JPS6340385A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPS6340385A JPS6340385A JP18335686A JP18335686A JPS6340385A JP S6340385 A JPS6340385 A JP S6340385A JP 18335686 A JP18335686 A JP 18335686A JP 18335686 A JP18335686 A JP 18335686A JP S6340385 A JPS6340385 A JP S6340385A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- main
- preliminary
- rod
- electron density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003989 dielectric material Substances 0.000 claims 1
- 238000010891 electric arc Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract 1
- 239000003990 capacitor Substances 0.000 description 13
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000010355 oscillation Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、気体レーザ発振器、特に改良した主放電電
極部を有するレーザ発振器に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a gas laser oscillator, and particularly to a laser oscillator having an improved main discharge electrode section.
第４図、第５図は、例えば「レーザ研究」、第１３巻、
第１０号（１９８５年）の第５２岬６０ページに掲載さ
れた論文１高効率放電励起エキシマレーザに見られる従
来の容量移行型エキシマレーザ発振器の一例を示す模式
図であり、それぞれ第５図のＢ−Ｂ線における断面図、
第４図のＡ−Ａ線における断面図である。図において、
（１）はレーザ管であって、その内部に一対の主電極（
２）および予備電離電極（３）を有し、これら主電極（
２） 、 （２）間に主放電ギャップ（４）が形成され
ると共に予備電離電極（３）間に予備放電ギャップ（５
）が形成されている。Figures 4 and 5 are, for example, "Laser Research", Volume 13,
10 (1985), page 52, Cape 60, is a schematic diagram showing an example of a conventional capacitive transfer type excimer laser oscillator found in Paper 1 high-efficiency discharge-pumped excimer laser. A cross-sectional view along the line B-B,
FIG. 5 is a sectional view taken along line A-A in FIG. 4; In the figure,
(1) is a laser tube with a pair of main electrodes (
2) and a pre-ionization electrode (3), and these main electrodes (
A main discharge gap (4) is formed between 2) and (2), and a preliminary discharge gap (5) is formed between the preliminary ionization electrodes (3).
) is formed.
レーザ管（１）にはレーザガス（６）が充填されており
、このレーザガス（６）をそれぞれ循環、冷却させるた
めに、レーザ管（１）の内部ｉこはブロア（７）、熱交
換器（８）も設けられている。予備電離電極（３）は、
その一部に充電キャパシタ（９）が直列接続されると共
に他の部分にピーキング会キャパシタ（１０）も直列接
続されている。なお、充電キャパシタ（９）の容量をＣ
１で表わし、ピーキング・キャパシタ（１０）の容量を
Ｃ２で表わす。充電キャパシタ（９）に接続されたスイ
ツチング素子（１１）は、上述した主電極（２）および
主放電ギャップ（４）、予備電離電極（３）および予備
放電ギャップ（５）、並びに充電キャパシタ（９）およ
びピーキング・キャパシタ（１０）と共に放電ループを
形成する。充電キャパシタ（９）に接続された高電圧発
生装置（１２）は、充電キャパシタ（９）を高電圧で充
電する。部分反射鏡（１３）および全反射鏡（１りは共
振器（１５）を形成する。上述した構成要素は発振器筐
体（１６）の中に収納され、このようなレーザ発振器か
らはレーザビーム（１７）が発振される。The laser tube (1) is filled with laser gas (6), and in order to circulate and cool the laser gas (6), the inside of the laser tube (1) is equipped with a blower (7) and a heat exchanger ( 8) is also provided. The pre-ionization electrode (3) is
A charging capacitor (9) is connected in series to one part, and a peaking capacitor (10) is also connected in series to another part. Note that the capacity of the charging capacitor (9) is C
1 and the capacitance of the peaking capacitor (10) is denoted by C2. The switching element (11) connected to the charging capacitor (9) includes the above-mentioned main electrode (2) and main discharge gap (4), pre-ionization electrode (3) and pre-discharge gap (5), and the charging capacitor (9). ) and the peaking capacitor (10) form a discharge loop. A high voltage generator (12) connected to the charging capacitor (9) charges the charging capacitor (9) with a high voltage. A partially reflecting mirror (13) and a totally reflecting mirror (one of which forms a resonator (15). The above-mentioned components are housed in an oscillator housing (16), and from such a laser oscillator a laser beam ( 17) is oscillated.
従来のレーザ発振器は上述したように構成され、高電圧
発生装置（１２）によって充電キャパシタ（９）に充電
された電荷はスイッチング素子（１１）がｏｎになるこ
とにより予備放電ギャップ（５）を通ってピーキング・
キャパシタ（１０）に移行される。この時、主放電ギャ
ップ（４）は予備放電ギャップ（５）でのアーク放電に
より予備電離され、これによりピーキング・キャパシタ
（１０）に充電された電荷は主放電ギャップ（４）を通
ってグロー放電の形態で放電される。The conventional laser oscillator is configured as described above, and the charge charged in the charging capacitor (9) by the high voltage generator (12) passes through the pre-discharge gap (5) when the switching element (11) is turned on. Peaking
The capacitor (10) is transferred to the capacitor (10). At this time, the main discharge gap (4) is pre-ionized by the arc discharge in the pre-discharge gap (5), and the charge charged in the peaking capacitor (10) passes through the main discharge gap (4) and becomes a glow discharge. It is discharged in the form of
この時、共振器（１５）を介してレーザビーム（１７）
が発振され、その波長はレーザガス（６）の種類によっ
て一義的に決定される。At this time, the laser beam (17) is transmitted through the resonator (15).
is oscillated, and its wavelength is uniquely determined by the type of laser gas (6).
予備電離によって生成される電子密度は、第６図に点線
で示すように予備電離電極（６）の近傍で最も高く、予
備電離電極（５）から遠ざかるに従って低くなる。従っ
て、主放電ギャップ（４）′７！の予備電子密度は、実
線で示すように主電極（２）の中心部において高い山形
の分布となる。そのため放電は主電極中心部近傍で起り
やすく、これが放電幅を狭くする原因であり、放電がせ
まいと従って予備電子密度分布が不均一であると、電子
密度の低い部分（すなわち予備電離不足部分）でストリ
ーマ−放電に移行し易く、レーザガスを均一にかつ効率
的に励起できないため、レーザ発振効率が下がるという
問題点があった。The electron density generated by pre-ionization is highest near the pre-ionization electrode (6), as shown by the dotted line in FIG. 6, and decreases as the distance from the pre-ionization electrode (5) increases. Therefore, the main discharge gap (4)'7! The preliminary electron density has a high mountain-shaped distribution at the center of the main electrode (2), as shown by the solid line. Therefore, discharge tends to occur near the center of the main electrode, and this is the cause of narrowing the discharge width.If the discharge is narrow and the preliminary electron density distribution is uneven, areas with low electron density (i.e., areas with insufficient preionization) The problem is that the laser gas tends to shift to a streamer discharge, and the laser gas cannot be excited uniformly and efficiently, resulting in a decrease in laser oscillation efficiency.
この発明は、このような問題点を解決するためになされ
たもので、主放電ギャップでの予備電離電子密度を均一
にし、レーザ発振効率を上げたレーザ発振器を得ること
を目的とする。The present invention was made to solve these problems, and aims to provide a laser oscillator with uniform pre-ionized electron density in the main discharge gap and improved laser oscillation efficiency.
この発明に係るレーザ発振器は、一方の主電極の中心部
に開孔をあけると共にその内部を空洞に、シ、この空洞
内に棒状予備電離電極を設け、この棒状予備電離電極を
予備電離電極と電気的に接続したものである。In the laser oscillator according to the present invention, a hole is formed in the center of one of the main electrodes, the inside of the hole is made hollow, and a rod-shaped pre-ionization electrode is provided in the cavity, and the rod-shaped pre-ionization electrode is used as the pre-ionization electrode. It is electrically connected.
この発明においては、予備放電ギャップでの予備電離電
子密度に開孔を有する主電極からの予備電離電子密度を
重畳することにより、電子密度分布を均一にする。In this invention, the electron density distribution is made uniform by superimposing the preliminary ionization electron density from the main electrode having an opening on the preliminary ionization electron density in the preliminary discharge gap.
第１図はこの発明の一実施例を示す断面図であり、図に
おいて（１）〜（１２）および（１６）は従来のものと
同じである。しかしながら、本実施例で一方の主電極（
２人）は、その中心部に開孔を有すると共番こその内部
が空洞になっている。しかも、この空洞内にかつ主電極
（２人）と平行に棒状予備電離電極（３Ａ）を設け、こ
れを予備電離電極（３）と電気的に接続している。FIG. 1 is a sectional view showing one embodiment of the present invention, and in the figure, (1) to (12) and (16) are the same as the conventional one. However, in this example, one main electrode (
2) has an opening in the center, and the inside of the same number is hollow. Moreover, a bar-shaped pre-ionization electrode (3A) is provided in this cavity and parallel to the main electrodes (two), and this is electrically connected to the pre-ionization electrode (3).
このように構成されたレーザ発振器は、予備放電ギャッ
プ（５）でアーク放電させて予備電離すると同時に、棒
状予備電離電極（３Ａ）と開孔を有する主電極（２人）
との間でもアーク放電させ、そこから出る紫外線が開孔
よりもれ出て主放電ギャップ（４）で予備電離するので
ある。もう少し詳しく説明すれば、第２図に示すように
予備放電ギャップ（５）での予備電離電子密度は点線■
のように変り、これに紫外線による予備電離電子密度〔
点線■〕が重畳されると、実線■で示す均一な電子密度
が得られる。The laser oscillator configured in this way performs pre-ionization by arc discharge in the pre-discharge gap (5), and at the same time uses a rod-shaped pre-ionization electrode (3A) and a main electrode with an opening (2).
An arc discharge is also caused between the two, and the ultraviolet rays emitted from the arc leak through the opening and pre-ionize in the main discharge gap (4). To explain in more detail, as shown in Figure 2, the pre-ionized electron density at the pre-discharge gap (5) is indicated by the dotted line ■
The density of pre-ionized electrons due to ultraviolet rays [
When the dotted lines ■] are superimposed, a uniform electron density shown by the solid line ■ is obtained.
以上、主電極（２人）の背後からの予備電離にアーク放
電Ｉこよる紫外線を利用した例について述べたが、第３
図に示すように棒状予備電離電極（６Ａ）のまわりに誘
電体（１８）を被覆したものを配置することｌこよって
も同様の効果が得られる。この場合、予備電離は、誘電
体（１８）を介して棒状予備電離電極（３Ａ）と主電極
（２人）との間で起るコロナ放電を利用する。Above, we have described an example of using ultraviolet rays caused by arc discharge I for preliminary ionization from behind the main electrode (two people).
As shown in the figure, a similar effect can be obtained by disposing a dielectric (18) coated around the rod-shaped pre-ionization electrode (6A). In this case, the pre-ionization utilizes corona discharge that occurs between the rod-shaped pre-ionization electrode (3A) and the main electrodes (two people) via the dielectric (18).
この発明は以上説明したと詔り、一方。ヨ電極の中心部
に開孔を設けると共にその内部ヲ空洞ＩＣし、この空洞
内に棒状予備電離電極を設け、これを予備電離電極と電
気的に接続したので、主放電ギャップでの予備電離電子
密度を均一にすることができ、放電幅を増大させてレー
ザ発振効率を上げる効果がある。On the other hand, this invention has been explained above. A hole is provided in the center of the electrode, a cavity is formed inside the IC, and a bar-shaped pre-ionization electrode is provided inside this cavity, and this is electrically connected to the pre-ionization electrode, so that the pre-ionization electrons in the main discharge gap are This has the effect of making the density uniform, increasing the discharge width, and increasing the laser oscillation efficiency.
第１図はこの発明の一実施例を示す概略断面図、第２図
は第１図に示した実施例において電極と電子密度の関係
を説明するための図、第６図は他の実施例を示す概略断
面図、第４図および第５図は従来のレーザ発振器を示す
概略断面図、第６図は従来のレーザ発振器における電極
と電子密度の関係を説明するための図である。
図において、（２）は主電極、（２Ａ）は開孔を有する
主電極、（３）は予備電離電極、（３Ａ）は棒状予備電
離電極、（１８）は誘電体である。
なお、各図中、同一符号は同−又は相当部盆を示す。
￥２図
′第３図
第４図
Ｖ′″′″Ａ
第６図
手続補正書「自発」
昭和６１０年１０．馬。８Fig. 1 is a schematic cross-sectional view showing one embodiment of the present invention, Fig. 2 is a diagram for explaining the relationship between electrodes and electron density in the embodiment shown in Fig. 1, and Fig. 6 is another embodiment. 4 and 5 are schematic sectional views showing a conventional laser oscillator, and FIG. 6 is a diagram for explaining the relationship between electrodes and electron density in a conventional laser oscillator. In the figure, (2) is a main electrode, (2A) is a main electrode with an opening, (3) is a pre-ionization electrode, (3A) is a rod-shaped pre-ionization electrode, and (18) is a dielectric. In each figure, the same reference numerals indicate the same or corresponding trays. ¥2 Figure 'Figure 3 Figure 4 V''''''A Figure 6 Procedural Amendment “Sponsored” October 1988. Horse. 8
Claims (2)
発振器において、前記一対の主電極のうちの一方の主電
極はその中心部に開孔を有すると共にその内部が空洞に
なつており、この空洞内に棒状予備電離電極を設け、こ
の棒状予備電離電極を前記予備電離電極と電気的に接続
したことを特徴とするレーザ発振器。(1) In a laser oscillator equipped with a pair of main electrodes and a pre-ionization electrode, one of the pair of main electrodes has an opening in its center and is hollow inside. A laser oscillator characterized in that a rod-shaped pre-ionization electrode is provided in a cavity, and the rod-shaped pre-ionization electrode is electrically connected to the pre-ionization electrode.
を特徴とする特許請求の範囲第１項記載のレーザ発振器
。(2) The laser oscillator according to claim 1, wherein the rod-shaped pre-ionization electrode is coated with a dielectric material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18335686A JPS6340385A (en) | 1986-08-06 | 1986-08-06 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18335686A JPS6340385A (en) | 1986-08-06 | 1986-08-06 | Laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6340385A true JPS6340385A (en) | 1988-02-20 |
Family
ID=16134314
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18335686A Pending JPS6340385A (en) | 1986-08-06 | 1986-08-06 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6340385A (en) |
-
1986
- 1986-08-06 JP JP18335686A patent/JPS6340385A/en active Pending
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