JPH0997419A - Magnetic disk, production of magnetic disk and magnetic recorder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase the density of magnetic recording by separating recording magnetic members from each other by hard guard band members. SOLUTION: A substrate 1a is provided thereon with a recording layer 2. This recording layer 2 includes band-shaped magnetic members 2a long in the direction of the recording tracks and the guard band members 4a consisting of different materials embedded between these members 2a. The magnetic members 2a and the guard band members 4a are periodically and alternately arranged with the track pitch as one period in the radial direction of the disk in the recording layer 2. The track pitch is given by (T+G) and the effective recording magnetic domain area corresponding to the inverse number of the surface density is given by (T×G)×B when the width of the band-shaped recording magnetic members 2a, i.e., recording track width, is defined as T and the width of the band-shaped guard band members 4a, i.e., guard band width, as G and the length of the recording magnetic domains as B. The surface recording density attains about 1.5Gbpsi and the storage capacity with the drive of the four surfaces of two sheets of the disk attains 1.5GB when a disk substrate of a 2.5-inch size is used for the disk substrate 1 and the red track width T is set at 1.8±0.1μm and the guard width G at 0.2±0.1μm.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic disk mainly used for a computer peripheral storage device, a method for manufacturing the magnetic disk, and a magnetic recording device.

[0002]

2. Description of the Related Art Magnetic disks have the characteristics of high areal recording density, high data transfer rate, high speed access, high reliability and low price, and are the mainstream of computer peripheral storage devices. The areal recording density of the magnetic disk is several tens in the past 10 years.
It has doubled its growth, and there are hopes for further improvements in its areal recording density.

In magnetic recording, a recording magnetic domain is formed in a magnetic recording layer by a signal magnetic field generated from a magnetic head for recording, and a signal magnetic field leaking from the recording magnetic domain to the outside of the recording layer is reproduced by the magnetic head. The thing is the principle. In order to improve the areal recording density, the point is how the recording magnetic domains formed in the magnetic recording layer can be miniaturized, and the minute magnetic field leaking from the minute recording magnetic domains can be reproduced with high sensitivity.

To miniaturize the recording magnetic domain, firstly, the tip of the magnetic head closest to the magnetic recording layer should be miniaturized, more specifically, the recording (reproducing) magnetic gap should be narrowed. To narrow the recording (reproducing) magnetic pole track width. Secondly, to narrow the gap (spacing) between the magnetic head tip and the magnetic recording layer. Thirdly, spatially from the magnetic head tip. To minimize fringing of the edges of the recording domain due to the diverging magnetic field;
In addition, it is important to position the tip of the magnetic head at a predetermined recording / reproducing position on the magnetic recording layer with the highest possible accuracy.

Further, in reproducing a minute magnetic field from a minute recording magnetic domain with high sensitivity, a breakthrough in reproducing principle is required. In recent years, a reproduction principle utilizing a magnetoresistive effect different from the conventional induction reproduction principle has been proposed and demonstrated, and further research and development of giant magnetoresistive effect materials have been promoted. It is considered to be mainstream.

The technical point for increasing the recording / reproducing density is to use the vertical medium even in the head flying type recording / reproducing mode (induction reproducing type) using the longitudinal medium adopted in the current magnetic recording. The head contact type recording / reproducing mode (magnetoresistive reproducing type) is also a common matter.

Conventionally, as measures for reducing fringing, it is possible to reduce the fringe magnetic field from the head by narrowing the spacing and to reduce the magnetic transition width of the recording layer. However, in the conventional magnetic disk, it is impossible to eliminate fringes in principle, so it is necessary to make the track width to have a certain fringe value, which is an obstacle to narrowing the track. .

Regarding the positioning of the head, after installing the magnetic recording disk and the magnetic head in the drive,
Under the present circumstances, a servo writer is used to record a magnetic servo signal and an address signal in the recording layer, and this servo information is used during actual operation. However, as long as the magnetic recording layer is simply a continuous flat surface, the tracking accuracy is limited to the mechanical accuracy of the head, which is also an obstacle to narrowing the track.

One approach for achieving high precision tracking is the discrete track disclosed in Japanese Patent Laid-Open No. 2-201730. This is one in which physical unevenness is provided on the magnetic disk substrate in advance, a magnetic recording layer is formed on this, and track servo is performed by utilizing the difference between the signal from the concave portion and the signal from the convex portion. is there. Such P
In an ERM (Pre Embossed Rigid Magnetic) disk, the tracking accuracy is determined by the accuracy of the physical unevenness provided on the substrate, and if the unevenness is provided according to the optical disk substrate process, the fluctuation amount can be increased to the order of 0.01 μm with high accuracy. Can be realized.

However, in the above-mentioned PERM disk, since the member forming the guard band is a soft resist, only the resist is apt to be selectively worn. In order to prevent this abrasion, it is necessary to coat the disk surface with a hard protective film, and it is difficult to reduce the spacing.

In Japanese Patent Laid-Open No. 2-189715, an organic thick film typified by a resist is provided on a substrate, and a concave-convex stamper is pressed against it to form physical unevenness on the upper surface of the organic film. There is disclosed a magnetic recording medium in which a magnetic thin film is embedded in a recess and the organic film and the magnetic film have a substantially flat surface. In this magnetic recording medium, since the organic film exists below the magnetic film, the interface ineffective layer is formed thickly below the magnetic film, and the thickness of the magnetic film must be set to obtain a magnetic film having predetermined characteristics. Since it must be made thicker and high resolution recording is difficult, it cannot be said to be a high density technology. further,
In this conventional technique, since a high magnetic permeability film cannot be provided under the recording magnetic film, it is difficult to apply it to perpendicular magnetic recording, which is expected as a future high density recording technique.

Further, Japanese Patent Application No. 5-205257 proposes a technique in which the recording function is lost by forming a guard band by ion implantation or laser irradiation in a region between recording tracks of a magnetic recording layer. . However, in this conventional technique, since the altered portion of the recording layer is used for the guard band, it is difficult to form a uniform guard band, and the boundary between the recording track and the guard band becomes unclear. There is a problem.

By the way, the "magnetoresistance effect" is an effect in which the electric resistance is changed by an external magnetic field, and (a) the electric resistance value of the magnetic thin film for reproduction is the direction of current and the direction of magnetization of the reproducing magnetic body. Phenomenon that changes depending on the relative angle of (AM
R), (b) There is a phenomenon (GMR) in which the resistance changes depending on the relative angle of magnetization between the magnetic layers laminated via the non-magnetic layer. This has a feature that the reproduction sensitivity is very high and the reproduction signal strength does not depend on the head traveling speed as compared with the conventional induction reproduction.

The structure of the magnetic body used in the magnetoresistive head utilizes the anisotropic magnetoresistive effect, for example, Ni.
Fe single layer film, spin valve structure in which a conductive non-magnetic film is sandwiched between two magnetic thin films, for example, CoFe / Cu / Co
Fe three-layer film, granular structure in which magnetic particles are dispersed in a conductive non-magnetic member, for example, NiFe / Ag, magnetic artificial lattice structure in which a large number of magnetic thin films and a large number of conductive non-magnetic thin films are alternately laminated, for example, There are four types of (Co / Cu) n films.

Of these, the one having a single-layer film structure is at a practical level because it is relatively easy to manufacture an element, but the resistance change rate is only about 2% at most, and hence the recording domain is further miniaturized in the future. It is said that the reproduction sensitivity is insufficient for the progress of miniaturization of the reproduction magnetic field.

