JP2016077969A - Gas treatment device and function regeneration method of gas treatment device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a technique for regenerating function of a rotor while avoiding the deterioration of the function of the rotor in itself.SOLUTION: A gas treatment device includes: a freely rotatable rotor which forms a first ventilation zone for constituting a part of a first ventilation path and adsorbing a substance contained in passage gas and a second ventilation zone for constituting a part of a second ventilation path and regenerating a function of the first ventilation zone and is arranged over the first ventilation path and the second ventilation path; a supply part for supplying a predetermined gas which is thermally decomposed to generate active species having oxidizing power to the second ventilation path; and a heating part which is disposed on the upstream side of the second ventilation zone of the second ventilation path, heats the predetermined gas and generates the active species. Further, in the second ventilation zone, the substance adsorbed on the rotor is decomposed by the active species.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a gas processing apparatus and a function regeneration method for the gas processing apparatus.

  There is an adsorption device using a honeycomb type volatile organic compounds (VOC) concentration rotor. Such an adsorbing apparatus may perform a VOC adsorption process by passing a gas to be processed through the rotor and a process for regenerating the function of the rotor.

  Patent Document 1 proposes an exhaust gas treatment apparatus that includes an ozone gas supply unit and a filter in an exhaust gas flow path. This exhaust gas processing apparatus decomposes ozone gas supplied from an ozone gas supply unit to generate active species, and uses the active species to decompose organic substances adsorbed on an adsorption unit (filter). There is also a description that an ozone decomposition catalyst is supported on a porous material which is a filter substrate.

  Patent Document 2 proposes a rotor-type concentrator system in which a high-temperature airflow (typically 600 ° F. to 1000 ° F. (about 316 ° C. to 538 ° C.)) is introduced into the regeneration section. Patent Document 3 proposes an organic solvent vapor treatment apparatus in which 140 ° C. desorption air flows to the first desorption zone and 220 ° C. desorption air flows to the second desorption zone.

JP 2014-117648 A Special Table 2010-538826 JP 2000-189750 A

  There is an adsorption device using a honeycomb type VOC concentration rotor. The rotor of such an adsorption device is provided with a plurality of zones having different functions such as an adsorption zone for adsorbing VOC and a regeneration zone (desorption zone) for regenerating the function of the adsorption zone. In the regeneration zone, for example, by passing air heated to about 140 ° C. with a heater, the VOC adsorbed by the rotor is desorbed, and the VOC adsorption function of the rotor is regenerated.

  Incidentally, the gas to be treated (also referred to as “gas to be treated”) may contain impurities other than VOC, such as high boiling point organic substances. In particular, an organic substance having a boiling point of 200 ° C. or higher (also referred to as “high-boiling organic substance”) is difficult to desorb by the above-described regeneration treatment at about 140 ° C. When such high boiling point organic substances are accumulated in the rotor, there is a problem that the VOC adsorption / desorption function of the rotor is lowered.

  Further, the adsorption device is provided with a flow path for allowing gas to pass through the processing zone, the regeneration zone, etc. of the rotor, and gas flows out from the outer periphery of the flow path at the boundary between the rotor and the surrounding chamber portion. Packing and a sealing material for suppressing this are provided. For example, if the temperature of the regeneration zone is increased to such an extent that the above-described high boiling point organic substances can be desorbed, there arises a problem that the deterioration of the packing and the sealing material is accelerated.

In addition, when ozone gas is decomposed using an ozone decomposition catalyst in order to decompose high-boiling organic substances by reacting with active species, if the ozone decomposition catalyst is supported on the rotor, the original VOC adsorption / desorption function of the rotor is achieved. The problem of degradation occurs.

  In view of such a problem, an object of the present invention is to provide a technique for regenerating the function of a rotor while avoiding a decrease in the original function of the rotor.

  A gas processing apparatus according to one aspect of the present invention constitutes a part of a first ventilation path, and constitutes a first ventilation zone that adsorbs a substance contained in a passing gas and a part of a second ventilation path. And a second ventilation zone that regenerates the function of the first ventilation zone, a rotatable rotor disposed across the first ventilation path and the second ventilation path, and thermal decomposition and oxidation power A supply unit that supplies a predetermined gas that generates a certain active species to the second ventilation path and an upstream side of the second ventilation zone in the second ventilation path, and heats the predetermined gas to activate the active species. The heating part which produces | generates. In the second ventilation zone, the substance adsorbed on the rotor is decomposed by the active species.

  In this way, a substance (particularly, a high boiling point organic substance) adsorbed on the rotor can be decomposed. Further, the generation of active species can be promoted by heating, and for example, it is not necessary to coat the rotor with a catalyst or the like, so that the original adsorption function of the rotor is not lowered. Therefore, it is possible to provide a technique for regenerating the function of the rotor while avoiding the deterioration of the original function of the rotor.

  A gas processing apparatus according to another aspect of the present invention includes a first ventilation zone that forms part of a first ventilation path and adsorbs a substance contained in a passing gas, and a part of a second ventilation path. Forming a second ventilation zone that regenerates the function of the first ventilation zone and a third ventilation zone that constitutes a part of the third ventilation path and regenerates the function of the first ventilation zone; , A rotatable rotor disposed across the second ventilation path and the third ventilation path, and a predetermined gas that thermally decomposes and generates active species having oxidizing power in the second ventilation path And a heating unit that is provided on the upstream side of the third ventilation zone in the third ventilation path and heats the gas flowing to the third ventilation zone. A portion of the rotor corresponding to the third ventilation zone that has been heated by the passage of the heated gas moves to a position corresponding to the second ventilation zone due to the rotation of the rotor. The active gas is heated to generate active species, and the substance adsorbed on the rotor is decomposed by the active species.

