JPH02214023A - Production of perpendicular magnetic disk - Google Patents
Production of perpendicular magnetic diskInfo
- Publication number
- JPH02214023A JPH02214023A JP3569989A JP3569989A JPH02214023A JP H02214023 A JPH02214023 A JP H02214023A JP 3569989 A JP3569989 A JP 3569989A JP 3569989 A JP3569989 A JP 3569989A JP H02214023 A JPH02214023 A JP H02214023A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- plating
- radial direction
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 238000007747 plating Methods 0.000 claims abstract description 45
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 22
- 230000035699 permeability Effects 0.000 claims abstract description 21
- 238000009713 electroplating Methods 0.000 claims abstract description 12
- 239000010408 film Substances 0.000 description 50
- 229910003271 Ni-Fe Inorganic materials 0.000 description 5
- 230000001050 lubricating effect Effects 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
〔概 要〕
垂直磁気記録方式の磁気ディスク装置に用いて好適な垂
直磁気ディスクの製造方法に関し、簡単な方法によりデ
ィスク基板の半径方向に磁気容易軸が向（ように磁気異
方性を付与した軟磁性膜を容易に形成して、その軟磁性
膜の透磁率を高めることを目的とし、
非磁性のディスク基板上にめっき用下地導電膜を介して
めっき膜からなる高透磁率な軟磁性層を形成する垂直磁
気ディスクの製造工程において、前記めっき用下地導電
膜をその一部を半径方向に電気的に分断されたリング状
のパターンに形成し、この電気的に分断されためっき用
下地導電膜パターンの両端に電流を流して前記ディスク
基板の半径方向に磁界を発生させた状態で、該下地導電
膜上に電解めっき法により上記軟磁性層を形成するよう
に構成する。[Detailed Description of the Invention] [Summary] A method of manufacturing a perpendicular magnetic disk suitable for use in a perpendicular magnetic recording type magnetic disk device involves a simple method in which the magnetic easy axis is oriented in the radial direction of the disk substrate. The purpose of this method is to easily form a soft magnetic film with magnetic anisotropy and increase the magnetic permeability of the soft magnetic film.The purpose is to easily form a soft magnetic film with magnetic anisotropy, and to increase the magnetic permeability of the soft magnetic film. In the manufacturing process of perpendicular magnetic disks in which a soft magnetic layer with high magnetic permeability is formed, a part of the conductive base film for plating is formed into a ring-shaped pattern electrically separated in the radial direction, and this electrically The soft magnetic layer is formed on the base conductive film by electrolytic plating while a current is applied to both ends of the divided base conductive film pattern for plating to generate a magnetic field in the radial direction of the disk substrate. Configure.
本発明は垂直磁気記録方式の磁気ディスク装置に用いて
好適な垂直磁気ディスクの製造方法に係リ、特に記録再
生特性の良い二層膜構造の垂直磁気ディスクにおける軟
磁性薄膜の形成方法に関するものである。The present invention relates to a method for manufacturing a perpendicular magnetic disk suitable for use in a perpendicular magnetic recording type magnetic disk device, and more particularly to a method for forming a soft magnetic thin film in a perpendicular magnetic disk having a double-layer structure with good recording and reproducing characteristics. be.
磁気ディスク装置に用いられる磁気ディスクとしては、
記録層における記録トラックに対して水平方向に情報を
磁化記録する水平磁気記録方式の磁気ディスクが広く用
いられている。この方式の磁気ディスクへの磁化記録で
は記録トラックに対して水平方向に連なって磁化された
微小な磁石が隣接する磁石と反発し合って、互いに磁化
を弱め合う傾向がある。Magnetic disks used in magnetic disk devices include:
2. Description of the Related Art Magnetic disks employing a horizontal magnetic recording method are widely used, in which information is magnetized and recorded in the horizontal direction with respect to recording tracks in a recording layer. In this method of magnetization recording on a magnetic disk, there is a tendency for minute magnets that are magnetized in a row in the horizontal direction with respect to the recording track to repel adjacent magnets and weaken each other's magnetization.
このような傾向は情報記録の高密度化に伴って顕著に現
れてくるため、高密度記録化に対して限界が生じてくる
。This tendency becomes more noticeable as the density of information recording becomes higher, and therefore there is a limit to the higher density recording.
従って、このような限界を打破するものものとして記録
層における記録トラックに対して垂直方向への磁化を利
用する垂直磁気記録方式の磁気ディスクが提案され、こ
れを実現する磁気ディスクとして高透磁率な軟磁性層と
垂直記録層とを積層した二層膜構造の垂直磁気ディスク
が実用化されつつある。Therefore, a perpendicular magnetic recording type magnetic disk that utilizes magnetization in the direction perpendicular to the recording track in the recording layer has been proposed as a way to overcome these limitations, and a magnetic disk with high magnetic permeability that realizes this has been proposed. Perpendicular magnetic disks having a two-layer structure in which a soft magnetic layer and a perpendicular recording layer are laminated are being put into practical use.
この垂直磁気ディスクにおける軟磁性層は、磁気ヘッド
からの記録磁界が垂直記録層を垂直に通って磁化した後
、再び磁気ヘッド側のリターンヨークへ帰還させる磁界
経路の役目を果たす磁気ヘッドの一部の機能を担ってお
り、その透磁率を高めることにより記録再生効率を向上
し、記録再生特性の優れた垂直磁気ディスクを得ること
が必要とされている。The soft magnetic layer in this perpendicular magnetic disk is a part of the magnetic head that serves as a magnetic field path for the recording magnetic field from the magnetic head to pass perpendicularly through the perpendicular recording layer and magnetize, and then return to the return yoke on the magnetic head side. It is necessary to improve the recording and reproducing efficiency by increasing its magnetic permeability and to obtain a perpendicular magnetic disk with excellent recording and reproducing characteristics.
従来、上記した二層膜構造の垂直磁気ディスクを製造す
る方法としては、第３図に示すように例えばアルマイト
表面処理が施されたアルミニウム（八り板、或いはガラ
ス板等からなる非磁性のディスク基板１上に１μＩの膜
厚のＮｉ−Ｆｅからなる軟磁性層（軟磁性裏打ち層とも
称する）２と、０．２μｍの膜厚のＣｏ−Ｃｒからなる
垂直記録Ｎ３を連続スパッタリング法により順に形成し
、その垂直記録層３の表面に磁気ヘッドに対する摩擦、
摩耗を低減するために保護膜４及び潤滑膜５を施してい
る。Conventionally, as shown in FIG. 3, the method for manufacturing the perpendicular magnetic disk with the above-mentioned two-layer film structure has been to produce a non-magnetic disk made of, for example, an aluminum plate or a glass plate that has been subjected to an alumite surface treatment. A soft magnetic layer (also referred to as a soft magnetic backing layer) 2 made of Ni-Fe with a thickness of 1 μm and a perpendicular recording layer N3 made of Co-Cr with a thickness of 0.2 μm are sequentially formed on a substrate 1 by a continuous sputtering method. Friction against the magnetic head is applied to the surface of the perpendicular recording layer 3.
A protective film 4 and a lubricating film 5 are applied to reduce wear.
しかし、上記した製造方法によって得られた垂直磁気デ
ィスクにおける軟磁性Ｎ２の透磁率は高々、数百程度と
極めて低く、充分な記録再生特性が得られず、スパッタ
リング法を用いたＮｉ−Ｆｅからなる軟磁性層の形成方
法では、これ以上に透磁率は高めることが困難であった
。However, the magnetic permeability of soft magnetic N2 in the perpendicular magnetic disk obtained by the above-mentioned manufacturing method is extremely low, on the order of several hundred at most, and sufficient recording and reproducing characteristics cannot be obtained. With the method of forming the soft magnetic layer, it has been difficult to increase the magnetic permeability further.
そこで薄膜磁気ヘッドのＮｉ−Ｆｅからなる磁極を電解
めっき法により形成することにより、その透磁率が高め
られることに着目して、例えば第４図に示すようにＮｉ
−Ｆｅめっき液１２が満たされためっき槽１１内のめっ
き電極１３に対向して、表面にめっき下地導電膜（図示
せず）が施された非磁性のディスク基板１を基板ホルダ
１４に支持した形で配置し、該ディスク基板１を回転さ
せた状態で該めっき下地導電膜上に電解めっきによりＮ
ｉ−Ｆｅめっき膜からなる軟磁性層を形成することによ
り、その透磁率を１０００程度にまで改善している。Therefore, we focused on the fact that the magnetic permeability of thin-film magnetic heads could be increased by forming the magnetic poles made of Ni-Fe by electrolytic plating.For example, as shown in FIG.