Further, the granular structure and the magnetic artificial lattice structure exhibit a resistance change rate of several tens of percent or more and are highly expected in the future, but in order to obtain a large resistance change, it is several kO.
Since a magnetic field as large as e to several tens of kOe is required, it is currently difficult to reproduce a minute medium magnetic field.

Therefore, a spin valve structure which exhibits a practically sufficient resistance change rate of about 10% with a comparatively small magnetic field change of less than several hundred Oe has attracted attention and is most practically used as the next reproducing element having a single-layer film structure. Is expected. The principle of reproduction of the spin valve structure is that the electrical resistivity changes depending on the relative directions of the magnetizations of the two magnetic thin films. In reality, the magnetization direction of one magnetic thin film is fixed,
The orientation of the magnetization of the other magnetic thin film is made to follow the orientation of the magnetic field of the medium, and the relative orientation relationship of the magnetizations of the two magnetic thin films is changed and used. In order to fix the magnetization of the magnetic thin film on one side, a magnetic film having a high coercive force is exchange-coupled to this film as a fixed magnetization film to form a fixed magnetization film. Since the magnetization of the magnetic thin film on the other side rotates following the medium magnetic field,
Hereinafter, this is abbreviated as "magnetization rotating film". It is important to ensure the symmetry of the reproduction signal that the magnetization direction of the magnetization rotation film in the state without the medium magnetic field is orthogonal to the magnetization direction of the magnetization fixed film. Including the relationship of, the magnetization direction of the magnetization fixed film is set in the same direction as the medium magnetic field, that is, the direction perpendicular to the medium surface, and the magnetization direction of one magnetization rotation film is the track width direction of the medium in the absence of the medium magnetic field. Is preferred.

Several methods are used to set the magnetization directions of the above-mentioned magnetization fixed film and magnetization rotation film. The magnetization pinned film is generally used to set the magnetization direction of the magnetization pinned film, and the following two steps are used to set the magnetization direction of one of the magnetization rotation films.
Two methods have been proposed. Firstly, there is a method of utilizing a magnetic field generated by a sense current, and secondly there is a method of exchange-coupling or magnetostatic-coupling a hard film for applying an appropriate bias magnetic field to the magnetization rotation film.

[0019]

However, in the former method using the sense current, since the sense current value is defined by the bias magnetic field to the magnetization rotation film, it is impossible to increase the output by increasing the current. The bias magnetic field applied to the rotating film acts on the magnetization fixed film in the direction of reversing the magnetization direction thereof, so that it is difficult to ensure operational reliability.

On the other hand, the latter method using a hard film bias has problems that the film structure of the head is complicated, the number of manufacturing process steps is increased, and it is difficult to provide the head at low cost.

The importance of the bias and the specific means in using the magnetoresistive effect element have been described above by taking an example of the spin valve structure, but any other magnetoresistive effect film is used. Even in such a case, it is practically necessary to make the rotation of magnetization symmetrical with respect to the direction of the magnetic field of the medium in order to prevent waveform distortion, and the magnetic field is biased to the magnetoresistive film by some means. Let it be used.

It is an object of the present invention to provide a magnetic disk capable of reducing the side fringe of the recording magnetic domain and improving the positioning accuracy of the magnetic head even during narrow spacing, and a method for manufacturing the same.

Further, the object of the present invention is to set the film thickness of the recording magnetic film to a film thickness capable of high resolution recording, and to be applicable to future perpendicular magnetic recording or contact recording. It is an object of the present invention to provide a magnetic disk capable of high density recording suitable for a magnetoresistive recording head and a method for manufacturing the same.

Further, an object of the present invention is to allow a large sense current to flow in the magnetoresistive recording / reproducing head,
An object of the present invention is to provide a magnetic disk capable of ensuring the operational reliability of the head and inexpensively manufacturing the head, and a manufacturing method thereof.

A further object of the present invention is to provide a magnetic disk which has a small side fringe and enables stable narrow spacing recording or contact recording operation with stable tracking servo characteristics, and a method of manufacturing the same.

A further object of the present invention is to provide a magnetic recording device capable of high density recording with a large capacity.

The magnetic disk according to the present invention comprises a substrate, a recording track portion provided on the substrate and made of a magnetic member for magnetically recording and reproducing information, and a track between the recording track portions adjacent to each other. A guard band member which is provided so as to be substantially continuous in a direction, and which is harder than the magnetic member and made of a non-magnetic material, and the magnetic member is provided in a lower region of the guard band member. Is not present, or a magnetic member having a thickness different from that of the magnetic member forming the recording track portion is provided.

The method of manufacturing a magnetic disk according to the present invention comprises:
(A) a step of forming a magnetic layer made of a magnetic material on a substrate having a substantially flat surface; and (b) removing a part of the magnetic layer so that they are substantially continuous in the track direction. Patterning a guard band space that defines adjacent recording track portions; and (c) making the guard band space harder than the magnetic material that forms the magnetic layer,
And a step of filling with a guard band member made of a non-magnetic material, and (d) a step of processing so that the surfaces of the guard band member and the magnetic layer are substantially flat. .

The guard band member has only to appear on the surface of the disk, and its thickness may be the same as, thicker than, or thinner than the thickness of the magnetic member.

The guard band member is preferably made of a non-magnetic hard material, such as SiO ₂ and Al ₂ O.
₃ , oxides such as TiO ₂ , Si ₃ N ₄ , AlN, T
It is preferably made of a nitride such as iN, a carbide such as TiC, a boride such as BN, or a polymer compound of any one of C type, CH type, and CF type. Since the guard band member is non-magnetic, the side fringe problem is almost completely solved. Further, since the guard band member is harder than the magnetic member, it has excellent contact start / stop (CSS) resistance, and further has excellent durability in future contact recording systems.

In the magnetic disk of the present invention, the magnetic member itself has a physical shape change of fine irregularities. It is desirable that the guard band member is embedded in the concave portion of the magnetic member up to the surface of the convex portion of the magnetic member so that the disk surface is substantially flat. The concavo-convex shape of the magnetic member is important, and in order to reduce side fringing and perform highly accurate tracking, it is preferable that the magnetic member is provided substantially continuously in the recording track direction. By adopting such a shape of the guard band member, the problem of side fringing can be essentially solved, and at the same time, high-precision tracking similar to that of an optical disk becomes possible.

Here, the meaning of "substantially continuous" means that the guard band member does not necessarily need to be continuous over the entire circumference of the track, but it is a recording magnetic domain array forming portion or a magnetic servo provided if necessary. It only has to be continuous in the track direction over the information recording portion. In addition to the shape which is substantially continuous in the track direction described above, a more preferable uneven shape is that, in addition to the shape which is substantially continuous in the track direction, an address signal provided if necessary is information recorded as a shape change of the recording magnetic layer. It is in the form of. By adopting such a form, there is no need for servo writing that has been conventionally performed.

Further, as an effect of the present invention which is important for high density recording, improvement of recording resolution, that is, improvement of linear recording density can be mentioned. This is because by separating the recording magnetic member for each recording track portion by the non-magnetic guard band member, the shape magnetic anisotropy of the magnetic member is given in the recording track direction, and the fluctuation of the reproduction signal at the magnetization transition portion is reduced. Depends on.

If the surfaces of the guard band member and the magnetic member embedded in the concave and convex portions of the recording magnetic member are made substantially flat, the abrasion resistant protective layer need not be provided on the recording layer. In such a case, it is the most preferable form in reducing the spacing loss. When the magnetic head is brought into contact with the recording surface of the disk, the guard band member serves as a guide rail for guiding the magnetic head. In the contact recording method, a protective layer may be provided if sufficient reliability cannot be obtained when the recording magnetic member is exposed. The protective layer is preferably a hard non-magnetic member made of the same material as the guard band member.

Further, the electric resistance of the guard band member is
It is desirable that it is larger than the electric resistance of the magnetic member. When considering the recording / reproducing of the magnetoresistive effect method, it is preferable that the guard band member has electrical insulation as compared with the recording magnetic member, and the specific resistance value should be at least about one digit higher than that of the recording magnetic member. It is preferable to have. By doing so, it is possible to solve the problem that the current is leaked to the medium and the reproduction output is lowered even when the contact reproduction is performed using the lateral conduction type magnetoresistive head.

As the magnetic member, a Co-based material used for ordinary magnetic disks, such as CoNiPt or Co, is used.
Pt, CoPtCr, CoTaCr, CoNiCr, CoCr expected as a future perpendicular magnetic recording material,
CoPtO, a material system in which Ba ferrite-based, Fe-based, or Co-based particles are dispersed in a hard matrix, which has been studied as a contact recording material because it is hard itself, can be used.

Although the substrate may be directly disposed on the base of the recording magnetic member, it is preferable to use NiP, Cr or the like as an orientation control film for the in-plane medium and a closed magnetic circuit forming film for the vertical medium. As a high magnetic permeability film, for example, a NiFe film or the like is preferably formed. The material of the substrate is not particularly limited, but usually aluminum or glass is used. Furthermore, it is preferable to use a glass substrate having excellent chemical resistance.

A magnetic disk according to the present invention comprises a substrate, a recording track portion formed of a magnetic member provided on the substrate for magnetically recording and reproducing information, and a track direction between the recording track portions adjacent to each other. And a magnetic member that is provided so as to be substantially continuous with the magnetic member that is magnetically different from the magnetic member that forms the recording track portion and that supplies a DC magnetic field to the outside.

The method of manufacturing a magnetic disk according to the present invention comprises:
(A) a step of forming a magnetic layer made of a magnetic material on a substrate having a substantially flat surface, and (B) a part of this magnetic layer is removed so that they are substantially continuous in the track direction. Patterning a space defining adjacent recording track portions; and (C) filling the space with a magnet member made of a material magnetically different from the magnetic material and supplying a DC magnetic field to the outside. And (D) processing so that the surfaces of the magnet member and the magnetic layer are substantially flat.

The phrase "substantially continuous in the track direction" means that at least the magnetic member should be present in the recording / reproducing portion of the information signal. Therefore, the address information area and the servo information area may or may not have magnet members and are optional.

Further, the address information and the servo information may be provided by a magnet member pattern. In such a case, the magnet members in this portion may not be substantially continuous in the track direction.

The direct-current magnetic field generated from the magnet member to the outside (head direction) is generally in the direction parallel to the recording track parallel to the medium surface. However, when a longitudinal resistance type magnetoresistive reproducing element is used. It is preferable to generate it perpendicularly to the medium surface.

Further, the magnetic disk may be provided with an underlayer, a protective layer, a lubricating layer, etc., if necessary.

Co-P and Co-Ni-P are used for the magnetic member.
Plating film, Co-Ni vapor deposition film, Ba ferrite sputter film, Co-Pt, Co-Cr, Co-Ni-Cr, Co
It is desirable to use a Co-based sputtered film of —Cr—Ta and Co—Ni—Pt.

The magnet member may be made of any material as long as it has a large coercive force so that the magnetization direction does not change depending on the recording medium of the magnetic head. The magnitude of the generated magnetic field is also important, but this is not only the value of the magnetization of the magnet member (value depending on the material characteristics and manufacturing method) but also the size (width and film thickness) of the magnet member and the soft magnetic underlayer of the magnet member. It can also be adjusted by providing a membrane. For example, ferrite magnets, SmCo magnets, NdFeB magnets, and other bulk magnet materials may be thinned and used as magnet members, and mainly Pt / Co multilayer film magnets, MnBi magnets, TbCo magnets, TbFeCo magnets, and other magneto-optical recording media. High coercive force thin film materials such as those used in.

A magnetic recording apparatus according to the present invention comprises a substrate, a recording track portion provided on the substrate and made of a magnetic member for magnetically recording and reproducing information, and between the recording track portions adjacent to each other. A guard band member which is provided so as to be substantially continuous in the track direction and which is harder than the magnetic member and made of a non-magnetic material, and the magnetic band is provided in a lower region of the guard band member. A magnetic head that magnetically reads / writes information from / into a magnetic disk provided with no magnetic member or a magnetic member having a thickness different from that of the magnetic member forming the recording track portion, and an external device. And a controller for processing the write information sent thereto and sending the data-processed information to the magnetic head via a read / write circuit. A spin-valve type magnetoresistive element, which is connected to the read / write circuit and has a first magnetic layer whose magnetization is fixed in a direction perpendicular to the surface of the magnetic disk; Is provided with a second magnetic layer that changes depending on the applied magnetic field, and a non-magnetic conductive layer inserted between the second magnetic layer and the first magnetic layer.

[0047]

DETAILED DESCRIPTION OF THE INVENTION Various embodiments of the present invention will be described below with reference to the accompanying drawings.

FIG. 1 is an enlarged perspective view showing a part of a magnetic disk according to an embodiment of the present invention. In the figure, reference numeral 1a represents a substrate and reference numeral 2 represents a recording layer. The recording layer 2 includes a recording magnetic member 2a having a long strip shape in the recording track direction, and a guard band member 4a made of a material different from the recording magnetic member 2a embedded between the recording magnetic members 2a. As described above, in the recording layer 2, the magnetic members 2a and the guard band members 4a are alternately arranged periodically in the disk radial direction with the track pitch as one cycle.

The width of the band-shaped recording magnetic member 2a, that is, the recording track width is T, the width of the band-shaped guard band member 4a, that is, the guard band width is G, and the length of the recording magnetic domain is B.
Then, the track pitch is given by (T + G), and the effective recording magnetic domain area corresponding to the reciprocal of the areal density is (T + G).
G) × B. In this embodiment, a disk substrate 1a having a size of 2.5 inches was used, the recording track width T was 1.8 ± 0.1 μm, and the guard band width G was 0.2 ± 0.1 μm. These are surface recording when the aspect ratio (track pitch / shortest bit pitch) of the recording cell is set to 10 as in the current magnetic recording disk and the zone contact angular velocity (ZCAV) method is adopted for recording on the disk. The density is about 1.5 Gbpsi, which corresponds to a track pitch with a storage capacity of 1.5 GB in a drive with two disks and four surfaces.

Next, a method of manufacturing a magnetic disk will be described with reference to FIGS. The cleaned glass disk substrate 1a is placed on a processing table of a multi-source magnetron sputtering apparatus, and a CoPt (20 atomic% Pt) target is sputtered for about 1 minute to form a recording magnetic layer with in-plane magnetization of about 20 nm. 2a was formed. Further continuously SiO ₂
The target is sputtered for 1 minute to form a Si film with a thickness of about 10 nm.
An O ₂ film was formed and taken out.

Next, a positive resist 3 is spin-coated on the SiO ₂ film of the disk after the film deposition by about 50 nm and prebaked, and then the disk is cut using a master cutting device for an optical disk using a Kr laser as a light source. While rotating 1 with high precision, the track pitch is 2 μm, the exposure width is 0.2 μm (widths G ₁ , G ₂ ,
The resist 3 was exposed to light with G ₃ , ... Gn). The time required for exposing the entire surface of the disc was about 10 minutes. By subjecting to development processing, a concentric resist pattern was formed on the recording layer 2a. As shown in FIG. 2, the recording track portion 2a of the recording layer 2 was covered with the resist via the SiO ₂ film, and the portion corresponding to the guard band portion 4a was covered with only the SiO ₂ film and there was no resist.

Next, the disk 1 having this resist pattern was loaded into the RIE apparatus, and the SiO ₂ film was subjected to reactive ion etching for about 30 seconds using CHF ₃ gas. After exposing the recording layer 2a of the guard band portion 4a, the disc was loaded into a resist ashing device to remove the resist pattern on the recording track portion 2a.

Next, a disk having a SiO ₂ film pattern was placed in an RIE apparatus, the disk was heated to about 200 ° C., and a CoPt film was formed by using a mixed gas plasma containing chlorine and boron trichloride as main components. Was reactive ion etched for about 1 minute. By removing the underlying substrate surface by etching, a band-shaped guard band space was formed between the adjacent CoPt recording layers 2a as shown in FIG. Further, as shown in FIG. 4, the resist 3 was removed by an ashing device.

Next, a disk having a guard band space was placed in a sputtering apparatus, sputtered for about 2 minutes until the guard band space was completely filled, and the disk surface was covered with a SiO ₂ film as shown in FIG. . This was taken out and loaded into an ion polishing apparatus, and the disk surface was polished for about 30 seconds until the upper surface of the recording magnetic member 2a was exposed. As a result, at the same time, the SiO ₂ film 4 having an uneven surface on the recording layer is flattened. As a result, as shown in FIG. 6, a disk 1 was obtained in which belt-shaped recording magnetic members 2a and guard band members 4a were alternately exposed.

When a part of the obtained disk 1 was destroyed and the cross-sectional structure was observed by an electron microscope, as shown in FIG. 1, the recording magnetic member 2a and the guard band member 4a were substantially free of steps. It was confirmed to have a smooth surface.

The increment of the total process time in this embodiment can be sufficiently compensated by increasing the production equipment, and the increase in disk cost can be suppressed to a slight extent.

Further, in the above-mentioned embodiment, the case where the reactive ion etching is used for the patterning of the magnetic film has been described, but the ion milling method can also be used. In that case, it is not necessary to provide SiO ₂ on the magnetic film, the resist is directly coated and laser-exposed, and then the magnetic film is patterned by ion milling to remove the resist.
Io ₂ may be embedded and ion-polished. However, the processing precision of reactive ion etching was superior.

As a material for forming a mask or a guard band when patterning the magnetic film, a material other than the recording magnetic property other than SiO ₂ can be freely used, but is preferably harder than the recording magnetic member and has an insulating property. Good materials are good. The manufacturing process is not particularly limited to the material. For example, when C is used for the mask, mask patterning can be performed with an oxygen-based gas.

Using the magnetic disk of the present invention prototyped by the manufacturing method described above, a verification test was carried out to clarify the effects of the present invention in the following procedure. In the verification test described below, a magnetic recording disk was prepared according to the prior art and evaluated simultaneously for the purpose of clarifying the effect of the present invention. This conventional magnetic recording disk was taken out at the stage of forming the CoPt magnetic layer on the glass substrate by sputtering in the above-mentioned embodiment (hereinafter abbreviated as comparative disk A), 20 nm CoPt recording layer and 10 nm Si.
There are two types, that is, the O ₂ layer (which functions as a protective layer in the prior art) taken out at the stage of sputtering (hereinafter abbreviated as comparative disk B).

The results of testing the disc according to the example of the present invention (hereinafter referred to as example disc C) and the comparative discs A and B will be described below.

First, the static magnetic characteristics of the samples prepared under the same conditions as the obtained disk samples were measured using a vibrating sample magnetometer (hereinafter referred to as VSM). Since the disk sample of the present invention is provided with a non-magnetic member in the recording layer in addition to the recording magnetic member, the magnitude of the magnetization was determined by obtaining the net volume of the magnetic member based on the results of cross-section electron microscope observation. .

As a result of measuring the VSM in two ways, that is, in the direction parallel to the recording tracks on the plane in the film plane and in the direction perpendicular to the recording tracks shown in FIG. No significant difference was seen,
In Example Disk C, the magnetization of the magnetic member of the recording layer seemed to have an easy axis parallel to the track. It is considered that this is because the magnetic member had shape anisotropy parallel to the recording track, and it can be regarded as preferable for magnetic recording.

The magnitude of the saturation magnetization is the same as the disk of the embodiment C,
Comparative discs A and B were about 650 emu / cc, showing no significant difference.

The coercive force was about 2 kOe without any significant difference between the comparative discs A and B, but the value was different in the measuring direction in the disc C of the embodiment, and the magnetic field was applied in the track parallel direction. A value reflecting the shape anisotropy was 2.5 kOe and 1.5 kOe when a magnetic field was applied in the direction perpendicular to the track. It is important to have a high coercive force in order to increase the density of magnetic recording, but since the recording magnetic domains are arranged in the recording track direction, the structure of the magnetic recording disk of the present invention is high in density and the recording wavelength is shortened. However, it was found to be effective from the viewpoint of static magnetic properties.

Next, a 2.5-inch disk (lubricant was applied) for comparison with the example was installed in a magnetic disk tester to perform comparative evaluation of tracking servo accuracy and recording / reproducing operation. As the magnetic head, a lateral current-carrying magnetoresistive effect reproducing type thin film head specially manufactured for the narrow track operation of the present invention was used. To clarify the effect of the present invention, the track width of the magnetic head is 2 μm for both recording and reproduction.
And the flying height in the rated rotation operation is the disk C of the embodiment.
The comparative disk A had a thickness of 0.04 μm, and the comparative disk B had a thickness of 0.03 μm so that the head-media spacing was 0.04 μm for all disks.
In addition, a control system was used in which the magnetic head was aligned with an arbitrary radius on the disk, an appropriate signal was recorded, and the reproduction signal was tracked so as to maximize the mechanical track deviation.

First, the results of the tracking performance test will be described. The tracking characteristics after recording an appropriate signal were substantially the same in both Example disk C and Comparative disks A and B. A signal is recorded on the next track without recording on the next adjacent track, and the head is sent to the track that was not recorded to continue the rotation of the disk, and the tracking signal is obtained only from the magnetic recording signal. In the disk for use in the magnetic disk of the present invention, track deviations gradually occur due to insufficient mechanical rotation accuracy of the spindle motor, and the recording signals of the adjacent tracks are gradually reproduced. Since the magnetic signal output was completely different from that of the guard band portion even in the unrecorded track, no tracking deviation occurred. Therefore, in the magnetic disk of the present invention, it is not necessary to write the tracking servo signal in advance when the disk is driven by an actual drive, the format efficiency is improved and the user data capacity is increased, and the address signal is also magnetic when the disk is created. It is clear that there is no need for servo writing because it can be entered during film patterning.

Next, the side fringe characteristics when recording with a narrow track pitch as shown in FIG. 1 was evaluated by an off-track reproducing operation and an overwriting operation.
The magnetic head used is the same as that used for the tracking evaluation. First, after signal recording was performed on a track at an appropriate position, offset was applied to the tracking signal to gradually perform off-track, and the relationship between the off-track amount and the reproduction signal intensity was measured. As a result, in comparative disks A and B, side fringes of about 0.2 μm each occurred on both sides of the head track width as observed by a magnetic force microscope (hereinafter referred to as MFM), and therefore offtrack of about 2.2 μm was required. While the signal output was not fixed at zero level, in the disc of the present invention, side fringes did not occur at all in the MFM observation, and the signal output decreased to zero level on an off track of 2 μm, that is, an adjacent track.

Further, signal recording is performed on three adjacent tracks at the same frequency, and then 1.5 is recorded on the middle track.
As a result of recording a signal having a double frequency and examining the overwrite characteristic and the crosstalk characteristic, it was difficult to obtain a sufficient overwrite characteristic while picking up the signals of the adjacent tracks in the comparative disks A and B. In the disk of No. 3, there was no adjacent track signal and sufficient overwrite characteristics were obtained. Therefore, it was proved that the embodiment disk C has a great effect on the narrowing of the track.

Next, for the purpose of clarifying one of the further effects of the present invention, three types of disks, Example disk C and Comparative disks A and B, were subjected to a contact start / stop test (hereinafter referred to as CSS test). The wear resistance was investigated. The CSS test is to check the time (starting time) from the rotation start of the disk to the rated rotation, and 5
The state of the disk surface after the 10,000-pass test was examined by light-shielding observation. Comparison of only lubricator without protective film on flat magnetic film Disk A shows an abnormal value of several tens of seconds in starting time in about several hundred passes. Comparison with both protective film and lubricator of conventional structure Disk B had a normal startup time of about 2.5 seconds even after 50,000 passes. On the other hand, although no protective film is formed on the magnetic film of the present invention, Si
In the example disk C having the O ₂ guard band, the same result as that of the comparative disk B was obtained, and no particular abrasion was observed in the result of light-shielding observation. As a result, the embodiment disk C
Shows that the head runs while being guided by a hard guard band member even without a protective film, so it can be demonstrated that it shows the same strong abrasion resistance as with a protective film, and it is also advantageous for narrowing spacing. Was done.

Further, for the purpose of demonstrating the superiority in reproducing the magnetoresistive effect reproducing head, a running test was conducted by increasing the head load while the reproducing head was energized to bring the head into contact with the medium surface. In the comparative disk A, the reproduction signal strength dropped to less than half at the moment of contact. This is because the current is shunted to the conductive recording layer.

In the comparative disc B, the reproduction signal was not reduced even when the disc was brought into contact with the disc. However, after several tests in which the contact operation was continuously conducted, the signal suddenly disappeared. there were. Examination of the magnetic head that stopped producing signals revealed that it had reached a dielectric breakdown. It is considered that this is because the protective film of the disk has an insulating property, so that static electricity was accumulated by the rotating operation, and the static electricity was concentrated on the head to cause discharge.

On the other hand, in Example C, although the reproduction signal strength during contact travel was reduced by about 10% as compared with that during floating, no dielectric breakdown occurred even after continuous contact reproduction tests. The decrease in signal is smaller than that of the comparative disc A because the conductive recording layer is isolated by the insulating guard band, and the dielectric breakdown does not occur because the disc surface is a completely insulating protective film. This is probably because it is not covered.

In the above embodiment, Co is used as the recording magnetic material.
Although the case where Pt is used and the underlayer is not provided is described above, the present invention is not particularly limited by the kind of the recording material and the presence or absence of the underlayer, and CoNiPt, CoCrP is used as the recording material.
t, CoTaCr, CoNiCr, perpendicularly magnetized CoCr
Etc. can be used freely. Further, it can be carried out even if a NiP plated layer, a Cr orientation control layer, a NiFe soft magnetic layer, or the like is provided on the base.

Further, the guard band member is shown in FIGS.
It is not limited to those shown in. As shown in FIG. 7, a guard band member 4b having a V-shaped cross section may be provided up to the middle of the film thickness of the magnetic member 2a. Such a guard band member 4b is formed by controlling the crystal orientation of the magnetic member 2a in a predetermined direction and using a special etching method. The guard band member 4b may have an elliptical cross section instead of the V-shaped cross section.

Further, as shown in FIG. 8, the guard band member 4c having a rectangular cross section is provided on the underlayer 5 below the magnetic member 2c.
May be provided up to the boundary between the substrate 1 and the substrate 1. Such a guard band member 4c can be formed on a medium having the underlayer 5, and high-density recording / reproducing can be realized.

Further, as shown in FIG. 9, a guard band member 4d having an oval cross section may be formed so as to enter a part of the substrate 1a. Such a guard band member 4d can be formed halfway on the substrate 1a in the medium 1 having no underlying layer, and high-density recording / reproducing can be realized.

According to the present invention, by separating the recording magnetic members from each other by the hard guard band member, the side fringe is greatly reduced and the track narrowing is facilitated.
In addition, even without a protective film, high durability can be achieved, narrow spacing can be facilitated, and narrow bit pitch can be facilitated, which greatly contributes to high density magnetic recording. Furthermore, a magnetic disk capable of forming a hard guard band member and a method of manufacturing the same are provided without increasing the cost.

Further, according to the present invention, the degree of freedom with respect to the film arranged under the recording layer is high, and in the case of the in-plane medium, the orientation control film is arranged to reduce the recording magnetic thickness to a thinness suitable for high density recording. In the perpendicular medium, it is easy to strengthen the recording / reproducing magnetic field by disposing a high magnetic permeability layer under the recording layer. Further, since the CSS resistance can be greatly improved by adopting the hard guard band member, it can be sufficiently applied to the contact recording method in the future. Furthermore, if an insulative guard band member is adopted, it is possible to bring the magnetoresistive head into contact with the disk surface, which greatly contributes to higher density magnetic recording as a whole.

Next, the magnetic recording device and the magnetic head will be described with reference to FIGS.

As shown in FIG. 10, the disk 1 is placed on the turntable of the magnetic recording device 20, and the spindle motor 21 spins the disk 1. The magnetic head 22 is provided at the tip of the arm 28. The base end of the arm 28 is supported by a voice coil motor (VCM) 29.

As shown in FIG. 11, the microprocessor 35 includes a spindle driver 31 and a VCM driver 3.
9. Hard disk drive (HDD) controller 3
It is connected to each of the 3 and is adapted to send control signals to them. The microprocessor 35 executes both servo control and data processing. For example, the microprocessor 35 performs sampling 3000 times per second in order to control the operation of the VCM 29, while generating a digital signal for servo control. This digital signal is D / A converted and used for controlling the VCM driver 39. As a result, the VCM 29 as the actuator of the arm 28 is driven and controlled, and the magnetic head 22 is brought close to or in contact with a desired position on the recording surface of the disk 1. Also,
The microprocessor 35 includes a motor 21 and a spindle driver 31 so that the disk 1 rotates at a desired speed.
Control.

Further, the writing / reading process is also executed under the supervision of the microprocessor 35. That is, the microprocessor 35
A signal is exchanged with the D controller 33 to convert the data to be recorded on the disk 1 into a signal, which is sent to the magnetic head 22 via the read / write circuit 32. On the other hand, the HDD controller 33 is connected to an external host computer (not shown) via the host interface 34. The data to be recorded on the disk 1 is input from the host computer to the HDD controller 33, this input data is once sent to the microprocessor 35, and is processed by the microprocessor 35.
It is returned to the DD controller 33. The arm 28
If a plurality of heads are mounted on the microprocessor, the microprocessor 35 executes these multiplexing processing.

Next, the magnetic head will be described with reference to FIGS.

FIG. 12 is a diagram schematically showing the principle structure of the magnetic head unit 22. Magnetic head unit 2
The recording head 23 and the reproducing head 24 are mounted on the recording medium 2. The recording head 23 is a thin film type induction type head having a mechanism in which a coil is wound around a recording magnetic pole that is normally used. This recording head 23 has a terminal 25
A recording current corresponding to a data signal is supplied from a recording amplifier (not shown) via the
The data signal is recorded on the top.

The reproducing head 24 is a giant magnetoresistive head (GMR head) using a spin valve magnetoresistive element (MR element). The reproducing head 24 reproduces a data signal recorded on the magnetic disk 1 and a servo signal previously recorded before recording the data signal. A sense circuit (not shown) supplies a sense current to the MR element of the reproducing head 24 via a terminal 26. Further, a change in the magnetic resistance of the MR element due to a magnetic field based on a signal recorded on the magnetic disk 1 is taken out from the terminal 26 as a voltage change due to a sense current, that is, a voltage signal, and this voltage signal is reproduced by an amplifier (not shown). To be supplied to.

As shown in FIG. 13, the spin valve MR element of the recording head 23 has a pinned layer (first magnetic layer) 23.
a, free layer (second magnetic layer) 23b, non-magnetic conductive layer 2
3c and a pair of leads 23d. The pinned layer 23a has its magnetization fixed in the direction perpendicular to the surface of the magnetic disk 1. The magnetization of the free layer 23b changes depending on the applied magnetic field. The non-magnetic conductive layer 23c includes the pinned layer 23a and the free layer 2.
It is inserted between 3b. The pair of leads 23d are connected to both ends of the pinned layer 23a in the track width direction.
A terminal 25 is connected to each lead 23d. Each terminal 25 is connected to the read / write circuit 32.

The pinned layer 23a and the free layer 23b are made of, for example, a Co--Fe film, and the nonmagnetic conductive layer 23c is made of, for example, a Cu film. Here, the free layer 23a is oriented in the track width direction so that the magnetization is aligned parallel to the magnetic disk surface. When a signal magnetic field is applied to the MR element of the recording head 23, the magnetization direction of the free layer 23b is determined. The relationship between the magnetization direction of the free layer 23b and the magnetization direction of the pinned layer 23a is observed between the pair of leads 23d. The electric resistance of the MR element changes. This phenomenon of change in electric resistance is the giant magnetoresistive effect.

Next, another preferred embodiment of the present invention will be described with reference to FIGS.

In FIG. 14, reference numeral 1a is a substrate, reference numeral 2 is a recording layer, reference numeral 11 is a magnet member, and reference numeral 12 is a recording magnetic member. In the present embodiment, two recording magnetic members 12 are used.
A CoPt film with a thickness of 0 nm is used as the magnet member 11 with a thickness of 20 nm.
A thick TbCo film was used as the substrate 1a, and a glass substrate having a diameter of 2.5 inches was used.

The recording layer 2 is composed of the magnet member 11 and the recording magnetic member 1.
2 and 2 are alternately provided in the disk radial direction. The recording magnetic member 12 forms recording tracks T1, T2, ... Tn, respectively, and the magnet member 11 forms recording track regions M1, M2 ,.
The magnetization direction of the recording magnetic member 12 is parallel to the recording track in the case of the longitudinal recording medium, and perpendicular to the film surface in the case of the perpendicular recording medium.

On the other hand, the direction of magnetization of the magnet member 11 is perpendicular to the film surface when operated by the lateral energization type magnetoresistive head, and recorded in the film surface when operated by the longitudinal energized type magnetoresistive head. It is perpendicular to the tracks T1, T2, ... Tn. It should be noted that the magnetizing direction of the magnet member 11 is preferably set to the opposite direction for each track regardless of the lateral energizing method or the longitudinal energizing method.

The magnetic disk 1D shown in FIG. 14 can be manufactured, for example, by the following method. First, a flat CoPt film is formed on the glass substrate 1a forming a flat surface by sputtering, and a SiO ₂ film is continuously formed to a film thickness of 10 nm. Next, a resist is spin-coated on the SiO ₂ film, the resist is concentrically exposed using a laser exposure device used for cutting the master of the optical disc, and the resist is patterned by developing.

Next, the substrate 1 is loaded into the RIE apparatus, and the SiO ₂ film is etched by using CHF ₃ gas, for example. Further, the resist pattern is removed by ashing to form a SiO ₂ pattern on the CoPt film. Next, the CoPt magnetic film is etched by the RIE apparatus using a mixed gas of chlorine and boron trichloride, for example, to reach the substrate surface.

Further, a high coercive force (10
A TbCo perpendicularly magnetized film of about kOe) was formed up to a film thickness of 20 nm, and then an excess TbCo film formed on the recording magnetic member 12 was removed by using an ion polishing apparatus to obtain a magnetic disk 1D.

Since the TbCo film used as the magnet member 11 is an amorphous alloy and has a higher hardness than the CoPt film used for the recording magnetic member 12, the TbCo film was subjected to disk evaluation as it was without forming a protective film.

By the way, it is necessary to set the initial magnetization direction of the magnet member (magnet layer) 11 before using the obtained disk for evaluation. This was performed using a magneto-optical recording device equipped with an air spindle motor and capable of highly accurate positioning. First, the disk 1D is installed in the magneto-optical recording device.
Then, the recording magnetic field is applied perpendicularly to the film surface to vertically reverse the direction of the recording magnetic field for each track, and TbC
The film 11 is focused and irradiated with a semiconductor laser beam to uniformly orient the magnetization of the film upward or downward over one track.
The optical head was sent concentrically in the radial direction of the disk at a track pitch of μm. In this way, the magnet layer 11
The disk 1D in which the magnetization direction of 1 was set was installed in a magnetic recording / reproducing test device and evaluated.

FIG. 15 is a schematic diagram showing the magnetoresistive reproducing magnetic head used in the evaluation test of the magnetic disk 1D as viewed from the ABS surface of the reproducing portion. The magnetic head shown in FIG. 15 is specially manufactured in order to evaluate the magnetic disk 1D of this embodiment. In the figure, reference numeral 41 is a magnetization rotation film,
Reference numeral 42 represents a magnetization fixed film, reference numeral 7 represents a conductive non-magnetic film, reference numeral 8 represents a magnetization fixed film, and reference numeral 6 represents an electrode film.

A CoFe film was used for the magnetization rotation film 41 and the magnetization fixed film 42, Cu was used for the conductive non-magnetic film 7, FeMn was used for the magnetization fixed film 8, and Cu was used for the electrode film 6.
In the final process of trial manufacture of the head, the magnetization direction of the magnetization pinned film 8 and the magnetization pinned film 42 exchange-coupled to the magnetization pinned film 8 subjected to heat treatment in a vacuum is changed from the front side to the back side in FIG. 15 (that is, perpendicular to the medium surface). Direction).

The head actually used had an insulating film, a magnetic shield, and a CoZrNb film also serving as a lower magnetic pole for recording, and a NiFe upper magnetic pole formed through a recording gap, and had a recording / reproducing track width of 2 μm. . By rotating the magnetic disk of this embodiment, the flying height of the magnetic head is 0.04.
The recording / reproducing test was carried out by floating at μm. as a result,
In the magnetic disk of the present embodiment, the magnetic signal from the recording magnetic member 12 and the magnetic signal from the magnet member 11 are different even in the unrecorded state, so that a stable tracking operation can be realized even when no servo write is performed. I was able to. This proves one of the effects of the present invention.

Next, as shown in FIG. 16, information was recorded / reproduced on / from the magnetic disk 1D of the present embodiment by using the magnetoresistive reproducing magnetic head described above. FIG. 16 is a schematic cross-sectional view showing a state of the magnetization rotation film 41 of the head and the recording medium which travel on the recording track in the unrecorded state during operation.

