JPH0220036B2 - - Google Patents
Info
- Publication number
- JPH0220036B2 JPH0220036B2 JP57038639A JP3863982A JPH0220036B2 JP H0220036 B2 JPH0220036 B2 JP H0220036B2 JP 57038639 A JP57038639 A JP 57038639A JP 3863982 A JP3863982 A JP 3863982A JP H0220036 B2 JPH0220036 B2 JP H0220036B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- photoconductor
- state imaging
- imaging device
- solid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000003384 imaging method Methods 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 10
- 239000012212 insulator Substances 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims 2
- 238000001444 catalytic combustion detection Methods 0.000 description 10
- 239000011521 glass Substances 0.000 description 6
- 238000002844 melting Methods 0.000 description 6
- 230000008018 melting Effects 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- 241000519995 Stachys sylvatica Species 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- 238000005381 potential energy Methods 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 210000003127 knee Anatomy 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14665—Imagers using a photoconductor layer
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57038639A JPS58154977A (ja) | 1982-03-10 | 1982-03-10 | 固体撮像装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57038639A JPS58154977A (ja) | 1982-03-10 | 1982-03-10 | 固体撮像装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58154977A JPS58154977A (ja) | 1983-09-14 |
| JPH0220036B2 true JPH0220036B2 (fr) | 1990-05-07 |
Family
ID=12530806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57038639A Granted JPS58154977A (ja) | 1982-03-10 | 1982-03-10 | 固体撮像装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58154977A (fr) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60245166A (ja) * | 1984-05-18 | 1985-12-04 | Matsushita Electric Ind Co Ltd | 固体撮像装置 |
| JP2514941B2 (ja) * | 1986-12-26 | 1996-07-10 | 株式会社東芝 | 固体撮像装置の製造方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55104176A (en) * | 1979-02-06 | 1980-08-09 | Matsushita Electric Ind Co Ltd | Solidstate pick up unit |
| JPS56115575A (en) * | 1980-02-15 | 1981-09-10 | Matsushita Electric Ind Co Ltd | Solid state image pickup device |
| JPS5732183A (en) * | 1980-08-04 | 1982-02-20 | Matsushita Electric Ind Co Ltd | Solid state image pickup device |
-
1982
- 1982-03-10 JP JP57038639A patent/JPS58154977A/ja active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55104176A (en) * | 1979-02-06 | 1980-08-09 | Matsushita Electric Ind Co Ltd | Solidstate pick up unit |
| JPS56115575A (en) * | 1980-02-15 | 1981-09-10 | Matsushita Electric Ind Co Ltd | Solid state image pickup device |
| JPS5732183A (en) * | 1980-08-04 | 1982-02-20 | Matsushita Electric Ind Co Ltd | Solid state image pickup device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58154977A (ja) | 1983-09-14 |
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