- A non-magnetic disk substrate 1 having a plating base conductive film (not shown) on its surface was supported on a substrate holder 14, facing a plating electrode 13 in a plating tank 11 filled with Fe plating solution 12. With the disc substrate 1 rotated, N is applied by electrolytic plating onto the conductive film under plating.
By forming a soft magnetic layer made of an i-Fe plating film, its magnetic permeability is improved to about 1000.
ところがこの程度の透磁率の軟磁性層でも、なお充分な
記録再生特性が得られず、その透磁率を更に数倍以上に
高める必要があった。However, even with a soft magnetic layer having a magnetic permeability of this level, sufficient recording and reproducing characteristics cannot be obtained, and it is necessary to further increase the magnetic permeability by several times or more.
高い透磁率の軟磁性層を得るために検討した結果、電解
めっきにより形成されたＮｉ−Ｆｅからなる軟磁性層の
磁気特性は等方的であることから、ディスク基板の半径
方向に磁気容易軸が向くように磁気的に異方性が付与さ
れた軟磁性層を形成することがでれば、その円周方向、
即ち記録トラック方向の透磁率を２０００以上に高めら
れることが判明した。As a result of studies to obtain a soft magnetic layer with high magnetic permeability, it was found that the magnetic properties of the soft magnetic layer made of Ni-Fe formed by electrolytic plating are isotropic, so that the magnetic easy axis extends in the radial direction of the disk substrate. If it is possible to form a soft magnetic layer that is magnetically anisotropic so that it is oriented in the circumferential direction,
That is, it has been found that the magnetic permeability in the recording track direction can be increased to 2000 or more.
しかしながら、上記したような磁気異方性を付与したＮ
ｌ−Ｆｅからなる軟磁性層を得る方法としては、■予め
磁気容易軸を付与する半径方向に多数の掻きキズ等を設
けたディスク基板面に電解めっきにより軟磁性層を形成
する、■半径方向に磁界を印加した状態のディスク基板
面に電解めっきにより軟磁性層を形成する等の方法が考
えられるが、■についてはディスク基板面の円周方向に
多数の掻きキズ等を形成することは比較的容易であるが
、これが半径方向となると極めて困難である。また■に
ついては同心円形状のマグネット等ヲ用イテ基板面の半
径方向に磁界を印加することが考えられるが、電解めっ
きを前提条件としたマグネットに対する基板取り付は機
樽が大掛かりとなり、実用化が難しい等の問題があった
。However, N with magnetic anisotropy as described above
The method for obtaining a soft magnetic layer made of l-Fe is: 1. Forming a soft magnetic layer by electrolytic plating on a disk substrate surface that has been provided with many scratches in the radial direction to provide a magnetic easy axis. Methods such as forming a soft magnetic layer by electrolytic plating on the disk substrate surface while a magnetic field is applied to (2) can be considered, but for (2), forming a large number of scratches etc. in the circumferential direction of the disk substrate surface is not recommended. However, it is extremely difficult to do this in the radial direction. Regarding (2), it is possible to apply a magnetic field in the radial direction of the substrate surface using concentric magnets, etc., but mounting the magnet to the substrate with electrolytic plating as a prerequisite requires a large amount of equipment, making it difficult to put it into practical use. There were some difficult issues.
本発明は上記した従来の実状に濫み、簡単な方法により
ディスク基板の半径方向に磁気容易軸が向くように磁気
異方性を付与した軟磁性膜を容易に形成して、その軟磁
性膜の透磁率を高め、記録再生特性の向上を図った新規
な磁気ディスクの製造方法を提供することを目的とする
ものである。The present invention overcomes the above-mentioned conventional situation, and makes it possible to easily form a soft magnetic film with magnetic anisotropy such that the magnetic easy axis is oriented in the radial direction of a disk substrate by a simple method. The object of the present invention is to provide a method for manufacturing a new magnetic disk in which the magnetic permeability of the magnetic disk is increased and the recording and reproducing characteristics are improved.
