JPH02146165U - - Google Patents
Info
- Publication number
- JPH02146165U JPH02146165U JP5432989U JP5432989U JPH02146165U JP H02146165 U JPH02146165 U JP H02146165U JP 5432989 U JP5432989 U JP 5432989U JP 5432989 U JP5432989 U JP 5432989U JP H02146165 U JPH02146165 U JP H02146165U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- vapor phase
- epitaxial growth
- reaction
- phase epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 239000012808 vapor phase Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 4
- 239000013078 crystal Substances 0.000 claims 1
- 239000004570 mortar (masonry) Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5432989U JPH02146165U (un) | 1989-05-11 | 1989-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5432989U JPH02146165U (un) | 1989-05-11 | 1989-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146165U true JPH02146165U (un) | 1990-12-12 |
Family
ID=31576296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5432989U Pending JPH02146165U (un) | 1989-05-11 | 1989-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146165U (un) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013521655A (ja) * | 2010-03-03 | 2013-06-10 | ビーコ・インストゥルメンツ・インコーポレイテッド | 傾斜縁を有するウエハキャリア |
| CN105755450A (zh) * | 2010-12-30 | 2016-07-13 | 维易科仪器公司 | 使用承载器扩展的晶圆加工 |
-
1989
- 1989-05-11 JP JP5432989U patent/JPH02146165U/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013521655A (ja) * | 2010-03-03 | 2013-06-10 | ビーコ・インストゥルメンツ・インコーポレイテッド | 傾斜縁を有するウエハキャリア |
| JP2016184742A (ja) * | 2010-03-03 | 2016-10-20 | ビーコ・インストゥルメンツ・インコーポレイテッド | 傾斜縁を有するウエハキャリア |
| CN105755450A (zh) * | 2010-12-30 | 2016-07-13 | 维易科仪器公司 | 使用承载器扩展的晶圆加工 |
| US9938621B2 (en) | 2010-12-30 | 2018-04-10 | Veeco Instruments Inc. | Methods of wafer processing with carrier extension |
| US10167554B2 (en) | 2010-12-30 | 2019-01-01 | Veeco Instruments Inc. | Wafer processing with carrier extension |
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