JPH022081B2 - - Google Patents

Info

Publication number
JPH022081B2
JPH022081B2 JP18363683A JP18363683A JPH022081B2 JP H022081 B2 JPH022081 B2 JP H022081B2 JP 18363683 A JP18363683 A JP 18363683A JP 18363683 A JP18363683 A JP 18363683A JP H022081 B2 JPH022081 B2 JP H022081B2
Authority
JP
Japan
Prior art keywords
film
signal
light
transmitted
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18363683A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6073406A (ja
Inventor
Katsue Kotari
Shusaku Shigeta
Hiroshi Yokota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kurashiki Spinning Co Ltd
Original Assignee
Kurashiki Spinning Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kurashiki Spinning Co Ltd filed Critical Kurashiki Spinning Co Ltd
Priority to JP18363683A priority Critical patent/JPS6073406A/ja
Publication of JPS6073406A publication Critical patent/JPS6073406A/ja
Publication of JPH022081B2 publication Critical patent/JPH022081B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0691Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of objects while moving

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP18363683A 1983-09-30 1983-09-30 赤外線厚み計 Granted JPS6073406A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18363683A JPS6073406A (ja) 1983-09-30 1983-09-30 赤外線厚み計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18363683A JPS6073406A (ja) 1983-09-30 1983-09-30 赤外線厚み計

Publications (2)

Publication Number Publication Date
JPS6073406A JPS6073406A (ja) 1985-04-25
JPH022081B2 true JPH022081B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1990-01-16

Family

ID=16139244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18363683A Granted JPS6073406A (ja) 1983-09-30 1983-09-30 赤外線厚み計

Country Status (1)

Country Link
JP (1) JPS6073406A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60224002A (ja) * 1984-04-21 1985-11-08 Kurabo Ind Ltd 赤外線厚み計
JPH02226005A (ja) * 1989-02-27 1990-09-07 Chino Corp 厚さ測定装置

Also Published As

Publication number Publication date
JPS6073406A (ja) 1985-04-25

Similar Documents

Publication Publication Date Title
US4254337A (en) Infrared interference type film thickness measuring method and instrument therefor
US3631526A (en) Apparatus and methods for eliminating interference effect errors in dual-beam infrared measurements
JPH04502214A (ja) 干渉計を含む走査センサーシステム
JPS60242308A (ja) 薄いサンプルの厚さの測定方法及びその装置並びに薄いサンプルの特性の測定方法及びその装置
CH423278A (fr) Dispositif pour déterminer les coordonnées relatives de deux ou plusieurs points sur un objet par rapport à deux axes qui se coupent
CN111174694B (zh) 一种激光干涉位移测量装置及其使用方法
JPS5839931A (ja) 赤外線を使用してプラスチツクフイルムの特性を測定する方法
US4798703A (en) Photometric apparatus in automatic chemical analyzer
US4893024A (en) Apparatus for measuring the thickness of a thin film with angle detection means
JPH022081B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
SU1747877A1 (ru) Интерференционный способ измерени толщины полупроводниковых слоев
JP2004138499A (ja) ガス濃度検出センサ
EP0660075A2 (en) High resolution high speed film measuring apparatus and method
US4794258A (en) Spectroanalytical gas measuring apparatus
JPS60224002A (ja) 赤外線厚み計
JPWO2018193499A1 (ja) フーリエ変換型赤外分光光度計
JPH0781836B2 (ja) 光学測定装置
JPS6175203A (ja) 膜厚測定装置
JP2022074869A (ja) 干渉計及び光学機器
JPH076841B2 (ja) 偏光角検出方法および偏光角検出装置
JPH0458139A (ja) 赤外線光学装置
SU947637A1 (ru) Устройство дл измерени коэффициента отражени плоской поверхности образцов
JPH063364B2 (ja) 膜厚測定方法
RU2281471C1 (ru) Рефлектометр многократного отражения на основе плоских зеркал
SU737817A1 (ru) Интерференционный способ измерени показател преломлени диэлектрических пленок переменной толщины