JPH02142691A - Welding method - Google Patents

Abstract

PURPOSE:To prevent defective welding by forming a collar having specific times thickness as much as a thin metallic plate member on the periphery of a thick metallic plate member, welding a collar end to a thin metallic plate member end and regulating the welding energy so that a contact angle between the welding surface and extension of the surfaces of both members is made to less than a prescribed value. CONSTITUTION:The collar 3 having 1 - 3 times thickness as much as that of the thin metallic plate member 1 is formed on the periphery of the thick metallic plate member 2. The end of the thin metallic plate member 1 having thickness less than prescribed thickness and the and of the collar 3 are subjected to rounding welding by a laser beam irradiation so that a welded zone 4 is formed into a hemispherical shape. Be-Cu is used for both metallic members and a Nd-YAG laser beam is used as the laser beam and respective prescribed values of the pulse width, average deviation quantity, average output, pulse rate, weld ing speed, lens focal length, shielding gas pressure, gas flow rate, etc., are used as welding conditions. Ar gas is used as shielding gas. The welding energy is regulated so that the contact angle theta of the welded zone is made to <=35 deg. and high airtightness is obtained. By this method, defective welding is prevented.

Description

[Detailed description of the invention] 〔overview〕 Concerning detailed welding methods for small electronic parts, etc.

The purpose is to provide a welding method that prevents welding defects in thin metal plates and has high airtightness.

A brim having a thickness of 1 to 3 times that of the thin metal plate member is formed on the periphery of the thick metal plate member, and the third temporary metal member is brought into contact with the thick metal plate member in the thickness direction so that the edge of the brim At this time, the ends of the thin metal plate member are welded.

The surface of the welded portion in contact with both the thick metal plate member and the thin metal plate member is configured such that the contact angle formed with the extended surface of the surfaces of both members is 35° or less.

[Industrial application field]

The present invention relates to a fine welding method for small electronic parts and the like.

In recent years, with the miniaturization of electronic components, the size of welded parts of packages and the like that seal electronic components has become smaller and smaller, and the present invention can be used as a method for stably performing these fine welds.

[Conventional technology]

The third method of welding thin metal plates with a thickness of 100 μm or less
As shown in the figure.

FIGS. 3(1) and 3(2) are cross-sectional views of members illustrating a conventional method of welding a single metal plate.

Figure 3 (1) shows the state before welding, and Figure 3 (2) shows the state after welding.

In the conventional method, large energy (laser light) is required to melt the thick plate member 2, so the Fi plate member 1 deforms and a force acts in the direction of separating both members, causing the welded portion 4
It had the disadvantage that it would break.

Furthermore, when the welding energy is reduced in order to reduce deformation, the welded portion 4 is not sufficiently penetrated and breaks, resulting in poor joining.

[Problem to be solved by the invention]

Due to the above-mentioned welding defects, airtightness may not be obtained at the welded portion of the package.

An object of the present invention is to provide a welding method that prevents welding defects and has high airtightness.

[Means to solve the problem]

To solve the above problem, a collar having a thickness 1 to 3 times that of the thin metal plate member is formed on the periphery of the thick metal plate member.

The thin metal plate member is brought into contact with the thick metal plate member in the thickness direction to weld the end of the collar and the end of the thin metal plate member, and at this time, both the thick metal plate member and the thin metal plate member are welded. This is achieved by a welding method in which the welding energy is such that the contact angle between the surface of the welded portion in contact with the member and the extended surface of the surfaces of both members is 35° or less.

[Effect]

FIGS. 1(1) to 1(3) are diagrams of the principle of the present invention, and are sectional views of welded parts.

In FIG. 1 (1), a thick metal plate member 2 has a collar 3 on its periphery having a thickness of 1 to 3 times the thickness of the thin metal plate member 1, and has a thickness of 100 μm or less. The end portion and the end portion of the collar 3 are welded so that the welded portion 4 is rounded into a hemispherical shape due to surface tension.

The formation of the flange 3 allows welding to be performed with less welding energy, making it difficult for the thin plate member 1 to deform, thereby preventing the welded portion 4 from breaking, and making it possible to perform welding with high airtightness.

In addition, if the length of the brim is sufficiently larger than the thickness of the brim, and the thickness of the brim is three times or less than the thickness of the thin metal plate member 1, It was experimentally confirmed that it did not deform.

By gradually increasing the welding energy, the shape of the welded part 4 becomes larger as shown in Fig. 1 (2), and the contact angle θ increases, and when the welding energy is further increased, the shape becomes as shown in Fig. 1 (3).
As shown in FIG. 2, the surface tension increases and the thin metal plate member 1 is broken.

As a result of actual measurements, the relationship between the contact angle θ and the airtightness of the welded portion 4 at that time is shown in the following table.

Airtightness (atm cc s-') (I X 10-10-6-4 <lXl0-"< lXl0-10 7 When the angle is 35° or more, high airtightness is obtained, but when the angle is 35° or more, the airtightness decreases.

The present invention prevents poor welding by providing a flange on a thick metal plate member and adjusting welding energy so that the contact angle of the welded portion is 35° or less.

〔Example〕

FIGS. 2(1) and 2(2) are cross-sectional views of members illustrating a method of welding thin metal plates according to an embodiment of the present invention.

FIG. 2 (1) shows the state before welding, and FIG. 2 (2) shows the state after welding.

In the figure, a thick metal plate member 2 has a collar 3 on its periphery having a thickness of 1 to 3 times the thickness of the thin metal plate member l.

By irradiating the laser beam, the end of the metal thin plate member 1 having a thickness of 100 μm or less and the end of the collar 3 are welded so that the welded portion 4 is rounded into a hemispherical shape.

Here, beryllium copper was used for the metal thin plate member 1 and the metal thick plate member 2.

The laser used for welding was an Nd-YAG laser, and the welding conditions were: pulse width '1 ms, defocus'! ! kOmm
, average output 120 W, pulse ray) 30 pps,
Welding speed 150 mm/min, lens focal length 100
n+n+, static shielding gas, gas pressure 1.5 k
g/cm", and the gas flow rate was 301 g/min.

FIG. 4 is a sectional view of a package showing an example of an application of the present invention.

The figure 2 shows a diaphragm used, for example, in an atmospheric pressure sensor, all of which are made of beryllium copper, and the thin plate member I has a hollow. and the periphery of the bellows tip.

The peripheral edge of the collar 3 provided on the thick plate member 2 is welded and sealed.

[Brief explanation of the drawing]

FIGS. 1 (1) to (3) illustrate the principle of the present invention, and are sectional views of welded parts. FIGS. 2(1) and 2(2) are cross-sectional views of members illustrating a method of welding thin metal plates according to an embodiment of the present invention. FIGS. 3(1) and 3(2) are cross-sectional views of members illustrating a conventional method of welding thin metal plates. FIG. 4 is a sectional view of a package showing an example of an application of the present invention. In fig. 1 is a thin metal plate member. 2 is a metal thick plate member 3 is a collar provided on the periphery of the thick metal plate member. 4: Welded Section [Effects of the Invention] As explained above, according to the present invention, a welding method that prevents poor welding of metal thin plates and has high airtightness can be obtained. (1) Lu η small (L=o) (2) Outputting
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Claims (1)

[Claims] A flange having a thickness of 1 to 3 times that of the thin metal plate member is formed on the periphery of the thick metal plate member, and the thin metal plate member is brought into contact with the thick metal plate member in the thickness direction so that the end of the flange and the The ends of the thin metal plate members are welded, and at this time, the contact angle that the surface of the welded part that contacts both the thick metal plate member and the thin metal plate member makes with the extended surface of the surfaces of the two members is 35° or less A welding method characterized by using a welding energy such that .