JPH02222183A - Pulse laser oscillator - Google Patents

Abstract

PURPOSE:To increase the intial electron density of a discharge space, to stabilize main discharge and to obtain a stable laser output by forming single or a plurality of gaps in parallel with a corona source. CONSTITUTION:An electrode 4 and a reactor 10 for shunting are connected to a pulse power supply 6, and the reactor 10 is connected to a main electrode 1 through single or a plurality of gaps 11. When the capacitance of a dielectric 3 is brought to one hundredth of a peaking capacitor 5 in pre-ionization discharge, pulse voltage is applied approximately to the dielectric 3 when pulse voltage is applied from the power supply 6. On the other hand, the capacitance of the power supply 6 is equalized approximately to the capacitor 5 normally, and the initial electron density of a discharge space can be increased. When the voltage of the dielectric 3 reaches the breakdown voltage of the gaps 11, the charge of the capacitor 5 is started through the gaps 11.

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a corona pre-ionization type pulsed laser oscillation device in which a pre-ionization discharge method is improved.

(Prior Art) In recent years, with remarkable progress in the technology of various pulsed laser oscillation devices such as CO2 lasers, there has been a demand for further miniaturization and higher performance of these various pulsed laser oscillation devices. As such a pulse laser oscillation device, for example, the one shown in FIG. 2 is used. That is, at a position facing the first main electrode 1 arranged in the laser medium,
A second main electrode 2 is provided, and a dielectric material 3, which is a source of corona generation, is provided in close contact with the first main electrode 1.

Further, an electrode 4 is attached to the dielectric body 3 on a surface not in contact with the first main electrode 1 and is connected to the second main electrode 2 . Furthermore, a plurality of holes are provided on the surface of the first main electrode 1 that is in contact with the dielectric 3. Further, the two main electrodes 1 and 2 arranged facing each other are connected to a peaking capacitor 5 and a pulse power source 6, and the main electrodes 1 and 2 are connected to a peaking capacitor 5 and a pulse power source 6.
, 2 are provided with optical resonators 7 at both ends in the longitudinal direction.

In the conventional corona pre-ionization type pulsed laser oscillator configured as described above, when a pulse voltage is applied from the pulse power source 6 between the two main electrodes 1 and 2, charging of the peaking capacitor 5 starts and the dielectric Body 3 also begins to be charged. When the dielectric 3 is charged, the dielectric 3 and the first
A corona is generated between the main electrode 1 and the main electrode 1. The laser gas between the main electrodes 1.degree.2 is pre-ionized by the electrons generated at this time and the ultraviolet rays emitted from the corona discharge. Then, when the charging of the peaking capacitor 5 progresses and reaches the discharge starting voltage between the main electrodes 1 and 2, glow discharge begins and energy is supplied from the peaking capacitor 5. When the laser gas is excited in this manner, laser light 8 is output from the optical resonator 7 disposed at both ends.

(Problem to be Solved by the Invention) However, in the conventional pulsed laser oscillation device using the corona pre-ionization method as described above, the capacitance of the dielectric cannot be made very large, and the charging current of the dielectric is small. However, the disadvantage was that the initial electron density in the discharge space required to maintain a stable glow discharge was insufficient. Furthermore, it has been difficult to obtain stable laser output.

The present invention was proposed to solve the following two drawbacks, and its purpose is to stabilize the main discharge and obtain stable laser output by increasing the initial electron density in the discharge space. An object of the present invention is to provide a pulsed laser oscillation device.

[Structure of the Invention] (Means for Solving the Problems) The present invention comprises two main electrodes disposed facing each other in a laser medium, and a corona generation source for performing preliminary ionization, and the main electrodes In a pulsed laser oscillation device that circulates laser gas along the surface of the corona generation source, in parallel with the corona generation source,
It is characterized by providing one or more gaps.

(Function) According to the pulsed laser oscillation device of the present invention, a gap is provided in parallel to the dielectric material for corona generation, which is used for preliminary ionization, so that a rapidly rising pulse voltage can be applied to the dielectric material. This allows a large charging current to flow.

(Example) Hereinafter, an example of the present invention will be described in detail based on FIG. Incidentally, the same members as those of the conventional type shown in FIG. 2 are given the same reference numerals, and the description thereof will be omitted.

In this embodiment, as shown in FIG. 1 main electrode 1.

In the pulsed laser oscillation device of this embodiment having such a configuration, preliminary ionization discharge is performed as described below.

In other words, when the capacitance of the dielectric 3 is set to 1/100 of that of the peaking capacitor 5, when a pulse voltage is applied from the pulse power supply 6, the voltage is almost applied to the dielectric 3.
It takes. On the other hand, since the capacitance of the pulse power source 6 is usually approximately equal to that of the peaking capacitor, the rate of change of the voltage applied to the dielectric 3 d v /"d t is approximately f d σ d 7
It becomes seven times. Moreover, the charging current of the dielectric 3 is d v /
Since d is proportional to t, similarly f is 77 times,
The initial electron density in the discharge space can be increased. Then, when the voltage of the dielectric 3 reaches the discharge starting voltage of the gap 11, charging of the peaking capacitor 5 through the gap 11 starts.

As described above, according to this embodiment, by arranging one or more gaps in parallel with the dielectric for corona generation, a rapidly rising pulse voltage can be applied to the dielectric, and the dielectric Charging current can be increased. As a result, the initial electron density in the discharge space can be increased, so that a stable main discharge can be ignited.

[Effects of the Invention] As stated above, according to the present invention, the initial stage of the discharge space is It can increase the electron density, stabilize the main discharge,
A pulsed laser oscillation device that can obtain stable laser output can be provided.

[Brief explanation of the drawing]

FIG. 1 is a block diagram showing an embodiment of a pulse laser oscillation device of the present invention, and FIG. 2 is a block diagram showing an example of a conventional pulse laser oscillation device. 1... First main electrode, 2... Second main electrode, 3...
・Dielectric material, 4... Electrode, 5... Peaking capacitor, 6... Pulse power supply, 7... Optical resonator, 8...
Laser light, 1-0... Diversion reactor, 11...
Gear pump.

Claims (1)

[Claims] Pulsed laser oscillation comprising two main electrodes disposed facing each other in a laser medium, a corona generation source for pre-ionization, and circulating laser gas along the surface of the main electrodes. A pulsed laser oscillation device, characterized in that one or more gaps are provided in parallel with the corona generation source.