrical body and the desorption gas alternately pass in parallel to the axis of rotation, thereby concentrating the components in the adsorption gas into the desorption gas to a high concentration. ing.

[Problems to be Solved by the Invention] However, the conventional concentrating device described above has been used in a general solvent recovery device, and when applied to fluorocarbon gas, which is difficult to recover, the concentration rate obtained is low. However, due to the low CFC, the equipment has to be large and the fluorocarbons cannot be recovered at a sufficient recovery rate. For this reason, conventional concentrators do not satisfy the recent demand for minimizing the amount of fluorocarbons discharged outdoors.

Furthermore, if the recovery efficiency of the recovery device is low, a considerable amount of fluorocarbons remains unrecovered in the waste gas, resulting in the fluorocarbons being dissipated into the atmosphere.

The present invention has been made in view of such problems, and includes:
A solvent-containing gas recovery device that allows for miniaturization of the device, has an extremely high fluorocarbon-containing gas concentration rate, can recover fluorocarbons with high efficiency even when the recovery efficiency of the recovery means is low, and can prevent fluorocarbons from dispersing into the atmosphere. The purpose is to provide

[Means for Solving the Problems] A solvent-containing gas recovery device according to the present invention includes a rotor made of a honeycomb formed body of activated carbon, and the rotor is rotated in one direction around a rotation center parallel to the gas passage direction. a rotating means; a low concentration solvent-containing gas supply means for introducing a low concentration solvent-containing gas into the rotor from one end surface thereof, adsorbing the solvent to the rotor, and discharging the clean gas from the other end surface; a cooling means for introducing a part of the low concentration solvent-containing gas into the rotor as a cooling gas to cool the rotor; a circulation path for circulating and supplying regeneration gas to the rotor; a heating means for heating the gas to be used, a solvent recovery means for recovering the solvent from the solvent concentrated gas, and a regeneration gas for supplying the waste gas of the solvent recovery means as a regeneration gas to the upstream side of the heating means in the circulation path. a supply means, and a concentration method in which a part of the regeneration gas is extracted as a concentrated gas from a position upstream of the regeneration gas supply position of the regeneration gas supply means with respect to the circulation path, and this concentrated gas is supplied to the solvent recovery means. and a gas supply means, and the rotor is characterized in that during its rotation, regeneration gas, cooling gas, and gas containing a low concentration solvent are passed through the rotor.

[Function] In the present invention, the gas containing a low concentration of solvent is supplied to the rotor by the supply means, and by passing through the rotor, the solvent component in the gas is adsorbed to the honeycomb formed body of activated carbon and removed from the gas. removed.

The clean gas purified by adsorption of the solvent or a portion of the low concentration solvent-containing gas passes through the rotor as a cooling gas to cool the rotor. Further, the regeneration gas is configured to pass through the rotor through a circulation path, and after being heated by the heating means, the regeneration gas passes through the rotor to desorb and release the solvent adsorbed by the rotor. Therefore, the regeneration gas that has passed through the rotor contains a high concentration of solvent, and the concentrated gas supply means extracts this high concentration solvent-containing gas from the circulation path as a concentrated gas and sends it to the solvent recovery means. be provided. Then, the solvent is recovered from the concentrated gas by the solvent recovery means, and the waste gas is supplied as a regeneration gas to the circulation path by the regeneration gas supply means. This regeneration gas supply means is, for example, as claimed in claim 3.
As described in , after the waste gas from the recovery means is heated as a regeneration gas by another heating means, it is supplied to the circulation path via the regeneration gas supply path.

In the present invention, during rotation, the rotor first passes a gas containing a low concentration of solvent and adsorbs the solvent in the gas, and then passes a high-temperature regeneration gas to desorb the adsorbed solvent. )do. Thereafter, the rotor is once cooled by passing a cooling gas (clean gas), and then passes a low concentration solvent-containing gas again to adsorb the solvent. For this reason, the rotor, which was heated by the passage of the regeneration gas, is cooled by the cooling gas and the solvent desorption action has sufficiently stopped, and then the gas containing a low concentration of solvent passes through it, and the rotor is desorbed from the high-temperature rotor. This prevents the solvent from getting mixed into the clean gas. Therefore, the present invention can remove the solvent from a gas containing a low concentration of solvent with extremely high efficiency.

