JPH021856Y2 - - Google Patents

Info

Publication number

JPH021856Y2

JPH021856Y2 JP3897183U JP3897183U JPH021856Y2 JP H021856 Y2 JPH021856 Y2 JP H021856Y2 JP 3897183 U JP3897183 U JP 3897183U JP 3897183 U JP3897183 U JP 3897183U JP H021856 Y2 JPH021856 Y2 JP H021856Y2

Authority

JP

Japan

Prior art keywords

conductor layer

layer

cutting

lower conductor

trimming capacitor

Prior art date

1983-03-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• 239000004020 conductor Substances 0.000 claims description 29
• 239000003990 capacitor Substances 0.000 claims description 15
• 238000009966 trimming Methods 0.000 claims description 15
• 239000000758 substrate Substances 0.000 claims description 12
• 238000000034 method Methods 0.000 description 3
• 239000000919 ceramic Substances 0.000 description 2
• 239000013078 crystal Substances 0.000 description 2
• 238000005488 sandblasting Methods 0.000 description 2
• WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
• 229910052721 tungsten Inorganic materials 0.000 description 2
• 239000010937 tungsten Substances 0.000 description 2
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 230000007423 decrease Effects 0.000 description 1
• 238000007747 plating Methods 0.000 description 1
• 238000004544 sputter deposition Methods 0.000 description 1
• 238000007738 vacuum evaporation Methods 0.000 description 1