JPH0214358U - - Google Patents

Info

Publication number

JPH0214358U

JPH0214358U JP9261288U JP9261288U JPH0214358U JP H0214358 U JPH0214358 U JP H0214358U JP 9261288 U JP9261288 U JP 9261288U JP 9261288 U JP9261288 U JP 9261288U JP H0214358 U JPH0214358 U JP H0214358U

Authority

JP

Japan

Prior art keywords

disk

electrons

primary

electron emission

wafer

Prior art date

1988-07-12

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010884 ion-beam technique Methods 0.000 claims description 3
• 238000005259 measurement Methods 0.000 claims 2
• 230000001678 irradiating effect Effects 0.000 claims 1
• 238000000034 method Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 238000006386 neutralization reaction Methods 0.000 description 3
• 238000001514 detection method Methods 0.000 description 1
• 230000007935 neutral effect Effects 0.000 description 1