CN100354936C - Information recording medium, recording/reproducing apparatus, and stamper - Google Patents

Abstract

On an information recording medium, a data track pattern and a servo pattern composed of a concave/convex pattern including a plurality of convex parts are formed on at least one surface side of a substrate and respective concave parts in the concave/convex pattern are filled with non-magnetic material. In the concave/convex pattern that constructs the data track pattern, the respective convex parts are formed concentrically or in a spiral. The concave/convex pattern that constructs the servo pattern is divided into a plurality of ring-shaped regions that are concentric with the data track pattern and has a unit convex part length along a direction of rotation of the substrate set in each ring-shaped region so that a value produced by dividing an average length of the unit convex part length in each ring-shaped region by a distance from a center of the data track pattern to the ring-shaped region decreases from ring-shaped regions in an inner periphery to ring-shaped regions in an outer periphery.

Description

Carrier, record regenerator and stamper

Technical field

The present invention relates to utilize convex-concave pattern to form data track figure and servo figure and nonmagnetic substance is imbedded carrier in each recess of convex-concave pattern, have this carrier record regenerator, and make the stamper that this carrier is used.

Background technology

As record regenerator, in Japanese patent laid-open 9-97419 communique, disclosed (the Japanese: the magnetic recording that disk constituted of type デ イ ス Network リ one ト ト ラ Star Network) that has discrete track with this carrier.This occasion, disk are formed the recording track (banded protuberance) of concentric circles in the one side side of glass disk substrate (base material) by record magnetic component (magnetic material).Again, between each recording track (recess), imbed the protection frequency band member (nonmagnetic substance) that is used to improve the flatness of disk and makes adjacent magnetic magnetic track magnetic resolution, form protection frequency band portion.When the manufacturing of this disk, at first, at the one side side spraying plating magnetic material of base material and form the record magnetosphere.Then, with after covering the magnetospheric state of record the eurymeric protective seam being carried out preliminary drying as spin coating, use the former dish cutter sweep pair figure identical to describe and carry out the video picture processing with the figure of protection frequency band portion.Thus, on the record magnetosphere, form the protective seam figure.Then, after the protective seam figure is carried out etch processes as mask to the record magnetosphere, utilize sanding apparatus that residual mask is removed, thus, on base material, form recording track and the servo figure (protuberance) that constitutes by magnetic material.Then, spraying plating nonmagnetic substance on the base material of this state.At this moment, the recess between each recording track is buried with nonmagnetic substance, and spraying plating nonmagnetic substance fully, until each recording track being covered with nonmagnetic substance.Then, carry out dry etch process, the upper surface of recording track is exposed from nonmagnetic substance by surface to the nonmagnetic substance after the spraying plating.Thus, recording track becomes the alternately state of adjacency with protection frequency band portion, finishes disk.

[patent documentation 1] Japanese patent laid-open 9-97419 communique (the 6th～12 page, Fig. 1～19)

Yet, the problem below in disk in the past, existing.Promptly, in disk in the past, after with the state spraying plating nonmagnetic substance that covers record magnetosphere (recording track), nonmagnetic substance is carried out dry etch process, till the upper surface of the protuberance that makes recording track and servo figure etc. exposes, and make flattening surface.But, in the occasion of making disk according to this manufacture method, outer circumferential side at disk, residual in large quantities nonmagnetic substance (the following nonmagnetic substance that will remain on the protuberance is called " residue ") on the formed protuberance with magnetic material becomes the state that protuberance is covered by thick nonmagnetic substance sometimes.

Specifically, for example, as shown in figure 29, according to the disk 10x that above-mentioned manufacture method is made, be to make with being formed with the state that is specified on the sense of rotation (direction of the arrow R shown in this figure) that shape alternately is arranged in disk 10x by the track pattern zone At of the convex-concave pattern 20t that a plurality of recording track constituted of concentric circles and the servo figure zone Asx that is formed with the convex-concave pattern 20sx that tracking servo uses.This occasion in the record regenerator after having carried this disk, generally is that disk is rotated with certain angular velocity.Therefore, in this disk 10x, with time per unit by the length on the disk 10x of magnetic head (not shown) below be directly proportional ground, will become interior all sides from disk 10x more to the long more state of outer circumferential side (servo figure zone Asx is just wide more to the outer circumferential side of disk 10x more) along the length legislations of the servo figure zone Asx of the sense of rotation of disk 10x.Specifically, as Figure 30, shown in Figure 32, compare with the length of interior all side servo figures zone Asxi among interior all lateral areas territory Axi, length one side of the outer circumferential side servo figure zone Asxo among the Axo of outer circumferential side zone be directly proportional with the distance of convex-concave pattern 20t decentering O (with reference to Figure 29) elongated.Again, in this disk, on the equidistant position of decentering O, will be at the protuberance 21sxi among the servo figure zone Asx (convex-concave pattern 20sx), the unit protuberance length along sense of rotation of 21sxo (following be also referred to as when not needing to distinguish " protuberance 21sx ") (detects the length of the benchmark of " 1 protuberance is arranged ": Figure 31 when reading magnetic signal, L1xi in 33, L1xo) and recess 22sxi, the unit recess length along sense of rotation of 22sxo (following be also referred to as when not needing to distinguish " recess 22sx ") (detects the length of the benchmark of " 1 recess is arranged ": Figure 31 when reading magnetic signal, L2xi in 33, L2xo) be specified to equal state.Its result, in this disk 10x, to the whole zone of outer circumferential side, unit protuberance length becomes 1 with the ratio of unit recess length in all sides in it.

Therefore, as Figure 31, shown in Figure 33, in this disk 10x, compare with the length L 1xi of protuberance 21sxi among interior all side servo figure zone Asxi, the side of the length L 1xo of the protuberance 21sxo among the Asxo of outer circumferential side servo figure zone be directly proportional with the distance of convex-concave pattern 20t decentering O elongated.This occasion, the applicant finds: nonmagnetic substance 15 is being carried out dry etch process and making each protuberance 21sx, 21sx ... when exposing, thereunder the length of the protuberance 21sx of Cun Zaiing long more (width of the upper surface of protuberance 21sx is wide more), to the etched progress of nonmagnetic substance 15 with regard to slack-off phenomenon.Therefore, as shown in figure 31, in the short interior all side servo figures zone Asxi of its length L 1xi, the residue on the protuberance 21sxi (nonmagnetic substance 15) removed and under become well at interior all side flatness of disk 10x (value of surface roughness Ra diminishes: or concavo-convex difference of height Hxi diminishes) such etching condition, to from interior all sides of disk 10x when etch processes is carried out in the whole zone of outer circumferential side, as shown in figure 33, in the long outer circumferential side servo figure zone Asxo of its length L 1xo, become the state of the thicker residue (nonmagnetic substance 15) of on protuberance 21sxo existence.Therefore, after under such etching condition nonmagnetic substance 15 being carried out etch processes, the surface roughness Ra of the outer circumferential side of disk 10x (or concavo-convex difference of height Hxo) becomes very big.Like this, on disk 10x in the past, at its outer circumferential side, the nonmagnetic substance 15 that reason is thick causes the state that protuberance 21sxo covers, and exists the problem in the obvious more deterioration of flatness of outer circumferential side (distance of decentering O is long more) disk 10x.

In disk in the past, in its manufacturing process, after using former dish cutter sweep that exposure figure is described on the aspect of the eurymeric protective seam that will write down the formation of magnetosphere covering shape, form the protective seam figure by the video picture processing again.This occasion and since for exposure figure describe need be to a certain degree time, the record magnetosphere carried out the protective seam figure (mask) that etch processes uses become difficult so will form in the short time.Therefore, preferably this point is improved.

Summary of the invention

The present invention, in view of such problem makes, its fundamental purpose is, be provided in it all sides to the whole zone of outer circumferential side flatness good information recording medium, have flatness good information recording medium record regenerator, and can form the stamper of the convex-concave pattern that etch processes uses easily in the short time.

The carrier of the present invention that can achieve the above object, data track figure and servo figure have been formed by convex-concave pattern in the side of one side at least of base material with a plurality of protuberances, and in each recess of this convex-concave pattern, imbed nonmagnetic substance, in the convex-concave pattern that constitutes described data track figure, described each protuberance forms concentric circles or spiral fashion, the convex-concave pattern that constitutes described data track figure and described servo figure is divided into a plurality of annular sections concentric with described data track figure, and, in constituting the convex-concave pattern of described servo figure, the unit protuberance length of each annular section is specified to: is this annular section from this annular section of interior all side towards outer circumferential side and more and more littler along the average length of unit protuberance length in this each annular section of sense of rotation divided by the resulting value of distance till from the center of this data track figure to this annular section along described base material.In addition, for " each protuberance is formed concentric circles or spiral helicine data track figure " in this manual, comprise that the recess that utilizes convex-concave pattern will be arranged in the data track figure of concentric circles or spiral helicine figure medium with respect to the separated protuberance as the unit record key element of both sides of the radial direction of carrier and sense of rotation.Again, what is called in this manual " unit protuberance length " is meant the length that detects the benchmark of " 1 protuberance is arranged " usefulness when the magnetic signal that reads from carrier.Therefore, in the carrier of reality, according to the content of servo data, the protuberance of the length of the integral multiple of formation unit protuberance length constitutes servo figure.This occasion, length for the benchmark that detects " 1 protuberance is arranged " usefulness, in servo figure integral body, also can be specified to 1 general length, can also (preposition (Japanese: プ リ ア Application Block Le) figure, address figure and segmentation (Japanese: バ one ス ト) figure etc.) be specified to different length with each figure according to the kind of the various figures that constitute servo figure.Generally the formation position of protuberance is detected as " output of detection signal is arranged " or " detection signal that signal level is high " again.Again, " from the center of data track figure to the distance of annular section " of this instructions for example not only comprises: " from the center of data track figure to the distance at interior all positions of annular section ", " from the distance at center to the most peripheral position of annular section of data track figure " also comprise " central portion that makes progress to the footpath of annular section from the center of data track figure grade the distance at position arbitrarily " etc.But, the position of stipulating this distance in all annular sections as identical position.

Carrier of the present invention, its unit protuberance length and unit recess length thereof are specified to, described unit protuberance length and the ratio of described base material along the unit recess length of sense of rotation, outer circumferential side to this annular section is more little more from interior all sides of this annular section in described annular section, thereby forms the convex-concave pattern that constitutes described servo figure.In addition, the what is called in this instructions " unit recess length " is meant the length that detects the benchmark of " 1 recess is arranged " usefulness when the magnetic signal that reads from carrier.Therefore, in the carrier of reality, according to the content of servo data, the recess of the length of the integral multiple of formation unit recess length constitutes servo figure.This occasion, length for the benchmark that detects " 1 recess is arranged " usefulness, in servo figure integral body, also can be specified to 1 general length, can also be specified to different length to each figure according to the kind (preposition figure, address figure and piecewise graph etc.) of the various figures that constitute servo figure.Generally the formation position of recess is detected as " output of no detection signal " or " detection signal that signal level is low " again.

In addition, carrier of the present invention, described unit recess length is defined as, and all sides are long more towards the described outer circumferential side of this annular section more in this annular section described in described annular section, thereby form the convex-concave pattern that constitutes described servo figure.

In addition, carrier of the present invention, described unit protuberance length is specified to, all sides become equal lengths or length about equally to the whole zone of the described outer circumferential side of this annular section in this annular section described in described annular section, thereby form the convex-concave pattern that constitutes described servo figure.In addition, in the present invention, become the state that error is arranged in a certain annular section slightly in the unit protuberance length on the convex-concave pattern even produce the foozle of minimum degree, these length (will as the specified length of manufacturing objective as the length in the specialized range at center) are also included within the category of equal lengths.Again, for " length about equally " in this instructions, comprise with as the specified length of manufacturing objective as beyond center, the foozle by the length in the permissible range of the small amplitude of regulation originally.

Again, carrier of the present invention, the combined length of described unit protuberance length and described unit recess length is specified to, in described annular section, be directly proportional with distance from described center, long more to the described outer circumferential side of this annular section more from described interior all sides of this annular section, thus the convex-concave pattern that constitutes described servo figure formed.In addition, in the present invention, even produce the foozle of minimum degree, become the length that fine difference is arranged with the length that is directly proportional with respect to the excentric distance of data track figure in a certain annular section at the combined length of unit protuberance length on the convex-concave pattern and unit recess length, the unit protuberance length in this convex-concave pattern and the combined length of unit recess length are also included within the category of the length that is directly proportional with excentric distance.

Again, carrier of the present invention, described unit protuberance length is specified to, in described annular section, be directly proportional with distance from described center, long more to the outer circumferential side of this annular section more from interior all sides of this annular section, simultaneously, this unit protuberance length and this unit recess length are specified to, the combined length along the unit recess length and the described unit protuberance length of sense of rotation of described base material, in this annular section, be directly proportional with distance from described center, long more to the described outer circumferential side of this annular section more from described interior all sides of this annular section, thus the convex-concave pattern that constitutes described servo figure formed.In addition, in the present invention, even produce the foozle of minimum degree, becoming the length that is directly proportional with distance from the data track centre of figure in a certain annular section in the unit protuberance length on the convex-concave pattern has the length of fine difference, and the unit protuberance length in this convex-concave pattern is also included within the category of the length that is directly proportional with excentric distance.In addition, in the present invention, even produce the foozle of minimum degree, becoming length that combined length in unit protuberance length on the convex-concave pattern and unit recess length is directly proportional with distance from the data track centre of figure in a certain annular section has the length of fine difference, and the unit protuberance length in this convex-concave pattern is also included within the category of the length that is directly proportional with excentric distance with the combined length of unit recess length.

In addition, carrier of the present invention, the described unit described average length of protuberance length in described annular section is specified to, become equal lengths or length about equally the whole annular section till from described interior all annular sections of surveying to the annular section of described outer circumferential side, thereby form the convex-concave pattern of the described servo figure of formation.In addition, in the present invention, become the state that error is arranged slightly in the unit average length of protuberance length in annular section on the convex-concave pattern even produce the foozle of minimum degree, these average lengths (will as the specified length of manufacturing objective as the length in the specialized range at center) are also included within the category of equal lengths.

Again, carrier of the present invention, its unit protuberance length is defined as, the value that described unit protuberance length is obtained divided by the distance from described center, in described annular section in this annular section described all sides the described outer circumferential side to this annular section is more little more, thereby form the convex-concave pattern that constitutes described servo figure.

And, carrier of the present invention, its unit recess length is defined as, the value that the unit recess length along sense of rotation of described base material is obtained divided by the distance from described center, in described annular section in this annular section described all sides the described outer circumferential side to this annular section is more little more, thereby form the convex-concave pattern that constitutes described servo figure.

In addition, carrier of the present invention, described unit protuberance length is specified to, all sides become equal lengths or length about equally to the whole zone of the described outer circumferential side of this annular section in this annular section described in described annular section, thereby form the convex-concave pattern that constitutes described servo figure.In addition, in the present invention, become the state that error is arranged in a certain annular section slightly in the unit protuberance length on the convex-concave pattern even produce the foozle of minimum degree, these length (will as the specified length of manufacturing objective as the length in the specialized range at center) are also included within the category of equal lengths.

And, carrier of the present invention, described unit recess length is specified to, all sides become equal lengths or length about equally to the whole zone of the described outer circumferential side of this annular section in this annular section described in described annular section, thereby form the convex-concave pattern that constitutes described servo figure.In addition, in the present invention, become the state that error is arranged in a certain annular section slightly in the unit recess length on the convex-concave pattern even produce the foozle of minimum degree, these length (will as the specified length of manufacturing objective as the length in the specialized range at center) are also included within the category of equal lengths.

Again, record regenerator of the present invention has: above-mentioned any carrier; Carry out servo-controlled control part according to the servo data corresponding with described servo figure.

Again, record regenerator of the present invention has: above-mentioned any carrier; The read frequency information of predesignating according to described each annular section ((when reading) employed frequency information that becomes the time clock benchmark when the detection of servo figure), read the servo data corresponding and carry out servo-controlled control part with described servo figure from described carrier.

Again, record regenerator of the present invention has: above-mentioned any carrier; According to the read frequency information of predesignating from the distance at described center, read the servo data corresponding and carry out servo-controlled control part with described servo figure from described carrier.

Again, stamper of the present invention, be formed with convex-concave pattern, this convex-concave pattern has: the protuberance of the corresponding formation of the recess with described convex-concave pattern on above-mentioned any carrier and the recess of the corresponding formation of the protuberance with described convex-concave pattern on the described carrier.

Adopt carrier of the present invention and record regenerator, at each annular section unit protuberance length legislations is become, the average length of the unit protuberance length in each annular section is become annular section from interior all sides more to the more little state of the annular section of outer circumferential side divided by center to the resulting value of the distance of annular section from the data track figure, thereby form the convex-concave pattern that constitutes servo figure, thus, become the disk 10x in the past that forms convex-concave pattern from interior all sides to outer circumferential side with unit protuberance length gradually elongatedly and compare, the unit protuberance length in the annular section of outer circumferential side can be made enough weak points.Therefore, when the aspect of the nonmagnetic substance that forms covering each protuberance is carried out etch processes, the situation that can avoid poor (that is, the thickness of the residue on the protuberance of residue thickness on the protuberance of interior all sides of carrier and carrier outer circumferential side is poor) of the residue thickness on the protuberance in the annular section of residue thickness on the protuberance in the annular section of outer circumferential side and interior all sides to increase.Again, from the annular section of interior all sides to the whole zone of the annular section of outer circumferential side, when on each protuberance, the nonmagnetic substance etch processes being become not have nonmagnetic substance (residue), can the residue on each protuberance be removed in the annular section of avoiding in interior all sides not only under nonmagnetic substance but also the also etched situation of protuberance.Thus, can in whole zone, keep the flatness of carrier well.Therefore, in the whole zone of carrier, can roughly keep the float-amount of the relative carrier of magnetic head comparably, its result adopts the record regenerator with this carrier, can carry out stable record regenerating.

Adopt carrier of the present invention and record regenerator, unit protuberance length and unit recess length are specified to, unit protuberance length is with respect to the ratio of unit recess length, outer circumferential side to annular section is more little more from interior all sides of annular section in each annular section, thereby the unit protuberance length of the outer circumferential side in each annular section can be made enough weak points.Thus, can be in annular section from interior all sides of annular section to the whole zone of the outer circumferential side of annular section keep the flatness of carrier well.Therefore, in each annular section from interior all sides of annular section to the whole zone of the outer circumferential side of annular section, can roughly keep the magnetic head float-amount of this carrier relatively comparably, its result can carry out stable record regenerating.

And, adopt carrier of the present invention and record regenerator, by the unit recess length is specified to, interior all sides from annular section in annular section are long more to the outer circumferential side of annular section more, for example, the unit recess length is specified to, interior all sides from annular section in annular section are equal lengths to the whole zone of the outer circumferential side of annular section, with by changing unit protuberance length, the unit's of making protuberance length is different to the more little structure of the outer circumferential side of annular section more from interior all sides of annular section with the ratio of unit recess length, can avoid taking place in the excessively short state of affairs of outer circumferential side unit's protuberance length of annular section.Therefore, can avoid reliably generation from the read error of the magnetic signal of the protuberance of the outer circumferential side of annular section.

Adopt carrier of the present invention and record regenerator, by unit protuberance length legislations is become, interior all sides from annular section in annular section are equal lengths to the whole zone of the outer circumferential side of annular section, the protuberance in each annular section (magnetic material) can be gone up the thickness of the residue (nonmagnetic substance) that forms and keep evenly to the whole zone of the outer circumferential side of annular section in the interior all sides from annular section.When nonmagnetic substance being carried out etch processes so do not produce residue on can each protuberance for the interior all sides in annular section, the state of affairs generation that can avoid the etched state of affairs of protuberance of the outer circumferential side in this annular section reliably and on the protuberance of outer circumferential side, produce residue, do not produce residue on each protuberance for the outer circumferential side in annular section and when nonmagnetic substance carried out etch processes, the state of affairs that can avoid the etched state of affairs of interior all side protuberances in this annular section reliably and produce residue on the protuberance of interior all sides takes place.

And, adopt carrier of the present invention and record regenerator, by (promptly with the combined length of unit protuberance length and unit recess length, the formation spacing of protuberance and recess) is specified to, be directly proportional with distance from the data track centre of figure, interior all sides from annular section in annular section are long more to the outer circumferential side of annular section more, carrier is not changed in 1 annular section while the frequency information that is rotated the benchmark that makes the time clock that becomes use when servo data is read in the servo figure zone (read frequency information) under angular velocity is certain condition, and (detection) servo data is read in interior all sides of the annular section from this annular section to the servo figure zone of the outer circumferential side of annular section reliably.Therefore, for example, magnetic head need not searched the frequency hand-off process of the read frequency information in when action from interior all sides to the outer circumferential side of annular section, its result, but the short time carry out and search action.Therefore, can carry out data access at high speed.In addition, as read frequency information,, therefore can carry out tracking servo by the control part of easy structure as long as can export the frequency information of the kind corresponding with the number of annular section.

Adopt carrier of the present invention and record regenerator, by unit protuberance length and unit recess length are specified to, unit protuberance length is in annular section, be directly proportional with distance from the data track centre of figure, long more to the outer circumferential side of annular section more from interior all sides of annular section, and the combined length of unit recess length and unit protuberance length, in annular section, be directly proportional with distance from the data track centre of figure, long more to the outer circumferential side of annular section more from interior all sides of annular section, thereby can be when the elongated state of affairs of unit protuberance length in the annular section of avoiding at outer circumferential side takes place, the frequency of read frequency information does not change in 1 annular section, can read servo data in the case, for example, can not need the frequency hand-off process of read frequency information when the outer circumferential side from interior all sides of annular section to annular section makes magnetic head search action.Therefore, but the short time carry out and to search action.Therefore, can carry out data access at high speed.In addition, as read frequency information, as long as export the frequency information of the kind corresponding, so can carry out tracking servo by the control part of easy structure with the number of annular section.Adopt this carrier and record regenerator, the protuberance that can the unit's of making protuberance length and the recess of unit recess length equate by the interior all sides and the outer circumferential side of time in 1 annular section of magnetic head below.Therefore, can make the whole zone from interior all sides to outer circumferential side of signal shape in 1 annular section of the unit protuberance length of the servo data that magnetic head detects and unit recess length and equate.Therefore, can read (detection) servo data more reliably.

And, adopt carrier of the present invention and record regenerator, by the average length in the annular section of unit protuberance length is specified to, to the whole annular section of the annular section of outer circumferential side, become equal lengths or length about equally at annular section from interior all sides, can be (promptly at all annular sections from the annular section of interior all sides to the annular section of outer circumferential side, the whole zone of carrier) in, flatness does not produce inequality, can keep well.Its result in the whole zone of carrier, can keep the float-amount of the relative carrier of magnetic head equably.

Adopt carrier of the present invention and record regenerator, by unit protuberance length legislations is become, outer circumferential side to annular section is more little more divided by become in annular section interior all sides from annular section from the resulting value of the distance of data track centre of figure with unit protuberance length, compare with the elongated disk 10x in the past that forms convex-concave pattern that is directly proportional along the unit protuberance length of sense of rotation and distance (unit's of making protuberance length equates to the whole zone of the outer circumferential side of annular section divided by becoming from interior all sides of annular section from the resulting value of the distance of data track centre of figure), the unit protuberance length of the outer circumferential side in the annular section can be made enough weak points from the data track centre of figure.Therefore, when the aspect of the nonmagnetic substance that forms covering each protuberance is carried out etch processes, can avoid the situation of the difference increase of the residue thickness on the protuberance of residue thickness and interior all sides on the protuberance of the outer circumferential side in the annular section.Again, in annular section from interior all sides of annular section to the whole zone of the outer circumferential side of annular section, when on each protuberance, the nonmagnetic substance etch processes being become not have nonmagnetic substance (residue), can, the residue on each protuberance be removed not only under nonmagnetic substance but also the also etched situation of protuberance (magnetic material) in interior all sides of annular section avoiding.Thus, can be in annular section from interior all sides of annular section to the whole zone of the outer circumferential side of annular section keep the flatness of carrier well.Therefore, can be in annular section from interior all sides of annular section to the whole zone of the outer circumferential side of annular section, can keep the float-amount of the relative carrier of magnetic head comparably, its result adopts this record regenerator, can carry out stable record regenerating.

Adopt carrier of the present invention and record regenerator, by the unit recess length is specified to, outer circumferential side to annular section is more little more divided by become in annular section interior all sides from annular section from the resulting value of the distance of data track centre of figure with the unit recess length, and formation constitutes the convex-concave pattern of servo figure, compare with the elongated carrier in the past (disk 10x) that forms convex-concave pattern that is directly proportional along the unit recess length of the sense of rotation of base material and distance (unit's of making recess length is divided by equating in the whole zone that becomes from the resulting value of the distance of data track centre of figure from interior all sides to outer circumferential side), the unit recess length of the outer circumferential side in the annular section can be made enough weak points from the data track centre of figure.This occasion, the applicant finds: at the position that exists along the excessively long recess of the length of sense of rotation, with respect to the slack-off phenomenon of etched progress of the nonmagnetic substance on the protuberance that clips this recess formation.On the other hand, according to this carrier, as mentioned above, the unit recess length of each recess is enough short, so can not cause the situation slack-off to take place with respect to the etched progress of the nonmagnetic substance on the protuberance, can carry out etch processes to layer of non-magnetic material, its result can avoid the situation of the difference increase of the residue thickness on the protuberance of residue thickness and interior all sides on the protuberance of the outer circumferential side in the annular section.Again, the whole zone in annular section from interior all sides to outer circumferential side, when on each protuberance, the nonmagnetic substance etch processes being become not have nonmagnetic substance (residue), can, the residue on each protuberance be removed not only under nonmagnetic substance but also the also etched situation of protuberance (magnetic material) in interior all sides of annular section avoiding.Thus, can be in annular section from interior all sides of annular section to the whole zone of the outer circumferential side of annular section further keep the flatness of carrier well.

