JPH0716046B2 - Corona preionizer - Google Patents
Corona preionizerInfo
- Publication number
- JPH0716046B2 JPH0716046B2 JP31207788A JP31207788A JPH0716046B2 JP H0716046 B2 JPH0716046 B2 JP H0716046B2 JP 31207788 A JP31207788 A JP 31207788A JP 31207788 A JP31207788 A JP 31207788A JP H0716046 B2 JPH0716046 B2 JP H0716046B2
- Authority
- JP
- Japan
- Prior art keywords
- corona
- electrode
- laser
- preionizer
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、放電電極対間（以下放電空間）のレーザガス
を電離させるためにコロナ予備電離器を用いた高効率、
長寿命なパルスガスレーザに関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to high efficiency using a corona preionizer for ionizing a laser gas between a pair of discharge electrodes (hereinafter referred to as a discharge space),
The present invention relates to a long-life pulse gas laser.
（従来の技術） レーザガスの電離にコロナ予備電離器を用いた従来のパ
ルスガスレーザの一例を第３図に示す。このパルスガス
レーザについては、文献「昭和62年レーザ学会学術講演
会第７次大会講演予稿集」1987年、30pIV8に詳細に記載
されている。この従来のパルスガスレーザでは、励起回
路に容量移行型励起回路を用い、レーザガスの電離にコ
ロナ予備電離器を用いている。このパルスガスレーザで
用いているコロナ予備電離器は、放電面から背面に向か
って開かれた多数の貫通穴を持つ穴開き電極７と、この
穴開き電極７の背面に設置され、穴開き電極７と対向す
る面にコロナ電極６を持つコロナ誘電体（コロナ誘電
体）５とから構成されている。(Prior Art) An example of a conventional pulse gas laser using a corona preionizer for ionization of laser gas is shown in FIG. This pulsed gas laser is described in detail in the document "Proceedings of the 7th Conference of the Laser Society Academic Conference 1987", 1987, 30pIV8. In this conventional pulse gas laser, a capacitance transfer type excitation circuit is used for the excitation circuit, and a corona preionizer is used for ionization of the laser gas. The corona preionizer used in this pulsed gas laser is equipped with a perforated electrode 7 having a large number of through holes opened from the discharge surface to the back surface, and is installed on the back surface of the perforated electrode 7, And a corona dielectric body (corona dielectric body) 5 having a corona electrode 6 on the surface opposite to.
このパルスガスレーザにおいて、レーザ発振を行わせる
ためには、スパークギャップ９を導通させ充電用コンデ
ンサ10の充電エネルギーをピーキングコンデンサ11に移
行させる。この時、コロナ電極６と穴開き電極７との間
にピーキングコンデンサ11間の端子間電圧が印加され
る。このため、コロナ誘電体５の穴開き電極７側の面に
コロナ放電が生じ紫外線が発生する。この紫外線が穴開
き電極７に開けられた多数の穴を通してレーザ励起を行
う放電空間８に照射され、レーザガスが電離する。この
結果、放電空間８に安定なレーザ励起を行なうグロー放
電が起き、効率よくレーザ出力を得ることができる。In order to cause laser oscillation in this pulse gas laser, the spark gap 9 is made conductive and the charging energy of the charging capacitor 10 is transferred to the peaking capacitor 11. At this time, the terminal voltage between the peaking capacitors 11 is applied between the corona electrode 6 and the perforated electrode 7. Therefore, corona discharge occurs on the surface of the corona dielectric 5 on the side of the perforated electrode 7, and ultraviolet rays are generated. This ultraviolet ray is applied to the discharge space 8 for laser excitation through a large number of holes formed in the perforated electrode 7, and the laser gas is ionized. As a result, glow discharge for stable laser excitation occurs in the discharge space 8, and laser output can be efficiently obtained.
（発明が解決しようとする課題） ところで、コロナ予備電離器を用いた従来のパルスガス
レーザにおいては、コロナ電極とコロナ誘電体表面とを
別々に形成してから接着しているが、誘電体の表面には
凹凸があり、これらの密着は難しく、かつ不均一な接触
になり、コロナ電極と穴開き電極間の静電容量が減少
し、コロナ電極と穴開き電極間に流れる電流が少なくな
る。このため、穴開き電極とコロナ誘電体表面との間に
生じるコロナ放電で発生する紫外線が弱く、レーザ励起
が行われる放電空間の予備電離が不均一で、かつ不足す
る。この結果、レーザ励起の放電にアーク放電が発生
し、レーザ発振効率の低下や、レーザガスの寿命が短く
なる欠点があった。(Problems to be Solved by the Invention) By the way, in the conventional pulse gas laser using the corona preionizer, the corona electrode and the corona dielectric surface are separately formed and then bonded to each other. Since there is unevenness in the surface of the corona electrode, it is difficult to adhere them to each other, resulting in non-uniform contact, the capacitance between the corona electrode and the perforated electrode is reduced, and the current flowing between the corona electrode and the perforated electrode is reduced. Therefore, the ultraviolet rays generated by the corona discharge generated between the perforated electrode and the corona dielectric surface are weak, and the preionization in the discharge space where the laser excitation is performed is nonuniform and insufficient. As a result, arc discharge occurs in the laser-excited discharge, and there are drawbacks that the laser oscillation efficiency is reduced and the life of the laser gas is shortened.