Furthermore, in the present invention, the flow rate of the regeneration gas circulating through the circulation path can be controlled separately and independently of the supply flow rate of the low concentration solvent-containing gas.

In order to release the solvent adsorbed and held by the honeycomb molded body rotor into the high-temperature regeneration gas with high efficiency, it is preferable that the regeneration gas has as much heat as possible. In this case, the amount of heat Q can be expressed as Q=cGT. However, C is the specific heat of the gas, G is the gas flow rate, and T is the temperature of the gas. In order to increase this amount of heat Q, as is clear from the above equation, either the temperature T is increased or the flow iG is increased. However, if the temperature T is made too high, the regeneration gas and the activated carbon of the rotor will react and the rotor will burn, so there are restrictions on increasing the temperature T.

Therefore, in the present invention, it was decided to increase the amount of heat Q by increasing the flow rate G, thereby improving the concentration of the solvent in the regeneration gas. In this case, the concentration of the solvent is determined by reducing the flow rate of the gas containing the low concentration solvent introduced into the rotor to 0.
1. If the flow rate of the solvent concentrated gas supplied to the recovery means is 02, it is expressed as G1/G2. Therefore, for example, if a part of the clean gas is heated and then passed through the rotor as a regeneration gas and then supplied as it is to the recovery means, the flow rate G1 of the low concentration solvent-containing gas and the high concentration solvent The flow rate G2 of the contained gas (that is, the regeneration gas) is uniquely determined. Therefore, the flow rate of the regeneration gas is determined by the required degree of concentration, and the amount of heat Q cannot be increased by increasing the flow rate.

However, in the present invention, the regeneration gas is circulated through the rotor through the circulation path, and in a steady state, the regeneration gas is supplied into the circulation path by the regeneration gas supply means, and the concentrated gas supply means is used to circulate the regeneration gas. Since a part of the regeneration gas passing through the rotor from the path is extracted as concentrated gas and supplied to the recovery means, the flow rate of the regeneration gas passing through the rotor and the concentration means of the present invention as concentrated gas are The flow rate G3 of the regeneration gas passing through the rotor can be set not the same as the flow rate G2 of the supplied gas, in other words, independently of the required concentration. Therefore, according to the present invention, the amount of heat of the high-temperature regeneration gas can be arbitrarily controlled, and the solvent adsorbed on the rotor can be released into the regeneration gas with high efficiency.

Furthermore, the waste gas from the recovery means is supplied as a regeneration gas into the circulation path and used again to remove the solvent from the rotor. For this reason, the waste gas from the recovery means containing the solvent is concentrated together with the regeneration gas and then sent to the recovery means again to recover the solvent. Therefore, waste gas containing a relatively high concentration of solvent can be prevented from being dissipated into the atmosphere.

[Example] Next, an example of the present invention will be described with reference to the accompanying drawings.

FIG. 1 is a block diagram showing a first embodiment in which the present invention is applied to a fluorocarbon-containing gas recovery device that concentrates and then recovers fluorocarbons from a fluorocarbon-containing gas, and FIG. 2 shows the left end surface and right end surface of the rotor 1. FIG. As shown in FIGS. 1 and 2, the rotor 1 has a cylindrical or disk shape, and is rotatably installed around the central axis with its central axis horizontal. The rotor 1 is driven to rotate at a constant speed in the direction indicated by the arrow in FIG. 2 by an appropriate drive source.

The rotor 1 is formed into a honeycomb shape using activated carbon that has excellent adsorption efficiency for fluorocarbons, and the rotor 1 is formed from this honeycomb structure so that the extending direction of its pores (that is, the gas passage direction) is aligned with the rotor center axis. It is cut out to be parallel.

The rotor 1 has a seal member 2 for the cooling gas discharge chamber, a seal member 3 for the regeneration gas discharge chamber E, and a seal member 4 for the regeneration gas discharge chamber FI on one end surface (left end surface). are arranged adjacent to each other, and on the other hand, on the other end surface (right end surface) of the rotor 1, a seal member 5 for the regeneration gas (high temperature gas) introduction chamber E is located at a position aligned with the seal member 3. A seal member 6 for the regeneration gas (high temperature gas) introduction chamber G is arranged at a position aligned with the seal member 4.

Each of the seal members 2 to 6 is pressed against the rotor 1 with an appropriate force, and slides on the rotating rotor 1 to airtightly partition each chamber from the rotor 1. As a result, the inner chambers surrounded by the seal members 2 and 3° 4 become a cooling gas discharge chamber D, a regeneration gas discharge chamber F, and a regeneration gas (gas containing high concentration CFC) discharge chamber H, respectively, and the seal members 2 , 4 becomes the low concentration fluorocarbon-containing gas introduction chamber A.

On the other hand, the inner space surrounded by the seal members 5 and 6 becomes a regeneration gas introduction chamber E and a regeneration gas introduction chamber G, respectively, and the outer space of the seal member 5.6 becomes a clean gas discharge chamber B after adsorption of fluorocarbons.
becomes. A region of this clean gas discharge chamber B that aligns with the cooling gas discharge chamber D (seal member 2) becomes a cooling gas introduction region C.

As shown in FIG. 1, low-concentration CFC-containing gas discharged from a factory or the like is sucked into a blower 7 installed in the pipe 7 through a pipe 7, is supplied to its introduction chamber A, and is introduced into the rotor 1. be introduced. A portion of the clean gas is supplied into the rotor 1 from the cooling gas introduction region C, excluding the portion that is dissipated into the atmosphere.

The gas in the cooling gas discharge chamber is returned to the upstream side of the blower 8 in the pipe 7 via the pipe 9. Furthermore, the waste gas discharged from the recovery means 32 that recovers fluorocarbons as a liquid from the concentrated gas is heated by the heater 10 as a regeneration gas through a pipe 33, and then supplied to the regeneration gas introduction chamber E. Then, the regeneration gas discharged from the regeneration gas introduction chamber E through the rotor 1 to the regeneration gas discharge chamber F is supplied to the piping of the circulation path 12 via the piping 11.

This circulation path 12 connects the regeneration gas introduction chamber G and the regeneration gas discharge chamber H of the rotor 1, and is designed to circulate and supply regeneration gas to the regeneration gas passage zone 1d of the rotor 1. . A blower 13 is disposed in this pipe 12, and a heater 14 is also interposed therein. The blower 12 pressurizes the regeneration gas supplied to the regeneration gas passage zone of the rotor 1 and heats this gas to a predetermined regeneration temperature. A condensed gas extraction pipe 15 is connected between a connection point 16 of the pipe 11 (regeneration gas supply point) in the circulation path 12 and the rotor 1 . A part of the regenerated gas that passes through the gas passage zone 1d and contains a high concentration of solvent is extracted and supplied to the fluorocarbon recovery means 32.

Next, the operation of the fluorocarbon-containing gas recovery apparatus configured as described above will be explained. The low-concentration fluorocarbon-containing gas supplied to the gas introduction chamber A by the blower 8 passes through the part of the rotor 1 that is rotating into the adsorption zone 1a, and during this time, fluorocarbons are adsorbed to the honeycomb molded body of the rotor 1, and the fluorocarbons are removed from the gas. The obtained clean gas is discharged into its discharge chamber B.
is discharged. A part of the clean gas in the discharge chamber B is transferred from the cooling zone C to the cooling zone 1 of the rotor 1 as a cooling gas.
b, during which time the rotor 1 is cooled and then discharged to the cooling gas discharge chamber. This cooled gas is supplied to the upstream side of the blower 8 in the pipe 7 via the pipe 9. On the other hand, the waste gas discharged from the recovery means 32 is supplied to the heater 10. Then, this waste gas is heated by the heater 10 and becomes high-temperature regeneration gas into the regeneration gas introduction chamber E.
is supplied to This regeneration gas passes through the rotor 1 in the regeneration gas passage zone IC, heats the fluorocarbons adsorbed on the rotor 1, and causes them to separate from the rotor 1. In this way, the regeneration gas containing a high concentration of fluorocarbons (gas containing high concentration fluorocarbons) is supplied into the circulation path 12 from the connection point 16 through the pipe 11 . Then, this regeneration gas joins the regeneration gas discharged from the rotor 1 in the circulation path 12 to become regeneration gas. This regeneration gas is sucked by the blower 13, heated by the heater 14, and then transferred to the rotor 1. The regeneration gas is supplied to the regeneration gas introduction chamber G.

This high-temperature regeneration gas passes through the regeneration gas passage zone 1d of the rotor 1, heats the fluorocarbon adsorbed on the rotor 1, and causes it to separate from the rotor 1. Therefore, the regenerated gas that has passed through the regenerated gas passage zone 1d contains an extremely high concentration of fluorocarbon. Therefore, a part of this regenerated gas is transferred to the circulation path 1 upstream of the regeneration gas supply point 16 mentioned above.
The fluorocarbons are extracted through a pipe 15 connected to the fluorocarbons 2 and sent to the fluorocarbon recovery means 32. Thereby, extremely high concentration of fluorocarbon-containing gas can be sent to the fluorocarbon recovery means 32 and used for recovery of fluorocarbons.

While the rotor 1 rotates at a constant speed in the direction shown by the arrow in FIG. Zone IC and regeneration gas passage zone 1
In step d, high-temperature regeneration gas and regeneration gas are passed through to desorb fluorocarbons, and then in cooling zone 1b, cooling gas is passed through to cool the zone. By repeating these steps, the fluorocarbons are concentrated at an extremely high concentration rate and a highly concentrated fluorocarbon-containing gas is obtained.

In addition, in order to increase the fluorocarbon concentration rate, the fluorocarbons adsorbed on the rotor 1 are not completely desorbed in the regeneration gas passage zone 1c and the regeneration zone 1d, but are transferred to the adsorption zone 1a with some residual fluorocarbons remaining. It is preferable to

This is because the speed at which activated carbon desorbs fluorocarbons significantly decreases after a certain period of time has passed after being heated by high-temperature gas. Therefore, the regeneration gas passage zone 1d and the regeneration gas passage zone 1c are lengthened to increase the heating time of the rotor. This is because even if the length is made longer, it is meaningless in terms of the effect of removing fluorocarbons.

Further, in the above embodiment, after receiving the regeneration gas, the rotor 1 passes through the cooling zone 1b and is cooled. This is because when the activated carbon rotor enters the adsorption zone 1a while still being heated through the passage of the regeneration gas and the regeneration gas, there is a gap between the fluorocarbons adsorbed on the rotor and the fluorocarbons in the clean gas discharge chamber B. Because there is a difference in the partial pressure of fluorocarbon vapor, the fluorocarbons separate from the rotor, which is still at a high temperature.
This is because Freon is discharged into the clean gas discharge chamber B. For this reason, the regeneration gas passing zone 1 is made to enter the adsorption zone 1a after passing through the cooling zone 1b.
The portions of the rotor 1 that are heated to a high temperature in the regeneration gas passage zone 1d and regeneration gas passage zone 1d are cooled to make it difficult for Freon to be released.

As a result, the separated fluorocarbon gas is not mixed into the clean gas, so that a clean gas with an extremely low concentration of fluorocarbons can be obtained, or in other words, a concentrated fluorocarbon gas with an extremely high concentration can be obtained.

Further, as described above, the regeneration gas is circulated through the regeneration zone 1d of the rotor 1 via the circulation path 12. and,
A portion of the regenerated gas is extracted in the amount required by the recovery means 32 via the piping 15 and sent to the recovery device, and an amount of regeneration gas sufficient to replenish the flow rate of the extracted amount is extracted. It is supplied to the circulation path 12 via piping 11. Therefore, the concentration ratio in this case is the ratio G of the flow rate G1 of the low concentration solvent-containing gas and the flow rate G2 of the regenerated gas extracted from the pipe 15, since the amount of fluorocarbon in the clean gas is negligibly small.
It is given by l/G2. In other words, the low-concentration solvent-containing gas may be supplied to the concentrator of this embodiment at the flow rate required to obtain the required degree of concentration, and the high-concentration solvent-containing gas may be extracted from the concentrator.

