JPH0584417A - Method and equipment for recovering solvent - Google Patents
Method and equipment for recovering solventInfo
- Publication number
- JPH0584417A JPH0584417A JP3276977A JP27697791A JPH0584417A JP H0584417 A JPH0584417 A JP H0584417A JP 3276977 A JP3276977 A JP 3276977A JP 27697791 A JP27697791 A JP 27697791A JP H0584417 A JPH0584417 A JP H0584417A
- Authority
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- Japan
- Prior art keywords
- solvent
- adsorption tower
- adsorption
- adsorbent
- desorption
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Treating Waste Gases (AREA)
- Separation Of Gases By Adsorption (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明は半導体製造工程などで発
生する溶剤含有ガスから溶剤を除去し、これを液体とし
て回収する溶剤回収装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a solvent recovery device for removing a solvent from a solvent-containing gas generated in a semiconductor manufacturing process and recovering the solvent as a liquid.
【０００２】[0002]
【従来の技術】従来の溶剤回収装置としては、蒸気再生
式の溶剤回収装置と、ヒータによるドライ再生式の溶剤
回収装置とがある。従来、多用されている蒸気再生式の
溶剤回収装置においては、吸着塔内に活性炭を充填し、
この吸着塔内に溶剤含有ガスを通流させて含有溶剤を前
記活性炭に吸着させ、その後、水蒸気を吸着塔内に導入
して前記活性炭に吸着されている溶剤を水蒸気による加
熱によって離脱させる。そして、このように吸着及び脱
着により濃縮した高濃度溶剤含有ガスを、冷却凝縮器に
導入し、冷却することにより溶剤を凝縮させて溶剤をガ
ス中から除去し、清浄ガスを得ると共に、溶剤を液体と
して回収する。2. Description of the Related Art Conventional solvent recovery devices include a vapor recovery solvent recovery device and a heater-based dry recovery solvent recovery device. Conventionally, in a steam recovery type solvent recovery device that is often used, the adsorption tower is filled with activated carbon,
A solvent-containing gas is passed through the adsorption tower to adsorb the contained solvent on the activated carbon, and then steam is introduced into the adsorption tower to remove the solvent adsorbed on the activated carbon by heating with the steam. Then, the high-concentration solvent-containing gas concentrated by adsorption and desorption in this way is introduced into a cooling condenser, the solvent is condensed by cooling and the solvent is removed from the gas, and a clean gas is obtained, together with the solvent. Collect as a liquid.
【０００３】この蒸気再生式の溶剤回収装置は、脱着効
率が高いと共に、脱着されて排出された高濃度溶剤含有
ガスからの溶剤濃縮効率が高いという利点がある。This vapor-regeneration type solvent recovery device has the advantages of high desorption efficiency and high solvent concentration efficiency from the desorbed and discharged high-concentration solvent-containing gas.
【０００４】一方、ヒータによるドライ再生式の溶剤回
収装置においては、 ハニカム状の活性炭をシート状の
ヒータに挟んで吸着塔内に装入し、溶剤の脱着をシート
ヒータへの通電による抵抗発熱により活性炭を加熱する
ことによって行う。活性炭吸着材の再生をシートヒータ
の通電発熱によって行っているため、回収溶剤中に溶剤
以外の成分が混入したり、溶剤成分が損失したりするこ
とがなく、高品質の溶剤を回収することができる。On the other hand, in a dry-recovery type solvent recovery device using a heater, honeycomb-shaped activated carbon is sandwiched between sheet-shaped heaters and charged into an adsorption tower, and solvent desorption is performed by resistance heating by energizing the sheet heaters. This is done by heating the activated carbon. Since the activated carbon adsorbent is regenerated by the energization and heat generation of the sheet heater, it is possible to recover a high-quality solvent without mixing components other than the solvent into the recovered solvent or loss of the solvent component. it can.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、蒸気再
生式の溶剤回収装置においては、活性炭吸着材の再生に
多量の蒸気が必要であり、排水量が多く、その処理が煩
雑である。また、この排水中に有害な溶剤が溶け込むた
め、大型の排水処理設備が必要となる。更に、活性な水
蒸気により溶剤の加水分解が促進され、塩素系溶剤の場
合に極端なときには排水中に塩酸が出てくる。また、排
水量が多いため、溶剤中に含まれている水溶性安定剤が
排水中に溶出し、回収液の品質が低下する。However, in the vapor recovery type solvent recovery apparatus, a large amount of vapor is required to regenerate the activated carbon adsorbent, the amount of waste water is large, and its treatment is complicated. In addition, since a harmful solvent dissolves in this wastewater, a large wastewater treatment facility is required. Further, active water vapor accelerates the hydrolysis of the solvent, and in the extreme case of a chlorine-based solvent, hydrochloric acid comes out in the waste water. In addition, since the amount of waste water is large, the water-soluble stabilizer contained in the solvent is eluted into the waste water, and the quality of the recovered liquid deteriorates.
【０００６】一方、シートヒータによるドライ再生式の
溶剤回収装置においては、排水量が少量のため、前述の
如く、排水に起因する種々の問題点は解消できるもの
の、蒸気再生式の場合と同程度の高脱着効率を得ること
が困難である。即ち、ドライ再生式の溶剤回収装置は、
常温常圧吸着及び加熱減圧脱着時の平行吸着差を利用す
るものであるため、蒸気再生式のように活性炭気孔の中
に蒸気を吸着させて溶剤を置換する置換脱着に比較し
て、脱着効率が低い。また、溶剤のキャリアガスが非凝
縮性の空気であるため、脱着されてきたガスの凝縮効率
が低い。更に、脱着時の吸着材の加熱には比較的時間が
かかり、処理能力を高めにくい。このように、従来の２
タイプの溶剤回収装置には、一長一短がある。On the other hand, in the dry recovery type solvent recovery apparatus using the seat heater, since the amount of drainage is small, various problems due to drainage can be solved as described above, but the same level as in the case of the steam regeneration type. It is difficult to obtain high desorption efficiency. That is, the dry regeneration type solvent recovery device is
Since the parallel adsorption difference at room temperature and normal pressure adsorption and heating decompression adsorption is used, the desorption efficiency is higher than the substitution desorption method in which vapor is adsorbed in the activated carbon pores to replace the solvent like the vapor regeneration method. Is low. Moreover, since the carrier gas of the solvent is non-condensable air, the desorption efficiency of the desorbed gas is low. Furthermore, it takes a relatively long time to heat the adsorbent at the time of desorption, and it is difficult to increase the processing capacity. In this way, the conventional 2
The type of solvent recovery device has advantages and disadvantages.
【０００７】本発明はかかる問題点に鑑みてなされたも
のであって、蒸気再生式の場合とドライ再生式の場合の
欠点を解消し、両方式の長所を併せ持つ溶剤回収装置、
即ち、排水処理が容易であると共に、脱着効率が高く、
回収効率も高い溶剤回収方法及び装置を提供することを
目的とする。The present invention has been made in view of the above problems, and solves the drawbacks of the vapor regeneration type and the dry regeneration type, and has the advantages of both types.
That is, wastewater treatment is easy, and desorption efficiency is high,
It is an object of the present invention to provide a solvent recovery method and device having high recovery efficiency.
【０００８】[0008]
【課題を解決するための手段】本発明に係る溶剤回収方
法は、溶剤吸着材を収納した吸着塔に対し、溶剤含有空
気を通流させて前記溶剤吸着材に溶剤を吸着させる吸着
工程と、前記吸着塔内を減圧排気し、次いでこの減圧排
気を停止し又は継続した状態で前記吸着塔内に水蒸気を
導入した後、この水蒸気の導入を停止して前記吸着塔内
を減圧排気することにより溶剤を脱着する脱着工程と
を、交互に繰り返して行うことを特徴とする。A solvent recovery method according to the present invention comprises an adsorption step for adsorbing a solvent to the solvent adsorbent by passing a solvent-containing air through an adsorption tower containing the solvent adsorbent, By evacuating the inside of the adsorption tower under reduced pressure, then introducing steam into the adsorption tower while stopping or continuing the evacuation of the inside of the adsorption tower, and stopping the introduction of the steam to evacuate the inside of the adsorption tower under reduced pressure. The desorption step of desorbing the solvent is alternately repeated.
【０００９】また、前記吸着塔を複数設け、この溶剤吸
着材を収納した複数の吸着塔に対し、前記吸着工程と、
前記脱着工程とを、各吸着塔について選択的に且つ交互
に繰り返して行うことにより、溶剤含有ガスの連続的処
理が可能になる。Further, a plurality of the adsorption towers are provided, and the adsorption step is performed for the plurality of adsorption towers containing the solvent adsorbent,
By selectively and alternately repeating the desorption step for each adsorption column, it is possible to continuously process the solvent-containing gas.
【００１０】本発明に係る溶剤回収装置は、溶剤吸着材
を収納した複数の吸着塔と、この吸着塔に溶剤含有空気
を選択的に且つ交互に通流させるガス導入手段と、前記
吸着塔内を選択的に且つ交互に減圧排気する排気手段
と、前記吸着塔内に水蒸気を選択的に導入する水蒸気導
入手段と、前記吸着塔から排気された高濃度溶剤含有ガ
スから溶剤を冷却凝縮させて液体として回収する冷却凝
縮手段とを有することを特徴とする。The solvent recovery apparatus according to the present invention comprises a plurality of adsorption towers containing a solvent adsorbent, gas introduction means for selectively and alternately passing solvent-containing air through the adsorption towers, and inside the adsorption tower. An exhausting means for selectively and alternately decompressing and evacuating, a steam introducing means for selectively introducing water vapor into the adsorption tower, and cooling and condensing the solvent from the high-concentration solvent-containing gas exhausted from the adsorption tower. It has a cooling and condensing means for collecting as a liquid.
【００１１】[0011]
【作用】本発明においては、吸着材の再生（即ち、溶剤
の脱着）工程において、吸着塔内を減圧排気し、この減
圧排気を停止した状態で、又は減圧排気を継続した状態
で、前記吸着塔内に水蒸気を少量導入する。水蒸気は吸
着材を短時間で加熱するため、少量導入すれば良い。そ
して、水蒸気の導入を停止した後、更に吸着塔内を減圧
排気することにより、水蒸気の導入で脱着した溶剤を吸
着塔内から排出する。従って、吸着塔内から排出されて
きた溶剤は、この減圧排気により吸引された吸着塔内の
水蒸気、又は減圧排気工程で吸着塔内に極めて少量導入
されるキャリアガスにより、キャリアされており、従来
の蒸気再生式にくらべて、排出されてくる水蒸気の量は
少ない。このため、排水処理容易である。また、水蒸気
による溶剤の加水分解も抑制されると共に、溶剤中の水
溶性安定材が排水中に溶出する量も極めて少ない。しか
も、水蒸気により溶剤を脱着しているので、その脱着効
率が高い。また、溶剤を運ぶキャリアガス中の水蒸気比
率も高いため、従来のドライ再生式にくらべて、凝縮効
率も高い。According to the present invention, in the step of regenerating the adsorbent (that is, desorbing the solvent), the inside of the adsorption tower is evacuated to a reduced pressure, and the reduced pressure evacuation is stopped or continued under the reduced pressure evacuation. A small amount of water vapor is introduced into the tower. Since water vapor heats the adsorbent in a short time, a small amount of water vapor may be introduced. Then, after the introduction of water vapor is stopped, the inside of the adsorption tower is further evacuated under reduced pressure to discharge the solvent desorbed by the introduction of water vapor from the inside of the adsorption tower. Therefore, the solvent discharged from the adsorption tower is carried by the water vapor in the adsorption tower sucked by the reduced pressure exhaust, or by the carrier gas introduced into the adsorption tower in a very small amount in the reduced pressure exhaust step, which is conventionally used. Compared to the steam regeneration type, the amount of water vapor discharged is smaller. Therefore, wastewater treatment is easy. Further, hydrolysis of the solvent by water vapor is suppressed, and the amount of the water-soluble stabilizer in the solvent eluted into the waste water is extremely small. Moreover, since the solvent is desorbed by the steam, the desorption efficiency is high. Further, since the ratio of water vapor in the carrier gas that carries the solvent is high, the condensation efficiency is higher than that of the conventional dry regeneration type.
【００１２】なお、脱着工程の時間を短くすることによ
り溶剤の加水分解を減少させることができるため、吸着
材としては、ペレット活性炭よりも、繊維状活性炭フェ
ルト及びハニカム活性炭を使用することが好ましい。Since the hydrolysis of the solvent can be reduced by shortening the time of the desorption process, it is preferable to use fibrous activated carbon felt and honeycomb activated carbon as the adsorbent rather than the pellet activated carbon.
【００１３】[0013]
【実施例】以下、本発明の実施例について添付の図面を
参照して具体的に説明する。Embodiments of the present invention will be specifically described below with reference to the accompanying drawings.
【００１４】図１は本発明の実施例に係る溶剤回収装置
を示すブロック図である。吸着塔１，２内には、吸着材
としてのハニカム状又は繊維状の活性炭（図示せず）が
充填されており、その一方のガス入力端は、配管１０
ａ，１０ｂ及びこれらの合流配管１０を介して、半導体
製造設備などの溶剤含有ガス排出部に連結されている。
配管１０には、ブロア３が介装されていて、このブロア
３により、溶剤含有ガスが吸着塔１，２内に供給される
ようになっている。また、吸着塔１，２の他方のガス入
力端には、水蒸気の発生源に接続された配管１５から分
岐した分岐配管１５ａ，１５ｂが接続されている。更
に、吸着塔１，２の他方のガス入力端には、配管１１
（又は１１ａ，１１ｂ）に接続された配管１２ａ，１２
ｂが接続されており、これにより、配管１１内の清浄ガ
スが吸着塔１，２内に導入されるようになっている。FIG. 1 is a block diagram showing a solvent recovery apparatus according to an embodiment of the present invention. The adsorption towers 1 and 2 are filled with honeycomb-shaped or fibrous activated carbon (not shown) as an adsorbent, and one gas input end of the activated carbon is connected to the pipe 10
It is connected to a solvent-containing gas discharge part such as a semiconductor manufacturing facility via a and 10b and a merging pipe 10 thereof.
A blower 3 is interposed in the pipe 10, and the solvent-containing gas is supplied into the adsorption towers 1 and 2 by the blower 3. Further, branch pipes 15a and 15b branched from the pipe 15 connected to the water vapor generation source are connected to the other gas input ends of the adsorption towers 1 and 2. Further, a pipe 11 is provided at the other gas input end of the adsorption towers 1 and 2.
(Or 11a, 11b) connected to the pipe 12a, 12
b is connected, so that the clean gas in the pipe 11 is introduced into the adsorption towers 1 and 2.
【００１５】一方、前記一方のガス入力端に対応するガ
ス排出端には、配管１１ａ，１１ｂ及びその合流配管１
１が接続されており、この配管１１を介して清浄ガスが
排出される。また、前記他方のガス入力端に対応するガ
ス排出端には、配管１３ａ，１３ｂが接続されており、
更にその合流配管１３が冷却凝縮器５に接続されてい
る。そして、この配管１３には、真空ポンプ４が介装さ
れており、このポンプ４により、吸着塔１，２内の空気
が吸引されて、冷却凝縮器５に導入されるようになって
いる。On the other hand, at the gas discharge end corresponding to the one gas input end, the pipes 11a and 11b and the merging pipe 1 thereof are provided.
1 is connected, and the clean gas is discharged through this pipe 11. Further, pipes 13a and 13b are connected to a gas discharge end corresponding to the other gas input end,
Further, the merging pipe 13 is connected to the cooling condenser 5. A vacuum pump 4 is interposed in the pipe 13, and the air in the adsorption towers 1 and 2 is sucked by the pump 4 and introduced into the cooling condenser 5.
【００１６】配管１０ａ，１０ｂには、夫々バルブ２０
ａ，２０ｂが介装されていて、その開閉により吸着塔
１，２内への溶剤含有ガスの導入を制御する。また、配
管１１ａ，１１ｂにもバルブ２１ａ，２１ｂが介装され
ていて、清浄ガスの排出を制御するようになっている。
更に、配管１３ａ，１３ｂ、配管１２ａ，１２ｂ及び配
管１５ａ，１５ｂには夫々バルブ２３ａ，２３ｂ、バル
ブ２２ａ，２２ｂ及びバルブ２４ａ，２４ｂが介装され
ており、吸着塔１，２からの排気及び水蒸気の導入を制
御するようになっている。A valve 20 is provided in each of the pipes 10a and 10b.
a and 20b are interposed, and opening and closing thereof control the introduction of the solvent-containing gas into the adsorption towers 1 and 2. Valves 21a and 21b are also provided in the pipes 11a and 11b to control the discharge of clean gas.
Further, the pipes 13a and 13b, the pipes 12a and 12b, and the pipes 15a and 15b are provided with valves 23a and 23b, valves 22a and 22b, and valves 24a and 24b, respectively. Is designed to control the introduction of.
【００１７】冷却凝縮器５にて凝縮した液体溶剤はタン
ク６内に集められる。また、凝縮せずに残存する未凝縮
ガスは、配管１４を介して配管１０に返戻され、再度吸
着塔１，２による吸着処理を受ける。The liquid solvent condensed in the cooling condenser 5 is collected in the tank 6. Further, the uncondensed gas remaining without being condensed is returned to the pipe 10 through the pipe 14 and is again subjected to the adsorption treatment by the adsorption towers 1 and 2.
【００１８】次に、このように構成された溶剤回収装置
の動作について説明する。先ず、吸着塔１が吸着工程、
吸着塔２が脱着工程を実施しているものとする。バルブ
２０ａ，２１ａ，２３ｂは開、バルブ２０ｂ，２１ｂ，
２３ａ，２２ａ，２２ｂ，２４ａは閉である。そうする
と、溶剤含有ガスはブロア３に吸引されて吸着塔１内に
導入され、吸着塔１内を通流する。この間に、含有溶剤
が吸着塔１内の吸着材に吸着され、溶剤が除去されて清
浄化されたガスが吸着塔１から排出される。この清浄ガ
スは配管１１ａ，１１を介して大気中に放出される。一
方、吸着塔２内の吸着材は従前の吸着工程で溶剤を吸着
しており、真空ポンプ４により排気されてその雰囲気は
減圧状態にある。そして、吸着塔２内が所定の高真空度
に到達した後、バルブ２３ｂを閉にし吸着塔２内の真空
排気を停止した後、バルブ２４ｂを開にして、吸着塔２
内に少量の水蒸気を導入する。これにより、吸着塔２内
の吸着材が水蒸気により加熱され、溶剤を脱着（離脱）
する。その後、バルブ２４ｂを閉にし、バルブ２３ｂを
開にすると共に、バルブ２２ｂを所定の開度で開にす
る。これにより、吸着塔２内を再度ポンプ４により吸引
排気すると共に、配管１２ｂを介して清浄ガスをキャリ
アガスとして若干量吸着塔２内に導入する。これによ
り、吸着塔２内で脱着された溶剤は清浄ガスをキャリア
ガスとして吸着塔２から排出されてくる。このガスは溶
剤を高濃度で濃縮しており、冷却凝縮器５に供給されて
冷却されることにより、含有溶剤が凝縮し、液体とな
る。この液化溶剤はタンク６に集められ、未凝縮溶剤を
含有するガスは配管１４，１０，１０ａを介して吸着塔
１内に導入され、再度吸着工程を受ける。Next, the operation of the solvent recovery device thus constructed will be described. First, the adsorption tower 1 is an adsorption step,
It is assumed that the adsorption tower 2 is performing the desorption process. Valves 20a, 21a, 23b open, valves 20b, 21b,
23a, 22a, 22b and 24a are closed. Then, the solvent-containing gas is sucked by the blower 3 and introduced into the adsorption tower 1, and flows through the adsorption tower 1. During this time, the contained solvent is adsorbed by the adsorbent in the adsorption tower 1, the solvent is removed and the purified gas is discharged from the adsorption tower 1. This clean gas is released into the atmosphere through the pipes 11a and 11. On the other hand, the adsorbent in the adsorption tower 2 has adsorbed the solvent in the previous adsorption step and is evacuated by the vacuum pump 4 so that its atmosphere is in a reduced pressure state. Then, after the inside of the adsorption tower 2 reaches a predetermined high vacuum degree, the valve 23b is closed to stop the vacuum evacuation of the inside of the adsorption tower 2, and then the valve 24b is opened to open the adsorption tower 2
Introduce a small amount of water vapor. As a result, the adsorbent in the adsorption tower 2 is heated by the steam, and the solvent is desorbed (desorbed).
To do. Then, the valve 24b is closed, the valve 23b is opened, and the valve 22b is opened at a predetermined opening. As a result, the inside of the adsorption tower 2 is sucked and exhausted by the pump 4 again, and at the same time, a small amount of the clean gas is introduced into the adsorption tower 2 as the carrier gas through the pipe 12b. As a result, the solvent desorbed in the adsorption tower 2 is discharged from the adsorption tower 2 using the clean gas as a carrier gas. This gas concentrates the solvent at a high concentration and is supplied to the cooling condenser 5 to be cooled, whereby the contained solvent is condensed and becomes a liquid. The liquefied solvent is collected in the tank 6, and the gas containing the uncondensed solvent is introduced into the adsorption tower 1 through the pipes 14, 10, 10a, and undergoes the adsorption step again.
【００１９】次いで、バルブ２０ａ，２１ａ，２３ｂ，
２２ｂを閉にし、バルブ２０ｂ，２１ｂ，２３ａを開に
する。これにより、吸着塔１は脱着工程、吸着塔２は吸
着工程に移る。これにより、溶剤含有ガスは吸着塔２に
導入され、その含有溶剤が吸着塔２内の吸着材に吸着除
去される。一方、吸着塔１内は真空ポンプ４により吸引
排気される。これにより、吸着塔１内は高真空になる。
次いで、バルブ２３ａを閉にし、バルブ２４ａを開にし
て、吸着塔１内に少量の水蒸気を導入する。これによ
り、吸着材が加熱されて溶剤を脱着する。その後、バル
ブ２４ａを閉にし、バルブ２３ａを開、バルブ２２ａを
所定の開度に設定する。これにより、吸着塔１内にキャ
リアガスが少量導入されると共に、吸着塔１内の脱着さ
れた溶剤がこのキャリアガスにキャリアされ、ポンプ４
により吸引されて吸着塔１から排出される。この高濃度
溶剤含有ガスは冷却凝縮器５により冷却されて溶剤が凝
縮する。これにより、溶剤が液体として回収される。こ
のようにして、吸着塔１と吸着塔２にて、吸着工程と脱
着工程とを交互に繰り返すことにより、溶剤含有ガスを
連続的に回収処理することができる。Next, the valves 20a, 21a, 23b,
22b is closed and valves 20b, 21b and 23a are opened. As a result, the adsorption tower 1 moves to the desorption step and the adsorption tower 2 moves to the adsorption step. As a result, the solvent-containing gas is introduced into the adsorption tower 2, and the contained solvent is adsorbed and removed by the adsorbent in the adsorption tower 2. On the other hand, the inside of the adsorption tower 1 is sucked and exhausted by the vacuum pump 4. As a result, the inside of the adsorption tower 1 becomes a high vacuum.
Next, the valve 23a is closed and the valve 24a is opened to introduce a small amount of water vapor into the adsorption tower 1. As a result, the adsorbent is heated to desorb the solvent. Then, the valve 24a is closed, the valve 23a is opened, and the valve 22a is set to a predetermined opening. As a result, a small amount of carrier gas is introduced into the adsorption tower 1, and the desorbed solvent in the adsorption tower 1 is carried by this carrier gas and the pump 4
And is discharged from the adsorption tower 1. This high-concentration solvent-containing gas is cooled by the cooling condenser 5 and the solvent is condensed. As a result, the solvent is recovered as a liquid. In this manner, the solvent-containing gas can be continuously recovered by repeating the adsorption step and the desorption step in the adsorption tower 1 and the adsorption tower 2 alternately.
【００２０】本実施例においては、溶剤の脱着工程、即
ち吸着材の再生工程において、少量の水蒸気と吸着塔内
の真空排気とを併用するから、水蒸気により高効率で吸
着材を加熱し、溶剤を速やかに脱着すると共に、この脱
着した溶剤を吸着塔内に存在する水蒸気及び減圧排気に
よる少量の清浄ガスをキャリアガスとして吸着塔から排
出する。このため、排水量は微量であり、排水処理は容
易であると共に、水蒸気による溶剤の加水分解及び水溶
性安定材の溶解等の種々の不都合を回避することができ
る。In the present embodiment, since a small amount of water vapor and vacuum exhaust in the adsorption tower are used together in the solvent desorption process, that is, the adsorbent regeneration process, the adsorbent is heated by the water vapor with high efficiency, Is rapidly desorbed, and the desorbed solvent is discharged from the adsorption tower as water vapor existing in the adsorption tower and a small amount of clean gas generated by decompression exhaust as a carrier gas. Therefore, the amount of wastewater is very small, the wastewater treatment is easy, and various inconveniences such as hydrolysis of the solvent by steam and dissolution of the water-soluble stabilizer can be avoided.
【００２１】なお、溶剤の回収処理が連続的でなくても
良い場合には、吸着塔を複数設ける必要はなく、１基の
吸着塔で足りる。また、脱着工程において、水蒸気の導
入は、真空ポンプ４による吸着塔内部の排気と同時に並
行して行っても良い。更に、吸着塔からの冷却ガス排気
用の配管を設け、水蒸気の導入による脱着工程の終了
後、バルブ２２ａ又は２２ｂを全開にし、吸着塔１又は
２内に清浄ガスを比較的大量に通流させ、前記冷却ガス
排気用配管を介してこれを排出することにより、吸着塔
１，２内の水蒸気により加熱された活性炭吸着材を冷却
することとしても良い。これにより、次順の吸着工程に
おける吸着効率の向上を図ることができる。また、減圧
脱着後、吸着塔内を次工程のための常圧にするために
は、別途大気解放弁等を設けることもできる。If the solvent recovery process does not have to be continuous, it is not necessary to provide a plurality of adsorption towers, and one adsorption tower is sufficient. In addition, in the desorption process, the introduction of water vapor may be performed in parallel with the evacuation of the inside of the adsorption tower by the vacuum pump 4. Further, a pipe for exhausting the cooling gas from the adsorption tower is provided, and after the desorption process by the introduction of water vapor is completed, the valve 22a or 22b is fully opened to allow a relatively large amount of clean gas to flow into the adsorption tower 1 or 2. The activated carbon adsorbent heated by the water vapor in the adsorption towers 1 and 2 may be cooled by discharging it through the cooling gas exhaust pipe. This can improve the adsorption efficiency in the next adsorption step. Further, after desorption under reduced pressure, an atmospheric release valve or the like can be separately provided in order to bring the inside of the adsorption column to a normal pressure for the next step.
【００２２】[0022]
【発明の効果】以上詳述したように、本発明によれば、
吸着材の再生工程、即ち溶剤の脱着工程において、水蒸
気の少量導入と、減圧排気とを併用するから、溶剤を高
効率で脱着することができると共に、多量の水蒸気を使
用することにともなう排水処理の問題並びに溶剤の加水
分解及び安定材の溶出等の不都合を解消することができ
る。従って、本発明は、従来の蒸気再生式及びドライ再
生式の双方の欠点を解消し、双方の利点を兼備したもの
であり、極めて優れた効果をそうする。As described in detail above, according to the present invention,
In the adsorbent regeneration process, that is, in the solvent desorption process, a small amount of water vapor is introduced together with decompression exhaust, so that the solvent can be desorbed with high efficiency, and wastewater treatment is accompanied by the use of a large amount of water vapor. And the disadvantages such as hydrolysis of the solvent and elution of the stabilizer can be solved. Therefore, the present invention eliminates the drawbacks of both the conventional steam regeneration type and the dry regeneration type, and has the advantages of both, and achieves an extremely excellent effect.
【図１】本発明の実施例に係る溶剤回収装置を示すブロ
ック図である。FIG. 1 is a block diagram showing a solvent recovery device according to an embodiment of the present invention.
１，２；吸着塔 ４；真空ポンプ ５；冷却凝縮器 ６；溶剤タンク 1, 2; adsorption tower 4; vacuum pump 5; cooling condenser 6; solvent tank
───────────────────────────────────────────────────── フロントページの続き (72)発明者 高原 宏之 神奈川県藤沢市宮前字裏河内100−１ 株 式会社神戸製鋼所藤沢事業所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroyuki Takahara 100-1 Urakawachi, Miyamae, Fujisawa City, Kanagawa Stock Company Fuji Steel Works, Fujisawa Works
Claims (4)
剤含有空気を通流させて前記溶剤吸着材に溶剤を吸着さ
せる吸着工程と、前記吸着塔内を減圧排気し、次いでこ
の減圧排気を停止し又は継続した状態で前記吸着塔内に
水蒸気を導入した後、この水蒸気の導入を停止して前記
吸着塔内を減圧排気することにより溶剤を脱着する脱着
工程とを、交互に繰り返して行うことを特徴とする溶剤
回収方法。1. An adsorption step of allowing solvent-containing air to flow into an adsorption tower containing a solvent adsorbent to adsorb the solvent to the solvent adsorbent, and decompressing the inside of the adsorption tower, and then depressurizing the exhaust. After introducing water vapor into the adsorption tower in the state of stopping or continuing, desorption step of desorbing the solvent by stopping the introduction of this water vapor and depressurizing the inside of the adsorption tower, alternately repeated. A method for recovering a solvent, which is characterized by carrying out.
し、溶剤含有空気を通流させて前記溶剤吸着材に溶剤を
吸着させる吸着工程と、前記吸着塔内を減圧排気し、次
いでこの減圧排気を停止し又は継続した状態で前記吸着
塔内に水蒸気を導入した後、この水蒸気の導入を停止し
て前記吸着塔内を減圧排気することにより溶剤を脱着す
る脱着工程とを、各吸着塔について選択的に且つ交互に
繰り返して行うことを特徴とする溶剤回収方法。2. An adsorption step in which solvent-containing air is passed through a plurality of adsorption towers containing a solvent adsorbent to adsorb the solvent on the solvent adsorbent, and the inside of the adsorption tower is evacuated to a reduced pressure. After introducing steam into the adsorption tower in a state of stopping or continuing the reduced pressure exhaust, desorption step of desorbing the solvent by stopping the introduction of this steam and exhausting the inside of the adsorption tower under reduced pressure, each adsorption A method for recovering a solvent, characterized in that the column is selectively and alternately repeated.
気を通流させて前記吸着材を乾燥すると共に冷却する乾
燥冷却工程を有し、前記吸着工程と、前記脱着工程及び
乾燥冷却工程とを各吸着塔について選択的に且つ交互に
繰り返して行うことを特徴とする請求項２に記載の溶剤
回収方法。3. After the desorption step, there is a drying and cooling step of passing air through the adsorption tower to dry and cool the adsorbent, and the adsorption step, the desorption step and the dry cooling step. The method for recovering a solvent according to claim 2, wherein the steps of and are repeated selectively and alternately for each adsorption tower.
この吸着塔に溶剤含有空気を選択的に且つ交互に通流さ
せるガス導入手段と、前記吸着塔内を選択的に且つ交互
に減圧排気する排気手段と、前記吸着塔内に水蒸気を選
択的に導入する水蒸気導入手段と、前記吸着塔から排気
された高濃度溶剤含有ガスから溶剤を冷却凝縮させて液
体として回収する冷却凝縮手段とを有することを特徴と
する溶剤回収装置。4. A plurality of adsorption towers containing a solvent adsorbent,
Gas introduction means for selectively and alternately passing solvent-containing air through the adsorption tower, exhaust means for selectively and alternately evacuating the inside of the adsorption tower, and water vapor in the adsorption tower selectively A solvent recovery apparatus comprising: a steam introducing unit for introducing the solvent; and a cooling and condensing unit for cooling and condensing the solvent from the high-concentration solvent-containing gas exhausted from the adsorption tower to recover it as a liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3276977A JPH0584417A (en) | 1991-09-26 | 1991-09-26 | Method and equipment for recovering solvent |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3276977A JPH0584417A (en) | 1991-09-26 | 1991-09-26 | Method and equipment for recovering solvent |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0584417A true JPH0584417A (en) | 1993-04-06 |
Family
ID=17577052
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3276977A Pending JPH0584417A (en) | 1991-09-26 | 1991-09-26 | Method and equipment for recovering solvent |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0584417A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004105807A (en) * | 2002-09-13 | 2004-04-08 | Toyobo Co Ltd | Equipment for treating organic solvent |
| JP2019529377A (en) * | 2016-09-01 | 2019-10-17 | コベストロ、ドイチュラント、アクチエンゲゼルシャフトＣｏｖｅｓｔｒｏ Ｄｅｕｔｓｃｈｌａｎｄ Ａｇ | Isocyanate production method |
| JP2020032381A (en) * | 2018-08-31 | 2020-03-05 | ウシオ電機株式会社 | Gas treatment apparatus, gas treatment method |
| KR102092541B1 (en) * | 2019-04-25 | 2020-03-24 | 주식회사 윈텍글로비스 | Regeneration equipment of activted carbon |
| CN114867542A (en) * | 2019-12-25 | 2022-08-05 | 东洋纺株式会社 | Organic solvent recovery system |
| CN114931838A (en) * | 2022-03-29 | 2022-08-23 | 扬州海通电子科技有限公司 | Adsorption condensation recovery system and method |
| CN115537227A (en) * | 2022-10-21 | 2022-12-30 | 中国石油化工股份有限公司 | Adsorption tower and method for removing oxygen-containing compounds in isoparaffin solvent |
-
1991
- 1991-09-26 JP JP3276977A patent/JPH0584417A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004105807A (en) * | 2002-09-13 | 2004-04-08 | Toyobo Co Ltd | Equipment for treating organic solvent |
| JP2019529377A (en) * | 2016-09-01 | 2019-10-17 | コベストロ、ドイチュラント、アクチエンゲゼルシャフトＣｏｖｅｓｔｒｏ Ｄｅｕｔｓｃｈｌａｎｄ Ａｇ | Isocyanate production method |
| JP2020032381A (en) * | 2018-08-31 | 2020-03-05 | ウシオ電機株式会社 | Gas treatment apparatus, gas treatment method |
| KR102092541B1 (en) * | 2019-04-25 | 2020-03-24 | 주식회사 윈텍글로비스 | Regeneration equipment of activted carbon |
| CN114867542A (en) * | 2019-12-25 | 2022-08-05 | 东洋纺株式会社 | Organic solvent recovery system |
| CN114867542B (en) * | 2019-12-25 | 2024-05-17 | 东洋纺Mc株式会社 | Organic solvent recovery system |
| CN114931838A (en) * | 2022-03-29 | 2022-08-23 | 扬州海通电子科技有限公司 | Adsorption condensation recovery system and method |
| CN115537227A (en) * | 2022-10-21 | 2022-12-30 | 中国石油化工股份有限公司 | Adsorption tower and method for removing oxygen-containing compounds in isoparaffin solvent |
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