  Even with such a configuration, the substance adsorbed on the rotor can be decomposed. Further, the generation of active species can be promoted by heating, and for example, it is not necessary to coat the rotor with a catalyst or the like, so that the original adsorption function of the rotor is not lowered. Therefore, it is possible to provide a technique for regenerating the function of the rotor while avoiding the deterioration of the original function of the rotor. The first ventilation zone, the second ventilation zone, and the third ventilation zone correspond to an adsorption zone 21, a second desorption zone 222, and a first desorption zone 221 of Embodiment 3 described later, respectively.

  The predetermined gas may be ozone. The substance adsorbed on the rotor can be directly decomposed by ozone, or can be decomposed by ozone decomposition products. Moreover, the direct decomposition reaction by ozone can be accelerated | stimulated by heating, or the production | generation of an ozone decomposition product can be accelerated | stimulated.

  Further, the predetermined gas may be heated to 80 to 200 ° C. As described above, the direct decomposition reaction by ozone can be promoted by heating, or the production of ozone decomposition products can be promoted. Moreover, deterioration of the structural member of a gas processing apparatus can be avoided by making the upper limit of temperature into this grade.

  Moreover, the nitrogen component may be 90% or more of the component of the gas which flows through the 2nd ventilation path containing predetermined gas. If it is such a range, it can avoid becoming easy to react with oxygen by the raise in the air | atmosphere density | concentration of organic substance for safety.

  In addition, the first ventilation mode of the rotor adsorbs the substance contained in the passing gas, the supply unit supplies the predetermined gas to the second ventilation path, and the heating unit includes the predetermined operation. The gas may be heated to generate active species, and in the second ventilation zone, a control unit that switches between a second operation mode in which the substance adsorbed on the rotor is decomposed by the active species may be provided. If it does in this way, in the 2nd operation form, ozone can be used efficiently for decomposition of a high boiling point organic substance, and when a fluid processing device has a sealing material and packing, these are protected from degradation by ozone. Can do.

  The supply unit may supply 1 g / h to 1000 g / h of ozone. In a practically sized rotor, an ozone amount in such a range is suitable.

  Moreover, it may further include a flow rate adjusting unit for controlling the gas flow rate, and the flow rate adjusting unit may set the surface wind speed of the gas passing through the second ventilation zone to 0.3 m / s or more. In this way, it is possible to avoid the occurrence of unevenness in the regeneration of the rotor.

  The predetermined gas may be hydrogen peroxide or peracetic acid. Even in the case of such a gas, it is possible to generate OH radicals and O radicals and decompose the substance adsorbed on the rotor.

  In addition, a concentration measuring unit that is provided downstream of the second ventilation zone and measures the ozone concentration is further provided, and it is determined whether the function of the first ventilation zone has been regenerated based on the ozone concentration measured by the concentration measuring unit. May be. When the substance adsorbed on the rotor decreases, some of the O radicals that are not consumed react with oxygen molecules and return to ozone again. Moreover, since the direct consumption of ozone is reduced, the ozone concentration is increased. Therefore, it can be determined whether the function of the first ventilation zone has been regenerated since the decrease in the substance adsorbed on the rotor due to the increase in the ozone concentration is known. Such a determination can appropriately complete the processing.

  In addition, the content of the means for solving the said subject can be combined as much as possible within the range which does not deviate from the subject and technical idea of this invention. Moreover, you may make it provide the content of the means for solving a subject as a function reproduction | regeneration method in a gas processing apparatus.

  ADVANTAGE OF THE INVENTION According to this invention, the technique for reproducing the function of a rotor can be provided, avoiding the fall of the original function of a rotor.

FIG. 1 is a schematic perspective view showing a rotor cassette. FIG. 2 is a schematic front view showing the rotor cassette. FIG. 3 is a system configuration diagram of a gas processing apparatus showing an operation during normal operation according to the first embodiment. FIG. 4 is a system configuration diagram of a gas processing apparatus showing an operation at the time of decomposition processing of a high boiling point organic substance according to the first embodiment. FIG. 5 is a system configuration diagram of a gas processing apparatus showing an operation at the time of decomposition processing of high boiling point organic substances according to the second embodiment. FIG. 6 is a schematic front view showing a rotor cassette according to the third embodiment. FIG. 7 is a system configuration diagram of the gas processing apparatus showing operations during normal operation according to the third embodiment. FIG. 8 is a system configuration diagram of a gas processing apparatus showing an operation at the time of decomposition processing of high boiling point organic substances according to the third embodiment.

  Next, embodiments of the present invention will be described with reference to the drawings. The embodiment described below is merely an example, and the present invention is not limited to the embodiment described below.

<First Embodiment>
FIG. 1 is a schematic perspective view showing an outline of a rotor cassette provided in the adsorption device (also referred to as “gas processing device”) according to the first embodiment. The gas processing apparatus is an apparatus intended to remove VOC from a gas containing a volatile organic compound (VOC), for example. A rotor cassette 1 shown in FIG. 1 is a module used in a gas processing apparatus, and includes a honeycomb-type VOC concentration rotor (also simply referred to as “rotor”) 2.

  The rotor 2 contains a predetermined adsorbent or is coated with a predetermined adsorbent, and adsorbs VOC. The rotor 2 is rotatable by a drive source (not shown) such as a gear motor connected by a power transmission mechanism (not shown) such as a belt or a chain. Further, for example, a duct (not shown) is connected to the rotor cassette 1 in a ventilation direction indicated by a broken line. A chamber between the rotor 2 and the duct in the rotor cassette 1 is partitioned by a wall-like member, and a ventilation path is formed in the rotor cassette 1 and the rotor 2 substantially in parallel with the rotation axis. In FIG. 1, a wall-shaped member is indicated by a thin line. As will be described later, the rotor 2 is repeatedly used for VOC adsorption (ie, VOC removal processing) and VOC desorption (ie, adsorbent regeneration processing).

  The gas to be processed by the gas processing apparatus is, for example, exhaust generated in the process of drying the solvent or air to be dehumidified in processes in the fields of industrial cleaning, printing, adhesion, and the like. Here, the above-described exhaust and air contain so-called high boiling point organic substances. The high boiling point organic substance is a generic term for high molecular organic substances having a boiling point of about 200 ° C. or higher. Such a high-boiling organic substance is released into the air together with VOC, for example, in the step of drying the solvent. The high-boiling organic substances are usually removed using activated carbon or the like in the pretreatment for VOC removal. However, some of the high boiling point organic substances reach the rotor cassette 1 where VOC removal is performed and are adsorbed by the rotor 2.

On the other hand, the VOC processed by the gas processing apparatus is an organic compound having a boiling point of about 150 ° C. or lower, such as ethyl acetate, toluene, xylene, and the like. In the regeneration process of the rotor 2, for example, a gas heated to about 140 ° C. is passed through the rotor 2. However, in such a regeneration treatment, high boiling point organic substances cannot be completely removed, and some high boiling point organic substances are accumulated in the rotor 2. The accumulation of high-boiling organic substances greatly affects the life of the rotor. Specifically, when a high boiling point organic substance adheres to the rotor 2, the pores of the rotor 2 are blocked, and the VOC adsorption function and the desorption function (also referred to as “VOC removal performance”) of the rotor 2 are reduced. Will shorten the lifespan. That is, if the designed predetermined VOC removal performance cannot be exhibited, it is determined that the rotor 2 has reached the end of its life and needs to be replaced. The interval of exchange varies depending on conditions such as the quality and amount of high-boiling organic substances contained in the gas to be treated and the amount of high-boiling organic substances removed in the pretreatment, but is generally about several years to less than 10 years. In replacement, in addition to the cost of the rotor 2 itself, costs are also incurred by stopping the equipment until the replacement work is completed. Therefore, it is naturally desirable that the life of the rotor 2 be long. Therefore, in the present embodiment, in order to regenerate the rotor 2, not only desorption of VOC but also decomposition of high boiling point organic substances is performed. The decomposition of the high-boiling organic substances may be performed while the gas processing apparatus stops the VOC removal (also referred to as “normal operation” or “first operation mode” for convenience). That is, the gas flowing through the rotor 2 and its flow path are switched between the normal operation and the high-boiling point organic substance decomposition process (also referred to as “second operation mode” for convenience). When ozone is added in parallel with normal operation, ozone is also consumed in the decomposition of VOC. If regeneration processing is performed while normal operation is stopped, ozone can be efficiently decomposed into high-boiling organic substances. Can be used. Further, from the viewpoint of protecting the sealing material and packing from deterioration due to ozone, it is preferable to perform the regeneration process while the normal operation is stopped. However, the reproduction process may be performed in parallel with the VOC process.

  FIG. 2 is a front view of the rotor cassette 1. In addition, the front view here shall mean drawing when the rotor 2 is seen from one side of the ventilation direction (rotation axis direction). The rotor 2 has a substantially circular shape when viewed from the front, and is divided into a plurality of fan-shaped ventilation zones. Specifically, the rotor 2 according to the first embodiment includes an adsorption zone 21, a desorption zone 22, and a cooling zone 23. The adsorption zone 21 is the first ventilation zone of the present invention, and VOC is adsorbed to the rotor 2 in the adsorption zone 21 during normal operation. The desorption zone 22 is the second ventilation zone of the present invention. In the desorption zone 22, the VOC is heated and desorbed from the rotor 2, and a VOC solution is generated by cooling condensation described later, and the VOC is recovered. Further, in the cooling zone 23, the rotor 2 heated in the desorption zone 22 is cooled. In addition, the cross-sectional area shape of each ventilation zone in front view is an example, and is not limited to the ratio shown in FIG.

  As described above, the plurality of ventilation zones are formed by dividing a chamber between the rotor 2 and a duct (not shown) with a wall-shaped member, and forming a plurality of ventilation paths that pass through the rotor 2. Formed. In other words, the rotor 2 is disposed across a plurality of air passages. In addition, in order to suppress the mixing of the gas which flows through each ventilation path, the above-mentioned wall-shaped member is provided with an inter-zone sealant (for example, made of fluorine rubber or the like) at its end close to the surface of the rotor 2. Not shown). Similarly, an outer peripheral sealing material (not shown) is provided along the outer periphery of the rotor 2, for example, at the end of the wall-shaped member in order to suppress mixing of the gas flowing through the air passage and the outside air.

