JPH02146426U - - Google Patents

Info

Publication number
JPH02146426U
JPH02146426U JP5655989U JP5655989U JPH02146426U JP H02146426 U JPH02146426 U JP H02146426U JP 5655989 U JP5655989 U JP 5655989U JP 5655989 U JP5655989 U JP 5655989U JP H02146426 U JPH02146426 U JP H02146426U
Authority
JP
Japan
Prior art keywords
reactor
cap
plasma processing
closes
opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5655989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0754999Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989056559U priority Critical patent/JPH0754999Y2/ja
Publication of JPH02146426U publication Critical patent/JPH02146426U/ja
Application granted granted Critical
Publication of JPH0754999Y2 publication Critical patent/JPH0754999Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP1989056559U 1989-05-17 1989-05-17 縦型プラズマ処理機のリアクター Expired - Lifetime JPH0754999Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989056559U JPH0754999Y2 (ja) 1989-05-17 1989-05-17 縦型プラズマ処理機のリアクター

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989056559U JPH0754999Y2 (ja) 1989-05-17 1989-05-17 縦型プラズマ処理機のリアクター

Publications (2)

Publication Number Publication Date
JPH02146426U true JPH02146426U (enrdf_load_stackoverflow) 1990-12-12
JPH0754999Y2 JPH0754999Y2 (ja) 1995-12-18

Family

ID=31580495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989056559U Expired - Lifetime JPH0754999Y2 (ja) 1989-05-17 1989-05-17 縦型プラズマ処理機のリアクター

Country Status (1)

Country Link
JP (1) JPH0754999Y2 (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860552A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置
JPS6226028U (enrdf_load_stackoverflow) * 1985-07-29 1987-02-17

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5860552A (ja) * 1981-10-05 1983-04-11 Tokyo Denshi Kagaku Kabushiki 縦型自動プラズマ処理装置
JPS6226028U (enrdf_load_stackoverflow) * 1985-07-29 1987-02-17

Also Published As

Publication number Publication date
JPH0754999Y2 (ja) 1995-12-18

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