JPH02158180A - Corona pre-ionizer - Google Patents
Corona pre-ionizerInfo
- Publication number
- JPH02158180A JPH02158180A JP31207688A JP31207688A JPH02158180A JP H02158180 A JPH02158180 A JP H02158180A JP 31207688 A JP31207688 A JP 31207688A JP 31207688 A JP31207688 A JP 31207688A JP H02158180 A JPH02158180 A JP H02158180A
- Authority
- JP
- Japan
- Prior art keywords
- corona
- dielectric
- ionizer
- gas
- fluoride
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims abstract description 16
- 229910001634 calcium fluoride Inorganic materials 0.000 claims abstract description 16
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims abstract description 15
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims abstract description 15
- 229910052736 halogen Inorganic materials 0.000 abstract description 12
- 150000002367 halogens Chemical class 0.000 abstract description 12
- 238000006243 chemical reaction Methods 0.000 abstract description 5
- 239000012535 impurity Substances 0.000 abstract description 4
- 239000000126 substance Substances 0.000 abstract description 3
- 239000011248 coating agent Substances 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract description 2
- 230000008020 evaporation Effects 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 230000002401 inhibitory effect Effects 0.000 abstract 1
- 238000004904 shortening Methods 0.000 abstract 1
- 239000003990 capacitor Substances 0.000 description 5
- 230000005284 excitation Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 241000282465 Canis Species 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、放電電極対間（以下放電空間）のレーザガス
を電離させるためにコロナ予備電離器を用いた高効率、
長寿命なパルスガスレーザに関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention provides high-efficiency,
This article relates to a long-life pulsed gas laser.
（従来の技術）
レーザガスの電離にコロナ予備電離器を用いた従来のパ
ルスガスレーザの一例を第５図に示す。このパルスガス
レーザについては、文献［昭和６２年レーザ学会学術講
演会第７次犬会講演予稿集Ｊ ｌ９８７年、５ｏｐｒｖ
ｓに詳剛Ｇこ記載されている。この従来のパルスガスレ
ーザでは、励起回路に容量移行型励起回路を用い、レー
ザガスの電離にコロナ予備電離器を用いている。このパ
ルスガスレーザで用いているコロナ予備電離器は、放電
面から背面に向かって開かれた多数の貫通穴を持つ穴開
き電極１２と、この穴開き電極１２の背面に設置され、
穴開き電極１２と対向する面にコロナ電極１１を持つコ
ロナ誘電体１０とから構成されている。(Prior Art) FIG. 5 shows an example of a conventional pulsed gas laser that uses a corona pre-ionizer to ionize laser gas. Regarding this pulsed gas laser, please refer to the literature [1987 Laser Society Academic Conference Proceedings of the 7th Canine Association Lecture J 1987, 5oprv
It is written in s. In this conventional pulsed gas laser, a capacitive transfer type excitation circuit is used as an excitation circuit, and a corona pre-ionizer is used to ionize the laser gas. The corona pre-ionizer used in this pulsed gas laser includes a perforated electrode 12 having a large number of through holes opened from the discharge surface toward the back, and is installed on the back of the perforated electrode 12.
It is composed of a perforated electrode 12 and a corona dielectric 10 having a corona electrode 11 on the opposing surface.
このパルスガスレーザにおいて、レーザ発振を行わせる
ためには、スパークギャップ１４を導通させ充電用コン
デンサ１５の充電エネルギーをピーキングコンデンサ１
６に移行させる。この時、コロナ電極１１と穴開き電極
１２との間にピーキングコンデンサ１６間の端子間電圧
が印加される。このため、コロナ誘電体１０の穴開き電
極１２側の面にコロナ放電が生じ紫外線が発生する。こ
の紫外線が穴開き電極１２に開けられた多数の穴を通し
てレーザ励起を行う放電空間１３に照射され、レーザガ
スが電離する。この結果、放電空間１３に安定なレーザ
励起を行うグロー放電が起き、効率よくレーザ出力を得
ることができる。In this pulsed gas laser, in order to perform laser oscillation, the spark gap 14 is made conductive and the charging energy of the charging capacitor 15 is transferred to the peaking capacitor 1.
Move to 6. At this time, a voltage between the terminals of the peaking capacitor 16 is applied between the corona electrode 11 and the perforated electrode 12. Therefore, corona discharge occurs on the surface of the corona dielectric 10 on the perforated electrode 12 side, and ultraviolet rays are generated. The ultraviolet rays are irradiated through a large number of holes in the perforated electrode 12 to the discharge space 13 where laser excitation is performed, and the laser gas is ionized. As a result, a glow discharge that stably excites the laser occurs in the discharge space 13, and laser output can be efficiently obtained.
（発明が解決しようとする課題）
ところで、コロナ予備電離器を用いた従来のパルスガス
レーザにおいては、コロナ予備電離器をレーザガス中に
設置しているためコロナ誘電体であるアルミナがレーザ
ガスに含まれるハロゲンガスと化学反応を生じ、不純物
の発生及びハロゲンガスの減少を起こす。このため、レ
ーザガス寿命が劣化し、短時間でレーザ出力が減少する
欠点があった。(Problems to be Solved by the Invention) By the way, in conventional pulsed gas lasers using a corona pre-ionizer, since the corona pre-ionizer is installed in the laser gas, alumina, which is a corona dielectric, is exposed to halogens contained in the laser gas. It causes a chemical reaction with gas, generating impurities and reducing halogen gas. For this reason, there was a drawback that the laser gas life deteriorated and the laser output decreased in a short period of time.
本発明の目的は、レーザガスの寿命の劣化が少ないコロ
ナ予備電離器を提供することである。An object of the present invention is to provide a corona pre-ionizer in which the lifetime of laser gas is less deteriorated.
（課題を解決するための手段）
本発明によるコロナ予備電離器は、穴開き電極の裏面か
らコロナ予備電離を行うコロナ電極とそれを囲むコロナ
誘電体とからなるコロナ予備電離器において、コロナ誘
電体としてフッ化マグネシウムまたはフッ化カルシウム
、あるいはフッ化マグネシウムまたはフッ化カルシウム
を被覆した誘電体を用いることを特徴としている。(Means for Solving the Problems) A corona pre-ionizer according to the present invention includes a corona electrode that performs corona pre-ionization from the back surface of a perforated electrode and a corona dielectric surrounding the corona pre-ionizer. It is characterized by using magnesium fluoride or calcium fluoride, or a dielectric coated with magnesium fluoride or calcium fluoride.
（作用）
本発明によるコロナ予備電離器に用いられるコロナ誘電
体として、フッ化マグネシウムやフッ化カルシウム、ま
たはフッ化マグネシウムやフッ化カルシウムを被覆した
誘電体を使用している。(Function) Magnesium fluoride, calcium fluoride, or a dielectric coated with magnesium fluoride or calcium fluoride is used as the corona dielectric used in the corona pre-ionizer according to the present invention.
フッ化マグネシウ、ムやフッ化カルシウムは、ハロゲン
ガスと化学反応を起こしにくい耐ハロゲン性の高い物質
である。このため、レーザガスに含まれるハロゲンガス
との化学反応による不純物の発生やハロゲンガスの減少
によるレーザガスの劣化が防げ、レーザガスの長寿命化
が図れる。Magnesium fluoride, calcium fluoride, and calcium fluoride are highly halogen-resistant substances that do not easily cause chemical reactions with halogen gas. Therefore, generation of impurities due to a chemical reaction with the halogen gas contained in the laser gas and deterioration of the laser gas due to a decrease in halogen gas can be prevented, and the life of the laser gas can be extended.
（実施例）
次に、図面を用いて本発明の詳細な説明する。第１図、
第２図、第３図及び第４図は、本発明の一実施例の断面
図を各々示している。(Example) Next, the present invention will be explained in detail using the drawings. Figure 1,
FIGS. 2, 3, and 4 each show a cross-sectional view of an embodiment of the present invention.
第１図及び第ジ図に断面図を示した各々のコロナ予備電
離器のコロナ誘電体は、第５図に示した従来のコロナ誘
電体と異なり、フッ化マグネシウム１やフッ化カルシウ
ム４をコロナ誘電体として用いている。The corona dielectric of each of the corona pre-ionizers whose cross-sectional views are shown in FIGS. 1 and 2 differs from the conventional corona dielectric shown in FIG. Used as a dielectric.
さらに、第３図及び第４図に断面図を示した第３の発明
及び第４の発明を用いた各々のコロナ予備電離器のコロ
ナ誘電体は、第５図に示した従来のコロナ誘電体と異な
り、フッ化マグネシウム５やフッ化カルシウム８を被覆
した誘電体９用いている。このような被覆は蒸着により
容易に形成できる。Furthermore, the corona dielectric of each of the corona pre-ionizers using the third invention and the fourth invention whose cross-sectional views are shown in FIGS. 3 and 4 is the conventional corona dielectric shown in FIG. Unlike the above, a dielectric material 9 coated with magnesium fluoride 5 or calcium fluoride 8 is used. Such a coating can be easily formed by vapor deposition.
