JPH0220136B2 - - Google Patents
Info
- Publication number
- JPH0220136B2 JPH0220136B2 JP58062463A JP6246383A JPH0220136B2 JP H0220136 B2 JPH0220136 B2 JP H0220136B2 JP 58062463 A JP58062463 A JP 58062463A JP 6246383 A JP6246383 A JP 6246383A JP H0220136 B2 JPH0220136 B2 JP H0220136B2
- Authority
- JP
- Japan
- Prior art keywords
- boat
- pair
- light shielding
- elevator
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001514 detection method Methods 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000009792 diffusion process Methods 0.000 description 11
- 239000010453 quartz Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 8
- 235000012431 wafers Nutrition 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Description
【発明の詳細な説明】
この発明は、半導体ウエハの拡散工程中におい
て、この半導体ウエハを収納して熱処理治具とし
て用いられるボートの搬送を行うボートエレベー
タに関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a boat elevator that transports a boat that accommodates semiconductor wafers and is used as a heat treatment jig during a semiconductor wafer diffusion process.
第１図は従来のこの種ボートエレベータを示す
斜視図で、１は半導体ウエハに、シリコン酸化膜
または窒化膜などの皮膜形成処理、あるいはPN
接合を作るための不純物拡散処理などを行なう拡
散炉、２はこの拡散炉の前面に設けられた複数の
石英管、３は数の半導体ウエハ、４はこの多数の
半導体ウエハ３を直立状態に並列して載置するボ
ート、５は上記拡散炉１の石英管２内にボート４
を移送案内するボート受台、６は上記ボート４を
石英管２を経て拡散炉１内に出し入れする引出
棒、７は上記ボート受台５を載置し、所定間隔を
あけて複数の切欠き８ａ，８ｂを形成したボート
受棚、９はボート４を載置したままの状態で、ボ
ート受台５をボート受棚７と、ボート送り装置１
７との間に置き換えるエレベータ本体、１０ａ，
１０ｂは上記ボート受台５を載置するボート受ア
ームで、回転するクランク１２に連結されたリン
ク１１によつて矢印Ａの方向に往復移動するよう
に構成されている。１３，１３は上記エレベータ
本体９を矢印Ｂの方向に昇降させるための一対の
ガイド軸で、上記エレベータ本体９は、昇降駆動
装置１６のスプロケツトホイール１５の正逆回転
により、チエーン１４を介して所定ストロークを
昇降し得るように構成されている。 FIG. 1 is a perspective view showing a conventional boat elevator of this type. 1 is a perspective view showing a conventional boat elevator of this type.
A diffusion furnace that performs impurity diffusion treatment to create a bond, 2 a plurality of quartz tubes installed in the front of this diffusion furnace, 3 a number of semiconductor wafers, and 4 a plurality of semiconductor wafers 3 arranged in an upright position. A boat 5 is placed inside the quartz tube 2 of the diffusion furnace 1.
6 is a pull-out rod for moving the boat 4 in and out of the diffusion furnace 1 through the quartz tube 2; 7 is a pull-out rod on which the boat 4 is placed; a plurality of notches are provided at predetermined intervals; Boat racks 8a and 8b are formed, and 9 is a boat rack with the boat 4 placed thereon, and the boat rack 5 is connected to the boat rack 7 and the boat feeding device 1.
The elevator main body to be replaced between 7 and 10a,
10b is a boat receiving arm on which the boat receiving stand 5 is placed, and is configured to reciprocate in the direction of arrow A by a link 11 connected to a rotating crank 12. Reference numerals 13 and 13 denote a pair of guide shafts for raising and lowering the elevator main body 9 in the direction of arrow B. It is configured to be able to move up and down within a predetermined stroke.