On the other hand, the rotor-passing flow rate G3 of the regeneration gas is the flow rate that is sucked by the blower 13 and flows through the circulation path 12, and this flow rate G3 is independently set and controlled regardless of the above-mentioned flow rates G1 and G2. be able to. Therefore, the amount of heat Q that the regeneration gas has is cG3T, and by adjusting this flow rate G3, the amount of heat Q that the regeneration gas has can be controlled separately from the above-mentioned concentration ratio. As a result, even in an apparatus with an extremely high concentration ratio of approximately 20 times or more, that is, in an apparatus in which the flow rate G2 of the concentrated gas discharged from the concentrator is small, the flow rate of the regeneration gas passing through the regeneration gas passage zone 1d of the rotor 1 G3 can be made sufficiently large, so that the regeneration gas can have sufficient heat to remove the fluorocarbons from the rotor 1 with high efficiency. For this reason,
The concentration of fluorocarbon in the regenerated gas fed to the recovery means 32 can be significantly increased. Further, the amount of fluorocarbons remaining in the rotor 1 is extremely reduced, and the durability or replacement life of the rotor 1 can be increased.

Further, the waste gas from the recovery means 32 passes through the rotor 1 as a regeneration gas, is returned to the circulation path 12, and is then supplied to the recovery means 32 again. In this way, the waste gas from the recovery means 32 is repeatedly concentrated and recovered without being dissipated into the atmosphere. Therefore, even if the recovery efficiency of the recovery means 32 is as low as, for example, 50%, the recovery efficiency of the recovery device as a whole is improved.

Furthermore, in this embodiment, this waste gas is not returned to the low concentration solvent-containing gas supply piping 7, but is returned to the circulation path 12 as a regeneration gas, thereby preventing overloading of the concentrator. be able to.

In other words, when the recovery efficiency of the recovery means 32 is 50%, when the waste gas is returned to the piping 7 on the upstream side of the adsorption zone 1a, the load on the rotor 1 is twice as much as when the waste gas is not returned. However, since this waste gas is returned to the regeneration gas circulation path 12 after passing through the regeneration gas passage zone 1c, the load on the rotor only compensates for the deterioration in heating efficiency of the rotor 1 due to the high concentration gas. , and the increase in load can be suppressed to about 1.3 times. Therefore, an increase in the amount of activated carbon in the rotor 1 can be suppressed.

FIG. 3 is a schematic diagram showing the distribution of the fluorocarbon concentration (% by weight) in the thickness direction of the rotor 1. FIG. 3(a) shows the fluorocarbon concentration distribution in the adsorption zone 1a, where the concentration of the low-concentration fluorocarbon-containing gas is high on the inlet side and decreases toward the outlet side. As shown in FIG. 3(b), in the regeneration gas passage zone 1d, fluorocarbons are removed from the rotor as the high-temperature regeneration gas passes through, and the fluorocarbon concentration is reduced overall. Figure 3 (C)
As shown in FIG. 2, in the regeneration gas passage zone IC, as the high temperature regeneration gas similarly passes through, the separation of fluorocarbons further progresses, and the fluorocarbon concentration further decreases. Note that the regeneration gas and the regeneration gas pass in a direction opposite to the direction in which the low-concentration fluorocarbon-containing gas passes. In this case, as shown in FIG. 3(c), fluorocarbon remains in the rotor that has left the regeneration gas passage zone IC as an unavoidable residual amount 30. This unavoidable residual amount 30 is larger on the inlet side of the low-concentration CFC-containing gas, and because the temperature drop of the regeneration gas is also greater, the inlet side of the low-concentration CFC-containing gas is larger than the outlet side. many.

Next, a second embodiment of the present invention will be described with reference to the flowchart of FIG.

This embodiment differs from the first embodiment in the direction in which the regeneration gas passing through the circulation path passes through the rotor 1, but the other configurations are the same as in the first embodiment. Identical parts are designated by the same reference numerals and their explanations will be omitted.

In this embodiment, the regeneration gas is circulated and supplied to the regeneration gas passage zone 1d of the rotor 1 through the circulation path 17.
A blower 18 installed in the circulation path 17 introduces the regeneration gas to the low concentration solvent-containing gas introduction surface of the rotor 1, and discharges the regenerated gas from the clean gas discharge surface of the rotor 1.

Then, the regeneration gas is heated by a heater 19 installed downstream of the blower 18 and then supplied to the rotor 1 .

Further, on the upstream side of the blower 18, there is a regeneration gas supply point 20.
is provided, and a pipe 11 is connected to the supply point 20 of this circulation route 17, so that the regeneration gas that has passed through the regeneration gas passage zone IC of the rotor 1 is supplied to the circulation route 17 via the pipe 11. It has become so.

Furthermore, a piping 21 is connected to the upstream side of the regeneration gas supply point 20 in the circulation path 17, and a part of the regenerated gas that has passed through the rotor 1 is extracted via this piping 21, and is extracted as appropriate. It is designed to be sent to a recovery device.

In this embodiment configured as described above, the direction in which the regeneration gas passes through the rotor is different from the first embodiment described above, and is the same as the direction in which the low concentration solvent-containing gas passes. Since the other configurations are the same as those of the first embodiment, this embodiment also provides basically the same effects as the first embodiment.

In the case of the first embodiment described above, the regenerated gas containing a high concentration of solvent is supplied at high pressure by the blower 14 to the rotor end face on the side from which the clean gas is discharged. Therefore, in order to prevent this post-regeneration gas from leaking into the clean gas, it is necessary to ensure extremely high sealing performance by the sealing member 5.6 that partitions the regeneration gas introduction chamber G and the clean gas discharge chamber B. There is. Further, even if the sealing performance is improved in this way, the possibility that the highly concentrated solvent-containing gas leaks into the clean gas cannot be eliminated.

However, in this embodiment, the exhaust surface for the regenerated gas and the exhaust surface for the low concentration solvent-containing gas are the same, and these gas exhaust chambers are provided on the same side of the rotor 1. Therefore, since the gas discharge chamber with negative pressure is located on the same side of the rotor 1 for the regeneration gas and the clean gas, the regeneration gas containing the solvent CFC at a high concentration will not leak into the clean gas discharge chamber B. is suppressed.

FIG. 5 is a schematic diagram showing changes in the fluorocarbon concentration distribution in the thickness direction of the rotor 1 in this second embodiment.

In the adsorption zone 1a, as shown in FIG. 5(a), there is a distribution in which the fluorocarbon concentration decreases in the direction in which the gas containing a low concentration of solvent passes. - On the other hand, in the regeneration gas passage zone 1d, the high-temperature regeneration gas passes in the same direction as the low-concentration solvent-containing gas, so as shown in FIG. A large amount of fluorocarbon is released due to the removal action of the gas, and since the temperature of the regeneration gas is relatively lowered on the exhaust side of the regeneration gas, the removal action of the fluorocarbon is slowed down. In addition, in the regeneration gas passage zone 1c, the high-temperature regeneration gas passes through the rotor 1 in the opposite direction to the above-mentioned regeneration gas. As shown in Figure (c), a relatively large amount of fluorocarbon remains at the center of the rotor 1 in the thickness direction.
In this embodiment, as described above, there is no risk of leakage of the concentrated gas, but the unavoidable residual amount 31 of fluorocarbon remaining in the rotor 1 is slightly larger than in the first embodiment.

FIG. 6 is a block diagram showing a third embodiment of the present invention. In FIG. 6, the same parts as those in FIG. 5 are given the same reference numerals, and the description thereof will be omitted.

In this embodiment, in addition to the passage direction of the regeneration gas, the passage direction of the regeneration gas is also the same as the passage direction of the low concentration solvent-containing gas. The regeneration gas is heated by a blower 23 and a heater 24 installed in the circulation path 22 and then introduced into one end surface of the rotor 1 . This one end side is the side into which a gas containing a low concentration solvent is introduced, and after a part of the clean gas is heated as a regeneration gas by a heater 26 via a pipe 25, a portion of this rotor 1 is similarly heated. It is designed to be supplied to the end face side. After passing through the rotor 1, this regeneration gas is supplied to the regeneration gas supply point 28 of the circulation path 22 through the pipe 25. On the other hand, the circulation route 22
A pipe 29 is connected to the upstream side of the regeneration gas supply point 28 in , and a part of the regenerated gas that has passed through the rotor 1 and contains a high concentration of solvent is extracted through the two pipes and recovered as appropriate. It is designed to feed the device.

In this example, an unavoidable residual amount remains in the rotor portion that exits the regeneration gas passage zone IC with a distribution such that a large amount of fluorocarbon remains on the exit side in the regeneration gas passage direction. Since the direction is the same as the passing direction of the regeneration gas and the low concentration solvent-containing gas, the unavoidable residual amount is small as in the first embodiment. Furthermore, since the rotor surface that provides negative pressure for the regeneration gas and the regeneration gas is the same surface as the low concentration solvent-containing gas, leakage of the high concentration solvent-containing gas is extremely small.

[Effects of the Invention] As explained above, according to the present invention, the flow rate of regeneration gas can be independently controlled regardless of the desired concentration rate, and the heat amount of separation of fluorocarbons can be significantly increased. of concentrated solvent (fluorocarbon) gas can be obtained at an extremely high concentration rate. Therefore, the recovery efficiency of the solvent (fluorocarbon) recovery device can be improved. In addition, since the waste gas from the recovery means is configured to be returned to the circulation path, even if the recovery efficiency of the recovery means is low, the recovery efficiency of the entire recovery device can be improved without substantially increasing the load on the concentrator. can be increased. Therefore, the present invention makes a significant contribution to the technical field of using solvents such as fluorocarbon gas, as it enables industries that use fluorocarbons to continue using fluorocarbon gas.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing a solvent recovery device according to the first embodiment of the present invention, FIG. 2 is a schematic diagram showing the end face of the rotor, and FIG. 3 is a schematic diagram showing the solvent concentration distribution in the cross-sectional direction of the rotor. 4 is a block diagram showing a solvent recovery device according to a second embodiment of the present invention, FIG. 5 is a schematic diagram showing the solvent concentration distribution in the cross-sectional direction of the rotor, and FIG.
The figure is a block diagram showing a solvent recovery device according to a third embodiment of the present invention. 1; Rotor, 1a; Adsorption zone, 1b; Cooling zone, 1
c; Regeneration gas passage zone, 1d; Regeneration gas passage zone,
2, 3, 4. Seal member, 8, 13. 18, 23; Blower, 10, 14, 19, 24. 26; Heater, 30; Recovery means Fig. 1/? 3 years old (a) J maho m (b) /f, v sai N (C) IE3 figure 1r dust, figure name ni way figure (b) (C)

Claims (5)

[Claims] (1) A rotor made of a honeycomb molded body of activated carbon, a rotating means for rotating the rotor in one direction around a rotation center parallel to the gas passing direction, and one end surface of the rotor for directing a low concentration solvent-containing gas to the rotor. a low concentration solvent-containing gas supply means that introduces the solvent from the rotor and adsorbs the solvent to the rotor and discharges clean gas from the other end face; a circulation path that circulates and supplies regeneration gas to the rotor; a heating device disposed within the circulation path that heats the gas introduced into the rotor; and a heating device that recovers the solvent from the solvent concentrated gas. a solvent recovery means; a regeneration gas supply means for supplying waste gas from the solvent recovery means as a regeneration gas to an upstream side of the heating means in the circulation path;
Concentrated gas supply means extracts a part of the regeneration gas as a concentrated gas from a position upstream of the regeneration gas supply position of the regeneration gas supply means with respect to the circulation path and supplies the concentrated gas to the solvent recovery means; , wherein the rotor receives a regeneration gas, a cooling gas, and a low concentration solvent-containing gas through the rotor during its rotation. (2) The solvent-containing gas recovery device according to claim 1, wherein the cooling means reintroduces the cooled gas into the rotor together with the low-concentration solvent-containing gas. (3) The regeneration gas supply means passes the waste gas from the recovery means through an intermediate region between the regeneration gas supply region and the cooling gas supply region of the rotor, and then passes the waste gas from the heating means in the circulation path. Claim 1 characterized by comprising: a regeneration gas supply path for supplying the regeneration gas to the upstream side; and another heating means disposed upstream of the rotor in the regeneration gas supply path to heat the regeneration gas. Or the solvent-containing gas recovery device according to 2. (4) The solvent-containing gas recovery device according to any one of claims 1 to 3, wherein the circulation path introduces the regeneration gas into the rotor from the other end surface side of the rotor. (5) The solvent-containing gas recovery device according to any one of claims 1 to 3, wherein the circulation path introduces the regeneration gas into the rotor from the one end surface side of the rotor.