上記したように、フッ化マグネシウム１．５やフッ化カ
ルシウム４．８はハロゲンガスと化学反応を起こしにく
い耐ハロゲン性の高い物質であるため、不純物の発生や
ハロゲンガスの減少が抑えられ、レーザガスが長寿命に
なる。As mentioned above, magnesium fluoride 1.5 and calcium fluoride 4.8 are highly halogen-resistant substances that do not easily cause chemical reactions with halogen gas, so they suppress the generation of impurities and the reduction of halogen gas, and reduce the amount of laser gas. has a long life.
（発明の効果）
以上述べたように、本発明によるコロナ予備電離器では
レーザガスの劣化が少なくレーザガスが従来のものに比
べ数倍長寿命になる。(Effects of the Invention) As described above, in the corona pre-ionizer according to the present invention, the laser gas has less deterioration and the life of the laser gas is several times longer than that of the conventional one.
第１図、第２図、第３図及び第４図は各々本発明の一実
施例であるコロナ誘電体の断面図、第５図は従来のコロ
ナ予備電離器を用いたパルスガスレーザの構成図を示し
ている。
１．５・・・フッ化マグネシウム、２．６．１１・・、
コロ＋ｉ極、３．７．１２・・・穴開き電極、４，８・
・・フッ化カルシウム、９，１０・・・誘電体、１３・
・・放電空間、１４・・・スパークギャップ、１５・・
・充電用コンデンサ、１６・・・ピーキングコンデンサ
。1, 2, 3, and 4 are cross-sectional views of a corona dielectric material according to an embodiment of the present invention, and FIG. 5 is a configuration diagram of a pulsed gas laser using a conventional corona pre-ionizer. It shows. 1.5...Magnesium fluoride, 2.6.11...,
Roller + i-pole, 3.7.12... Hole electrode, 4,8.
...Calcium fluoride, 9,10...Dielectric, 13.
...Discharge space, 14...Spark gap, 15...
・Charging capacitor, 16...Peaking capacitor.
Claims (2)
ロナ電極とそれを囲むコロナ誘電体とからなるコロナ予
備電離器において、前記コロナ誘電体としてフッ化マグ
ネシウムまたはフッ化カルシウムを用いたことを特徴と
するコロナ予備電離器。(1) In a corona pre-ionization device consisting of a corona electrode and a corona dielectric surrounding it, which performs corona pre-ionization from the back side of a holed electrode, magnesium fluoride or calcium fluoride is used as the corona dielectric. Characteristic corona pre-ionizer.
ナ電極とそれを囲むコロナ誘電体とからなるコロナ予備
電離器において、前記コロナ誘電体としてフッ化マグネ
シウムまたはフッ化カルシウムを被覆した誘電体を用い
ることを特徴とするコロナ予備電離器。(2) In a corona pre-ionization device consisting of a corona electrode that performs corona pre-ionization from the back side of the holed electrode and a corona dielectric surrounding it, the dielectric coated with magnesium fluoride or calcium fluoride is used as the corona dielectric. A corona pre-ionizer characterized in that it is used.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31207688A JPH0716045B2 (en) | 1988-12-12 | 1988-12-12 | Corona preionizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP31207688A JPH0716045B2 (en) | 1988-12-12 | 1988-12-12 | Corona preionizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02158180A true JPH02158180A (en) | 1990-06-18 |
| JPH0716045B2 JPH0716045B2 (en) | 1995-02-22 |
Family
ID=18024946
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP31207688A Expired - Lifetime JPH0716045B2 (en) | 1988-12-12 | 1988-12-12 | Corona preionizer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0716045B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1287592A1 (en) * | 2000-06-09 | 2003-03-05 | Cymer, Inc. | Gas discharge laser with blade-dielectric electrode |
| EP1297594A1 (en) * | 2000-06-09 | 2003-04-02 | Cymer, Inc. | Gas discharge laser long life electrodes |
| JP2009200520A (en) * | 2000-03-15 | 2009-09-03 | Komatsu Ltd | Gas laser electrode, laser chamber employing the electrode, and gas laser device |
-
1988
- 1988-12-12 JP JP31207688A patent/JPH0716045B2/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009200520A (en) * | 2000-03-15 | 2009-09-03 | Komatsu Ltd | Gas laser electrode, laser chamber employing the electrode, and gas laser device |
| EP1287592A1 (en) * | 2000-06-09 | 2003-03-05 | Cymer, Inc. | Gas discharge laser with blade-dielectric electrode |
| EP1297594A1 (en) * | 2000-06-09 | 2003-04-02 | Cymer, Inc. | Gas discharge laser long life electrodes |
| EP1287592A4 (en) * | 2000-06-09 | 2005-11-09 | Cymer Inc | Gas discharge laser with blade-dielectric electrode |
| EP1297594A4 (en) * | 2000-06-09 | 2006-03-08 | Cymer Inc | Gas discharge laser long life electrodes |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0716045B2 (en) | 1995-02-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |