JPH02144740U - - Google Patents

Info

Publication number
JPH02144740U
JPH02144740U JP1989147771U JP14777189U JPH02144740U JP H02144740 U JPH02144740 U JP H02144740U JP 1989147771 U JP1989147771 U JP 1989147771U JP 14777189 U JP14777189 U JP 14777189U JP H02144740 U JPH02144740 U JP H02144740U
Authority
JP
Japan
Prior art keywords
support
ceramic
sensor element
ceramic sheet
support according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1989147771U
Other languages
English (en)
Other versions
JP2516277Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPH02144740U publication Critical patent/JPH02144740U/ja
Application granted granted Critical
Publication of JP2516277Y2 publication Critical patent/JP2516277Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/16—Special arrangements for conducting heat from the object to the sensitive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Testing Or Calibration Of Command Recording Devices (AREA)

Description

【図面の簡単な説明】
第１図はセンサ素子を有するプレートの断面図
、第２図は第１図に示したプレートの平面図であ
る。 １０……支持体、１１……センサ素子、１２…
…プレート、１３……孔、１４……セラミツクシ
ート、１５……評価エレクトロニクス。

Claims (1)

  1. 【実用新案登録請求の範囲】 １ セラミツク材料より成るセンサ素子１１の支
    持体１０において、該支持体１０が少なくとも一
    つの貫通する孔１３を有しており、該孔１３が薄
    いセラミツクシート１４によつて覆われていて、
    該セラミツクシート１４上の前記孔１３の範囲に
    センサ素子１１が取り付けられていることを特徴
    とする、センサの支持体。 ２ 前記セラミツクシート１４が高含量のガラス
    成分を有するセラミツクスより成つている、請求
    項１記載の支持体。 ３ 前記支持体１０上にセラミツク素子１１のた
    めの評価エレクトロニクス１５が配置されている
    、請求項１記載の支持体。 ４ 前記支持体１０が未処理の焼結されていない
    多数のセラミツクシートより成つている、請求項
    １から３までのいずれか１項記載の支持体。 ５ センサ素子１１が流過量センサであつて、セ
    ラミツクシート１４が測定しようとする媒体流に
    対してほぼ平行に配置されている、請求項１から
    ４までのいずれか１項記載の支持体。
JP1989147771U 1989-01-07 1989-12-25 センサ Expired - Lifetime JP2516277Y2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE8900142U DE8900142U1 (de) 1989-01-07 1989-01-07 Träger für Sensoren
DE8900142.7 1989-01-07

Publications (2)

Publication Number Publication Date
JPH02144740U true JPH02144740U (ja) 1990-12-07
JP2516277Y2 JP2516277Y2 (ja) 1996-11-06

Family

ID=6834870

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989147771U Expired - Lifetime JP2516277Y2 (ja) 1989-01-07 1989-12-25 センサ

Country Status (3)

Country Link
US (1) US5027652A (ja)
JP (1) JP2516277Y2 (ja)
DE (1) DE8900142U1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2564415B2 (ja) * 1990-04-18 1996-12-18 株式会社日立製作所 空気流量検出器
US5189916A (en) * 1990-08-24 1993-03-02 Ngk Spark Plug Co., Ltd. Pressure sensor
DE19946533C2 (de) * 1999-09-28 2002-01-10 Invent Flow Control Systems Gm Sensor zur Messung der Strömungsgeschwindigkeit von Gasen und Verfahren zu dessen Herstellung
US11681910B2 (en) * 2017-07-28 2023-06-20 Sony Interactive Entertainment Inc. Training apparatus, recognition apparatus, training method, recognition method, and program

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4964478A (ja) * 1972-06-14 1974-06-21
JPS6010138A (ja) * 1983-06-30 1985-01-19 Toshiba Corp 熱流束測定装置
JPS61239127A (ja) * 1985-04-15 1986-10-24 Natl Space Dev Agency Japan<Nasda> 熱流束センサ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2925975A1 (de) * 1979-06-27 1981-01-15 Siemens Ag Mengendurchflussmesser
US4471647A (en) * 1980-04-18 1984-09-18 Board Of Regents Of Stanford University Gas chromatography system and detector and method
US4633578A (en) * 1983-12-01 1987-01-06 Aine Harry E Miniature thermal fluid flow sensors and batch methods of making same
JPS61170618A (ja) * 1985-01-24 1986-08-01 Toyota Central Res & Dev Lab Inc 流速検出用半導体センサ
JPS61178614A (ja) * 1985-02-02 1986-08-11 Nippon Soken Inc 直熱型流量センサ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4964478A (ja) * 1972-06-14 1974-06-21
JPS6010138A (ja) * 1983-06-30 1985-01-19 Toshiba Corp 熱流束測定装置
JPS61239127A (ja) * 1985-04-15 1986-10-24 Natl Space Dev Agency Japan<Nasda> 熱流束センサ

Also Published As

Publication number Publication date
US5027652A (en) 1991-07-02
JP2516277Y2 (ja) 1996-11-06
DE8900142U1 (de) 1990-05-10

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