JPH02142535U - - Google Patents
Info
- Publication number
- JPH02142535U JPH02142535U JP5169889U JP5169889U JPH02142535U JP H02142535 U JPH02142535 U JP H02142535U JP 5169889 U JP5169889 U JP 5169889U JP 5169889 U JP5169889 U JP 5169889U JP H02142535 U JPH02142535 U JP H02142535U
- Authority
- JP
- Japan
- Prior art keywords
- wafer carrier
- integrated circuit
- circuit devices
- semiconductor integrated
- engaging protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims description 16
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5169889U JPH02142535U (enrdf_load_html_response) | 1989-05-02 | 1989-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5169889U JPH02142535U (enrdf_load_html_response) | 1989-05-02 | 1989-05-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02142535U true JPH02142535U (enrdf_load_html_response) | 1990-12-04 |
Family
ID=31571363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5169889U Pending JPH02142535U (enrdf_load_html_response) | 1989-05-02 | 1989-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02142535U (enrdf_load_html_response) |
-
1989
- 1989-05-02 JP JP5169889U patent/JPH02142535U/ja active Pending
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