JPH0220684A - Laser scriber - Google Patents

Abstract

PURPOSE:To efficiently capture and eliminate a working scattered object by irradiating an object to be worked by laser light, and also, blowing gas from a nozzle, providing a suction chamber on the outside of its nozzle, and generating an electric field between said chamber and the object to be worked. CONSTITUTION:Grooving working is executed by focusing the laser light 1 by a condensing lens 2 and irradiating an object to be worked 9 which is installed on a moving means 8 such as an X-Y table, etc. by said laser light. Simultaneously, the working effect is improved by blowing a turbulence 23 of pressurized gas 21 from a nozzle of a pressure chamber 4. In said laser scriber, the inside is sucked by providing a suction chamber 5 on the outside of said nozzle. In such a way, a working scattered object 24 is sucked and captured from a coaxial hole with said nozzle provided on a tip part 7 of the suction chamber 5. Also, between said suction chamber 5 and the object to be worked 9, an electric field is applied by a high voltage power source 12 through an electrode 10. Therefore, said scattered object 24 is electrified and sucked to said tip part 7 by electrostatic force, and the suction effect of the scattered object 24 is doubled.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to the removal of flying debris from a laser scriber that performs scribing using a laser.

[Conventional technology]

2. Description of the Related Art Conventionally, there has been known an apparatus that performs grooving, so-called scribing, on alumina ceramics or the like using a laser.

[Problem to be solved by the invention]

In many cases, such devices focus and blow gas along a condensed beam at a condensing point during machining in order to improve the machining effect. For this reason, there are drawbacks such as evaporation or molten material caused by processing scattering around and sticking to the target workpiece or contaminating the processing area.

The concept of evacuated suction chambers to capture flying debris is conventional. However, this is not enough, so
The present invention is a laser scriber in which a high electric field is applied to a workpiece to attract electrostatically charged flying objects toward a suction chamber of opposite polarity, thereby further enhancing the trapping effect.

[Means to solve the problem]

In the present invention, a suction chamber is installed near the light convergence point to create a vacuum to suction the scattered objects, and at the same time, a high voltage is applied between the target workpiece and the suction chamber to promote the suction effect electrostatically. It is something to do.

〔Example〕

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a longitudinal sectional view of an embodiment of the present invention.

1 is a laser beam emitted and introduced from a laser (not shown), 2 is a condensing lens thereof, 3 is a holder for the lens 2 which is airtight, and 4 is a pressurized gas guided to a condensing point 31 A conical pressurizing chamber, 5 is a suction chamber for flying debris that also includes the outer wall of the chamber 4, and 6 is an electrical connection between the main body part 50 and the suction chamber tip 7 made of a conductor. 8 is a moving means for placing and moving the target workpiece 9; 10 is an electrode for applying a high voltage to the workpiece 9; 11 is an insulating member between the electrode 10 and the moving means 8; 12 is a high voltage source and its wiring for applying a high voltage between 7 and 10, 21 is a gas pressurized by a pressure source (not shown), and 22 is a gas sucked by a vacuum source (not shown). gas, 23 passes through the tip of 4 and 9
A scattered flow of gas 21 is blown onto the surface, and 24 are scattered objects generated by processing.

In such a configuration, the target workpiece 9 is first moved along a desired trajectory by the moving means 8 such as an X-Y table, and is processed by the 1 irradiated with condensed light at the condensing point 31 . At this time, pressurized gas 21 is focused and blown into a scattered flow 23 by the cylindrical processing chamber 4 in order to promote the processing effect.

On the other hand, the interior of the suction chamber 5 disposed close to the condensing point 31 is constantly suctioned by a vacuum source to form a gas flow 22 . Scattered objects 24 generated by processing are scattered by the scattering flow 23, and are suctioned and captured through a hole provided in the tip 7 of the suction chamber 5 coaxially with the cylindrical pressurizing chamber 4. However, at this time, due to the influence of the scattering flow 23, a considerable amount of the scattered objects are not captured and are scattered to the outside. On the other hand, the flying object 24 from the target workpiece 9 is electrically charged by being reversely applied to the tip 6 of the suction chamber by the high voltage source 12 via the electrode 10.
is also charged, and therefore it is sucked towards the hole in the tip 7 of the suction chamber, improving the capture rate.

〔Effect of the invention〕

As explained above, the present invention can provide a laser scriber that is highly effective at capturing flying objects by using both a conventional suction chamber and electrostatic suction using high voltage.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing an embodiment of the present invention. 1... Laser light, 2... Condensing lens,
3... Group 2 holder, 4... Pressure chamber,
5... Suction chamber, 6... Insulating member, 7... Suction chamber tip, 8...
Transportation means, 9...Target workpiece, 10...
・Electrode, 11...Insulating member, 12...
High voltage power supply and its wiring, 21... Pressurized gas, 22... Marked/suctioned gas, 23... Scattered flow, 24... Flying objects, 31... Focus point. Agent Patent Attorney Susumu Uchihara

Claims (1)

[Claims] A laser scriber comprising a laser and a lens that focuses the output beam thereof, a nozzle attached to the output side of the condensing lens that blows gas onto the target workpiece, and a table on which the target workpiece is placed and moved, The present invention is characterized in that it includes a suction chamber for sucking flying debris from processing to the outside of the nozzle, and a means for generating an electric field between the table and the suction chamber, thereby doubling the suction effect of the flying debris. laser scriber.