Again, adopt carrier of the present invention and record regenerator, to the whole zone of the outer circumferential side of annular section, become the convex-concave pattern that equal lengths forms the formation servo figure by the interior all sides from annular section of the unit's of being specified to protuberance length in annular section, can from interior all sides of annular section to the whole zone of the outer circumferential side of annular section, keep etching condition (etch-rate) equably for the nonmagnetic substance on each protuberance (magnetic material).Therefore, can make the difference of the residue thickness on the protuberance of the residue thickness on the protuberance of the outer circumferential side in the annular section and interior all sides enough little.Again, in the interior all sides in annular section to the whole zone of outer circumferential side, when on each protuberance, the nonmagnetic substance etch processes being become not have nonmagnetic substance (residue), not only nonmagnetic substance but also the yet etched situation of protuberance (magnetic material) can not take place in the interior all sides at annular section, in this wise the residue on each protuberance are removed.Thus, can be in annular section, better and keep the flatness of carrier more equably from interior all sides of annular section to the whole zone of the outer circumferential side of annular section.Its result, in the annular section of carrier from interior all sides of annular section to the whole zone of the outer circumferential side of annular section, can keep the float-amount of the relative carrier of magnetic head equably.

And, adopt carrier of the present invention and record regenerator, to the whole zone of the outer circumferential side of annular section, become the convex-concave pattern that equal lengths forms the formation servo figure by the interior all sides from annular section of the unit's of being specified to recess length in annular section, can from interior all sides of annular section to the whole zone of the outer circumferential side of annular section, keep equably for the etching condition (etch-rate) of clamping the nonmagnetic substance on each protuberance (magnetic material) that each recess forms.Therefore, can make the difference of the residue thickness on the protuberance of the residue thickness on the protuberance of the outer circumferential side in the annular section and interior all sides enough little.Again, in the interior all sides in annular section to the whole zone of outer circumferential side, when on each protuberance, the nonmagnetic substance etch processes being become not have nonmagnetic substance (residue), not only nonmagnetic substance but also the yet etched situation of protuberance (magnetic material) can not take place in the interior all sides at annular section, in this wise the residue on each protuberance are removed.Thus, can be in annular section better and keep the flatness of carrier more equably from interior all sides of annular section to the whole zone of the outer circumferential side of annular section.

Again, adopt record regenerator of the present invention, the read frequency information of predesignating according to each annular section, the servo data corresponding with servo figure read from carrier by control part, for example, can reduce with the number of times of the detection of magnetic head when to the annular section of outer circumferential side, carrying out hunting action in the annular section of interior all sides of carrier with the frequency hand-off process of time clock.Thus, because of carrying out hunting action, so can carry out data access at a high speed with the short time.

Again, adopt record regenerator of the present invention, according to the read frequency information of predesignating accordingly from the distance at the center of data track figure, the servo data corresponding with servo figure read from carrier by control part, carrier is rotated under angular velocity is certain condition and can reads servo figure (servo data) reliably.

Again, adopt stamper of the present invention, owing to have convex-concave pattern, this convex-concave pattern has the protuberance of the corresponding formation of the recess with convex-concave pattern on above-mentioned any carrier, and recess on the described carrier and the corresponding formation of protuberance described convex-concave pattern, therefore, paint device in that to handle the manufacture method of the convex-concave pattern that forms etch processes and use (convex-concave pattern that uses as mask when forming the etch processes of servo figure etc.) different by exposure figure being described carry out video picture on the resin bed of the intermediate of carrier manufacturing usefulness with for example using the electronics line drawing, only need the convex-concave pattern of stamper is just pushed and can easily be formed the convex-concave pattern that etch processes is used with the short time to resin bed.Utilize 1 stamper on a large amount of intermediates, to form the convex-concave pattern that etch processes is used again.Therefore, the manufacturing cost of carrier is reduced fully.

Description of drawings

Fig. 1 is the block scheme of the structure of expression hard disk drive 1,1b.

Fig. 2 is the cut-open view of the deck structure of expression disk 10a～10e.

Fig. 3 is the vertical view of disk 10a.

Fig. 4 is the vertical view of the servo figure zone Asa among the disk 10a.

Fig. 5 is the vertical view of the interior all lateral areas territory Aia in the annular section Aa.

Fig. 6 is the cut-open view of interior all side servo figures zone Asai of interior all lateral areas territory Aia.

Fig. 7 is the vertical view of the outer circumferential side zone Aoa in the annular section Aa.

Fig. 8 is the cut-open view of the outer circumferential side servo figure zone Asao among the outer regions Aoa.

Fig. 9 is a cut-open view of making the intermediate 30 that disk 10a uses.

Figure 10 is irradiating electron beam EB and describe the cut-open view of the intermediate 30 of exposure figure state on resin bed 19.

Figure 11 is that the resin bed 19 with state shown in Figure 10 carries out the intermediate 30 after video picture is handled and the convex-concave pattern 39 of stamper 35a (35b, 35c) is replicated in the cut-open view of the intermediate 30 of state on the resin bed 19.

Figure 12 carries out etch processes as mask to Si mask layer 18 with convex-concave pattern 41 and the cut-open view that forms the intermediate 30 of convex-concave pattern 42 (Si mask) state on C mask layer 17.

Figure 13 carries out etch processes as mask to C mask layer 17 with convex-concave pattern 42 and the cut-open view that forms the intermediate 30 of convex-concave pattern 43 (C mask) state on magnetosphere 14.

Figure 14 carries out etch processes as mask to magnetosphere 14 with convex-concave pattern 43 and the cut-open view that forms the intermediate 30 of convex-concave pattern 20 back states on middle layer 13.

Figure 15 is that the convex-concave pattern 39 of stamper 35a (35b, 35c) is back (with protuberance 39a, 39a to resin bed 19 extruding ... behind resin bed 19 impressions) intermediate 30 of state and the cut-open view of stamper 35a (35b, 35c).

Figure 16 is the vertical view of expression disk 10b.

Figure 17 is the vertical view of the servo figure zone Asb among the disk 10b.

Figure 18 is the vertical view of the interior all lateral areas territory Aib in the annular section Ab.

Figure 19 is the cut-open view of interior all side servo figures zone Asbi of interior all lateral areas territory Aib.

Figure 20 is the vertical view of the outer circumferential side zone Aob in the annular section Ab.

Figure 21 is the cut-open view of the outer circumferential side servo figure zone Asbo among the Aob of outer circumferential side zone.

Figure 22 is the vertical view of the servo figure zone Asc among the disk 10c.

Figure 23 is the vertical view of the interior all lateral areas territory Aic in the annular section Ac.

Figure 24 is the cut-open view of interior all side servo figures zone Asci of interior all lateral areas territory Aic.

Figure 25 is the vertical view of the outer circumferential side zone Aoc in the annular section Ac.

Figure 26 is the cut-open view of the outer circumferential side servo figure zone Asco among the Aoc of outer circumferential side zone.

Figure 27 is the cut-open view of the deck structure of expression disk 10d.

Figure 28 is the cut-open view of the deck structure of expression disk 10e.

Figure 29 is the vertical view of disk 10x in the past.

Figure 30 is the vertical view of the interior all lateral areas territory Axi on the disk 10x.

Figure 31 is the cut-open view of the interior all side servo figures zone Asxi on interior all lateral areas territory Axi.

Figure 32 is the vertical view of the outer circumferential side zone Axo on the disk 10x.

Figure 33 is the cut-open view of the outer circumferential side servo figure zone Asxo on the Axo of outer circumferential side zone.

Embodiment

Below, describe with reference to the optimal morphology of accompanying drawing carrier of the present invention, record regenerator and stamper.

Hard disk drive 1 shown in Figure 1, be that its structure has as the magnetic recorder/reproducer of an example of record regenerator of the present invention: spindle motor 2, magnetic head 3, signal transformation portion 4, detection time clock efferent 5, servo data test section 6, driver 7, control part 8, ROM9 and disk 10a.This occasion, as an example, disk 10a is the disk (patterned medium) of the discrete track-type that can write down record data with perpendicular recording, and is suitable with carrier of the present invention.Specifically, as shown in Figure 2, this disk 10a, the order of pressing soft ferromagnetic layer 12, middle layer 13 and magnetosphere 14 on glass baseplate 11 forms.This occasion, formed magnetosphere 14 on middle layer 13 is by using the formed protuberance 21,21 of magnetic material ... with recess 22,22 ... alternately form and the convex-concave pattern 20 of formation regulation.Again, at recess 22,22 ... in, imbed SiO ₂Deng nonmagnetic substance 15.In addition, on the nonmagnetic substance 15 and protuberance 21 in imbedding recess 22, utilize the CVD method that the film of similar adamantine carbon (DLC) is carried out film forming, form the protective seam (DLC film) 16 of thickness 2nm degree as an example.Again, on this disk 10a, application of lubricating on the surface of protective seam 16 (is the lubricant of fluorine system as an example).

Glass baseplate 11 is suitable with base material of the present invention, and it is 0.2～0.3nm degree that the glass pane surface of 2.5 inches of diameters is ground to form surface roughness Ra, makes thickness form the degree of 0.6mm.In addition, base material of the present invention is not limited to glass material, can form with the various nonmagnetic substances of aluminium or pottery etc.Soft ferromagnetic layer 12, the soft magnetic material by spraying plating CoZrNb alloy etc. forms the degree that thickness is 100nm～200nm.Middle layer 13 is to play the layer as the function of basalis that is used to form magnetosphere 14, and the middle layer by spraying plating Cr or CoCr nonmagnetic alloy etc. forms and forms the degree that thickness is 40nm with material.Magnetosphere 14 is the protuberances 21,21 that formed by magnetic material ... the layer that is constituted; as described later, for example processing by carrying out spraying plating CoCrPt alloy and protective seam figure etc. carried out etch processes to form recess 22,22 as mask ... this order of processing, form protuberance 21,21 ... (convex-concave pattern 20) and constitute.

This occasion, as shown in Figure 3, in this disk 10a, be divided into center O with convex-concave pattern 20 (convex-concave pattern 20t) and be the center concentric circles (promptly, 20t is concentric with convex-concave pattern) 4 annular section A1a～A4a (example of a plurality of annular sections of the present invention: the following annular section Aa that is also referred to as when not distinguishing), form convex-concave pattern 20 (convex-concave pattern 20t, convex-concave pattern 20sa).But, the number of " a plurality of annular section " of the present invention is not limited to above-mentioned 4, interior all sides to the outer circumferential side of disk 10a can be divided into the number arbitrarily more than 2.In addition, among this disk 10a, track pattern zone At, At ... between servo figure zone Asa, Asa are set ..., be specified to sense of rotation (to the direction of arrow R) at track pattern zone At and servo figure zone As and go up alternately and arrange at disk 10a.

Again, as Fig. 5, shown in Figure 7, in track pattern zone At (the interior all side track pattern zone Ati of the interior all sides among each annular section Aa and the outer circumferential side track pattern zone Ato of the outer circumferential side among each annular section Aa), be formed with convex-concave pattern 20t as the data track figure.This occasion, convex-concave pattern 20t is many protuberance 21t, the 21t of the concentric circles of center O (with reference to Fig. 3) by the rotation center with disk 10a ... (data recording magnetic track: below be also referred to as " recording track ") and each protuberance 21t, 21t ... between recess 22t, 22t ... constitute.In addition, preferably the rotation center of disk 10a is consistent with the center O of convex-concave pattern 20t, but in fact, tends to produce the minimum deviation of 30～50 μ m degree that cause because of foozle.Yet,, be actually same so rotation center and center O be we can say if the departure of this degree can be carried out sufficient tracking servo control to magnetic head 3.Again, at recess 22t, the 22t of convex-concave pattern 20t ... in imbed nonmagnetic substance 15, make the flattening surface of track pattern zone At.

Again, as Fig. 4～shown in Figure 8, in servo figure zone Asa (the interior all side servo figure zone Asai of the interior all sides among each annular section Aa and the outer circumferential side servo figure zone Asao of the outer circumferential side among each annular section Aa), be formed with convex-concave pattern 20sa as servo figure.This occasion, shown in Fig. 5～8, convex-concave pattern 20sa is by protuberance 21s, the 21s of the various servo figures that constitute preposition figure, address figure and piecewise graph etc.. (protuberance 21si and protuberance 21so) and recess 22s, 22s ... (recess 22si and recess 22so) constitutes.Again, in this disk 10a, combined length (the formation spacing of protuberance 21s and recess 22s promptly) along the length of the length of the protuberance 21s of sense of rotation (the arrow R direction among each figure) and recess 22s is defined as, in each annular section Aa, be directly proportional with the distance of convex-concave pattern 20t decentering O, elongated gradually from interior all sides of annular section Aa towards outer circumferential side.Therefore, as shown in Figure 4, each annular section Aa, longer slightly along the length L 4o of the outer circumferential side of length in annular section Aa of sense of rotation than the length L 4i of interior all sides.

In this disk 10a, with each protuberance 21s, 21s ... form, length along the protuberance 21s of sense of rotation, to the whole zone of outer circumferential side, become equal lengths (example of being defined as among the present invention " unit protuberance length is equal lengths or length about equally ") in interior all sides from annular section Aa, and each recess 22s, 22s ... form, along the length of the recess 22s of sense of rotation, elongated gradually towards outer circumferential side in interior all sides from each annular section Aa.Therefore, among this disk 10a, be defined as along the length of the protuberance 21s of sense of rotation and the length ratio of recess 22s, in each annular section Aa, all sides diminish gradually towards its outer circumferential side in it.And in this disk 10a, the length that is defined as protuberance 21s becomes equal lengths in all annular section Aa.Its result, among this disk 10a, the average length of protuberance 21s in each annular section Aa becomes equal in all annular section Aa, and, the average length of protuberance 21s in each annular section Aa is become annular section A1a from interior all sides divided by the resulting value of distance (as an example, as the position in interior week among the annular section Aa) from the center O of convex-concave pattern 20t to annular section Aa, and the annular section A4a to outer circumferential side is more little more.As shown in Figure 4, in this disk 10a, be defined as length L 4i, the L4i of interior all sides of each annular section Aa ... equate each other, be defined as length L 4o, the L4o of the outer circumferential side of each annular section Aa ... equate each other.

Specifically, as Fig. 5, shown in Figure 6, interior all lateral areas territory Aia in each annular section Aa is (as an example, the distance that is the decentering O in the annular section A1a is the formation zone of the preposition figure at 11mm position) in, the length L 2i of recess 22si (is 220nm as an example) and the combined length L3i of the length L 1i (is 220nm as an example) of protuberance 21si are specified to 440nm.Again, as Fig. 7, shown in Figure 8, outer circumferential side zone Aoa in each annular section Aa is (as an example, the distance that is the decentering O in the annular section A1a is the formation zone of the preposition figure at 16mm position) in, the length L 2o of recess 22so (is 420nm as an example) becomes 640nm with the combined length L3o of the length L 1o (is the 220nm that equates with the length L 1i of protuberance 21si as an example) of protuberance 21so.Its result, as shown in Figure 6, in this disk 10a, in each annular section Aa, the length L 1i of the protuberance 21si of convex-concave pattern 20sa in being somebody's turn to do in all lateral areas territory Aia is 1 with the ratio of the length L 2i of recess 22si, and as shown in Figure 8, the length L 1o of the protuberance 21so in the Aoa of outer circumferential side zone is 11/21 with the ratio of the length L 2o of recess 22so.

This occasion for the length (unit protuberance length) of the protuberance 21s ratio with the length (unit recess length) of recess 22s, is not only similarly stipulated to above-mentioned preposition figure but also to the convex-concave pattern 20sa that constitutes address figure or piecewise graph.Again, for piecewise graph, along on the sense of rotation of disk 10a with protuberance 21s, the 21s of a plurality of rectangles ... accompany in the zone of arranging on recess 22s shape ground, the ratio of unit protuberance length and unit recess length is specified to and satisfies above-mentioned condition.In addition, in Fig. 7, Fig. 8,, length L 1o and the ratio of the length L 2o of recess 22so of protuberance 21so are exaggerated into the state (length of recess being exaggerated into the state of lengthening) that diagram reduces for the ease of understanding the present invention.In addition, among Fig. 5～Fig. 8, preposition figure and piecewise graph in the pattern ground diagram servo figure are for the ease of understanding, along each protuberance 21s, 21s of sense of rotation ... and each recess 22s, 22s ... length only made diagram with the unit protuberance length and the unit recess length of servo figure.Therefore, in the disk 10a of reality, protuberance 21s, 21s ... and recess 22s, 22s ... number, to form the position different with the state shown in each figure with length, with comprise tracking servo control in the various controls of information (figure) of required track address and sector address etc. corresponding with data, to the number separately of protuberance 21s and recess 22s, form position and length and stipulate and form convex-concave pattern 20sa.This occasion, the physical length of protuberance 21s and recess 22s becomes the length of integral multiple of the length (unit protuberance length and unit recess length) of protuberance 21s and recess 22s.

On the other hand, spindle motor 2 carries out constant speed rotation as an example with the rotating speed of 4200rpm with disk 10a under the control of control part 8.Magnetic head 3 is installed on the actuator 3b by rocking arm 3a as shown in Figure 1, moves on disk 10a when disk 10a being carried out the record regenerating of record data.Again, magnetic head 3 is carried out be servo figure zone Asa from each annular section Aa of disk 10a carry out the reading of servo data, to the zone of the track pattern among each annular section Aa At ( protuberance 21t, 21t ...) magnetic of carrying out record data writes, the record data that write among the track pattern zone At among each annular section Aa by magnetic are read.In addition, in fact magnetic head 3 is formed on the bottom surface (air-bearing surface) of the slide block that makes magnetic head 3 relative disk 10a come-up usefulness, omits for the explanation and the diagram of this slide block.Actuator 3b makes rocking arm 3a swing by the drive current of being supplied with from driver 7, thereby the arbitrarily record regenerating position of magnetic head 3 on disk 10a is moved under the control of control part 8.

Signal transformation portion 4 has (not shown) such as amplifier, LPF (Low Pass Filter) and A/D transducers, utilizes magnetic head 3 to amplify from the obtained various signals of disk 10a, carries out the A/D conversion and export after noise is removed.ROM9,8 exportable time clock data Dc1 about the read frequency information are stored in each annular section Aa with control part.This occasion, control part 8 as described later, according to time clock data Dc1, as an example, frequency does not change in same annular section Aa, and change read frequency information frequency so that the recording track in the annular section Aa that leaves center O of convex-concave pattern 20t when connecting (on) magnetic track frequency high more, and to detecting with 5 outputs of time clock efferent.Detect with time clock efferent 5, obtain the read frequency information of control part 8 according to time clock data Dc1 output, and from the numerical data of being exported by signal transformation portion 4, obtain the data (signal) of the preposition usefulness that (detecting) read from the servo figure of each annular section Aa zone Asa by magnetic head 3.Again, detect with time clock efferent 5, carry out the adjustment of phase place or frequency etc. according to the data of read frequency information and preposition usefulness, employed detection time clock C1s when being created on actual servo data detection is to 6 outputs of servo data test section.

This occasion, in this disk 10a, as mentioned above, 20sa forms with convex-concave pattern, makes length L 4i, L4i among each annular section Aa ... equate each other, and length L 4o, L4o ... equate each other.Therefore, make disk 10a carry out constant speed when rotation, making the time of servo figure zone Asa by the below of magnetic head 3 become more short more time just to the annular section Aa of outer circumferential side with the certain rotational speed of angular velocity.Therefore, control part 8, as an example, carry out with 4200rpm at disk 10a under the state of constant speed rotation, when connecting magnetic track on the recording track (protuberance 21t) of magnetic head 3 in annular section A1a, the read frequency information of output 22MHz, when connecting magnetic track on the recording track of magnetic head 3 in annular section A2a, the read frequency information of output 32MHz, when connecting magnetic track on the recording track in annular section A3a, the read frequency information of output 42MHz, when connecting magnetic track on the recording track in annular section A4a, the read frequency information of output 52MHz.

Servo data test section 6 by synchronously reading in time clock C1s with the detection of being exported with time clock efferent 5 from detection, is obtained (detecting) servo data Ds from the numerical data of being exported by signal transformation portion 4, to control part 8 outputs.Driver 7 is controlled actuator 3b according to the control signal from control part 8, makes magnetic head 3 connect magnetic track on required recording track (protuberance 21t).8 pairs of hard disk drives 1 of control part are totally controlled.Again, control part 8, according to the head position information of being exported from servo data test section 6, whether magnetic head 3 is being connected magnetic track is carried out specific from each the annular section Aa of the interior all sides on the disk 10a to the recording track in a certain annular section Aa between each annular section Aa of outer circumferential side, and according to the position of required magnetic head 3 (will make the annular section Aa that magnetic head 3 moves and the position of recording track), predesignated at each annular section Aa, and be stored in time clock data Dc1 among the ROM9 (about the data of frequency change condition), make the frequency change of read frequency information as described above like that, to detecting with 5 outputs of time clock efferent.In addition, control part 8 is controlled driver 7 according to the servo data Ds that is exported from servo data test section 6.

Then, describe with reference to the manufacture method of accompanying drawing disk 10a.

At first, after forming soft ferromagnetic layer 12 by spraying plating CoZrNb alloy on the glass baseplate 11, on soft ferromagnetic layer 12, form and form middle layer 13 with material by the spraying plating middle layer.Secondly, on middle layer 13, form the magnetosphere 14 that thickness is the 15nm degree by spraying plating CoCrPt alloy.Then, on magnetosphere 14, for example utilize metallikon to form C (carbon) mask layer 17 of thickness 12nm degree, and on C mask layer 17, utilize metallikon to form the Si mask layer 18 of thickness 4nm degree.Then, the electronics line protective seam to eurymeric on Si mask layer 18 is rotated coating, forms the resin bed 19 (mask forms and uses functional layer) of thickness 130nm degree.Thus, finish the intermediate 30 that manufacturing disk 10a uses as shown in Figure 9.Then, as shown in figure 10, use the electronics line drawing to paint device, the exposure figure identical with the flat shape of convex-concave pattern 20sa and convex-concave pattern 20t is depicted on the resin bed 19 intermediate 30 irradiating electron beam EB.Then, carry out the video picture processing, as shown in figure 11, on Si mask layer 18, form convex-concave pattern 41 (protective seam figure) by the resin bed 19 that will finish after exposure figure is described.

Then, convex-concave pattern 41 (resin bed 19) is used as mask, by carrying out the ion beam milling processing that argon (Ar) gas produces, recess 41b, 41b on convex-concave pattern 41 ... the bottom on to from mask (protuberance 41a, 41a ...) the Si mask layer 18 that exposes carries out etching, as shown in figure 12, on Si mask layer 18, form convex-concave pattern 42 (Si mask pattern).Then, convex-concave pattern 42 is used as mask, by carrying out with the reactive ion etch process of oxygen as reacting gas, recess 42b, 42b on convex-concave pattern 42 ... the bottom on to from mask (protuberance 42a, 42a ...) the C mask layer 17 that exposes carries out etching, as shown in figure 13, on C mask layer 17, form convex-concave pattern 43 (C mask pattern).Then, as mask, utilize the ion beam milling of argon (Ar) gas to handle convex-concave pattern 43.Thus, as shown in figure 14, the position that is covered by mask pattern on magnetosphere 14 is (by protuberance 43a, the 43a of convex-concave pattern 43 ... the position that covers) becomes protuberance 21,21 ... from position that mask pattern exposes (at recess 43b, the 43b of convex-concave pattern 43 ... the bottom on the position of exposing) become recess 22,22 ..., on middle layer 13, form convex-concave pattern 20 (convex-concave pattern 20sa, 20t).Then, at protuberance 21,21 ... go up residual C mask layer 17 (C mask pattern), by carrying out that the reactive ion etch process of oxygen as reacting gas made protuberance 21,21 ... upper surface expose (residual C mask layer 17 is removed).

Then, for example the substrate bias electric power with the 150W degree applies to intermediate 30, and sets the pressure of argon (Ar) gas for for example 0.3Pa, and spraying plating is as the SiO of nonmagnetic substance 15 ₂At this moment, utilize nonmagnetic substance 15 with recess 22,22 ... bury fully, and, according at protuberance 21,21 ... the upper surface aspect spraying plating nonmagnetic substance 15 like that fully that forms the nonmagnetic substance 15 of thickness 60nm degree for example.This occasion, intermediate 30 being applied under the state of substrate bias electric power, by spraying plating nonmagnetic substance 15, the surface can not produce the aspect that big sag and swell becomes nonmagnetic substance 15.Then, set the pressure of argon (Ar) gas for for example 0.04Pa, and the incident angle on the surface of relative intermediate 30 (aspect of nonmagnetic substance 15) with ion beam is set under the state of 2 degree, to (protuberance 21,21 on the magnetosphere 14 ... upward, recess 22,22 ... go up and the inside of recess 22,22) the aspect of nonmagnetic substance 15 carry out the ion beam milling processing.At this moment, on the interior all sides in each the annular section Aa on intermediate 30 (position of all lateral areas territory Aia in becoming thereafter), to each protuberance 21si, 21si ... upper surface proceed ion beam milling and handle until exposing from nonmagnetic substance 15.

This occasion, in this disk 10a (intermediate 30), with protuberance 21si, the 21si of the interior all sides in each annular section Aa ... length L 1i and protuberance 21so, the 21so of outer circumferential side in the annular section Aa ... length L 1o form equal lengths (in this example for 220nm).Again, among this disk 10a, with the protuberance 21si, the 21si that own (that is whole zones of disk 10a) of annular section A1a～A4a ... length L 1i and protuberance 21so, the 21so of outer circumferential side ... length L 1o form equal lengths.Therefore, by each protuberance 21si, 21si to the interior all sides among a certain annular section Aa ... upper surface proceed ion beam milling and handle until exposing from nonmagnetic substance 15, make each protuberance 21si, the 21si of the interior all sides among all annular section Aa ... and each protuberance 21so, the 21so of the outer circumferential side among all annular section Aa ... upper surface also expose (all annular section Aa from nonmagnetic substance 15, promptly, in the whole zone of disk 10a, the upper surface of protuberance 21si, 21so roughly side by side exposes).Thus, finish ion beam milling processing, make the flattening surface of intermediate 30 aspect of nonmagnetic substance 15.Then, by adopting the CVD method film of similar adamantine carbon (DLC) being carried out film forming, with the surface coverage of intermediate 30, after forming protective seam 16, for example is that the 2nm degree is coated on the surface of protective seam 16 with the lubricant of fluorine system with average thickness.Thus, as shown in Figure 2, finish disk 10a.

In this disk 10a, as previously mentioned, in the whole zone of disk 10a (among all annular section Aa), because of each protuberance 21s, 21s ... on nonmagnetic substance 15 (residue) be removed, therefore, the lip-deep concavo-convex difference of height (the difference of height Hi of the interior all sides among the annular section Aa and the difference of height Ho of outer circumferential side) of disk 10a becomes roughly even in the whole zone of disk 10a (all annular section Aa).Specifically, for example, the concavo-convex degree on the surface of the disk 10a of the interior all lateral areas territory Aia among the annular section A1a, promptly, surface roughness Ra is about 0.7nm, the surface roughness Ra of the disk 10a of outer circumferential side zone Aoa in annular section A1a is (in other annular sections Aa, the surface roughness Ra of the surface roughness Ra of interior all lateral areas territory Aia and outer circumferential side zone Aoa is 0.7～0.8nm degree) about 0.8nm.Therefore, from interior all sides of disk 10a to all annular section Aa of outer circumferential side, the float-amount of magnetic head 3 (slide block) is roughly certain, can carry out stable record regenerating.

On the other hand, among the disk 10x according in the past manufacture method manufacturing, in interior all lateral areas territory Axi that the length L 1xi along sense of rotation lacks, under the state that the upper surface of protuberance 21sxi is exposed, the surface roughness Ra of the disk 10x among interior all lateral areas territory Axi becomes the 0.7nm degree.To this, among the outer circumferential side zone Axo that being directly proportional ground with the distance of convex-concave pattern 20t decentering O at length L 1xo, grows than interior all lateral areas territory Axi,, the residue thickening on the protuberance 21sxo becomes the 3.1nm degree because of making the surface roughness Ra of disk 10x along sense of rotation.This occasion, in periphery lateral areas territory Axo, expose under such etching condition when nonmagnetic substance 15 carried out etch processes from nonmagnetic substance 15 at the upper surface of protuberance 21sxo, from interior all sides of disk 10x to the whole zone of outer circumferential side, the nonmagnetic substance in the recess 22sx 15 is carried out the etching meeting its flatness is worsened.Again, when under etching condition as described above nonmagnetic substance 15 being carried out etch processes, protuberance 21sxi is exceedingly etched in interior all lateral areas territory Axi, might be difficult to the signal of magnetic is normally read.Therefore, in the disk 10x of basis manufacture method manufacturing in the past, be difficult to carry out servo data Ds is read normally, and to the whole zone of outer circumferential side, be difficult to the float-amount homogenising that realization makes magnetic head 3 (slide block) in interior all sides from disk 10x.

Like this, adopt this disk 10a and hard disk drive 1, at each annular section Aa be with unit protuberance length legislations, the value that the average length of the unit protuberance length in each annular section Aa is obtained divided by the distance of annular section Aa decentering O becomes annular section Aa from interior all sides, and the annular section Aa to outer circumferential side is more little more, form the convex-concave pattern 20sa that constitutes servo figure with this, thus, become from interior all sides of disk 10x with unit protuberance length and to compare, the unit protuberance length among the annular section Aa of outer circumferential side can be made enough weak points towards the disk 10x in the past that outer circumferential side forms convex-concave pattern gradually elongatedly.Therefore, to covering each protuberance 21,21 ... when the aspect of the nonmagnetic substance 15 that shape forms is carried out etch processes, can avoid the situation of the difference increase of the residue thickness on the protuberance 21s among the annular section Aa of residue thickness and interior all sides on the protuberance 21s among the annular section Aa of outer circumferential side.Again, from the annular section Aa of interior all sides to the whole zone of the annular section Aa of outer circumferential side, at each protuberance 21s, 21s ... when upward nonmagnetic substance 15 etch processes being become not have nonmagnetic substance 15 (residue), in the annular section Aa of interior all sides, avoid not only nonmagnetic substance 15 but also the also etched situation of protuberance 21s (magnetic material), with this with each protuberance 21s, 21s ... on residue remove.Thus, can in whole zone, keep the flatness of disk 10a well.Therefore, in the whole zone of disk 10a, can roughly keep the float-amount of magnetic head 3 relative disk 10a comparably, its result adopts this hard disk drive 1, can carry out stable record regenerating.

Again, adopt this disk 10a and hard disk drive 1, unit protuberance length and unit recess length are defined as, all sides are more little to its outer circumferential side more in becoming in each annular section Aa the ratio of unit protuberance length and unit recess length from it, form convex-concave pattern 20sa (servo figure) in this wise, thus, the unit protuberance length of the outer circumferential side in each annular section Aa can be made enough weak points.Therefore, keep the flatness of disk 10a can the whole zone in annular section Aa well from interior all sides to outer circumferential side.Therefore, the whole zone from interior all sides to outer circumferential side in each annular section Aa, can roughly keep the float-amount of magnetic head 3 relative disk 10a comparably, its result can carry out stable record regenerating.

And, adopt this disk 10a and hard disk drive 1, the unit recess length is defined as, in annular section Aa from it in all sides long more to its outer circumferential side more, form convex-concave pattern 20sa (servo figure) with this, thus, for example, be defined as in the whole zone from interior all sides to outer circumferential side of the unit's of making recess length in annular section Aa and become equal length, with become from the more little structure of the past more outer circumferential side of interior all sides of annular section Aa differently by the ratio that changes the protuberance length unit of making of unit protuberance length and unit recess length, can avoid the outer circumferential side in annular section Aa, the excessively short state of affairs of unit protuberance length takes place.Therefore, can avoid generation reliably from the readout error of the magnetic signal of the protuberance of the outer circumferential side among the annular section Aa.

Again, adopt this disk 10a and hard disk drive 1, with unit protuberance length legislations be, interior all sides in annular section Aa become equal length to the whole zone of outer circumferential side, form convex-concave pattern 20sa (servo figure) in this wise, can the whole zone of annular section Aa, keep the thickness of the residue (nonmagnetic substance 15) that the protuberance 21s among each annular section Aa forms equably from interior all sides to outer circumferential side.Again, each protuberance 21si for the interior all sides in annular section Aa, 21si ... on do not produce residue and when nonmagnetic substance 15 carried out etch processes, can avoid the etched state of affairs generation of protuberance 21so (magnetic material) of the outer circumferential side among this annular section Aa and the state of affairs generation that on the protuberance 21so of outer circumferential side, produces residue, each protuberance 21so for the outer circumferential side in annular section Aa, 21so ... on do not produce residue and when nonmagnetic substance 15 carried out etch processes, can avoid the etched state of affairs of protuberance 21si (magnetic material) of the interior all sides among this annular section Aa to take place and the state of affairs that produces residue on the protuberance 21si of interior all sides takes place.

And, adopt this disk 10a and hard disk drive 1, by (promptly with the combined length of unit protuberance length and unit recess length, the formation spacing of protuberance and recess) is specified to, be directly proportional to the distance of center O with convex-concave pattern 20t, in annular section Aa, all sides are long more to its outer circumferential side more in it, form convex-concave pattern 20sa (servo figure) with this, making disk 10a is not change in 1 annular section Aa while the frequency information (read frequency information) that is rotated the benchmark that makes the time clock that becomes use when servo figure zone Asa reads servo data Ds under certain condition at angular velocity, and the interior all sides from annular section Aa are read (detection) servo data Ds to the servo figure zone Asa of outer circumferential side reliably.

In addition, adopt this disk 10a and hard disk drive 1, average length by being specified to the unit protuberance length in each annular section Aa becomes equal length or length about equally from the annular section A1a of interior all sides to the whole regional Aa of the annular section A4a of outer circumferential side, thereby form the convex-concave pattern 20sa that constitutes servo figure, can make on the flatness of each annular section Aa and not produce deviation, whole regional Aa from the annular section A1a of interior all sides to the annular section A4a of outer circumferential side keeps flatness (that is the whole zone from interior all sides of disk 10a to outer circumferential side) well.Its result in the whole zone of disk 10a, can keep the float-amount of magnetic head 3 with respect to disk 10a equably.

And, the hard disk drive 1 of this disk 10a has been loaded in employing, the read frequency information that control part 8 is predesignated according to each annular section Aa, servo data test section 6 is controlled, by read the servo data Ds corresponding from disk 10a with servo figure, the number of times of the frequency hand-off process of the read frequency information when for example, the annular section A4a of magnetic head 3 from the annular section A1a of interior all sides of disk 10a to outer circumferential side being searched action can be limited in 3 times.Therefore, but the short time carry out and to search action.Therefore, can carry out data access at high speed.In addition, as read frequency information, as long as can export the frequency information of the kind corresponding, so can carry out tracking servo by the control part (detection) of easy structure with time clock efferent 5 and control part 8 with the number (in this example being 4) of annular section.

Below, describe with reference to other the manufacture method of accompanying drawing disk 10a.In addition, for the operation same, omit the detailed description of its repetition with aforesaid manufacture method.

In the manufacture method of aforesaid disk 10a; for the resin bed on the intermediate 30 19; handle by after using the electronics line drawing to paint device to describe exposure figure, carrying out video picture; formed the convex-concave pattern 41 (protective seam figure) that etch processes is used, but the manufacture method of carrier of the present invention is not limited to this as mask.For example, also can adopt imprinting method also can on the resin bed 19 of intermediate 30, form convex-concave pattern 41 as the use stamper 35a (with reference to Figure 15) of stamper one example of the present invention.This occasion, as shown in figure 15, stamper 35a can form the convex-concave pattern 39 that concavo-convex position relation and the convex-concave pattern 20 (convex-concave pattern 20t, 20sa) on disk 10a overturn.In addition, the convex-concave pattern 39 of stamper 35a, its protuberance 39a, 39a ... with the recess 22,22 on the convex-concave pattern 20 of disk 10a ... correspondence, its recess 39b, 39b ... with the protuberance 21,21 on the convex-concave pattern 20 ... form accordingly.Therefore, on this stamper 35a, protuberance 39a along the length of sense of rotation and the recess 22 on the convex-concave pattern 20 along the length of sense of rotation about equally, and recess 39b along the length of sense of rotation and the protuberance 21 on the convex-concave pattern 20 along the length of sense of rotation about equally.In addition, the qualification especially of manufacture method for stamper 35a can utilize known various manufacture method to make.

When using this stamper 35a to make disk 10a, as shown in figure 15, at first, adopt the imprinting method that the convex-concave pattern 39 of stamper 35a is replicated on the resin bed 19 of intermediate 30.Specifically, the resin bed 19 that faces intermediate 30 by the formation with the convex-concave pattern on the stamper 35a 39 pushes, with protuberance 39a, the 39a of convex-concave pattern 39 ... resin bed 19 to intermediate 30 is pressed into.Secondly, from intermediate 30 stamper 35a is peeled off, and the resin (residue: not shown) that utilizes oxygen plasma treatment will remain on the bottom surface is removed.Thus, as shown in figure 11, on the Si of intermediate 30 mask layer 18, form convex-concave pattern 41.Then, convex-concave pattern 41 as mask, by Si mask layer 18 is carried out etching, is formed convex-concave pattern 42 on C mask layer 17, convex-concave pattern 42 as mask, by C mask layer 17 is carried out etching, is formed convex-concave pattern 43 on magnetosphere 14.Then, convex-concave pattern 43 as mask, by magnetosphere 14 is carried out etching, is formed convex-concave pattern 20 on middle layer 13.Then, with aforesaid manufacture method similarly behind the spraying plating nonmagnetic substance 15, the aspect of nonmagnetic substance 15 is carried out ion beam milling handles and make planarization.Then, utilize the CVD method that the film of similar adamantine carbon (DLC) is carried out film forming and forms protective seam 16, and with the lubricant applying of fluorine system on the surface of protective seam 16.Thus, finish disk 10a as shown in Figure 2.

Like this, adopt and make the stamper 35a that disk 10a uses, owing to formed convex-concave pattern 39, this convex-concave pattern 39 have with disk 10a on convex-concave pattern 20 (convex-concave pattern 20t, recess 22 20sa), 22 ... the corresponding protuberance 39a that forms, 39a ... with with disk 10a on the protuberance 21 of convex- concave pattern 20,21 ... the corresponding recess 39b that forms, 39b ... therefore, with for example use the electronics line drawing paint device on the resin bed 19 of intermediate 30 by to convex-concave pattern 20sa, the exposure figure that the 20t flat shape is identical is described to carry out video picture and is handled the manufacture method difference that forms convex-concave pattern 41, only needs the convex-concave pattern 39 of stamper 35a just can easily be formed convex-concave pattern 41 with the short time to resin bed 19 extruding.Utilize 1 stamper 35a can on many intermediates 30, form convex-concave pattern 41 again.Therefore, the manufacturing cost of disk 10a is reduced fully.

Then, with reference to accompanying drawing to carrier of the present invention other an example, be that disk 10b and the hard disk drive 1b that has loaded disk 10b (examples of other of record regenerator of the present invention) describe.But, for putting on common symbol and omit repeat specification with the shared element of disk 10a and hard disk drive 1.

Among the disk 10b shown in Figure 16, from interior all sides to the outer circumferential side of disk 10b be divided into center O with convex-concave pattern 20t be the center concentric circles (promptly, 20t is concentric with convex-concave pattern) 4 annular section A1b～A4b (example of a plurality of annular sections of the present invention: the following annular section Ab that is also referred to as when not distinguishing), thereby form convex-concave pattern 20.In addition, in this disk 10b, replace the servo figure zone Asa among the disk 10a, and at track pattern zone At, At ... between servo figure zone Asb, Asb are set, and be defined as, track pattern zone At and servo figure zone Asb alternately arrange on the sense of rotation (arrow R direction) of disk 10b.

As Figure 17～shown in Figure 21, servo figure zone Asb (interior all side servo figures zone Asbi of the interior all sides annular section Ab in, and annular section Ab in the regional Asbo of outer circumferential side servo figure of outer circumferential side) in, replace the convex-concave pattern 20sa among the disk 10a, and form convex-concave pattern 20sb as servo figure.This occasion, convex-concave pattern 20sb, 20sa is identical with convex-concave pattern, by protuberance 21s, the 21s (protuberance 21si and protuberance 21so) of the various servo figures that constitute preposition figure, address figure and piecewise graph etc.. and recess 22s, 22s ... (recess 22si and recess 22so) constitutes.In addition, among this disk 10b, make along the length of the protuberance 21s of sense of rotation (the arrow R direction among each figure) and the distance (not being long more to outer circumferential side more) not in direct ratio of convex-concave pattern 20t decentering O, be to equate (to be to be specified to the whole zone in each annular section Ab from interior all sides to outer circumferential side, the value that unit protuberance length is obtained divided by the excentric distance of data track figure is in annular section, more little example of outer circumferential side from the past more annular section of interior all sides of annular section, be an example of of the present invention being defined as " monomer protuberance length is equal length or length about equally "), thus each protuberance 21s formed, 21s ...

Equally, for length along the recess 22s of sense of rotation, also be and the distance of convex-concave pattern 20t decentering O (not being long more to outer circumferential side more) not in direct ratio, be to equate (to be to be specified to the whole zone in annular section Ab from interior all sides to outer circumferential side, the value that the unit recess length is obtained divided by the excentric distance of data track figure is in annular section, more little example of outer circumferential side from the past more annular section of interior all sides of annular section, be an example of of the present invention being defined as " the monomer recess length is equal length or length about equally "), thus each recess 22s formed, 22s ...Therefore, among this disk 10b, be specified to, along the combined length of the length of the length of the protuberance 21s of sense of rotation and recess 22s (promptly, the formation spacing of protuberance 21s and recess 22s) with the distance (not being long more to outer circumferential side more) not in direct ratio of convex-concave pattern 20t decentering O, being specified to, is to equate the whole zone from interior all sides to outer circumferential side in each annular section Ab.Therefore, as shown in figure 17, for example, in annular section A2b, the length L 52 along sense of rotation of interior all sides of annular section A2b equates with the length L 52 along sense of rotation of the outer circumferential side of annular section A2b.This occasion, in this disk 10b, each of annular section A1b～A4b is specified to as an example along the length L 51～L54 of sense of rotation, and the annular section Ab of past more outer circumferential side is elongated gradually.In addition,, shown in 21, equate, form convex-concave pattern 20sb with this along becoming the whole zone from interior all sides to outer circumferential side of length ratio in each annular section Ab of the length of the protuberance 21s of sense of rotation and recess 22s as Figure 19.

Specifically, as Figure 18, shown in 19, interior all lateral areas territory Aib of the interior all sides in annular section Ab is (as an example, the distance to center O among the annular section A1b is the formation zone of preposition figure at the position of 11mm) in, be specified to, the length L 7i of recess 22si (being 220nm as an example) is that length L 8i becomes 440nm with the combined length of the length L 6i (being 220nm as an example) of protuberance 21si.In addition, as Figure 20, shown in 21, the outer circumferential side zone Aob of the outer circumferential side among the annular section Ab is (as an example, the distance to center O among the annular section A1b is the formation zone of preposition figure at the position of 16mm) in, also be specified to, the length L 7o of recess 22so (as the 220nm of example for equating with the length L 7i of recess 22si) is that length L 8o becomes 440nm with the combined length of the length L 6o (is to equate 220nm with the length L 6i of protuberance 21si as an example) of protuberance 21so.Its result, as Figure 19, shown in 21, in this disk 10b, the length L 6o of the protuberance 21so among the length L 6i of the protuberance 21si of the convex-concave pattern 20sb among the interior all lateral areas territory Aib in the annular section Ab and the ratio of the length L 7i of recess 22si, the outer circumferential side zone Aob in the annular section Ab is respectively 1 with the ratio of the length L 7o of recess 22so in each annular section Ab.This occasion for the length (unit protuberance length) of the protuberance 21s ratio with the length (unit recess length) of recess 22s, not only for above-mentioned preposition figure, and is also made same regulation for the convex-concave pattern 20sb that constitutes address figure and piecewise graph.In addition, for piecewise graph, protuberance 21s, the 21s of disk 10b along a plurality of rectangles of sense of rotation ... clip in the zone that recess 22s arranges, the unit's of being specified to protuberance length satisfies above-mentioned condition with the ratio of unit recess length.

In this disk 10b, the average length of the protuberance 21s in each annular section Ab from the annular section A1b of interior all sides along with becoming long slightly to the annular section A4b of outer circumferential side more.And, in this disk 10b, the annular section A4b to outer circumferential side is more little more from the annular section A1b of interior all sides for the value that the average length of protuberance 21s in each annular section Ab is obtained divided by the center O of convex-concave pattern 20t to the distance (as an example, being taken as the position in interior week among the annular section Ab) of annular section Ab.

In Figure 18～21, illustrate preposition figure and piecewise graph in the servo figure model utility, for easy understanding, will be along each protuberance 21s, 21s of sense of rotation ... with each recess 22s, 22s ... length only illustrated with the unit protuberance length and the unit recess length of servo figure.Therefore, among the actual disk 10b, protuberance 21s, 21s ... with recess 22s, 22s ... number, form the position and length different with the state shown in each figure, the number of each protuberance 21s and recess 22s, form position and length and obtain accordingly stipulating with data, form convex-concave pattern 20sb with this with the various controls that comprise information (figure) such as track address that tracking servo control is required and centre address.This occasion, the physical length of protuberance 21s and recess 22s become the length of the integral multiple of the length of protuberance 21s and recess 22s (unit protuberance length and unit recess length).For the manufacture method of this disk 10b, identical with the manufacture method of above-mentioned disk 10a, Therefore, omited repeat specification.This occasion, when utilizing imprinting manufactured disk 10b, as long as use be formed with have with disk 10b in the protuberance 21,21 of convex-concave pattern 20 ... corresponding concave part 39b, 39b Recess 22,22 with convex-concave pattern 20 among the disk 10b ... corresponding protuberance 39a, 39a ... the grand master pattern 35b (with reference to Figure 15) of convex-concave pattern 39 get final product.

Among this disk 10b, protuberance 21si, the 21si of the interior all sides among the annular section Ab ... length L 6i and protuberance 21so, the 21so of the outer circumferential side among the annular section Ab ... length L 6o form equal lengths (for example, being 220nm in annular section A1b).Therefore, when using nonmagnetic substance 15 to carry out the ion beam milling processing when making disk 10b, the ion beam milling that continues is handled each protuberance 21si, 21si of the interior all sides in annular section Ab ... upper surface expose each protuberance 21so, the 21so of the outer circumferential side among this annular section Ab from nonmagnetic substance 15 ... upper surface also expose (upper surface of protuberance 21si, 21so roughly exposes simultaneously) from nonmagnetic substance 15.Therefore, shown in Figure 19,21, among this disk 10b, in the whole zone in the annular section Ab, because of each protuberance 21s, 21s ... on nonmagnetic substance 15 (residue) be removed, therefore, become in the lip-deep concavo-convex whole zone of difference of height H in annular section Ab of disk 10b evenly.Specifically, for example, the concavo-convex degree on the surface of disk 10b, promptly, surface roughness Ra, for example the both sides of interior all lateral areas territory Ai in annular section A1b and outer circumferential side zone Ao are (in other annular sections Ab, also being roughly the same surface roughness Ra) about 0.7nm.Therefore, from interior all sides of disk 10b to the whole zone of outer circumferential side, the float-amount of magnetic head 3 (slide block) is roughly certain, can carry out stable record regenerating.

Again, in this disk 10b, as mentioned above, with each protuberance 21s, 21s ... and each recess 22s, 22s ... form, among the convex-concave pattern 20sb of servo figure zone Asb along the combined length (length L 8i, L8o) of the length of the protuberance 21s of sense of rotation and the length of recess 22s in annular section Ab from interior all sides of annular section Ab to the whole zone of outer circumferential side become and equate.Therefore, as shown in figure 17, for example the length L 52 along sense of rotation of the interior all side servo figure zone Asbi (the convex-concave pattern 20sb of interior all sides) among the annular section A2b becomes with the length L 52 along sense of rotation of the regional Asbo of outer circumferential side servo figure (the convex-concave pattern 20sb of outer circumferential side) and equates.Therefore, among this disk 10b, the length along sense of rotation of track pattern zone At is elongated gradually towards outer circumferential side from interior all sides of annular section Ab.Specifically, the length along sense of rotation of outer circumferential side track pattern zone Ato (the convex-concave pattern 20t of outer circumferential side) is longer than the length along sense of rotation of interior all side track pattern zone Ati (the convex-concave pattern 20t of interior all sides).Therefore, compare with in the past disk 10x, at the outer circumferential side of annular section Ab, but the amount that the recording capacity of record data prolongs corresponding to the length of protuberance 21t and increasing.

This occasion, in this disk 10b, 20sb forms with convex-concave pattern, becomes to the whole zone of outer circumferential side equal along the length of the servo figure of sense of rotation zone Asb in the interior all sides in each annular section Ab.Therefore, when disk 10b carries out the constant speed rotation with the certain rotational speed of angular velocity, make the time of the below of magnetic head 3, compare with interior all sides of annular section Ab by servo figure zone Asb, short more towards the outer circumferential side time of annular section Ab more.Therefore, loaded among the hard disk drive 1b (with reference to Fig. 1) of this disk 10b, different with the hard disk 1 that has loaded above-mentioned disk 10a, ROM9 is stored the shift position (distance to center O in the annular section Ab) about the magnetic head 3 in the time clock data Dc1 of read frequency information and each the annular section Ab relatively.In addition, control part 8 is according to time clock data Dc1, as an example, in each annular section Ab, compare short more towards the outer circumferential side wavelength of annular section Ab more with interior all sides of annular section Ab with the distance of convex-concave pattern 20t decentering O with being directly proportional, the frequency rectilinearity of read frequency information is changed, and to detecting with 5 outputs of time clock efferent.Therefore, while being rotated reliably with the certain condition of angular velocity, disk 10b reads servo figure (servo data) from servo figure zone Asb.

Like this, adopt this disk 10b and hard disk drive 1b, at each annular section Ab unit protuberance length legislations is become, with the average length of the unit protuberance length in each annular section Ab divided by becoming annular section Ab from interior all sides from center O to the resulting value of the distance of annular section Ab more to the more little state of the annular section Ab of outer circumferential side, thereby form the convex-concave pattern 20sb that constitutes servo figure, thus, become the disk 10x in the past that forms convex-concave pattern from interior all sides to the outer circumferential side of disk 10x with unit protuberance length gradually elongatedly and compare, the unit protuberance length among the annular section Ab of outer circumferential side can be made enough weak points.Therefore, to covering each protuberance 21,21 ... and the aspect of the nonmagnetic substance 15 that forms is when carrying out etch processes, can avoid the situation of the difference increase of the residue thickness on the protuberance 21s among the annular section Ab of residue thickness and interior all sides on the protuberance 21s among the annular section Ab of outer circumferential side.Again, from the annular section Ab of interior all sides to the whole zone of the annular section Ab of outer circumferential side, at each protuberance 21s, 21s ... when upward nonmagnetic substance 15 etch processes being become not have nonmagnetic substance 15 (residue), can be in the annular section Ab that avoids in interior all sides, not only under nonmagnetic substance 15 but also the also etched situation of protuberance 21s (magnetic material), with each protuberance 21s, 21s ... on residue remove.Thus, can in whole zone, keep the flatness of disk 10b well.Therefore, in the whole zone of disk 10b, can roughly keep the float-amount of magnetic head 3 relative disk 10b comparably, its result adopts this hard disk drive 1b, can carry out stable record regenerating.

Again, adopt this disk 10b and hard disk drive 1b, unit protuberance length legislations is become, all sides are more to the more little state of outer circumferential side in becoming in annular section Ab from it divided by the resulting value of distance of convex-concave pattern 20t decentering O unit protuberance length, thereby form convex-concave pattern 20sb (servo figure), thus, elongated with the ground that is directly proportional along the unit protuberance length of sense of rotation and the distance of decentering O (divided by the distance of decentering O resulting value become in interior all side from annular section Ab equate to the whole zone of outer circumferential side unit protuberance length), compare with this disk 10x in the past that forms convex-concave pattern, the unit protuberance length of the outer circumferential side among the annular section Ab can be made enough weak points.Therefore, to covering each protuberance 21,21 ... and the aspect of the nonmagnetic substance 15 that forms is when carrying out etch processes, can avoid the situation of the difference increase of the residue thickness on the protuberance 21si of residue thickness and interior all sides on the protuberance 21so of the outer circumferential side in the annular section Ab.Again, in annular section Ab from interior all sides of annular section Ab to the whole zone of outer circumferential side, at each protuberance 21s, 21s ... when upward nonmagnetic substance 15 etch processes being become not have nonmagnetic substance 15 (residue), can avoid in interior all sides of annular section Ab not only under nonmagnetic substance 15 but also the also etched situation of protuberance 21s (magnetic material), with each protuberance 21s, 21s ... on residue remove.Thus, can keep the flatness of disk 10b to the whole zone of outer circumferential side well in the interior all sides in annular section Ab.Therefore, the whole zone from interior all sides to outer circumferential side in annular section Ab, can roughly keep the float-amount of magnetic head 3 relative disk 10b comparably, its result adopts this hard disk drive 1b, can carry out stable record regenerating.

And, adopt this disk 10b and hard disk drive 1b, the unit recess length is specified to, all sides are more to the more little state of outer circumferential side in becoming in annular section Ab from it divided by the resulting value of distance of convex-concave pattern 20t decentering O the unit recess length, thereby form convex-concave pattern 20sb (servo figure), thus, elongated with the ground that is directly proportional along the unit recess length of sense of rotation and the distance of decentering O (divided by the distance of decentering O resulting value become whole zone from interior all side to outer circumferential side equate the unit recess length), compare with the disk 10x in the past of such formation convex-concave pattern, the unit recess length of the outer circumferential side in the annular section can be made enough weak points.This occasion, the applicant finds: at the position that exists along the excessively long recess of the length of sense of rotation, with respect to the slack-off phenomenon of etched progress of the nonmagnetic substance on the protuberance that clips this recess formation.On the other hand, adopt this disk 10b, as mentioned above, the unit recess length of each recess 22s is fully short, so can not cause the situation slack-off to take place with respect to the etched progress of the nonmagnetic substance on the protuberance 21s 15, can carry out etch processes to the aspect of nonmagnetic substance 15, its result can avoid the situation of the difference increase of the residue thickness on the protuberance 21si of residue thickness and interior all sides on the protuberance 21so of the outer circumferential side in the annular section.Again, in the interior all sides from annular section to the whole zone of outer circumferential side, at each protuberance 21s, 21s ... when upward nonmagnetic substance 15 etch processes being become not have nonmagnetic substance 15 (residue), can avoid in interior all sides of annular section not only under nonmagnetic substance 15 but also the also etched situation of protuberance 21s (magnetic material), with each protuberance 21s, 21s ... on residue remove.Thus, can further keep the flatness of disk 10b to the whole zone of outer circumferential side well in the interior all sides in annular section Ab.

Again, adopt this disk 10b and hard disk drive 1b, unit protuberance length legislations is become, become equal state the whole zone in annular section Ab from interior all sides to outer circumferential side, thereby form convex-concave pattern 20sb (servo figure), therefore, can to the whole zone of the outer circumferential side of annular section, keep equably in interior all sides from annular section with respect to each protuberance 21s, 21s ... the etching condition (etch-rate) of the nonmagnetic substance 15 on (magnetic material).Therefore, can make the difference of the residue thickness on the protuberance 21si of the residue thickness on the protuberance 21so of the outer circumferential side in the annular section and interior all sides enough little.Again, the whole zone in annular section from interior all sides to outer circumferential side, at each protuberance 21s, 21s ... when upward nonmagnetic substance 15 etch processes being become not have nonmagnetic substance 15 (residue), can avoid in interior all sides of annular section not only under nonmagnetic substance 15 but also the also etched situation of protuberance 21s (magnetic material), with each protuberance 21s, 21s ... on residue remove.Thus, can be in annular section Ab, all sides are further kept the flatness of disk 10b to the whole zone of its outer circumferential side well, equably in it.Its result the whole zone from interior all sides to outer circumferential side in the annular section Ab of disk 10b, can keep the float-amount of magnetic head 3 relative disk 10b equably.

And, adopt this disk 10b and hard disk drive 1b, the unit recess length is specified to, become equal state the whole zone in annular section Ab from interior all sides to outer circumferential side, thereby form convex-concave pattern 20sb (servo figure), therefore, can to the whole zone of the outer circumferential side of annular section, keep equably in interior all sides from annular section with respect to clipping each recess 22s, 22s ... each protuberance 21s, 21s that ground forms ... the etching condition (etch-rate) of the nonmagnetic substance 15 on (magnetic material).Therefore, can make the difference of the residue thickness on the protuberance 21si of the residue thickness on the protuberance 21so of the outer circumferential side in the annular section and interior all sides enough little.Again, the whole zone in annular section from interior all sides to outer circumferential side, at each protuberance 21s, 21s ... when upward nonmagnetic substance 15 etch processes being become not have nonmagnetic substance 15 (residue), can avoid in interior all sides of annular section not only under nonmagnetic substance 15 but also the also etched situation of protuberance 21s (magnetic material), with each protuberance 21s, 21s ... on residue remove.Thus, further keep the flatness of disk 10b can the whole zone in annular section Ab well, equably from interior all sides to outer circumferential side.

Again, the hard disk drive 1b of this disk 10b has been loaded in employing, control part 8 is according to the read frequency information of predesignating corresponding to the distance of convex-concave pattern 20t decentering O, servo data test section 6 is controlled, by reading the servo data corresponding,, disk 10b reads servo figure (servo data) reliably under the certain condition of angular velocity while being rotated with servo figure from disk 10b.

Then, be that disk 10c describes with reference to accompanying drawing to the another example of carrier of the present invention.But, for the shared element of disk 10a, 10b, and hard disk drive 1 in disk 10a beyond element put on common symbol and omit repeat specification.

Among the disk 10c shown in Figure 22, identical with above-mentioned disk 10a, 10b, from interior all sides to the outer circumferential side of disk 10c be divided into center O (not shown) with convex-concave pattern 20t be the center concentric circles (promptly, 20t is concentric with convex-concave pattern) 4 annular section A1c～A4c (example of a plurality of annular sections of the present invention: the following annular section Ac that is also referred to as when not distinguishing), thereby form convex-concave pattern 20 (convex-concave pattern 20t, 20sc).In addition, only illustrating among the same figure with annular section A2c is 3 zones of center, annular section A1c～A3c.In this disk 10c, replace the servo figure zone Asa among the disk 10a, and at track pattern zone At, At ... between servo figure zone Asc, Asc are set, and be defined as, track pattern zone At and servo figure zone Asc alternately arrange on the sense of rotation (arrow R direction) of disk 10c.

As Figure 22～shown in Figure 26, servo figure zone Asc (interior all side servo figures zone Asci of the interior all sides annular section Ac in, and annular section Ac in the regional Asco of outer circumferential side servo figure of outer circumferential side) in, replace the convex-concave pattern 20sa among the disk 10a, and form convex-concave pattern 20sc as servo figure.This occasion, convex-concave pattern 20sc, identical with convex-concave pattern 20sa, 20sb, by protuberance 21s, the 21s (protuberance 21si and 21so) of the various servo figures that constitute preposition figure, address figure and piecewise graph etc.. and recess 22s, 22s ... (recess 22si and recess 22so) constitutes.In addition, among this disk 10c, be defined as, make along the distance of the length of the protuberance 21s of sense of rotation (the arrow R direction among each figure) and convex-concave pattern 20t decentering O in direct ratio, in annular section Ac, all sides become long more to its outer circumferential side more in it, form each protuberance 21s, 21s with this ...Equally, the length for along the recess 22s of sense of rotation also is defined as, and is in direct ratio with the distance of convex-concave pattern 20t decentering O, and in annular section Ac, all sides become long more to its outer circumferential side more in it, form each recess 22s, 22s with this ...Therefore, in this disk 10c, be specified to, along the combined length of the length of the length of the protuberance 21s of sense of rotation and recess 22s (promptly, the formation spacing of protuberance 21s and recess 22s) in direct ratio with the distance of convex-concave pattern 20t decentering O, in annular section Ac, all sides become long more to its outer circumferential side more in it.

Specifically, shown in Figure 23,24, interior all lateral areas territory Aic of the interior all sides among the annular section Ac is (as an example, the distance of decentering O among the annular section A1c is the formation zone of preposition figure at the position of 11mm) in, be specified to, the length L 12i of recess 22si (being 220nm as an example) is that length L 13i becomes 440nm with the combined length of the length L 11i (being 220nm as an example) of protuberance 21si.In addition, shown in Figure 25,26, the outer circumferential side zone Aoc of the outer circumferential side among the annular section Ac is (as an example, the distance of decentering O among the annular section A1c is the formation zone of preposition figure at the position of 16mm) in, be specified to, the length L 12o of recess 22so (being 320nm as an example) is that length L 13o becomes 640nm with the combined length of the length L 11o (being 320nm as an example) of protuberance 21so.Its result, shown in Figure 24,26, among this disk 10c, the length L 11o of the protuberance 21so among the length L 11i of the protuberance 21si of the convex-concave pattern 20sc among the interior all lateral areas territory Aic in the annular section Ac and the ratio of the length L 12i of recess 22si, the outer circumferential side zone Aoc in the annular section Ac is respectively 1 with the ratio of the length L 12o of recess 22so in each annular section Ac.

This occasion for the length (unit protuberance length) of the protuberance 21s ratio with the length (unit recess length) of recess 22s, not only for above-mentioned preposition figure, and is also made same regulation for the convex-concave pattern 20sc that constitutes address figure and piecewise graph.In addition, for piecewise graph, protuberance 21s, the 21s of disk 10c along a plurality of rectangles of sense of rotation ... clip in the zone that recess 22s arranges, the unit's of being specified to protuberance length satisfies above-mentioned condition with the ratio of unit recess length.In Figure 23～26, illustrate preposition figure and piecewise graph in the servo figure model utility, for easy understanding, will be along each protuberance 21s, 21s of sense of rotation ... with each recess 22s, 22s ... length only illustrated with the unit protuberance length and the unit recess length of servo figure.Therefore, among the actual disk 10c, protuberance 21s, 21s ... with recess 22s, 22s ... number, form the position and length different with the state shown in each figure, the number of each protuberance 21s and recess 22s, form position and length and obtain accordingly stipulating with data, form convex-concave pattern 20sc with this with the various controls that comprise information (figure) such as track address that tracking servo control is required and centre address.This occasion, the physical length of protuberance 21s and recess 22s become the length of integral multiple of the length (unit protuberance length and unit recess length) of protuberance 2 1s and recess 22s.

In this disk 10c, the average length of the protuberance 21s in each annular section Ac is specified to, and becomes equal in the whole zone of each annular section A1c～A4c.Therefore, the annular section A4c to outer circumferential side is more little more from the annular section A1c of interior all sides for the value that the average length of protuberance 21s in each annular section Ac is obtained divided by the distance (as an example, being taken as the position in interior week among the annular section Ac) from the center O of convex-concave pattern 20t to annular section Ac.This occasion is for the length along interior all sides of sense of rotation among each annular section Ac, long more slightly at the annular section Ac of the outer circumferential side in the disk 10c more.Specifically, as shown in figure 22, for example, long slightly than the length L 92i among the annular section A2c among the annular section A3c along interior all sides of sense of rotation along the length L 93i of interior all sides of sense of rotation.For the length of each annular section Ac, short more slightly at the annular section Ac of the outer circumferential side in the disk 10c more along the outer circumferential side of sense of rotation.Specifically, for example, short slightly than the length among the annular section A2c among the annular section A3c along the outer circumferential side of sense of rotation along the length of the outer circumferential side of sense of rotation.For the manufacture method of this disk 10c, identical with the manufacture method of above-mentioned disk 10a, Therefore, omited repeat specification.This occasion, when utilizing imprinting manufactured disk 10c, as long as use be formed with have with disk 10c in the protuberance 21,21 of convex-concave pattern 20 ... corresponding concave part 39b, 39b Recess 22,22 with convex-concave pattern 20 among the disk 10c ... corresponding protuberance 39a, 39a ... the grand master pattern 35c (with reference to Figure 15) of convex-concave pattern 39 get final product.

In this disk 10c, as mentioned above, the average length of the protuberance 21s among each annular section Ac is specified in the whole zone of each annular section A1c～A4c and equates.Therefore, when making disk 10c nonmagnetic substance 15 carried out ion beam milling when handling, the ion beam milling that continues is handled in the annular section Ac of interior all sides, each protuberance 21so of its outer circumferential side, 21so ... upper surface expose from nonmagnetic substance 15, each protuberance 21si among this annular section Ac, 21si ... upper surface expose from nonmagnetic substance 15, and in the annular section Ac of outer circumferential side, each protuberance 21so of its outer circumferential side, 21so ... upper surface and each protuberance 21si of interior all sides, 21si ... upper surface also expose (at the annular section Ac of interior all sides and the annular section Ac protuberance 21si of outer circumferential side from nonmagnetic substance 15, the upper surface of 21so roughly exposes simultaneously).Therefore, among this disk 10c, in all annular section Ac, protuberance 21s, 21s ... on nonmagnetic substance 15 (residue) be removed, therefore, the lip-deep concavo-convex difference of height of disk 10c roughly becomes in all annular section Ac evenly.Therefore, from interior all sides of disk 10c to the whole zone of outer circumferential side, the float-amount of magnetic head 3 (slide block) is roughly certain, can carry out stable record regenerating.

Again, in this disk 10c, as mentioned above, along the combined length of the length of the length of the protuberance 21s of sense of rotation and recess 22s (promptly, the formation of protuberance 21s and recess 22s is at interval) be specified to, in annular section Ac, be directly proportional with the distance of convex-concave pattern 20t decentering O, all sides are long more to outer circumferential side more in it, thereby form convex-concave pattern 20sc (servo figure), making disk 10c is not change in 1 annular section Ac while the frequency information (read frequency information) that is rotated the benchmark that makes the time clock that becomes use when servo figure zone Asc reads servo data Ds under certain condition at angular velocity, and the interior all sides from annular section Ac are read (detection) servo data Ds to the servo figure zone Asc of outer circumferential side reliably.Again, unit protuberance length and unit recess length along sense of rotation are specified to, in annular section Ac, be directly proportional with the distance of convex-concave pattern 20t decentering O, all sides are long more to outer circumferential side more in it, form convex-concave pattern 20sc (servo figure) with this, thus the below that makes magnetic head 3 by unit protuberance length protuberance 21s and interior all side and the outer circumferential side of time in annular section Ac of the recess 22s of unit recess length become equal.Therefore, can make the whole zone from interior all sides to outer circumferential side of signal shape in annular section Ac of the unit protuberance length of magnetic head 3 detected servo datas and unit recess length and equate.Therefore, can read (detection) servo data Ds more reliably.

Like this, in this disk 10c, the length and the unit recess length of unit protuberance are specified to, unit protuberance length is in annular section Ac, be directly proportional with the distance of convex-concave pattern 20t decentering O, long more to outer circumferential side more from interior all sides of annular section Ac, and the combined length of unit recess length and unit protuberance length is in annular section Ac, be directly proportional with the distance of convex-concave pattern 20t decentering O, long more to outer circumferential side more from interior all sides of annular section Ac, form convex-concave pattern 20sc (servo figure) with this.Therefore, adopt this disk 10c and hard disk drive 1, can avoid among the annular section Ac of outer circumferential side taking place along the elongated situation of length of the sense of rotation of protuberance 21s, in 1 annular section Ac, the frequency of read frequency information is not changed, read servo data with this, for example, can not need magnetic head 3 is searched from interior all sides to the outer circumferential side of annular section Ac the frequency hand-off process of the read frequency information in when action.Therefore, but the short time carry out and to search action, can carry out data access at high speed.In addition, as read frequency information,, can carry out tracking servo with time clock efferent 5 and control part 8 by the detection of easy structure as long as can export the frequency information of the kind corresponding with the number (in this example being 4) of annular section.

But the present invention is not limited to said structure.For example, each protuberance 21s, 21s have more than been narrated the whole zone in annular section Aa, Ab along sense of rotation from interior all sides to outer circumferential side ... length (length L 1i, L1o; Length L 6i, L6o) become equally, form the example of convex-concave pattern 20sa, 20sb with this, but also each protuberance 21s, 21s ... length slightly different in each one of annular section from interior all sides to outer circumferential side, form convex-concave pattern 20sa with this.Specifically, the protuberance 21so's of the outer circumferential side of annular section forms longly slightly along the length of sense of rotation than the length along sense of rotation of the protuberance 21si of interior all sides of annular section.Even such protuberance 21s, 21s ... the different structure of length, also can be stipulated unit protuberance length, make the length of protuberance 21so of outer circumferential side shorter than the length L 1xo of the protuberance 21sxo among the disk 10x in the past, form convex-concave pattern 20sa, 20sb with this, can make the residue on the protuberance 21so of outer circumferential side form fully thinly, so can keep good flatness at the outer circumferential side in annular section Aa, the Ab.

In addition, servo figure among the present invention is not limited to above-mentioned example, also the concaveconvex shape of the convex-concave pattern 20sa～20sc among servo figure zone Asa～Asc of disk 10a～10c can be overturn, and satisfy various condition of the present invention and like that unit protuberance length and unit recess length are stipulated to form servo figure.Again, in above-mentioned disk 10a～10c, with each protuberance 21,21 on the magnetic material formation convex-concave pattern 20 ... from base end part to protruding end portion, but the present invention is not limited to this, disk 10d as shown in figure 27 is such, also can form magnetosphere 14a, utilize and form its surperficial protuberance 21a, 21a by magnetosphere 14a by the convex-concave pattern mulched ground that will be formed on the base material 11a ... with the recess 22a, the 22a that form the bottom surface by magnetosphere 14a ... constitute convex-concave pattern 20a.This occasion, same for the convex-concave pattern of base material 11a with the formation method of convex-concave pattern 20 among the aforesaid disk 10a etc., for example to magnetosphere 14 etchings the time, use the convex-concave pattern of using as mask 43, can form by base material 11a is carried out etching.Again, for example pass through the drawing or the injection molded of the same stamper of use and stamper 35a～35c, also can on base material 11a, form convex-concave pattern.In addition, disk 10e as shown in figure 28 is such, also can make to constitute each protuberance 21b, 21b ... magnetosphere 14b and each protuberance 21b, 21b ... between recess 22b, 22b ... the magnetosphere 14b of bottom surface constitute convex-concave pattern 20b continuously.Again, disk 10a～10c is the disk of perpendicular recording, but the present invention also can be applied to the disk of recording mode in the face.

Claims (15)

1, a kind of carrier is characterized in that,

Formed data track figure and servo figure by convex-concave pattern in the side of one side at least of base material, and in each recess of this convex-concave pattern, imbedded nonmagnetic substance with a plurality of protuberances,

In the convex-concave pattern that constitutes described data track figure, described each protuberance forms concentric circles or spiral fashion,

The convex-concave pattern that constitutes described data track figure and described servo figure is divided into a plurality of annular sections concentric with described data track figure,

And, in constituting the convex-concave pattern of described servo figure, the unit protuberance length of each annular section is specified to: is this annular section from this annular section of interior all side towards outer circumferential side and more and more littler along the average length of unit protuberance length in this each annular section of sense of rotation divided by the resulting value of distance till from the center of this data track figure to this annular section along described base material.

2. carrier as claimed in claim 1, it is characterized in that, in the convex-concave pattern that constitutes described servo figure, unit protuberance length and this unit recess length are specified to: described unit protuberance length and described base material along the ratio of the unit recess length of sense of rotation be, the outer circumferential side of this annular section and more and more littler from interior all side direction of this annular section in described annular section.

3. carrier as claimed in claim 2, it is characterized in that, in constituting the convex-concave pattern of described servo figure, described unit recess length is specified to: all side direction the described outer circumferential side of this annular section and more and more longer in this annular section described in described annular section.

4. carrier as claimed in claim 2, it is characterized in that, in the convex-concave pattern that constitutes described servo figure, described unit protuberance length is specified to: in described annular section, be equal lengths or length about equally in all sides in this annular section described to the whole zone of the described outer circumferential side of this annular section.

5. carrier as claimed in claim 2, it is characterized in that, in constituting the convex-concave pattern of described servo figure, the combined length of described unit protuberance length and described unit recess length is specified to: in described annular section, be directly proportional with distance from described center in this annular section described all side direction the described outer circumferential side of this annular section and more and more longer.

6. carrier as claimed in claim 1, it is characterized in that, in the convex-concave pattern that constitutes described servo figure, described unit protuberance length is specified to: the outer circumferential side of this annular section and more and more longer from interior all side direction of this annular section with being directly proportional with distance from described center in described annular section, simultaneously, this unit protuberance length and this unit recess length are specified to, the combined length along the unit recess length and the described unit protuberance length of sense of rotation of described base material, in this annular section, be directly proportional with distance from described center in this annular section described all side direction the described outer circumferential side of this annular section and be more and more longer.

7. carrier as claimed in claim 2, it is characterized in that, in constituting the convex-concave pattern of described servo figure, the described unit described average length of protuberance length in described annular section is specified to: extremely become equal lengths or length about equally the whole annular section till the annular section of described outer circumferential side at week surveys from described in annular section.

8. carrier as claimed in claim 1, it is characterized in that, at the convex-concave pattern that constitutes described servo figure, its unit protuberance length is defined as, the value that described unit protuberance length obtains divided by the distance from described center be in described annular section in this annular section described all side direction the described outer circumferential side of this annular section and be more and more littler.

9. carrier as claimed in claim 8, it is characterized in that, in the convex-concave pattern that constitutes described servo figure, the unit recess length is defined as: the unit recess length along sense of rotation of described base material divided by the value that the distance from described center obtains is, all side direction the described outer circumferential side of this annular section and be more and more littler in this annular section described in described annular section.

10. carrier as claimed in claim 8, it is characterized in that, constituting the convex-concave pattern of described servo figure, described unit protuberance length is specified to: all sides become equal lengths or length about equally to the whole zone of the described outer circumferential side of this annular section in this annular section described in described annular section.

11. carrier as claimed in claim 8, it is characterized in that, in constituting the convex-concave pattern of described servo figure, described unit recess length is specified to: all sides become equal lengths or length about equally to the whole zone of the described outer circumferential side of this annular section in this annular section described in described annular section.

12. a record regenerator is characterized in that having: each described carrier in the claim 1 to 11; Carry out servo-controlled control part according to the servo data corresponding with described servo figure.

13. a record regenerator is characterized in that having: each described carrier in the claim 1 to 7; The read frequency information of predesignating according to described each annular section, read the servo data corresponding and carry out servo-controlled control part with described servo figure from described carrier.

14. a record regenerator is characterized in that having: each described carrier in claim 1, the claim 8 to 11; According to the read frequency information of predesignating from the distance at described center, read the servo data corresponding and carry out servo-controlled control part with described servo figure from described carrier.

15. the stamper of a carrier manufacturing usefulness, it is characterized in that, be formed with convex-concave pattern, this convex-concave pattern has: the recess of the protuberance of the corresponding formation of the recess with described convex-concave pattern in the claim 1 to 11 on each described carrier and the corresponding formation of the protuberance with described convex-concave pattern on the described carrier.

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