JPH02158181A - Corona pre-ionizer - Google Patents
Corona pre-ionizerInfo
- Publication number
- JPH02158181A JPH02158181A JP31207788A JP31207788A JPH02158181A JP H02158181 A JPH02158181 A JP H02158181A JP 31207788 A JP31207788 A JP 31207788A JP 31207788 A JP31207788 A JP 31207788A JP H02158181 A JPH02158181 A JP H02158181A
- Authority
- JP
- Japan
- Prior art keywords
- corona
- electrode
- dielectric
- laser
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 claims abstract description 9
- 238000007747 plating Methods 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000003989 dielectric material Substances 0.000 claims description 4
- 238000010891 electric arc Methods 0.000 abstract description 9
- 230000006866 deterioration Effects 0.000 abstract description 4
- 230000005284 excitation Effects 0.000 abstract description 4
- 230000003190 augmentative effect Effects 0.000 abstract 1
- 239000003990 capacitor Substances 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 2
- 241000282465 Canis Species 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、放電電極対間（以下放電空間）のレーザガス
を電離させるためにコロナ予備電離器を用いた高効率、
長寿命なパルスガスレーザに関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention provides high-efficiency,
This article relates to a long-life pulsed gas laser.
（従来の技術）
レーザガスの電離にコロナ予備電離器を用いた従来のパ
ルスガスレーザの一例を第３図に示す。このパルスガス
レーザについては、文献［昭和６２年レーザ学会学術講
演会第７次犬会講演予稿集Ｊ １９８７年、３０ｐＩＶ
８に詳細に記載されている。この従来のパルスガスレー
ザでは、励起回路に容量移行型励起回路を用い、レーザ
ガスの電離にコロナ予備電離器を用いている。このパル
スガスレーザで用いているコロナ予備電離器は、放電面
から背面に向かって開かれた多数の貫通穴を持つ穴開き
電極７と、この穴開き電極７の背面に設置され、穴開き
電極７と対向する面にコロナ電極６を持つコロナ誘電体
（コロナ誘電体）５とから構成されている。(Prior Art) FIG. 3 shows an example of a conventional pulsed gas laser that uses a corona pre-ionizer to ionize laser gas. Regarding this pulsed gas laser, please refer to the document [1987 Laser Society Academic Conference 7th Canine Society Lecture Proceedings J 1987, 30pIV
8 is described in detail. In this conventional pulsed gas laser, a capacitive transfer type excitation circuit is used as an excitation circuit, and a corona pre-ionizer is used to ionize the laser gas. The corona pre-ionizer used in this pulsed gas laser includes a perforated electrode 7 having a large number of through holes opened from the discharge surface toward the back, and a perforated electrode 7 installed on the back of the perforated electrode 7. and a corona dielectric (corona dielectric) 5 having a corona electrode 6 on its opposing surface.
このパルスガスレーザにおいて、レーザ発振を行わせる
ためには、スパークギャップ９を導通させ充電用コンデ
ンサ１０の充電エネルギーをピーキングコンデンサ１１
に移行させる。この時、コロナ電極６と穴開き電極７と
の間にピーキングコンデンサ１１間の端子間電圧が印加
される。このため、コロナ誘電体５の穴開き電極７側の
面にコロナ放電が生じ紫外線が発生する。この紫外線が
穴開き電極７に開けられた多数の穴を通してレーザ励起
を行う放電空間８に照射され、レーザガスが電離する。In this pulsed gas laser, in order to perform laser oscillation, the spark gap 9 is made conductive and the charging energy of the charging capacitor 10 is transferred to the peaking capacitor 11.
to be transferred to At this time, the voltage between the terminals of the peaking capacitor 11 is applied between the corona electrode 6 and the perforated electrode 7. Therefore, corona discharge occurs on the surface of the corona dielectric 5 on the perforated electrode 7 side, and ultraviolet rays are generated. The ultraviolet rays are irradiated through a large number of holes made in the perforated electrode 7 to the discharge space 8 where the laser is excited, and the laser gas is ionized.
この結果、放電空間８に安定なレーザ励起を行なうグロ
ー放電が起き、効率よくレーザ出力を得ることができる
。As a result, a glow discharge that stably excites the laser occurs in the discharge space 8, and laser output can be efficiently obtained.
（発明が解決しようとする課題）
ところで、コｑす予備電離器を用いた従来のパルスガス
レーザにおいては、コロナ電極とコロナ誘電体表面とを
別々に形成してから接着しているが、誘電体の表面には
凹凸があり、これらの密着は難しく、かつ不均一な接触
になり、コロナ電極と穴開き電極間の静電容量が減少し
、コロナ電極と穴開き電極間に流れる電流が少なくなる
。このため、穴開き電極とコロナ誘電体表面との間に生
じるｂロナ放電で発生する紫外線が弱く、レーザ励起が
行われる放電空間の予備電離が不均一で、かつ不足する
。この結果、レーザ励起の放電にアーク放電が発生し、
レーザ発振効率の低下や、レーザガスの寿命が短くなる
欠点があった。(Problem to be Solved by the Invention) Incidentally, in a conventional pulsed gas laser using a coq pre-ionizer, the corona electrode and the corona dielectric surface are formed separately and then bonded together. The surface of the electrode is uneven, making it difficult to make close contact with them, resulting in uneven contact, which reduces the capacitance between the corona electrode and the perforated electrode, and reduces the current flowing between the corona electrode and the perforated electrode. . For this reason, the ultraviolet rays generated by the b-rona discharge generated between the perforated electrode and the corona dielectric surface are weak, and the pre-ionization in the discharge space where laser excitation is performed is uneven and insufficient. As a result, arc discharge occurs in the laser-excited discharge,
There were drawbacks such as a decrease in laser oscillation efficiency and a shortened laser gas life.
