JPS59191728U - Rotating head for subinner - Google Patents

Rotating head for subinner

Info

Publication number
JPS59191728U
JPS59191728U JP8605683U JP8605683U JPS59191728U JP S59191728 U JPS59191728 U JP S59191728U JP 8605683 U JP8605683 U JP 8605683U JP 8605683 U JP8605683 U JP 8605683U JP S59191728 U JPS59191728 U JP S59191728U
Authority
JP
Japan
Prior art keywords
substrate
peripheral edge
rotating head
vacuum chuck
spinner
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8605683U
Other languages
Japanese (ja)
Inventor
町田　光三
Original Assignee
日本ビクター株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本ビクター株式会社 filed Critical 日本ビクター株式会社
Priority to JP8605683U priority Critical patent/JPS59191728U/en
Publication of JPS59191728U publication Critical patent/JPS59191728U/en
Pending legal-status Critical Current

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  • Coating Apparatus (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図Ａ、　　Ｂは夫々従来のスピンナ用回転ヘッドの
平面図及び断面図、第２図は従来の回転ヘラ１　　ドに
よる膜厚ムラの発生状態を示す平面図、第３図Ａ、　Ｂ
は夫々本考案になるスピンナ周回転ヘラ　。 ドの平面図及び断面図である。 、　　　　１．１０・・・回転ヘッド本体、ｌａ、１１
・・・上面、２・・・円環状溝、３・・・放射状溝、１
２ａ、１２ｂ・・・１　　上面周縁部、１３・・・円環
状溝部、１４・・・連通孔、１５・・・横孔、１６・・
・吸引孔、１７・・・空気抜穴、１９・・・ウェハー、
２１・・・薄膜。FIGS. 1A and 1B are a plan view and a sectional view of a conventional rotating head for a spinner, respectively. FIG. 2 is a plan view showing how film thickness unevenness occurs due to a conventional rotating head. FIGS. 3A and 3B are
The spinner circumferential rotating spatula is the invention of this invention. FIG. 2 is a plan view and a cross-sectional view of the , 1.10... Rotating head body, la, 11
...Top surface, 2...Annular groove, 3...Radial groove, 1
2a, 12b...1 Upper surface periphery, 13...Annular groove, 14...Communication hole, 15...Horizontal hole, 16...
・Suction hole, 17...Air vent hole, 19...Wafer,
21...Thin film.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] スピンコード法により均一の薄膜を形成される被コート
基板を載置され真空チャックで固定するスピンナ用回転
ヘッドにおいて、該スピンナ用回転ヘッド本体の上面周
縁部を突出させ、該突出させた上面周縁部に全周に亘２
て真空チャック用の円環状の溝部を設け、更に該溝部に
連通して形成されており真空源に連通される連通孔を設
けてなり、該被コート基板の周縁部を真空チャックで固
定するように構成したスピンナ用回転ヘッド。In a spinner rotary head on which a substrate to be coated on which a uniform thin film is formed by a spin code method is placed and fixed by a vacuum chuck, the top peripheral edge of the main body of the spinner rotary head is protruded, and the protruded upper surface peripheral edge is provided. 2 around the entire circumference
An annular groove for a vacuum chuck is provided in the substrate, and a communication hole is formed in communication with the groove and communicated with a vacuum source, so that the peripheral edge of the substrate to be coated can be fixed with the vacuum chuck. Rotating head for spinner configured as follows.
JP8605683U 1983-06-06 1983-06-06 Rotating head for subinner Pending JPS59191728U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8605683U JPS59191728U (en) 1983-06-06 1983-06-06 Rotating head for subinner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8605683U JPS59191728U (en) 1983-06-06 1983-06-06 Rotating head for subinner

Publications (1)

Publication Number Publication Date
JPS59191728U true JPS59191728U (en) 1984-12-19

Family

ID=30216001

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8605683U Pending JPS59191728U (en) 1983-06-06 1983-06-06 Rotating head for subinner

Country Status (1)

Country Link
JP (1) JPS59191728U (en)

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