  In FIG. 1, a broken arrow indicates a ventilation path. The ventilation paths that pass through the adsorption zone 21, the desorption zone 22, and the cooling zone 23 are referred to as an adsorption ventilation path 31, a desorption ventilation path 32, and a cooling ventilation path 33, respectively. Each air passage is connected to the periphery of the rotor cassette 1 by a duct or the like, and gas is caused to flow therein by a flow rate adjusting means such as a fan. In addition, in the example of FIG. 1, although the direction of the gas which passes each ventilation zone of the rotor 2 is the same, it is good also considering one part as a reverse direction.

  2, when the rotor 2 rotates clockwise when viewed from the front, a part of the rotor 2 included in the adsorption zone 21 moves to a position constituting the desorption zone 22. . When the rotor 2 further rotates, the portion moves to a position constituting the cooling zone 23 and then returns to a position constituting the adsorption zone 21. As the rotor 2 rotates, the VOC adsorption and the VOC desorption are repeated for each ventilation zone. The rotational speed of the rotor 2 during normal operation is approximately 0.1 times / h to 20 times / h. Note that the rotational speed of the rotor in a general VOC process is about 8 to 20 times / h.

<Normal operation>
FIG. 3 is a system configuration diagram of the gas processing apparatus showing an operation during normal operation. In the gas processing apparatus, an adsorption air passage 31 that passes through the adsorption zone 21 of the rotor 2, a desorption air passage 32 that passes through the desorption zone 22, and a cooling air passage 33 that passes through the cooling zone 23 form two different systems. doing. For convenience, the system on the adsorption air passage 31 side is called an adsorption system, and the system on the desorption air passage 32 and the cooling air passage 33 side is also called a desorption system.

  The adsorption air passage 31 is an example of the first air passage of the present invention, and is an air passage through which a gas processed by the gas processing device flows during normal operation. That is, the gas to be processed is introduced from the upstream side of the adsorption ventilation path 31, and the processed gas that has passed through the adsorption zone 21 is discharged downstream. The gas processed by the gas processing apparatus is, for example, contaminated air used for purification, and includes not only VOC but also a small amount of high-boiling organic substances. In addition, in FIG. 3, the tip of the both ends of the adsorption | suction ventilation path 31 is abbreviate | omitting illustration.

  The desorption air passage 32 is an example of the second air passage of the present invention, and is an air passage through which a gas for regenerating the function of the rotor 2 flows during normal operation. For example, a superheating means such as steam is provided in front of the desorption zone 22, and the gas flowing through the desorption air passage 32 is heated to about 140 ° C.

  The cooling air passage 33 is an air passage through which a gas for cooling the rotor 2 heated in the desorption zone 22 flows during normal operation. A portion of the rotor 2 that has been cooled in the cooling zone 23 functions as an adsorption zone 21 when the rotor 2 rotates thereafter. The cooling air passage 33 and the cooling zone 23 may not be provided.

  The desorption air passage 32 is provided with the heating unit 4 on the upstream side of the desorption zone 22, and the temperature of the gas passing through the heating unit 4 rises to about 140 ° C., for example. And by the heated gas, VOC is desorbed in the desorption zone 22, and the concentration of air VOC in the desorption system increases. On the other hand, on the downstream side of the desorption zone 22, a condenser 51 that performs cooling and condensation for recovering the desorbed VOC is provided, and heat exchangers 52 provided on the upstream side and the downstream side of the condenser 51, respectively. And the heat exchanger 53 exchange heat. Specifically, the condenser 51 has a cooling coil through which the refrigerant passes. Further, water or the like flows between the heat exchanger 52 and the heat exchanger 53, and heat is recovered. Thus, cooling condensation is performed on the downstream side of the desorption zone 22 to generate a VOC solution, and the VOC is recovered outside the system. The other end of the heat exchanger 53 is connected to the cooling air passage 33 upstream of the cooling zone 23 of the rotor 2. The downstream side of the cooling zone 23 is connected to the heating unit 4 described above.

  Further, a nitrogen supply unit 6 such as a nitrogen gas generator is connected to the desorption system via an air supply path 34 for supplying gas, and nitrogen gas is supplied from the nitrogen supply unit 6. Note that an ozone supply unit 7 such as an ozone gas generator is connected to the gas processing device via an ozone air supply path 35, but the supply of ozone gas is stopped during normal operation. Further, an exhaust path 36 for exhausting a part of the gas is also connected to the desorption system. The exhaust passage 36 is provided with a control valve (not shown) capable of controlling the opening degree within a predetermined range, and the exhaust amount can be adjusted. Note that the exhaust passage 36 is closed during normal operation. In this closed loop system, positive pressure control is performed with respect to the outside and the adsorption side, and nitrogen gas is supplied by the amount leaked from the gap of the rotor. Further, the exhaust path 36 is provided with a concentration measuring unit 8 that is a densitometer or the like that measures the ozone concentration. In addition, the position where the air supply path 34, the ozone air supply path 35, and the exhaust path 36 are connected in the desorption system is an example, and is not limited to the example of FIG.

  Further, each air passage is provided with a flow rate adjusting means 9 such as a fan, for example, to flow the gas in the air passage in a predetermined direction. The flow rate adjusting means 9 can control the magnitude of output as well as ON and OFF. Each air passage may be provided with a temperature measuring means (not shown) such as a thermometer. In addition, the temperature measuring unit, the concentration meter 8, the flow rate adjusting unit 9, and the like may be electrically connected to a control unit (not shown) so that the control unit controls the operation of the gas processing apparatus.

