JPH02146326U - - Google Patents
Info
- Publication number
- JPH02146326U JPH02146326U JP5570589U JP5570589U JPH02146326U JP H02146326 U JPH02146326 U JP H02146326U JP 5570589 U JP5570589 U JP 5570589U JP 5570589 U JP5570589 U JP 5570589U JP H02146326 U JPH02146326 U JP H02146326U
- Authority
- JP
- Japan
- Prior art keywords
- diaphragm
- block
- attached
- differential pressure
- sensor chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims 5
- 239000012530 fluid Substances 0.000 claims 3
- 238000007789 sealing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5570589U JPH02146326U (de) | 1989-05-15 | 1989-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5570589U JPH02146326U (de) | 1989-05-15 | 1989-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146326U true JPH02146326U (de) | 1990-12-12 |
Family
ID=31578897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5570589U Pending JPH02146326U (de) | 1989-05-15 | 1989-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146326U (de) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5188059A (de) * | 1975-01-30 | 1976-08-02 | ||
| JPS5439161A (en) * | 1977-09-02 | 1979-03-26 | Hitachi Ltd | Liquid level meter of differential pressure type |
-
1989
- 1989-05-15 JP JP5570589U patent/JPH02146326U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5188059A (de) * | 1975-01-30 | 1976-08-02 | ||
| JPS5439161A (en) * | 1977-09-02 | 1979-03-26 | Hitachi Ltd | Liquid level meter of differential pressure type |
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