JPH0218480B2 - - Google Patents
Info
- Publication number
- JPH0218480B2 JPH0218480B2 JP19409883A JP19409883A JPH0218480B2 JP H0218480 B2 JPH0218480 B2 JP H0218480B2 JP 19409883 A JP19409883 A JP 19409883A JP 19409883 A JP19409883 A JP 19409883A JP H0218480 B2 JPH0218480 B2 JP H0218480B2
- Authority
- JP
- Japan
- Prior art keywords
- branch pipe
- pipe
- water
- heating device
- valve mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010438 heat treatment Methods 0.000 claims description 35
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 32
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 28
- 239000012498 ultrapure water Substances 0.000 claims description 28
- 241000894006 Bacteria Species 0.000 claims description 19
- 238000004519 manufacturing process Methods 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 3
- 230000003213 activating effect Effects 0.000 claims 1
- 230000035755 proliferation Effects 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 2
- 230000001954 sterilising effect Effects 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000001580 bacterial effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 230000009545 invasion Effects 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Classifications
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03B—INSTALLATIONS OR METHODS FOR OBTAINING, COLLECTING, OR DISTRIBUTING WATER
- E03B7/00—Water main or service pipe systems
- E03B7/04—Domestic or like local pipe systems
-
- E—FIXED CONSTRUCTIONS
- E03—WATER SUPPLY; SEWERAGE
- E03B—INSTALLATIONS OR METHODS FOR OBTAINING, COLLECTING, OR DISTRIBUTING WATER
- E03B7/00—Water main or service pipe systems
- E03B7/04—Domestic or like local pipe systems
- E03B7/045—Domestic or like local pipe systems diverting initially cold water in warm water supply
Landscapes
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Hydrology & Water Resources (AREA)
- Public Health (AREA)
- Water Supply & Treatment (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Pipeline Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19409883A JPS6088299A (ja) | 1983-10-19 | 1983-10-19 | 流水システムの配管系及び配管系の滞留防止法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19409883A JPS6088299A (ja) | 1983-10-19 | 1983-10-19 | 流水システムの配管系及び配管系の滞留防止法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6088299A JPS6088299A (ja) | 1985-05-18 |
JPH0218480B2 true JPH0218480B2 (enrdf_load_stackoverflow) | 1990-04-25 |
Family
ID=16318911
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19409883A Granted JPS6088299A (ja) | 1983-10-19 | 1983-10-19 | 流水システムの配管系及び配管系の滞留防止法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6088299A (enrdf_load_stackoverflow) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07114192B2 (ja) * | 1987-10-23 | 1995-12-06 | 東京エレクトロン株式会社 | 洗浄装置及び洗浄方法 |
DE19744490A1 (de) * | 1997-10-08 | 1999-04-15 | Temp Rite International Gmbh | Trinkwasseraufbereitungsanlage |
-
1983
- 1983-10-19 JP JP19409883A patent/JPS6088299A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6088299A (ja) | 1985-05-18 |
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