<Decomposition treatment of high-boiling organic substances>
FIG. 4 is a system configuration diagram of a gas processing apparatus showing an operation at the time of decomposition processing of a high boiling point organic substance. The decomposition process of the high-boiling organic substances is performed at the timing when the gas to be processed to be processed by the gas processing apparatus is not generated at the time of replacement of consumables constituting the rotor cassette 1 such as packing or sealing material, or at night or on holidays. Shall be. The replacement of consumables is performed, for example, at intervals of 1 to 3 years.

  Since the decomposition process of the high-boiling organic substance is performed at the timing as described above, the gas flow in the adsorption system (for example, the adsorption vent 31) is stopped in FIG. On the other hand, in the desorption system, the downstream side of the desorption zone 22 and the heating unit 4 provided on the upstream side of the desorption zone 22 are connected, and the gas flows in the interior, and the downstream side of the desorption zone 22 and the desorption zone 22 An air supply path 34, a nitrogen supply section 6, and an exhaust path 36 connected to the heating section 4 provided on the upstream side are operating. That is, the gas flows only in the desorption zone 22 inside the rotor 2. Hereinafter, the operation | movement at the time of the decomposition process of a high boiling point organic substance is demonstrated, showing the value of an Example concretely.

  The rotation of the rotor 2 may be continuous rotation or intermittent rotation. In the case of continuous rotation, the same speed as in normal operation may be used, but it is desirable to change the rotation speed depending on the degree of contamination of the rotor 2. For example, when the accumulated amount of high-boiling organic substances is relatively large and the VOC adsorption performance of the rotor 2 is greatly deteriorated, it is more effective to make the rotation at a low speed of about 0.1 times / h to 1 time / h. Is. When processing is performed with a relatively long interval as in the case of replacement of consumables, it can be said that low-speed rotation is preferable. On the other hand, in the case of intermittent rotation, the high boiling point organic substance is decomposed for several tens of minutes to 2 hours and then the rotor 2 is rotated. The magnitude of the rotation is in units of a predetermined angle such as the center angle of the detachable zone 22 whose front view shape is a fan shape.

  Moreover, the heating part 4 raises the temperature of gas to about 140 degreeC similarly to the time of a normal driving | operation at the time of a decomposition process of a high boiling point organic substance. In addition, since reproduction | regeneration performance improves, so that preset temperature is high, you may make preset temperature high according to the heat resistance performance of the member which comprises a desorption system.

  An arbitrary value can be adopted as the wind speed for circulating the gas. For example, the rotor passing surface wind speed is 1.0 m / s. When the wind speed is low, the temperature distribution and the gas concentration distribution tend to be biased, and variations occur in the decomposition and desorption of high-boiling organic substances. In order to avoid this, it is preferable to set the wind speed at 0.3 m / s or more.

The nitrogen supply unit 6 supplies nitrogen gas as in normal operation. The ozone supply unit 7 supplies ozone gas continuously or intermittently via the ozone supply path 35. Note that the supply amount of nitrogen gas containing ozone and the exhaust amount are substantially the same. For example, in a rotor having a diameter of 2600 mm, when the effective ventilation area of the desorption zone is 1.5 m ² , the supply amount of nitrogen gas containing ozone is 54 m ³ / h (= 1.5 m ² × 0.01 m / s × 3600 s). / H). The same applies to the displacement. The ozone supply rate was 100 g / h. At this time, the ozone concentration is 1.9 g / m ³ (= 100 g ÷ 54 m ³ ).

In addition, the time for performing the decomposition process of the high boiling point organic substance is determined by, for example, the degree of contamination of the rotor. In this embodiment, the temperature is first raised while circulating nitrogen gas without supplying ozone, and supply of ozone is started when the temperature of the desorption system reaches 140 ° C. Further, the ozone concentration in the exhaust gas may be measured by the densitometer 8 provided in the exhaust passage 36, and the processing may be changed according to the ozone concentration. For example, when the ozone concentration in the exhaust gas exceeds 0.1 ppm, the amount of ozone supplied by the ozone supply unit 7 may be reduced until it becomes 0.1 ppm or less. Further, if not only the amount of ozone but also the amount of nitrogen gas that is a carrier gas is reduced, the running cost can be reduced. In addition, after the ozone concentration was stabilized at 0.1 ppm or less, the processing was continued, and when the ozone concentration showed an increasing tendency, it was determined that the amount of high boiling point organic substances accumulated in the rotor 2 was reduced. Therefore, the decomposition process of the high boiling point organic substance is finished.

  For example, the supply of ozone is first stopped, and the operation of the heating unit 4 is stopped when the ozone concentration in the exhaust gas falls to 0.1 ppm or less. Then, if the gas temperature in a desorption system falls to 40 degrees C or less, the ventilation of the flow volume adjustment means 9 will be stopped, and the decomposition process of a high boiling point organic substance will be complete | finished. In the case of processing performed when exchanging consumables, consumables such as packing and sealing material are exchanged to complete the operation.

  Note that the above-described process end determination is based on the following principle. That is, ozone decomposes in a shorter time as the temperature increases. The decomposed active O radicals are consumed for the decomposition reaction with the high-boiling organic substances. However, when decomposition progresses and the amount of high boiling point organic substances decreases, O radicals are not consumed quickly, and some of them react with oxygen molecules and return to ozone again. Some ozone itself is also consumed by direct reaction with high-boiling organic substances. However, if the amount of high-boiling organic substances decreases, direct consumption of ozone also decreases, and the ozone concentration increases. As described above, since the decrease in the high-boiling organic substances can be understood as the exhaust ozone concentration increases, the completion of the decomposition process can be determined.

<Action and effect>
In the decomposition process of high boiling point organic substances shown in FIG. 4, ozone decomposes high boiling point organic substances directly, or ozone decomposition products (active species such as O radicals) having high oxidative decomposition ability generated by decomposition of ozone have a high boiling point. Decompose organic matter. Here, ozone itself and ozonolysis products have a strong oxidizing power and can decompose organic substances into organic substances having lower molecular weight and lower boiling points, and further to carbon dioxide and water. Further, as a secondary effect, by decomposing ozone, the exhaust ozone treatment of the treatment exhaust becomes unnecessary.

  The decomposition rate of gaseous ozone increases with increasing temperature, increasing humidity, or increasing gas flow rate. Further, the decomposition rate of ozone can be increased using a predetermined catalyst. In the example of FIG. 4, the heating unit 4 increases the temperature of the gas containing ozone, thereby promoting the decomposition of ozone and generating an ozone decomposition product having a higher oxidative decomposition ability than ozone.

  According to this embodiment, two effects such as an effect of promoting the generation of an ozone decomposition product and an effect of promoting a reaction between the ozone decomposition product or undecomposed ozone and a high boiling organic material are obtained, and the high boiling organic material is efficiently obtained. Can be removed. Further, in this embodiment, for example, it is not necessary to coat the rotor 2 with an ozone decomposition catalyst, so that the original VOC adsorption function of the rotor 2 is not lowered. That is, it is possible to provide a technique for regenerating the function of the rotor while avoiding the deterioration of the original function of the rotor. Since the accumulation of high-boiling organic substances that affect the rotor life can be suppressed, the rotor life can be extended.

  Note that the upper limit of the ozone supply concentration may be determined from the viewpoint of preventing an abnormal temperature rise due to self-decomposition of ozone, which is an exothermic reaction, or decomposition of high-boiling organic substances. Further, from the viewpoint of shortening the processing time of the high boiling point organic matter, a lower limit of the ozone supply concentration may be set. Specifically, when high-boiling organic matter decomposition processing is performed at the timing of production facility stoppage such as nighttime or holiday when VOC processing is stopped, the ozone concentration in the supplied air supply amount (FIG. 4: Q1) is 100 ppm. It is preferable that the ozone amount (that is, the concentration × the air amount) is 1 g / h to 100 g / h. Also, when high-boiling organic substances are decomposed at the timing of replacement of consumables such as sealing materials and packing, the ozone concentration in the air supply amount is about 100 ppm to 1%, and the ozone amount is 10 g / h to 1000 g / h. Preferably there is. The ozone concentration and the ozone amount are preferable at least in the range of 700 mmφ to 3000 mmφ, which is a practical rotor size.

<Other variations>
In the example of FIG. 4, the nitrogen supply unit 6 is provided, but the gas in the processing atmosphere is not limited to nitrogen gas as long as it contains a predetermined amount of ozone. That is, the gas supplied in the decomposition process of the high boiling point organic substance may be air, nitrogen gas, or exhaust of nitrogen gas. Here, the inert gas is preferable from the viewpoint of avoiding the reaction with oxygen due to an increase in the atmospheric concentration of the organic substance. For example, a gas having a nitrogen concentration of 90% or more is preferable. In addition, as shown in FIG. 4, if the nitrogen supply part 6 which supplies nitrogen gas at the time of normal operation is used as it is also at the time of a decomposition process of a high boiling point organic substance, it is convenient because it is not necessary to provide a separate gas supply part.

  Moreover, the gas for promoting the oxidative decomposition of the high boiling point organic substance is not limited to ozone. For example, hydrogen peroxide or peracetic acid can be applied. That is, a gas that is thermally decomposed to generate an active species having an oxidizing power can be applied. Hydrogen peroxide and peracetic acid have a high boiling point and are difficult to supply at a high concentration compared to ozone. However, since these gases can be generated by heating the solution, there is an advantage that a gas supply unit can be manufactured at low cost.

  Moreover, it is preferable to use a material having high ozone resistance (that is, difficult to oxidize) for the members of the rotor cassette 1 such as packing and sealing material. For example, for high-concentration ozone, a fluorine-based resin such as polytetrafluoroethylene is preferable. For low-concentration ozone, fluorine rubber, silicon rubber, polyvinyl chloride (polyvinyl chloride) rubber, ethylene propylene rubber, and the like are also suitable in addition to fluorine-based resins.

Second Embodiment
FIG. 5 is a system configuration diagram of a gas processing apparatus showing an operation at the time of decomposition processing of high boiling point organic substances according to the second embodiment. In addition, the code | symbol corresponding to the component which is common in 1st Embodiment is attached | subjected, and it demonstrates centering on difference below.

  The gas processing apparatus of FIG. 5 differs from the first embodiment in that it includes two heating units 4. One heating unit 41 raises the temperature of the gas to about 140 ° C. by steam heating in the normal operation as in the first embodiment. The other heating unit 42 is an auxiliary heater such as an electric heater that operates during the decomposition process of the high-boiling organic substances, and raises the temperature of the gas passing through the desorption system to about 180 ° C., for example.