Recording / reproducing operation is performed by applying a recording signal to the recording magnetic pole and laterally energizing the reproducing head electrode 6 (energizing in the direction opposite to the arrow shown in the magnetization rotation film 41 in FIG. 15). went. Magnetization rotation film 41 on the track T2
The direction of the magnetization is aligned with the direction of the leakage magnetic field from the magnet members M2 and M3, which is the direction of magnetization capable of reproducing the symmetrical waveform as described above.

Next, when the recording operation is performed, the magnetization of the magnetization rotation film 41 rotates in accordance with the leakage magnetic field from the magnetization reversal portion (upward or downward perpendicular to the medium surface), the resistance changes, and a reproduction signal having a symmetrical waveform is generated. Was obtained. When the sense current was increased, the reproduction signal intensity increased almost linearly, and the magnetization direction of the magnetization pinned film 8 was not changed because the sense current magnetic field and the magnetization direction of the magnetization pinned film 8 coincided with each other.

When the track T3 adjacent to the track T2 is operated, the magnetization direction of the magnetization rotation film 41 is opposite to that of the track T2, but the tracks T2 and T3 are equivalent in the reproducing operation. So I was able to record and play back without any problems.

Next, the reproducing head was gradually moved from the recorded track to the unrecorded track in the radial direction of the disk to examine the off-track characteristics.
It was found that the signal disappears at the feed of μm, and the disc 1D of the present embodiment is also effective in reducing the side fringe. Further, the CSS test was repeated 5,000 times, but no particular wear of the medium surface was observed. However, a CSS test was conducted by applying lubricant to the medium surface. As is clear from this, it has been found that if the magnet member 11 is harder than the recording magnetic member 12, the magnet member 11 acts as a guide rail and has an effect of improving CSS resistance.

Further, in order to improve the CSS resistance, it is effective to use a ferrite type magnet member instead of TbCo as the magnet member 11. In such a case, a practical use of about 50,000 paths without a protective film is practical. It can be expected to have excellent CSS resistance and is effective in narrowing the spacing. Incidentally, in the case of the TbCo magnet layer used in the above-mentioned examples, 1 is formed on the medium surface.
It is practically preferable to provide a SiO ₂ protective film having a thickness of about 0 nm.

(Comparative Example) The result of the experiment clarifying the effect of the present invention has been described above. As a comparative example, a conventional method was used to prepare a magnetic disk having no magnet member, which was used in the above embodiment. Evaluation was made in the same manner as in Disc 1D. The structure of the comparative disk is 20 nm CoP on a glass substrate.
A t recording layer and a 10 nm SiO ₂ protective layer are formed by sputtering, and the same lubricant as used in the disk 1D is applied thereon. The conditions for the disk operation test were that the head flying height was 0.03 μm and the spacing between the head and the medium was changed, and the disk 1D was tested.
The conditions are the same.

Comparative Example Disk to Head Magnetization Rotating Film 4
Since the magnetic field leaking to 1 is random in the unrecorded state, the magnetization direction of the magnetization rotation film 41 is, on average, the direction of the leakage magnetic field of the magnetization fixed film 8 and the magnetization fixed film 42, that is, perpendicular to the paper surface in FIG. Facing from the back). Due to this, when the magnetic field from the comparative example disk medium is directed from the front side to the back side of the paper in FIG. 15 when reproducing the recording magnetic domain sequence, the magnetization of the magnetization rotation film 41 rotates to obtain a reproduction signal. However, when going from the back to the front, the magnetization of the magnetization rotation film 41 did not rotate and no signal was obtained. That is, although the reproduction signal output was obtained with the comparative example disk, only an output corresponding to half of the magnetic transition was obtained.

Further, in the comparative disk, no tracking information can be obtained from the unrecorded track without servo write, so that track deviation gradually occurs and side fringes become large, resulting in extra noise from adjacent tracks. This causes the inconvenience of large signal mixing.

In the above examples and comparative examples, glass is used as the substrate, CoPt film is used as the recording magnetic layer, and Tb is used as the magnet layer.
Although an example in which SiO ₂ is used as the Co film and the protective film has been described, the present invention is not particularly limited to these materials, a metal such as Al is used for the substrate, and CoCrT is used for the recording magnetic member 12.
a, CoNiPt, CoCr, Ba ferrite, etc., for the magnet member 11 ferrite, SmCo, NdFe, MnB
Various materials such as i can be used as the protective film and C as the protective film. Furthermore, an orientation control layer of Cr or the like, a high magnetic permeability layer of NiFe, or the like may be disposed under the recording magnetic member 11.

Further, there are various modified examples of the cross-sectional shape of the magnet member, and it may be V-shaped or semi-circular in addition to the rectangular shape.

Further, in the magnetic disk 1D of the above-described embodiment, the depth of the region where the magnet member 11 is provided is set to be the same as the film thickness of the recording magnetic layer 12, but the depth (thickness) of the magnet member 11 is not necessarily the recording magnetic layer. It need not be the same as the thickness of layer 12. For example, in the disk 1E shown in FIG. 17, the magnet member 1
The depth of 1a is smaller than the film thickness of the recording magnetic member 12a. Further, as shown in FIG. 18, the intermediate layer (base layer) 5
In the disc 1F having the substrate 1a and the recording layer 2, the depth of the magnet member 11b may be the sum of the film thickness of the intermediate layer 3 and the film thickness of the recording magnetic member 12b. Further, in the disc 1G shown in FIG. 19, the depth of the magnet member 11c is made larger than the film thickness of the recording magnetic member 12c.

The same effect can be obtained for a magnetoresistive effect reproducing element other than the spin valve structure, for example, an anisotropic magnetoresistive film, an artificial lattice multi-layered film, a granular film, or the like. . That is, the same effect is obtained for all magnetoresistive elements that require some operating point bias to obtain the symmetry of the reproduced signal.

When the magnetic disk of this embodiment is used, in a magnetic recording / reproducing apparatus having a magnetoresistive effect reproducing head, a large sense current can be passed, so that a high reproducing signal strength can be obtained and a good reproducing signal waveform can be obtained. Since the symmetry is obtained, the reproducing operation with a small error rate can be stably performed, and the reproducing head structure is simplified, so that the head can be manufactured at low cost. Further, as an additional effect, recording with less side fringes is possible, stable tracking operation is possible, narrowing of track is facilitated, and narrow spacing operation is also possible.

[0114]

According to the present invention, by separating the recording magnetic members from each other by the hard guard band member, the side fringe is greatly reduced and the track narrowing is facilitated. In addition, even without a protective film, high durability can be achieved, narrow spacing can be facilitated, and narrow bit pitch can be facilitated, which greatly contributes to high density magnetic recording. Furthermore, a magnetic disk capable of forming a hard guard band member and a method of manufacturing the same are provided without increasing the cost.

Further, according to the present invention, the degree of freedom with respect to the film disposed under the recording layer is high, and in the case of an in-plane medium, the orientation control film is disposed to reduce the recording magnetic thickness to a thinness suitable for high density recording. In the perpendicular medium, it is easy to strengthen the recording / reproducing magnetic field by disposing a high magnetic permeability layer under the recording layer. Further, since the CSS resistance can be greatly improved by adopting the hard guard band member, it can be sufficiently applied to the contact recording method in the future. Furthermore, if an insulative guard band member is adopted, it is possible to bring the magnetoresistive head into contact with the disk surface, which greatly contributes to higher density magnetic recording as a whole.

According to the magnetic disk of the present invention, since an appropriate operating point bias is applied to the magnetoresistive head by the magnetic field of the medium, a symmetric wave type stable reproducing operation is possible even with a simple reproducing element structure. Therefore, the manufacturing of the reproducing element is simplified.

In particular, even if the servo write is not performed, stable high-precision tracking operation can be performed, recording with less side fringes can be realized, and narrow spacing operation can be easily performed. It greatly contributes to high density and high performance of magnetic recording.

[Brief description of drawings]

FIG. 1 is an enlarged perspective view showing an enlarged recording track portion by cutting out a part of a magnetic disk according to a first embodiment of the present invention.

FIG. 2 is a vertical cross-sectional view showing a disk in one step of a manufacturing process for explaining a magnetic disk manufacturing method.

FIG. 3 is a vertical cross-sectional view showing the disk in one step of the manufacturing process for explaining the method of manufacturing the magnetic disk.

FIG. 4 is a vertical cross-sectional view showing the disk in one step of the manufacturing process for explaining the method of manufacturing the magnetic disk.

FIG. 5 is a vertical cross-sectional view showing the disk in one step of the manufacturing process for explaining the method of manufacturing the magnetic disk.

FIG. 6 is a vertical cross-sectional view showing a magnetic disk.

FIG. 7 is a vertical cross-sectional view showing a magnetic disk of another embodiment.

FIG. 8 is a vertical cross-sectional view showing a magnetic disk of another embodiment.

FIG. 9 is a vertical cross-sectional view showing a magnetic disk of another embodiment.

FIG. 10 is an overall schematic perspective view of a magnetic recording device.

FIG. 11 is a configuration block diagram showing a control system of the magnetic recording apparatus.

FIG. 12 is a partially enlarged schematic view schematically showing a magnetic head unit and a magnetic disk.

FIG. 13 is a perspective view schematically showing a main part of a GMR type recording head.

FIG. 14 is an enlarged perspective view showing an enlarged recording track portion by cutting out a part of a magnetic disk according to a second embodiment of the present invention.

FIG. 15 is a longitudinal sectional view showing a magnetoresistive effect reproducing element used in an operation test for demonstrating the effect of the present invention.

FIG. 16 is a schematic diagram showing the relationship between the magnetization directions of the magnetic disk according to the second embodiment and the head in operation.

FIG. 17 is a vertical cross-sectional view showing a recording track portion of a magnetic disk according to another embodiment of the present invention.

FIG. 18 is a vertical cross-sectional view showing a recording track portion of a magnetic disk according to another embodiment of the present invention.

FIG. 19 is a longitudinal sectional view showing a recording track portion of a magnetic disk according to another embodiment of the present invention.

[Explanation of symbols]

1a ... Substrate, 2 ... Recording layer, 2a ... Recording magnetic member, 3 ... Resist layer, 4a ... Guard band member, 5 ... Underlayer, 6 ...
Reproducing head electrode (Cu electrode film), 7 ... Conductive non-magnetic film (Cu film), 8 ... Magnetization fixed film, 11, M2, M3, M
4, M5 ... Magnet member (TbCo film), 12 ... Recording magnetic member (CoPt film), 41 ... Magnetization rotating film, 42 ... Magnetization fixed film.

Claims (17)

[Claims] 1. A substrate, a recording track portion formed on the substrate and made of a magnetic member for magnetically recording and reproducing information, and a substantially continuous track direction between the recording track portions adjacent to each other. And a guard band member that is harder than the magnetic member and is made of a non-magnetic material, and the magnetic member does not exist in the lower region of the guard band member, or A magnetic member having a thickness different from that of the magnetic member forming the recording track portion. 2. The magnetic disk according to claim 1, wherein an electric resistance of the guard band member is larger than an electric resistance of a magnetic member forming the recording track portion. 3. The magnetic disk according to claim 1, wherein a disk surface formed by the magnetic member and the guard band member is substantially flat. 4. The magnetic disk according to claim 1, wherein the thickness of the guard band member is substantially the same as the thickness of the magnetic member forming the recording track portion. 5. The magnetic disk according to claim 1, wherein the thickness of the guard band member is smaller than the thickness of the magnetic member forming the recording track portion. 6. The guard band member is thicker than the magnetic member forming the recording track portion, and a part of the guard band member is embedded in the substrate. Magnetic disk. 7. Further, N is provided between the magnetic member and the substrate.
An underlayer made of any one of an iP plated layer, a Cr orientation control layer and a NiFe soft magnetic layer is provided, and the thickness of the guard band member is the sum of the thickness of the underlayer and the thickness of the magnetic member. 2. The magnetic disk according to claim 1, which is substantially the same as 8. A substrate, a recording track portion made of a magnetic member for magnetically recording and reproducing information provided on the substrate, and the recording track portions which are adjacent to each other are substantially continuous in the track direction. And a magnetic member that is made of a material that is magnetically different from the magnetic member that forms the recording track portion and that supplies a DC magnetic field to the outside. 9. The magnetic disk according to claim 8, wherein the disk surface formed by the magnetic member and the magnet member is substantially flat. 10. The magnetic disk according to claim 8, wherein the thickness of the magnet member is substantially the same as the thickness of the magnetic member forming the recording track portion. 11. The magnetic disk according to claim 8, wherein the thickness of the magnet member is smaller than the thickness of the magnetic member forming the recording track portion. 12. The magnetic material according to claim 8, wherein the thickness of the magnet member is larger than the thickness of the magnetic member forming the recording track portion, and a part of the magnet member is embedded in the substrate. disk. 13. An underlayer made of any one of a NiP plating layer, a Cr orientation control layer and a NiFe soft magnetic layer is further provided between the magnetic member and the substrate, and the magnet member has a thickness of 9. The magnetic disk according to claim 8, wherein the total thickness of the underlayer and the magnetic member is substantially the same. 14. The magnetic disk according to claim 8, wherein the magnet member is made of a material having a coercive force of such a magnitude that the magnetization direction is not changed by the recording magnetic head. 15. A step of: (a) forming a magnetic layer made of a magnetic material on a substrate having a substantially flat surface; Patterning guard band spaces that define recording track portions adjacent to each other so as to be continuous; (c) this guard band space is made of a material that is harder than the magnetic material that forms the magnetic layer and is non-magnetic A method of manufacturing a magnetic disk, comprising: a step of filling with a guard band member; and (d) a step of processing so that the surfaces of the guard band member and the magnetic layer are substantially flat. 16. (A) A step of forming a magnetic layer made of a magnetic material on a substrate having a substantially flat surface, and (B) a part of this magnetic layer is removed so as to be substantially in the track direction. Patterning a space that defines adjacent recording track portions so as to be continuous with each other, and (C) a magnet that is made of a material that is magnetically different from the magnetic material and that supplies a DC magnetic field to the outside. A method of manufacturing a magnetic disk comprising: a step of filling with a member; and a step (D) of processing so that the surfaces of the magnet member and the magnetic layer are substantially flat. 17. A substrate, a recording track portion provided on the substrate and made of a magnetic member for magnetically recording and reproducing information, and a substantially continuous track direction between the recording track portions adjacent to each other. And a guard band member that is harder than the magnetic member and is made of a non-magnetic material, and the magnetic member does not exist in the lower region of the guard band member, or , A magnetic head magnetically reading and writing information on a magnetic disk provided with a magnetic member having a thickness different from that of the magnetic member forming the recording track portion, and writing information sent from an external device. A controller for processing the data and sending the data-processed information to the magnetic head through a read / write circuit, wherein the magnetic head is a spin valve type magnetoresistive element. This spin-valve magnetoresistive element is connected to the read / write circuit and has a first magnetic layer whose magnetization is fixed in a direction perpendicular to the surface of the magnetic disk, and the magnetization is changed by an applied magnetic field. A magnetic recording device comprising: a second magnetic layer; and a non-magnetic conductive layer inserted between the second magnetic layer and the first magnetic layer.