本発明は上記した目的を達成するため、非磁性のディス
ク基板上にめっき用下地導電膜を介してめっき膜からな
る高透磁率な軟磁性層を形成する垂直磁気ディスクの製
造工程において、前記めっき用下地導電膜をその一部を
半径方向に電気的に分断されたリング状のパターンに形
成し、この電気的に分断されためっき用下地導電膜パタ
ーンの両端に電流を流して前記ディスク基板の半径方向
に磁界を発生させた状態で、該下地導電膜上に電解めっ
き法により上記軟磁性層を形成するように構成する。In order to achieve the above-mentioned object, the present invention provides a process for manufacturing a perpendicular magnetic disk in which a soft magnetic layer with high magnetic permeability consisting of a plating film is formed on a non-magnetic disk substrate via an underlying conductive film for plating. A portion of the base conductive film for plating is formed into a ring-shaped pattern that is electrically separated in the radial direction, and a current is passed through both ends of this electrically divided pattern of the base conductive film for plating to form a ring-shaped pattern that is electrically separated in the radial direction. The soft magnetic layer is formed on the underlying conductive film by electrolytic plating while a magnetic field is generated in the radial direction.
本発明では上記したようにめっき用下地導電膜を電気的
に半径方向に分断されたリング状パターンに形成し、そ
の分断された両端に電流を流すことにより、ディスク基
板の半径方向に磁界を発生させることができる。In the present invention, as described above, the base conductive film for plating is electrically formed into a ring-shaped pattern divided in the radial direction, and a magnetic field is generated in the radial direction of the disk substrate by passing a current through both ends of the division. can be done.
従って、このような磁界発生中でのめっき用下地導電膜
上にＮｉ−Ｆｅからなるめっき膜を形成すれば、簡単に
該基板の半径方向を磁気容易軸とする磁気異方性が付与
され、かつ円周方向に透磁率の高められためっき層から
なる軟磁性層が容易に形成できる。その結果、記録再生
特性の優れた垂直磁気ディスクが得られる。Therefore, if a plating film made of Ni-Fe is formed on the base conductive film for plating while such a magnetic field is being generated, magnetic anisotropy with the magnetic easy axis in the radial direction of the substrate can be easily imparted. In addition, a soft magnetic layer consisting of a plating layer with increased magnetic permeability in the circumferential direction can be easily formed. As a result, a perpendicular magnetic disk with excellent recording and reproducing characteristics can be obtained.
以下図面を用いて本発明の実施例について詳細に説明す
る。Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図（ａ）〜（Ｃ）は本発明に係る垂直磁気ディスク
の製造方法の一実施例を順に示す図であり、図（ａ）は
斜視図、また図ら）及び（Ｃ）は要部断面図である。FIGS. 1(a) to 1(C) are views sequentially showing an embodiment of the method for manufacturing a perpendicular magnetic disk according to the present invention, in which FIG. 1(a) is a perspective view, and FIGS. FIG.
先ず第１図（ａ）に示すようにアルマイト表面処理を施
したアルミニウム（Ａ ｆ ）等からなる非磁性のディ
スク基板２１上に、スパッタリング法等により１０００
人の膜厚のＮｉ−Ｆｅからなるめっき用下地導電膜２２
を被着形成する。そしてこの下地導電膜２２の一部をイ
オンミリング法等により図示のように２μｍ程度の微細
幅で除去して半径方向に電気的に分断する。First, as shown in FIG. 1(a), 1,000 yen is deposited on a non-magnetic disk substrate 21 made of aluminum (A f ), etc., which has been subjected to an alumite surface treatment, by sputtering or the like.
Base conductive film 22 for plating made of Ni-Fe with a human thickness
Form the adhesion. Then, a part of the base conductive film 22 is removed by ion milling or the like to a fine width of about 2 μm as shown in the figure, and electrically separated in the radial direction.
次にこの電気的に分断されたリング状パターンのめっき
用下地導電膜２２の両端部を接続端子２３ａ。Next, both ends of the electrically separated ring-shaped pattern of the plating base conductive film 22 are connected to connection terminals 23a.
２３ｂとし、該再接続端子２３ａ 、 ２３ｂを電流発
生源（Ｐ＾）３１と接続する。そしてこのディスク基板
２１を、第２図に示すように基板ホルダ１４に取付けて
、例えば硫酸ニッケル（ＮｉＳＯｎ ・６ＨｔＯ）と硫
酸第一鉄（ＦｅＳＯｎ・７Ｈ，０）を主成分とするＮｉ
−Ｆｅめっき液１２が満たされためっき槽１１内のめっ
き電極１３に対向して配置する。23b, and the reconnection terminals 23a and 23b are connected to a current generation source (P^) 31. Then, this disk substrate 21 is attached to the substrate holder 14 as shown in FIG.
- It is arranged opposite to the plating electrode 13 in the plating tank 11 filled with the Fe plating solution 12.
そして前記めっき用下地導電膜２２の再接続端子２３ａ
、 ２３ｂに所定の電流を断続的（パルス状）に流して
前記ディスク基板２１の半径方向に磁界を発生させた状
態で、更に前記めっき用下地導電膜（陰極）２２とめっ
き電極（陽極）１３間に４〜５ｖの電圧を印加して電流
密度が６Ａ／ｄｍ”のめっき条件によって、第１図（ｂ
）に示すように該下地導電膜２２上に１μｍの膜厚のＮ
ｉ−Ｆｅめっき膜を形成する。このめっき時における前
記ディスク基板２１は必要りこ応じて回転させる。And the reconnection terminal 23a of the plating base conductive film 22
, 23b intermittently (in a pulsed manner) to generate a magnetic field in the radial direction of the disk substrate 21, further the plating base conductive film (cathode) 22 and the plating electrode (anode) 13. Figure 1 (b
), a layer of N with a thickness of 1 μm is deposited on the underlying conductive film 22.
Form an i-Fe plating film. During this plating, the disk substrate 21 is rotated as necessary.
かくすれば、前記ディスク基板２１の半径方向に容易軸
が向くように磁気異方性が付与されるため、その円周方
向、即ち記録トラック方向に２０００以上の極めて高い
透磁率を有するＮｉ−Ｆｅめっき膜からなる軟磁性膜２
４が容易に得られる。In this way, magnetic anisotropy is imparted so that the easy axis is oriented in the radial direction of the disk substrate 21, so that Ni--Fe having an extremely high magnetic permeability of 2000 or more in the circumferential direction, that is, in the recording track direction. Soft magnetic film 2 made of plated film
4 can be easily obtained.
また、前記めっき用下地導電膜２２の再接続端子２３ａ
、 ２３ｂに通電する電流値は、例えばディスク基板２
１の半径方向に発生する磁界が１０エルステツド（Ｏｅ
）程度となるように設定する。更に上記したようにめっ
き用下地導電膜２２に単に所定の電流を通電してディス
ク基板２１の半径方向に磁界を発生させた状態で該下地
導電膜２２上にＮｉ−Ｆｅからなるめっき膜を形成する
場合、該下地導電膜２２とめっき電極１３間及び下地導
電膜２２面に添って電界が生じるため、形成しためっき
膜の膜厚が多少不均一な分布になり易い傾向がある。従
って、そのような傾向を解消してより均一な膜厚分布の
めっき膜を形成するには、該下地導電膜２２の再接続端
子２３ａ。Also, the reconnection terminal 23a of the plating base conductive film 22
, 23b is, for example, the value of the current flowing through the disk substrate 2.
The magnetic field generated in the radial direction of 1 is 10 oersted (Oe
). Further, as described above, a plating film made of Ni--Fe is formed on the base conductive film 22 by simply passing a predetermined current through the base conductive film 22 for plating to generate a magnetic field in the radial direction of the disk substrate 21. In this case, since an electric field is generated between the base conductive film 22 and the plating electrode 13 and along the surface of the base conductive film 22, the thickness of the formed plating film tends to be somewhat unevenly distributed. Therefore, in order to eliminate such a tendency and form a plating film with a more uniform thickness distribution, the reconnection terminal 23a of the base conductive film 22 is required.
２３ｂに流す電流をパルス状に流すようにすれば良い。The current to be passed through 23b may be made to flow in a pulsed manner.
なお、前記下地導電膜２２の一部が微細幅で除去された
部分は段差部分となるが、前記微細幅は２μ晴程度であ
るため、ヘッド浮上時の安定性に悪影響を及ぼすことは
ない。Note that the part where the base conductive film 22 is partially removed becomes a stepped part, but since the fine width is about 2 μm, it does not adversely affect the stability when the head is flying.
従って、かかる方法で形成された軟磁性膜２４上に、第
１図（Ｃ）に示すように従来例と同様のＣｏ−Ｃｒから
なる０、２μ晴の膜厚の垂直記録層２５をスパッタリン
グ法等により形成し、その表面に更に保護膜２６及び潤
滑膜２７を形成することによって、記録再生特性の優れ
た垂直磁気ディスクが完成する。Therefore, on the soft magnetic film 24 formed by this method, as shown in FIG. By forming a protective film 26 and a lubricating film 27 on the surface thereof, a perpendicular magnetic disk with excellent recording and reproducing characteristics is completed.
以上の説明から明らかなように、本発明に係る二層膜構
造の垂直磁気ディスクの製造方法によれば、ディスクの
円周方向（記録トラック方向）に透磁率の高いＮｉ−Ｐ
ｅめっき膜からなる軟磁性膜を容易に形成することがで
きる優れた利点を有し、記録再生効率の高い、優れた記
録再生特性を有する垂直磁気ディスクを得ることが可能
となる。As is clear from the above description, according to the method for manufacturing a perpendicular magnetic disk with a double-layer film structure according to the present invention, Ni--P with high magnetic permeability can be used in the circumferential direction (recording track direction) of the disk.
This method has the excellent advantage that a soft magnetic film made of an e-plated film can be easily formed, and it becomes possible to obtain a perpendicular magnetic disk having high recording and reproducing efficiency and excellent recording and reproducing characteristics.
従って、このような二層膜構造の垂直磁気ディスクの製
造方法に適用して極めて有利である。Therefore, it is extremely advantageous to apply this method to a method of manufacturing a perpendicular magnetic disk having a double layer structure.
第１図（ａ）〜（Ｃ）は本発明に係る垂直磁気ディスク
の製造方法の一実施例を順に示す図で
あり、図（ａ）は斜視図、また図（ｂ）及び（Ｃ）は要
部断面図、
第２図は本発明に係る電解めっきによる軟磁性層の形成
方法を説明するための装置構
成断面図、
第３図は従来の垂直磁気ディスクの製造方法を説明する
ための要部断面図、
第４図は従来の電解めっきによる軟磁性層の形成方法を
説明するための装置構成断面
図である。
第１図（ａ）〜（Ｃ）及び第２図において、１１はめっ
き槽、１２はめっき液、１３はめっき電極、１４は基板
ホルダ、２１はディスク基板、２２はめっき用下地導電
膜、２３ａ、２３ｂは接続端子、２４は軟磁性層、２５
は垂直記録層、２６は保護膜、２７は潤滑膜、３１は電
流発生源をそれぞれ示す。
第１図FIGS. 1(a) to 1(C) are views sequentially showing one embodiment of the method for manufacturing a perpendicular magnetic disk according to the present invention, in which FIG. 1(a) is a perspective view, and FIGS. 1(b) and 1(C) are FIG. 2 is a cross-sectional view of the apparatus configuration for explaining the method of forming a soft magnetic layer by electrolytic plating according to the present invention. FIG. 3 is a main part for explaining the conventional method for manufacturing a perpendicular magnetic disk. FIG. 4 is a cross-sectional view of an apparatus configuration for explaining a conventional method of forming a soft magnetic layer by electrolytic plating. In FIGS. 1(a) to (C) and FIG. 2, 11 is a plating tank, 12 is a plating solution, 13 is a plating electrode, 14 is a substrate holder, 21 is a disk substrate, 22 is a base conductive film for plating, and 23a , 23b is a connection terminal, 24 is a soft magnetic layer, 25
2 shows a perpendicular recording layer, 26 a protective film, 27 a lubricating film, and 31 a current generation source. Figure 1
Claims (1)
（２２）を介してめっき膜からなる高透磁率な軟磁性層
（２４）を形成する垂直磁気ディスクの製造工程におい
て、 上記めっき用下地導電膜（２２）をその一部を半径方向
に電気的に分断されたリング状のパターンに形成し、こ
の電気的に分断されためっき用下地導電膜パターンの両
端（２３ａ、２３ｂ）に電流を流して前記ディスク基板
（２１）の半径方向に磁界を発生させた状態で、該下地
導電膜（２２）上に電解めっき法により上記軟磁性層（
２４）を形成することを特徴とする垂直磁気ディスクの
製造方法。[Claims] A perpendicular magnetic disk manufacturing process in which a high permeability soft magnetic layer (24) made of a plating film is formed on a non-magnetic disk substrate (21) via an underlying conductive film for plating (22). In this step, a part of the base conductive film for plating (22) is formed into a ring-shaped pattern electrically separated in the radial direction, and both ends (23a) of the electrically divided base conductive film pattern for plating are formed. , 23b) to generate a magnetic field in the radial direction of the disk substrate (21), the soft magnetic layer (23b) is coated on the base conductive film (22) by electroplating.
