JPH0212485U - - Google Patents
Info
- Publication number
- JPH0212485U JPH0212485U JP8992888U JP8992888U JPH0212485U JP H0212485 U JPH0212485 U JP H0212485U JP 8992888 U JP8992888 U JP 8992888U JP 8992888 U JP8992888 U JP 8992888U JP H0212485 U JPH0212485 U JP H0212485U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- exhaust fan
- coating liquid
- coating machine
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011248 coating agent Substances 0.000 claims 5
- 238000000576 coating method Methods 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 3
- 239000007788 liquid Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Description
第１図は本考案の実施例を示す概略構成図、第
２図は排気扇の形状を示す外観図、第３図は本考
案の動作を示す概略構成図、第４図は従来例を示
す概略構成図である。
１０…排気扇、１３…回転台、１６…基板。
Fig. 1 is a schematic configuration diagram showing an embodiment of the present invention, Fig. 2 is an external view showing the shape of the exhaust fan, Fig. 3 is a schematic configuration diagram showing the operation of the invention, and Fig. 4 shows a conventional example. It is a schematic configuration diagram. 10... Exhaust fan, 13... Turntable, 16... Board.
Claims (1)
表面に塗布液を滴下し、遠心力を利用して塗布液
を基板上に塗り広げて塗布膜を基板上に形成させ
る回転塗布機において、回転台外周部を同心円状
に取り囲む円環状排気扇を配置し、その排気扇に
よつて強制的に排気を行うことを特徴とする回転
塗布機。 In a rotary coating machine, a coating liquid is dripped onto the surface of a rotating substrate that is removably fixed on a rotating table, and the coating liquid is spread over the substrate using centrifugal force to form a coating film on the substrate. A rotary coating machine characterized by having an annular exhaust fan concentrically surrounding the outer periphery of the stand, and forcibly exhausting air by the exhaust fan.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8992888U JPH0212485U (en) | 1988-07-08 | 1988-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8992888U JPH0212485U (en) | 1988-07-08 | 1988-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0212485U true JPH0212485U (en) | 1990-01-25 |
Family
ID=31314467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8992888U Pending JPH0212485U (en) | 1988-07-08 | 1988-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0212485U (en) |
-
1988
- 1988-07-08 JP JP8992888U patent/JPH0212485U/ja active Pending
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