本発明の目的は、アーク放電の発生が少なく、効率よく
レーザ出力が取り出せ、かつレーザガスの寿命が長いコ
ロナ予備電離器を提供することである。An object of the present invention is to provide a corona pre-ionization device that generates less arc discharge, can efficiently extract laser output, and has a long laser gas life.
（課題を解決するための手段）
請求項第１項に記載した本発明によるコロナ予備電離器
は、穴開き電極の裏面からコロナ予備電離を行うコロナ
電極とそれを囲むコロナ誘電体とからなるコロナ予備電
離器において、前記誘電体内面に施した金属メッキをコ
ロナ電極することを特徴としている。(Means for Solving the Problems) A corona pre-ionization device according to the present invention as set forth in claim 1 is a corona pre-ionization device that includes a corona electrode that performs corona pre-ionization from the back surface of a holed electrode and a corona dielectric surrounding the corona electrode. The pre-ionizer is characterized in that the metal plating applied to the inner surface of the dielectric serves as a corona electrode.
請求項第２項に記載した本発明によるコロナ予備電離器
は、穴開き電極の裏面からコロナ予備電離を行うコロナ
電極とそれを囲むコロナ誘電体とからなるコロナ予備電
離器において、前記誘電体で囲まれた空間に充填した金
属粉末をコロナ電極することを特徴としている。The corona pre-ionizer according to the present invention as set forth in claim 2 is a corona pre-ionizer comprising a corona electrode that performs corona pre-ionization from the back surface of a holed electrode and a corona dielectric surrounding the corona dielectric. It is characterized by using metal powder filled in the enclosed space as a corona electrode.
（作用）
本発明によるコロナ予備電離器においては、コロナ誘電
体内面の金属メッキや誘電体内に充填された金属粉末を
コロナ電極として用いている。このため、コロナ誘電体
表面とコロナ電極とが均一に接触し、かつ接触面積が増
えコロナ電極と穴開き電極間の静電容量が増す。この静
電容量の増加により、穴開き電極とコロナ誘電体間で生
じるコロナ放電に注入されるエネルギーが増加して、コ
ロナ放電で発生する紫外線量が増える。この結果、放電
空間に強度の強い紫外線が照射され、レーザガスを強く
電離し、かつ均一に行なわれるので、レーザ励起の放電
時に発生するアーク放電が抑制され、効率よくレーザ出
力を得ることができ、アーク放電の発生によるレーザガ
スの劣化が抑えられる。(Function) In the corona pre-ionizer according to the present invention, metal plating on the inner surface of the corona dielectric or metal powder filled in the dielectric is used as a corona electrode. Therefore, the corona dielectric surface and the corona electrode come into uniform contact, and the contact area increases, increasing the capacitance between the corona electrode and the perforated electrode. This increase in capacitance increases the energy injected into the corona discharge generated between the perforated electrode and the corona dielectric, thereby increasing the amount of ultraviolet light generated by the corona discharge. As a result, the discharge space is irradiated with strong ultraviolet rays, which strongly ionizes the laser gas and ionizes it uniformly. This suppresses the arc discharge that occurs during laser-excited discharge, making it possible to efficiently obtain laser output. Deterioration of the laser gas due to the occurrence of arc discharge is suppressed.
（実施例） 次に、図面を用いて本発明の詳細な説明する。(Example) Next, the present invention will be explained in detail using the drawings.
第１図は、第１項に記載の発明（以下第１の発明）の一
実施例である、コロナ予備電離器の断面図を示している
。FIG. 1 shows a cross-sectional view of a corona pre-ionizer, which is an embodiment of the invention described in item 1 (hereinafter referred to as the first invention).
第２図は、第２項に記載の発明（以下第２の発明）の一
実施例である、コロナ予備電離器の断面図を示している
。FIG. 2 shows a sectional view of a corona pre-ionizer, which is an embodiment of the invention described in item 2 (hereinafter referred to as the second invention).
第１図及び第２図に断面図を示した第１及び第２の発明
を用いたコロナ予備電離器は、第３図に示した従来のコ
ロナ予備電離器と異なり、コロナ電極を囲むコロナ誘電
体１の内面に施された金属メッキ２やコロナ誘電体１で
囲まれた空間に充填された金属粉末４をコロナ電極とし
ている。Corona pre-ionizers using the first and second inventions whose cross-sectional views are shown in FIGS. 1 and 2 differ from the conventional corona pre-ionizer shown in FIG. The metal powder 4 filled in the space surrounded by the metal plating 2 applied to the inner surface of the body 1 and the corona dielectric 1 serves as a corona electrode.
このため、コロナ誘電体１表面とコロナ電極との均一な
接触がとれ、かつ接触面積が増え、コロナ電極と穴開き
電極３間の容量が増し、穴開き電極３とコロナ誘電体１
間で生じる′コロナ放電に注入されるエネルギーが増加
して、コロナ放電で発生する紫外線量を増やすことがで
きる。この結果、放電空間に強度の強い紫外線が照射さ
れ、レーザガスを強く電離し、かつ均一に行なわれるの
で、レーザ励起の放電時に発生するアーク放電が抑制さ
れ、効率よくレーザ出力を得ることができ、アーク放電
の発生によるレーザガスの劣化が抑えられる。Therefore, uniform contact can be made between the surface of the corona dielectric 1 and the corona electrode, the contact area is increased, the capacitance between the corona electrode and the perforated electrode 3 is increased, and the perforated electrode 3 and the corona dielectric 1 are increased.
The amount of energy injected into the corona discharge generated between the two increases, making it possible to increase the amount of ultraviolet rays generated by the corona discharge. As a result, the discharge space is irradiated with strong ultraviolet rays, which strongly ionizes the laser gas and ionizes it uniformly. This suppresses the arc discharge that occurs during laser-excited discharge, making it possible to efficiently obtain laser output. Deterioration of the laser gas due to the occurrence of arc discharge is suppressed.
発明の金属としては金、銀、Ａ１等が用いられる。また
、第２の発明に用いる金属粉末も同様のものが用いられ
る。金属粉末の粒径は、誘電体の凹凸の数ｍｍ程度であ
るのでこれよりも小さければよい。例えば１００１１ｍ
程度のものを用いた。Gold, silver, A1, etc. are used as the metal of the invention. Furthermore, the same metal powder is used in the second invention. Since the particle size of the metal powder is about several mm of the unevenness of the dielectric material, it is sufficient that it is smaller than this. For example, 10011m
I used something of about 100%.
（発明の効果）
以上述べたように、本発明によるパルスレーザでは高効
率でレーザが出力が得られ、レーザガスの劣化も少なく
レーザガスが長寿命になる。(Effects of the Invention) As described above, in the pulsed laser according to the present invention, a laser output can be obtained with high efficiency, and the laser gas has a long life with less deterioration.
第１図及び第２図は第１及び第２の発明の一実施例であ
る誘電体の断面図、第３図は従来のコロナ予備電離器を
用いたパルスガスレーザの構成図を示している。
１．５．・・コロナ誘電体、２・・・金属メッキ、３，
７・・・穴開き電極、４・・・金属粉末、６・・・コロ
ナ電極、８・・・放電空間、９・・・スパークギャップ
、１０・・・充電用コンデンサ、１１．・・ピーキング
コンデンサ。1 and 2 are cross-sectional views of a dielectric material according to an embodiment of the first and second inventions, and FIG. 3 is a block diagram of a pulsed gas laser using a conventional corona pre-ionizer. 1.5. ...Corona dielectric, 2...Metal plating, 3,
7... Hole electrode, 4... Metal powder, 6... Corona electrode, 8... Discharge space, 9... Spark gap, 10... Charging capacitor, 11. ...Peaking capacitor.
Claims (2)
ロナ電極とそれを囲む誘電体とからなるコロナ予備電離
器において、前記誘電体内面に金属メッキを施し、前記
金属メッキを前記コロナ電極とすることを特徴とするコ
ロナ予備電離器。(1) In a corona pre-ionization device that performs corona pre-ionization from the back surface of a holed electrode and is composed of a corona electrode and a dielectric surrounding it, metal plating is applied to the inner surface of the dielectric, and the metal plating is used as the corona electrode. A corona pre-ionizer characterized by:
ナ電極とそれを囲む誘電体とからなるコロナ予備電離器
において、前記誘電体で囲まれた空間に金属粉末を充填
し、前記金属粉末を前記コロナ電極とすることを特徴と
するコロナ予備電離器。(2) In a corona pre-ionization device consisting of a corona electrode that performs corona pre-ionization from the back side of a holed electrode and a dielectric material surrounding it, a space surrounded by the dielectric material is filled with metal powder, and the metal powder is A corona pre-ionization device characterized by using the corona electrode as described above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31207788A JPH0716046B2 (en) | 1988-12-12 | 1988-12-12 | Corona preionizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31207788A JPH0716046B2 (en) | 1988-12-12 | 1988-12-12 | Corona preionizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02158181A true JPH02158181A (en) | 1990-06-18 |
| JPH0716046B2 JPH0716046B2 (en) | 1995-02-22 |
Family
ID=18024959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31207788A Expired - Lifetime JPH0716046B2 (en) | 1988-12-12 | 1988-12-12 | Corona preionizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0716046B2 (en) |
-
1988
- 1988-12-12 JP JP31207788A patent/JPH0716046B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0716046B2 (en) | 1995-02-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |