JPH0214358U - - Google Patents
Info
- Publication number
- JPH0214358U JPH0214358U JP9261288U JP9261288U JPH0214358U JP H0214358 U JPH0214358 U JP H0214358U JP 9261288 U JP9261288 U JP 9261288U JP 9261288 U JP9261288 U JP 9261288U JP H0214358 U JPH0214358 U JP H0214358U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- electrons
- primary
- electron emission
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000006386 neutralization reaction Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9261288U JPH0214358U (OSRAM) | 1988-07-12 | 1988-07-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9261288U JPH0214358U (OSRAM) | 1988-07-12 | 1988-07-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0214358U true JPH0214358U (OSRAM) | 1990-01-29 |
Family
ID=31317046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9261288U Pending JPH0214358U (OSRAM) | 1988-07-12 | 1988-07-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214358U (OSRAM) |
-
1988
- 1988-07-12 JP JP9261288U patent/JPH0214358U/ja active Pending
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