本発明の目的は、アーク放電の発生が少なく、効率よく
レーザ出力が取り出せ、かつレーザガスの寿命が長いコ
ロナ予備電離器を提供することである。An object of the present invention is to provide a corona preionizer in which the occurrence of arc discharge is small, the laser output can be efficiently taken out, and the life of the laser gas is long.
（課題を解決するための手段） 請求項第１項に記載した本発明によるコロナ予備電離器
は、穴開き電極の裏面からコロナ予備電離を行うコロナ
電極とそれを囲むコロナ誘電体とからなるコロナ予備電
離器において、前記誘電体内面に施した金属メッキをコ
ロナ電極することを特徴としている。(Means for Solving the Problem) A corona preionizer according to the present invention as set forth in claim 1 comprises a corona electrode for performing corona preionization from the back surface of a perforated electrode and a corona dielectric surrounding the corona electrode. The preionizer is characterized in that the metal plating applied to the surface of the dielectric body serves as a corona electrode.
請求項第２項に記載した本発明によるコロナ予備電離器
は、穴開き電極の裏面からコロナ予備電離を行うコロナ
電極とそれを囲むコロナ誘電体とからなるコロナ予備電
離器において、前記誘電体で囲まれた空間に充填した金
属粉末をコロナ電極することを特徴としている。The corona preionizer according to the second aspect of the present invention is a corona preionizer comprising a corona electrode for performing corona preionization from the back surface of a perforated electrode and a corona dielectric surrounding the corona electrode, wherein the dielectric It is characterized in that the metal powder filling the enclosed space is used as a corona electrode.
（作用） 本発明によるコロナ予備電離器においては、コロナ誘電
体内面の金属メッキや誘電体内に充填された金属粉末を
コロナ電極として用いている。このため、コロナ誘電体
表面とコロナ電極とが均一に接触し、かつ接触面積が増
えコロナ電極と穴開き電極間の静電容量が増す。この静
電容量の増加により、穴開き電極とコロナ誘電体間で生
じるコロナ放電に注入されるエネルギーが増加して、コ
ロナ放電で発生する紫外線量が増える。この結果、放電
空間に強度の強い紫外線が照射され、レーザガスが強く
電離し、かつ均一に行なわれるので、レーザ励起の放電
時に発生するアーク放電が抑制され、効率よくレーザ出
力を得ることができ、アーク放電の発生によるレーザガ
スの劣化が抑えられる。(Operation) In the corona preionizer according to the present invention, the metal plating on the surface of the corona dielectric or the metal powder filled in the dielectric is used as the corona electrode. Therefore, the surface of the corona dielectric and the corona electrode are in uniform contact with each other, the contact area is increased, and the electrostatic capacitance between the corona electrode and the perforated electrode is increased. This increase in capacitance increases the energy injected into the corona discharge generated between the perforated electrode and the corona dielectric, increasing the amount of ultraviolet light generated by the corona discharge. As a result, the discharge space is irradiated with strong ultraviolet rays, the laser gas is strongly ionized, and because it is performed uniformly, the arc discharge generated at the time of the laser-excited discharge is suppressed, it is possible to efficiently obtain the laser output, The deterioration of the laser gas due to the occurrence of arc discharge is suppressed.
（実施例） 次に、図面を用いて本発明の実施例を説明する。(Example) Next, the Example of this invention is described using drawing.
第１図は、第１項に記載の発明（以下第１の発明）の一
実施例である、コロナ予備電離器の断面図を示してい
る。FIG. 1 shows a cross-sectional view of a corona preionizer, which is an embodiment of the invention described in item 1 (hereinafter, the first invention).
第２図は、第２項に記載の発明（以下第２の発明）の一
実施例である、コロナ予備電離器の断面図を示してい
る。FIG. 2 shows a sectional view of a corona preionizer, which is an embodiment of the invention described in item 2 (hereinafter, the second invention).
第１図及び第２図に断面図を示した第１及び第２の発明
を用いたコロナ予備電離器は、第３図に示した従来のコ
ロナ予備電離器と異なり、コロナ電極を囲むコロナ誘電
体１の内面に施された金属メッキ２やコロナ誘電体１で
囲まれた空間に充填された金属粉末４をコロナ電極とし
ている。Unlike the conventional corona preionizer shown in FIG. 3, the corona preionizer using the first and second inventions whose cross-sectional views are shown in FIGS. 1 and 2 is different from the corona preionizer surrounding the corona electrode. The metal plating 2 applied to the inner surface of the body 1 and the metal powder 4 filled in the space surrounded by the corona dielectric 1 are used as corona electrodes.
このため、コロナ誘電体１表面とコロナ電極との均一な
接触がとれ、かつ接触面積が増え、コロナ電極と穴開き
電極３間の容量が増し、穴開き電極３とコロナ誘電体１
間で生じるコロナ放電に注入されるエネルギーが増加し
て、コロナ放電で発生する紫外線量を増やすことができ
る。この結果、放電空間に強度の強い紫外線が照射さ
れ、レーザガスを強く電離し、かつ均一に行なわれるの
で、レーザ励起の放電時に発生するアーク放電が抑制さ
れ、効率よくレーザ出力を得ることができ、アーク放電
の発生によるレーザガスの劣化が抑えられる。Therefore, the surface of the corona dielectric 1 can be evenly contacted with the corona electrode, the contact area is increased, the capacity between the corona electrode and the perforated electrode 3 is increased, and the perforated electrode 3 and the corona dielectric 1 are
The energy injected into the corona discharge generated during the period increases, and the amount of ultraviolet rays generated by the corona discharge can be increased. As a result, the discharge space is irradiated with strong ultraviolet rays, strongly ionizes the laser gas, and is uniformly performed, so that arc discharge generated during laser-excited discharge is suppressed, and a laser output can be obtained efficiently. The deterioration of the laser gas due to the occurrence of arc discharge is suppressed.
発明の金属としては金、銀、Al等が用いられる。また、
第２の発明に用いる金属粉末も同様のものが用いられ
る。金属粉末の粒径は、誘電体の凹凸の数mm程度である
のでこれよりも小さければよい。例えば100μｍ程度の
ものを用いた。Gold, silver, Al, etc. are used as the metal of the invention. Also,
The same metal powder is used for the second invention. The particle size of the metal powder is about several millimeters of the unevenness of the dielectric, and thus it may be smaller than this. For example, one having a thickness of about 100 μm was used.
（発明の効果） 以上述べたように、本発明によるパルスレーザでは高効
率でレーザが出力が得られ、レーザガスの劣化も少なく
レーザガスが長寿命になる。(Effect of the Invention) As described above, in the pulsed laser according to the present invention, the laser output can be obtained with high efficiency, the laser gas is less deteriorated, and the laser gas has a long life.
第１図及び第２図は第１及び第２の発明の一実施例であ
る誘電体の断面図、第３図は従来のコロナ予備電離器を
用いたパルスガスレーザの構成図を示している。 1,5……コロナ誘電体、２……金属メッキ、3,7……穴開
き電極、４……金属粉末、６……コロナ電極、８……放
電空間、９……スパークギャップ、10……充電用コンデ
ンサ、11……ピーキングコンデンサ。1 and 2 are sectional views of a dielectric material according to an embodiment of the first and second inventions, and FIG. 3 is a block diagram of a pulse gas laser using a conventional corona preionizer. 1,5 ... Corona dielectric, 2 ... Metal plating, 3,7 ... Perforated electrode, 4 ... Metal powder, 6 ... Corona electrode, 8 ... Discharge space, 9 ... Spark gap, 10 ... … Charging capacitor, 11… peaking capacitor.
Claims (2)
う、コロナ電極とそれを囲む誘電体とからなるコロナ予
備電離器において、前記誘電体内面に金属メッキを施
し、前記金属メッキを前記コロナ電極とすることを特徴
とするコロナ予備電離器。1. A corona preionizer comprising a corona electrode and a dielectric surrounding the corona electrode, which performs corona preionization from the back surface of a perforated electrode. Corona preionizer characterized by using electrodes.
うコロナ電極とそれを囲む誘電体とからなるコロナ予備
電離器において、前記誘電体で囲まれた空間に金属粉末
を充填し、前記金属粉末を前記コロナ電極とすることを
特徴とするコロナ予備電離器。2. A corona preionizer comprising a corona electrode for performing corona preionization from the back surface of a perforated electrode and a dielectric surrounding the corona electrode, wherein the space surrounded by the dielectric is filled with metal powder, A corona preionizer, characterized in that a powder is used as the corona electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31207788A JPH0716046B2 (en) | 1988-12-12 | 1988-12-12 | Corona preionizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31207788A JPH0716046B2 (en) | 1988-12-12 | 1988-12-12 | Corona preionizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02158181A JPH02158181A (en) | 1990-06-18 |
| JPH0716046B2 true JPH0716046B2 (en) | 1995-02-22 |
Family
ID=18024959
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31207788A Expired - Lifetime JPH0716046B2 (en) | 1988-12-12 | 1988-12-12 | Corona preionizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0716046B2 (en) |
-
1988
- 1988-12-12 JP JP31207788A patent/JPH0716046B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02158181A (en) | 1990-06-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |