JPH0219960Y2 - - Google Patents

Info

Publication number
JPH0219960Y2
JPH0219960Y2 JP18175684U JP18175684U JPH0219960Y2 JP H0219960 Y2 JPH0219960 Y2 JP H0219960Y2 JP 18175684 U JP18175684 U JP 18175684U JP 18175684 U JP18175684 U JP 18175684U JP H0219960 Y2 JPH0219960 Y2 JP H0219960Y2
Authority
JP
Japan
Prior art keywords
gas
tube
outer tube
quartz
heat treatment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP18175684U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6196536U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18175684U priority Critical patent/JPH0219960Y2/ja
Publication of JPS6196536U publication Critical patent/JPS6196536U/ja
Application granted granted Critical
Publication of JPH0219960Y2 publication Critical patent/JPH0219960Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP18175684U 1984-11-30 1984-11-30 Expired JPH0219960Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18175684U JPH0219960Y2 (enrdf_load_stackoverflow) 1984-11-30 1984-11-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18175684U JPH0219960Y2 (enrdf_load_stackoverflow) 1984-11-30 1984-11-30

Publications (2)

Publication Number Publication Date
JPS6196536U JPS6196536U (enrdf_load_stackoverflow) 1986-06-21
JPH0219960Y2 true JPH0219960Y2 (enrdf_load_stackoverflow) 1990-05-31

Family

ID=30739297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18175684U Expired JPH0219960Y2 (enrdf_load_stackoverflow) 1984-11-30 1984-11-30

Country Status (1)

Country Link
JP (1) JPH0219960Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2693465B2 (ja) * 1988-02-16 1997-12-24 株式会社東芝 半導体ウェハの処理装置

Also Published As

Publication number Publication date
JPS6196536U (enrdf_load_stackoverflow) 1986-06-21

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