JPH0220322U - - Google Patents
Info
- Publication number
- JPH0220322U JPH0220322U JP9728488U JP9728488U JPH0220322U JP H0220322 U JPH0220322 U JP H0220322U JP 9728488 U JP9728488 U JP 9728488U JP 9728488 U JP9728488 U JP 9728488U JP H0220322 U JPH0220322 U JP H0220322U
- Authority
- JP
- Japan
- Prior art keywords
- setting section
- mask setting
- light source
- optical system
- wafer chuck
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Description
第１図は本考案の実施例を示す図、第２図は従
来の露光装置を示す図である。
図において、１０は基台、１１，２０は支柱、
１２はマスクセツト部、１３は回転駆動部、１４
は回転テーブル、１５は光源、１６は光学的系、
１７はウエハーチヤツク、１９はマスク、２４は
ウエハーを示す。
FIG. 1 is a diagram showing an embodiment of the present invention, and FIG. 2 is a diagram showing a conventional exposure apparatus. In the figure, 10 is a base, 11 and 20 are pillars,
12 is a mask setting section, 13 is a rotational drive section, 14
is a rotary table, 15 is a light source, 16 is an optical system,
17 is a wafer chuck, 19 is a mask, and 24 is a wafer.
Claims (1)
可能なマスクセツト部１２と、該マスクセツト部
１２の上方に配置された光源１５と、マスクセツ
ト部１２の下方に配置された転写用の光学系１６
及びウエハーチヤツク１７とを具備し、上記光源
１５と光学系１６とウエハーチヤツク１７とが一
体となつてマスクセツト部１２に対して回転可能
に設けられて成ることを特徴とする露光装置。 A mask setting section 12 in which a plurality of masks 19 can be arranged and set in the circumferential direction, a light source 15 arranged above the mask setting section 12, and a transfer optical system 16 arranged below the mask setting section 12.
and a wafer chuck 17, the light source 15, the optical system 16, and the wafer chuck 17 being integrally provided so as to be rotatable relative to the mask setting section 12.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9728488U JPH0220322U (en) | 1988-07-25 | 1988-07-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9728488U JPH0220322U (en) | 1988-07-25 | 1988-07-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0220322U true JPH0220322U (en) | 1990-02-09 |
Family
ID=31322613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9728488U Pending JPH0220322U (en) | 1988-07-25 | 1988-07-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0220322U (en) |
-
1988
- 1988-07-25 JP JP9728488U patent/JPH0220322U/ja active Pending