従来のボートエレベータは上記のように構成さ
れているので、ボート４を載置したボート受台５
をボート受棚７からボート送り装置１７に降ろす
場合には、まず、昇降駆動装置１６を起動してス
プロケツトホイール１５およびチエーン１４を介
してエレベータ本体９を所定位置まで上昇させ、
エレベータ本体９のボート受アーム１０ａ，１０
ｂがボート受棚７の切欠き８ａ，８ｂの下側に対
応した位置で停止させる。次に、クランク１２を
所定方向に回転させてリンク１１を移動させ、上
記ボート受アーム１０ａ，１０ｂをボート受台５
の下部に前進させたあと、再び、エレベータ本体
９を上昇させると、このエレベータ本体９のボー
ト受アーム１０ａ，１０ｂは切欠き８ａ，８ｂを
通り抜けてボート４と共にボート受台５を持ち上
げ、ボート４の外方端折曲部４ａが引出棒６から
外れる位置で停止するようになされている。次
に、再びクランク１２を所定方向に回転させ、リ
ンク１１によつてボート受アーム１０ａ，１０ｂ
をボート受台５と共に後退させ、エレベータ本体
９が元の位置に戻つた状態から昇降駆動装置１６
を起動してこのエレベータ本体９を下降させる
と、ボート受台５はボート４と共にボート送り装
置１７に移されるものである。なお、ボート受台
５をボート４と共にボート送り装置１７からボー
ト受棚７に移動させる動作は上述した動作と逆動
作で行なわれることはいうまでもない。 Since the conventional boat elevator is configured as described above, the boat pedestal 5 on which the boat 4 is placed is
When lowering a boat from the boat rack 7 to the boat feeding device 17, first, the elevator main body 9 is raised to a predetermined position via the sprocket wheel 15 and chain 14 by starting the lifting drive device 16.
Boat receiving arms 10a, 10 of elevator main body 9
b is stopped at a position corresponding to the lower side of the notches 8a and 8b of the boat receiving shelf 7. Next, the crank 12 is rotated in a predetermined direction to move the link 11, and the boat receiving arms 10a, 10b are moved to the boat receiving stand 5.
When the elevator main body 9 is raised again, the boat receiving arms 10a, 10b of the elevator main body 9 pass through the notches 8a, 8b and lift the boat 4 together with the boat receiving stand 5. It is configured to stop at a position where the outer end bent portion 4a is removed from the pull-out rod 6. Next, the crank 12 is rotated in a predetermined direction again, and the boat receiving arms 10a, 10b are connected by the link 11.
is moved back together with the boat pedestal 5, and from the state where the elevator main body 9 has returned to its original position, the elevator drive device 16 is moved back.
When the elevator main body 9 is lowered by starting the elevator main body 9, the boat pedestal 5 is transferred together with the boat 4 to the boat feeding device 17. It goes without saying that the operation of moving the boat pedestal 5 together with the boat 4 from the boat feeding device 17 to the boat cradle 7 is performed in the opposite manner to the above-described operation.
しかしながら、上述した従来のボートエレベー
タにおいては、ボート受アーム１０ａ，１０ｂの
前進または後退運動をクランク１２のクランク運
動によつて行なうようにしているため、その機能
上クランク１２の上・下死点におけるボート受ア
ームの移動停止精度は良いが、上・下死点を外れ
ると、移動停止精度が悪くなるため、ボート受台
５は、ボート受アーム１０ａ，１０ｂのストロー
クエンド、すなわちクランク１２の下死点におい
てボート受棚７上に位置決めすることになり、ボ
ート４の出し入れに対する拡散炉１の各石英管２
への芯出し作業も、クランク１２の下死点で位置
決めされたボート受台５を基準にして行なわなけ
ればならず、その作業がきわめて面倒であるばか
りでなく、ロスの多い作業規制が伴なう欠点があ
る。 However, in the above-mentioned conventional boat elevator, the forward or backward movement of the boat receiving arms 10a, 10b is performed by the crank movement of the crank 12. Although the movement stopping accuracy of the boat receiving arm is good, the movement stopping accuracy deteriorates when the boat receiving arm deviates from the top/bottom dead center. Each quartz tube 2 of the diffusion furnace 1 is positioned on the boat receiving shelf 7 at a point, and each quartz tube 2 of the diffusion furnace 1 is
The centering work must also be done based on the boat cradle 5, which is positioned at the bottom dead center of the crank 12, which is not only extremely troublesome, but also involves work regulations that involve a lot of loss. There are some drawbacks.
この発明は、かかる点に着目してなされたもの
で、ボート受アームの停止位置を可動範囲で拡散
炉の各石英管に対応して設定し、かつ同一停止精
度とすることによつて、各石英管に対するボート
受台の調整を対として簡単に行なうことができる
ボートエレベータを提供しようとするものであ
る。 This invention was made with attention to this point, and by setting the stop position of the boat receiving arm in a movable range corresponding to each quartz tube of the diffusion furnace, and by making the stop position the same for each quartz tube. It is an object of the present invention to provide a boat elevator in which adjustment of a boat pedestal with respect to a quartz tube can be easily performed as a pair.
すなわち、第２図ないし第４図は何れもこの発
明の一実施例を示すもので、２２はエレベータ本
体で、一対のガイド軸１３，１３に挿入された一
対のガイド軸受２１，２１を介し昇降駆動装置１
６によつて昇降されるようになされている。４
０，４０は一対のボート受アームで、このボート
受アームは一対のスライダ２６，２６にそれぞれ
固定された互いに平行な一対のアーム軸２３，２
３と一体をなす連結板３９の両端部に取付けられ
ている。３７は駆動モータで、この駆動モータは
常時噛合する複数の歯車３６，３５，３４を介し
て駆動軸２９の両端部に固着された一対の駆動プ
ーリ２８，２８に回転力を伝達し、一対の継手４
１，４１および駆動ベルト２４，２４を経て上記
一対のスライダ２６，２６を同時に前進または後
退させるために設けられたものである。３３は上
記各歯車のうち、その中間の歯車３５によつて回
転駆動される中間軸で、この中間軸３３には、前
進または後退する上記ボート受アーム４０，４０
の後退位置（実線で示す位置）と、前進位置（１
点鎖線で示す位置）とに設定するための複数の遮
光板３１ａ〜３１ｅが一体に取付けられている。
３０ａ〜３０ｅは上記各遮光板３１ａ〜３１ｅに
対応して配設され、上記拡散炉１の石英管２の数
量と同数の位置検出センサで、この各位置検出セ
ンサは、それぞれに備えているランプの光が、そ
れぞれの遮光板３１ａ〜３１ｅによつて透過、ま
たは遮光することによつてボート受アーム４０，
４０の位置検出信号を出力するように構成されて
いる。２７は第３図にも示すように、上記両スラ
イダ２６，２６の前進または後退時に、所定方向
にガイドする一対のガイド軸、２５，２５は一方
を上記両駆動プーリ２８，２８に巻掛けたベルト
２４，２４の他方が巻掛けられ、一対の支軸３
８，３８によつて回転自在に支承された一対の従
動プーリである。 That is, FIGS. 2 to 4 all show one embodiment of the present invention, and 22 is an elevator main body, which is moved up and down via a pair of guide bearings 21, 21 inserted into a pair of guide shafts 13, 13. Drive device 1
6 to be raised and lowered. 4
Reference numerals 0 and 40 designate a pair of boat support arms, which are connected to a pair of mutually parallel arm shafts 23 and 2 fixed to a pair of sliders 26 and 26, respectively.
3 is attached to both ends of a connecting plate 39 that is integral with the connecting plate 3. Reference numeral 37 denotes a drive motor, which transmits rotational force to a pair of drive pulleys 28, 28 fixed to both ends of the drive shaft 29 via a plurality of gears 36, 35, 34 that are always in mesh with each other. Fitting 4
1, 41 and drive belts 24, 24 to simultaneously move the pair of sliders 26, 26 forward or backward. Reference numeral 33 denotes an intermediate shaft rotatably driven by the intermediate gear 35 among the gears, and the boat receiving arms 40, 40, which move forward or backward, are attached to the intermediate shaft 33.
The backward position (the position shown by the solid line) and the forward position (1
A plurality of light shielding plates 31a to 31e are integrally attached to the light shielding plates 31a to 31e.
Numerals 30a to 30e are position detection sensors arranged corresponding to the light shielding plates 31a to 31e, the number of which is the same as the number of quartz tubes 2 of the diffusion furnace 1, and each of the position detection sensors corresponds to the number of lamps provided therein. The boat receiving arm 40,
It is configured to output 40 position detection signals. As shown in FIG. 3, 27 is a pair of guide shafts that guide the sliders 26, 26 in a predetermined direction when they advance or retreat, and 25, 25 has one end wrapped around the drive pulleys 28, 28. The other of the belts 24, 24 is wound around the pair of support shafts 3.
These are a pair of driven pulleys rotatably supported by 8 and 38.
この発明のボートエレベータは上記のように構
成されており、エレベータ本体２２がガイド軸１
３，１３に沿つて昇降する動作は、上述した従来
のエレベータ本体９と同様のためその説明を省略
する。 The boat elevator of the present invention is constructed as described above, and the elevator main body 22 is connected to the guide shaft 1.
The operation of moving up and down along lines 3 and 13 is the same as that of the conventional elevator main body 9 described above, so the explanation thereof will be omitted.
いま、第１図に示すボート受台５をボート受棚
７からボート送り装置１７に降ろす場合には、ボ
ート受棚７の下側でエレベータ本体２２を停止さ
せたあと、駆動モータ３７を起動すると、その回
転力は各歯車３６，３５，３４および駆動軸２９
の駆動プーリ２８，２８を介して駆動ベルト２
４，２４を矢印Ａの方向に移送させるため、継手
４１，４１、スライダ２６，２６、アーム軸２
３，２３および連結板３９を介して一対のボート
受アーム４０，４０を１点鎖線で示す位置まで前
進させる。この場合、１点鎖線で示す所定の前進
位置にボート受アーム４０，４０が停止されるの
は、中間軸３３の各遮光板３１ａ〜３１ｅのう
ち、所定の遮光板に対応する所定の位置検出セン
サ３０ａ〜３０ｅの何れかの出力信号がその遮光
板を透過して入力されたときに、これを検出して
駆動モータ３７を停止させるように構成されてい
るからである。 Now, when lowering the boat pedestal 5 shown in FIG. , the rotational force is generated by each gear 36, 35, 34 and the drive shaft 29.
Drive belt 2 via drive pulleys 28, 28
4, 24 in the direction of arrow A, the joints 41, 41, sliders 26, 26, arm shaft 2
3, 23 and the connecting plate 39, the pair of boat receiving arms 40, 40 are advanced to the position shown by the one-dot chain line. In this case, the boat receiving arms 40, 40 are stopped at the predetermined forward position indicated by the dashed line when a predetermined position corresponding to a predetermined light shielding plate is detected among the light shielding plates 31a to 31e of the intermediate shaft 33. This is because the drive motor 37 is configured to detect when an output signal from any of the sensors 30a to 30e is input through the light shielding plate and to stop the drive motor 37.
次に、エレベータ本体２２を昇降駆動装置１６
によつてわずかに上昇させると、ボート受けアー
ム４０，４０にはボート受台５が載置される。こ
のあと、上記駆動モータ３７を逆回転させると、
ベルト２４，２４は矢印Ａと反対方向に移送され
るため、スライダ２６，２６およびアーム軸２
３，２３と一体をなすボート受けアーム４０，４
０は実線で示す位置まで後退する。この場合、実
線で示す所定の後退位置にボート受アーム４０，
４０が停止されるのは、中間軸３３の各遮光板３
１ａ〜３１ｅのうち、所定の遮光板に対応する所
定の位置検出センサ３０ａ〜３０ｅの何れかの出
力信号がその遮光板を透過して入力されたとき
に、これを検出して駆動モータ３７を停止させる
ように構成されているからである。このようにし
て、エレベータ本体２２が元の位置に戻つた状態
から昇降駆動装置１６を起動してこのエレベータ
本体２２を所定位置まで下降させると、ボート受
台５はボート４と共にボート送り装置１７に移さ
れる。 Next, the elevator main body 22 is
When the boat receiving arms 40, 40 are slightly raised, the boat receiving stand 5 is placed on the boat receiving arms 40, 40. After that, when the drive motor 37 is reversely rotated,
Since the belts 24, 24 are transported in the direction opposite to the arrow A, the sliders 26, 26 and the arm shaft 2
Boat receiving arm 40, 4 integrated with 3, 23
0 retreats to the position shown by the solid line. In this case, the boat receiving arm 40,
40 is stopped by each light shielding plate 3 of the intermediate shaft 33.
When an output signal from one of the position detection sensors 30a to 30e corresponding to a predetermined light shielding plate among 1a to 31e is input through the light shielding plate, this is detected and the drive motor 37 is activated. This is because it is configured to be stopped. In this way, when the elevator main body 22 is returned to its original position and the elevator main body 22 is lowered to a predetermined position by starting the elevating drive device 16, the boat pedestal 5 is moved to the boat feeding device 17 together with the boat 4. be transferred.
以上述べたように、この発明によれば、ボート
受アーム４０，４０をアーム軸２３，２３の直線
運動によつて進退させるようにしたので、ボート
受アーム４０，４０の移動停止精度が著しく向上
するばかりでなく、上記ボート受アーム４０，４
０を駆動する駆動モータ３７と連動して回転され
る中間軸３３に複数の位置検出センサ３０ａ〜３
０ｅを設けるようにしたので、ボート受アーム４
０，４０を前進または後退位置において高精度に
停止させることができるばかりでなく、拡散炉１
の各石英管２への芯出し作業も個々にきわめて簡
単に行なうことができる優れた効果を有するもの
である。 As described above, according to the present invention, since the boat receiving arms 40, 40 are moved forward and backward by the linear movement of the arm shafts 23, 23, the movement and stopping accuracy of the boat receiving arms 40, 40 is significantly improved. Not only that, but also the boat receiving arms 40, 4
A plurality of position detection sensors 30a to 3 are mounted on an intermediate shaft 33 that rotates in conjunction with a drive motor 37 that drives 0.
0e is provided, so the boat receiving arm 4
Not only can the 0, 40 be stopped with high accuracy in the forward or backward position, but also the diffusion furnace 1 can be stopped with high accuracy.
The centering operation for each quartz tube 2 can also be performed individually very easily, which has an excellent effect.
なお、上述した一実施例においては、ボート４
を載置したボート受台５の移動操作について述べ
たが、ボート４のみの移動にも使用し得ることは
もちろん、ボート受アーム４０，４０の所定位置
の停止操作を、駆動モータ３７として、パルスモ
ータ、あるいはDCサーボモータを使用してその
パルス数をハード的に設定することにより同様の
効果が得られることはいうまでもない。 Note that in the above-mentioned embodiment, the boat 4
Although the operation of moving the boat holder 5 on which the It goes without saying that a similar effect can be obtained by using a motor or a DC servo motor and setting the number of pulses in hardware.
第１図は従来のボートエレベータを示す斜視
図、第２図ないし第４図はこの発明の一実施例を
示すもので、第２図は平面図、第３図は第２図の
−線における断面図、第４図は歯車と遮光板
と位置検出センサの位置関係を示す斜視図であ
る。
図面中、３は半導体ウエハ、４はボート、５は
ボート受台、１３，１３はガイド軸、２２はエレ
ベータ本体、２３，２３はアーム軸、２４，２４
は駆動ベルト、２６，２６はスライダ、２９は駆
動軸、３０ａ〜３０ｅは位置検出センサ、３１ａ
〜３１ｅは遮光板、３９は連結板、４０，４０は
ボート受アームである。なお、図中同一符号は同
一または相当部分を示す。
Fig. 1 is a perspective view showing a conventional boat elevator, Figs. 2 to 4 show an embodiment of the present invention, Fig. 2 is a plan view, and Fig. 3 is a perspective view taken along the - line in Fig. 2. The sectional view and FIG. 4 are perspective views showing the positional relationship between the gear, the light shielding plate, and the position detection sensor. In the drawing, 3 is a semiconductor wafer, 4 is a boat, 5 is a boat pedestal, 13, 13 is a guide shaft, 22 is an elevator main body, 23, 23 is an arm shaft, 24, 24
is a drive belt, 26, 26 is a slider, 29 is a drive shaft, 30a to 30e are position detection sensors, 31a
31e is a light shielding plate, 39 is a connecting plate, and 40, 40 are boat receiving arms. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
受台を移動させるボート受アームを、一対のスラ
イダに夫々固定された互いに平行な一対の水平ア
ーム軸に連結し、 一方、駆動モータにより駆動される歯車の軸に
複数の遮光板を取付け、この各遮光板に対応して
上記ボート受アームの位置検出信号を出力する検
出センサを配置し、 上記歯車と噛合する歯車の軸に駆動プーリを取
付けて、これにベルトを掛架し、該ベルトに上記
スライダを連結したボートエレベータ。[Claims] 1. A boat support arm for moving a boat or boat support on which a semiconductor wafer is mounted is connected to a pair of mutually parallel horizontal arm shafts fixed to a pair of sliders, respectively; A plurality of light shielding plates are attached to the shaft of the gear driven by the gear, and a detection sensor that outputs a position detection signal of the boat receiving arm is arranged corresponding to each light shielding plate. A boat elevator in which a pulley is attached, a belt is suspended from the pulley, and the slider is connected to the belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6246383A JPS59186338A (en) | 1983-04-07 | 1983-04-07 | Boat elevator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6246383A JPS59186338A (en) | 1983-04-07 | 1983-04-07 | Boat elevator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59186338A JPS59186338A (en) | 1984-10-23 |
| JPH0220136B2 true JPH0220136B2 (en) | 1990-05-08 |
Family
ID=13200922
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6246383A Granted JPS59186338A (en) | 1983-04-07 | 1983-04-07 | Boat elevator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59186338A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60111045U (en) * | 1983-12-29 | 1985-07-27 | 株式会社東芝 | Semiconductor wafer boat transport device |
| JPH01315132A (en) * | 1988-03-24 | 1989-12-20 | Tel Sagami Ltd | Treatment apparatus of semiconductor wafer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54155673A (en) * | 1978-05-26 | 1979-12-07 | Matsushita Electronics Corp | High pressure sodium lamp |
-
1983
- 1983-04-07 JP JP6246383A patent/JPS59186338A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54155673A (en) * | 1978-05-26 | 1979-12-07 | Matsushita Electronics Corp | High pressure sodium lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59186338A (en) | 1984-10-23 |
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