  In addition, from the viewpoint of the heat resistance performance of the constituent members of the rotor cassette 1, the gas temperature may be increased to about 200 ° C. When the temperature of the desorption system gas is increased, the accumulated amount of high-boiling organic substances in the desorption zone 22 is reduced. However, there is a demerit that the temperature of the gas rises so that the deterioration of the packing or the sealing material is accelerated, or the energy consumed by heating increases. Considering such disadvantages, the upper limit of the temperature of the gas raised by the heating unit 42 is preferably about 160 ° C. On the other hand, if the temperature is lowered, the regeneration capacity of the rotor is reduced, so that the amount of VOC adsorption is also reduced. Although the amount of adsorption can be increased by increasing the number of rotations of the rotor, in this case, the temperature rise and cooling must be realized more rapidly as the rotational speed increases, and the operating cost increases. The temperature (inflection point) at which the operating cost starts to increase on the low temperature side is about 80 ° C., although it varies depending on the configuration of the gas processing apparatus. From the above, the temperature of the desorption gas raised by the heating unit 42 is generally preferably 80 ° C. or higher, and more preferably 100 ° C. or higher. Note that 80 ° C. to 160 ° C. is a temperature range that can be adopted in normal VOC rotor regeneration processing. Since the present invention aims at decomposing the high boiling point organic substance by ozone rather than the direct desorption of the high boiling point organic substance, such a temperature range is suitable.

Also by the aspect shown in the second embodiment, two effects such as an effect of promoting the generation of the ozone decomposition product and an effect of promoting the reaction between the ozone decomposition product or the undecomposed ozone and the high-boiling organic substance can be obtained and efficiently. It becomes possible to remove high-boiling organic substances. That is, it is possible to provide a technique for regenerating the function of the rotor while avoiding the deterioration of the original function of the rotor.

<Third Embodiment>
FIG. 6 is a schematic front view of the rotor cassette according to the third embodiment. FIG. 7 is a system configuration diagram of the gas processing apparatus showing operations during normal operation according to the third embodiment. FIG. 8 is a system configuration diagram of a gas processing apparatus showing an operation at the time of decomposition processing of high boiling point organic substances according to the third embodiment. In addition, the code | symbol corresponding to the component which is common in 1st Embodiment is attached | subjected, and it demonstrates centering on difference below.

  The rotor 2 according to the gas processing apparatus of the third embodiment includes two desorption zones. As shown in FIG. 6, the ventilation zone of the rotor 2 is provided in the order of the adsorption zone 21, the first desorption zone 221, the second desorption zone 222, and the cooling zone 23 along the rotation direction. Moreover, as shown in FIG. 7, two systems, an adsorption system and a desorption system, are formed during normal operation. The adsorption system is a flow path that passes through the adsorption zone 21 and has the same configuration as the first embodiment and the second embodiment. Further, the desorption system includes the condenser 51, the cooling zone 23, the second heating unit 42, the second desorption zone 222, the first heating unit 41, the first desorption zone 221, the condenser 51, and so on in this order. Connected to circulate gas.

  As shown in FIG. 8, the two desorption zones form independent circulation systems during the decomposition treatment of the high-boiling organic substances. The first circulation system includes a desorption zone 221 and a heating unit 41, and circulates, for example, nitrogen gas. The heating unit 41 raises the nitrogen gas to about 140 ° C., and the portion of the rotor 2 where the desorption zone 221 is formed is heated by the heated nitrogen gas. The second circulation system includes a desorption zone 222 and a heating unit 42, and circulates air containing, for example, ozone. Specifically, ozone is supplied from the ozone supply unit 7 to an air supply path 37 that supplies air to the second circulation system. However, the heating part 42 has stopped heating. An exhaust passage 361 and an exhaust passage 362 are provided in each of the first circulation system and the second circulation system. Further, a concentration measuring unit 81 and a concentration measuring unit 82 are provided in the exhaust path 361 and the exhaust path 362, respectively.

  When the rotor 2 is rotated in such a configuration, a portion constituting the heated desorption zone 221 moves to a position constituting the desorption zone 222. That is, the part which comprises the desorption zone 222 among the rotors 2 is heated previously, and the air containing ozone passes through the desorption zone 222 which raised temperature. Therefore, ozone can be decomposed intensively at a position closer to the surface of the rotor 2 than when heated by the heating unit, and the decomposition efficiency of the high-boiling organic substances accumulated in the rotor 2 can be improved.

  In the decomposition process of the high boiling point organic substance, for example, the rotation of the rotor 2 is made faster than in the normal operation. If it does in this way, before the temperature of the part which comprises the heated desorption zone 221 falls, it can be moved to the position which comprises the desorption zone 222. FIG. For example, during normal operation, the rotational speed of the rotor with an upper limit of about 10 times / h to about 15 times / h is set to about 5 times / h to about 60 times / h during the decomposition treatment of high-boiling organic substances.

  Ozone decomposition products such as O radicals have higher oxidation / decomposition power than ozone, but have a short lifetime. When ozone is decomposed by the heating unit 4 provided in front of the rotor 2 as in the first embodiment or the second embodiment, it reacts with substances other than the high-boiling organic matter that is the original decomposition target before reaching the rotor 2. This may cause loss of resolution and is inefficient. If it is the structure shown in 3rd Embodiment, since the temperature of the rotor 2 itself to which the high boiling point organic substance adhered can be raised, ozone can be decomposed | disassembled intensively in the position nearer to the rotor 2, and ozone is efficiently A decomposition product and a high boiling point organic substance can be reacted.

  The various contents described above can be combined as much as possible without departing from the technical idea of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Rotor cassette 2 ... Rotor 21 ... Adsorption zone 22 ... Desorption zone 23 ... Cooling zone 31 ... Adsorption air passage 32 ... Desorption air passage 33 ... Cooling air passage 34 ... Air supply path 35 ... Ozone supply path 36 ... Exhaust path 4 (41, 42) ... Heating section 51 ... Condensers 52, 53 ... Heat exchanger 6 ... -Nitrogen supply unit 7 ... Ozone supply unit 8 ... Concentration measurement unit 9 ... Flow rate adjustment unit

Claims (11)

A part of the first ventilation path, a first ventilation zone that adsorbs a substance contained in the passing gas, and a part of the second ventilation path are formed, and the function of the first ventilation zone is regenerated. A rotatable rotor that forms a second ventilation zone and is disposed across the first ventilation path and the second ventilation path;
A supply unit configured to supply a predetermined gas that generates an active species having an oxidizing power by thermal decomposition to the second ventilation path;
A heating unit that is provided on the upstream side of the second ventilation zone in the second ventilation path, and generates the active species by heating the predetermined gas;
With
In the second ventilation zone, a gas treatment device that decomposes a substance adsorbed on the rotor by the active species. A part of the first ventilation path, a first ventilation zone that adsorbs a substance contained in the passing gas, and a part of the second ventilation path are formed, and the function of the first ventilation zone is regenerated. Forming a second ventilation zone and a third ventilation zone which constitutes a part of the third ventilation path and regenerates the function of the first ventilation zone; and the first ventilation path and the second ventilation path. And a rotatable rotor disposed across the third air passage,
A supply unit configured to supply a predetermined gas that is thermally decomposed to generate an active species having oxidizing power into the second air passage;
A heating unit that is provided on the upstream side of the third ventilation zone in the third ventilation path and heats the gas flowing to the third ventilation zone;
With
Of the rotor, a portion corresponding to the third ventilation zone heated by the passage of heated gas moves to a position corresponding to the second ventilation zone by rotation of the rotor,
In the second ventilation zone, the predetermined gas is heated to generate the active species, and the substance adsorbed on the rotor is decomposed by the active species. The gas processing apparatus according to claim 1, wherein the predetermined gas is ozone. The gas processing apparatus according to any one of claims 1 to 3, wherein the predetermined gas is heated to 80 to 200 ° C. A first operation mode in which the first ventilation zone of the rotor adsorbs a substance contained in a passing gas;
The supply unit supplies the predetermined gas to the second ventilation path, and the heating unit heats the predetermined gas to generate the active species, and the rotor in the second ventilation zone A second operation mode for decomposing the substance adsorbed on the active species by the active species;
The gas processing apparatus according to any one of claims 1 to 4, further comprising a control unit that switches between. The gas processing apparatus according to any one of claims 1 to 5, wherein the supply unit supplies ozone of 1 g / h to 1000 g / h. A flow rate adjusting unit for controlling the flow rate of the gas;
The gas processing apparatus according to any one of claims 1 to 6, wherein the flow rate adjusting unit sets a surface wind speed of the gas passing through the second ventilation zone to 0.3 m / s or more. The gas processing apparatus according to claim 1, wherein the predetermined gas is hydrogen peroxide or peracetic acid. A concentration measuring unit that is provided downstream of the second ventilation zone and measures the ozone concentration;
The gas processing device according to any one of claims 1 to 8, wherein it is determined whether or not the function of the first ventilation zone has been regenerated based on an ozone concentration measured by the concentration measuring unit. A part of the first ventilation path, a first ventilation zone that adsorbs a substance contained in the passing gas, and a part of the second ventilation path are formed, and the function of the first ventilation zone is regenerated. A rotary rotor that forms a second ventilation zone and is disposed across the first ventilation path and the second ventilation path, and a predetermined gas that is thermally decomposed to generate an active species having oxidizing power Is provided on the upstream side of the second ventilation zone in the second ventilation path, and heats the predetermined gas to generate the active species. A function regenerating method of a gas processing device comprising a unit,
A method for regenerating a function of a gas processing device, wherein the substance adsorbed on the rotor is decomposed by the active species in the second ventilation zone. A part of the first ventilation path, a first ventilation zone that adsorbs a substance contained in the passing gas, and a part of the second ventilation path are formed, and the function of the first ventilation zone is regenerated. Forming a second ventilation zone and a third ventilation zone which constitutes a part of the third ventilation path and regenerates the function of the first ventilation zone; and the first ventilation path and the second ventilation path. And a rotatable rotor disposed across the third ventilation path, and a supply unit that supplies a predetermined gas that thermally decomposes and generates active species having oxidizing power to the second ventilation path, A function regeneration method for a gas processing apparatus, comprising: a heating unit that is provided on an upstream side of the third ventilation zone in the second ventilation path and that heats the gas flowing to the third ventilation zone,
Of the rotor, a portion corresponding to the third ventilation zone heated by the passage of heated gas is moved to a position corresponding to the second ventilation zone by rotation of the rotor,
In the second ventilation zone, the predetermined gas is heated to generate the active species, and the substance adsorbed on the rotor is decomposed by the active species.

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