24) A method for manufacturing a perpendicular magnetic disk, comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3569989A JPH02214023A (en) | 1989-02-14 | 1989-02-14 | Production of perpendicular magnetic disk |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3569989A JPH02214023A (en) | 1989-02-14 | 1989-02-14 | Production of perpendicular magnetic disk |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02214023A true JPH02214023A (en) | 1990-08-27 |
Family
ID=12449130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3569989A Pending JPH02214023A (en) | 1989-02-14 | 1989-02-14 | Production of perpendicular magnetic disk |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02214023A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6347016B1 (en) | 1996-07-22 | 2002-02-12 | Matsushita Electric Industrial Co., Ltd. | Master information carrier, process for producing the carrier, and method and apparatus for recording master information signal on magnetic recording medium by using the carrier |
| US6611388B1 (en) | 1998-03-23 | 2003-08-26 | Matsushita Electric Industrial Co., Ltd. | Master information magnetic recorder |
| US6714367B1 (en) | 1998-10-29 | 2004-03-30 | Matsushita Electric Industrial Co., Ltd. | Master information medium and method of master information recording |
| US6858328B1 (en) | 1998-03-20 | 2005-02-22 | Matsushita Electric Industrial Co., Ltd. | Master information support |
| CZ305355B6 (en) * | 2014-06-20 | 2015-08-12 | České Vysoké Učení Technické V Praze, Fakulta Elektrotechnická | Device for electrodeposition of ferromagnetic layer in magnetic field |
-
1989
- 1989-02-14 JP JP3569989A patent/JPH02214023A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6347016B1 (en) | 1996-07-22 | 2002-02-12 | Matsushita Electric Industrial Co., Ltd. | Master information carrier, process for producing the carrier, and method and apparatus for recording master information signal on magnetic recording medium by using the carrier |
| US6567227B2 (en) | 1996-07-22 | 2003-05-20 | Matsushita Electric Industrial Co., Ltd. | Master information carrier, method for producing the carrier, method and apparatus for writing information into magnetic record medium using the carrier |
| US6587290B2 (en) | 1996-07-22 | 2003-07-01 | Matsushita Electric Industrial Co., Ltd. | Master information carrier, method for producing the carrier, and method apparatus for writing information into magnetic record medium using the carrier |
| US6590727B2 (en) | 1996-07-22 | 2003-07-08 | Matsushita Electric Industrial Co., Ltd. | Master information carrier, method for producing the carrier, method and apparatus for writing information into magnetic record medium using the carrier |
| US6606209B2 (en) | 1996-07-22 | 2003-08-12 | Matsushita Electric Industrial Co., Ltd. | Master information carrier, method for producing the carrier, method and apparatus for writing information into magnetic record medium using the carrier |
| US6606208B2 (en) | 1996-07-22 | 2003-08-12 | Matsushita Electric Industrial Co., Ltd. | Master information carrier, method for producing the carrier, method and apparatus for writing information into magnetic record medium using the carrier |
| US6961196B2 (en) | 1996-07-22 | 2005-11-01 | Matsushita Electric Industrial Co., Ltd. | Master information carrier, method for producing the carrier, method and apparatus for writing information into magnetic record medium using the carrier |
| US6858328B1 (en) | 1998-03-20 | 2005-02-22 | Matsushita Electric Industrial Co., Ltd. | Master information support |
| US6611388B1 (en) | 1998-03-23 | 2003-08-26 | Matsushita Electric Industrial Co., Ltd. | Master information magnetic recorder |
| US6714367B1 (en) | 1998-10-29 | 2004-03-30 | Matsushita Electric Industrial Co., Ltd. | Master information medium and method of master information recording |
| CZ305355B6 (en) * | 2014-06-20 | 2015-08-12 | České Vysoké Učení Technické V Praze, Fakulta Elektrotechnická | Device for electrodeposition of ferromagnetic layer in magnetic field |
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