JPH02142526U - - Google Patents
Info
- Publication number
- JPH02142526U JPH02142526U JP5140289U JP5140289U JPH02142526U JP H02142526 U JPH02142526 U JP H02142526U JP 5140289 U JP5140289 U JP 5140289U JP 5140289 U JP5140289 U JP 5140289U JP H02142526 U JPH02142526 U JP H02142526U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- insulator
- contact
- groove portion
- introducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012212 insulator Substances 0.000 claims description 8
- 239000002826 coolant Substances 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本考案に係る試料台の模式的断面図、
第２図は絶縁体における電極及びヒータの構成を
示す模式図、第３図は、絶縁体の模式的平面図、
第４図は静電チヤツクを備えた従来の試料台の模
式的断面図である。
３……絶縁体、４……電極、５……電極棒、９
……試料、１１……溝部分、１１ａ……導入口、
１２……ヒータ、１４……端子。
FIG. 1 is a schematic cross-sectional view of the sample stage according to the present invention,
FIG. 2 is a schematic diagram showing the configuration of electrodes and heaters in the insulator, and FIG. 3 is a schematic plan view of the insulator.
FIG. 4 is a schematic cross-sectional view of a conventional sample stage equipped with an electrostatic chuck. 3... Insulator, 4... Electrode, 5... Electrode rod, 9
...Sample, 11...Groove portion, 11a...Inlet,
12...Heater, 14...Terminal.
Claims (1)
面に接触する試料との間に電圧を印加し、両者間
に生じる静電力により、前記試料を前記表面に保
持すべくなしてある試料台において、 前記絶縁体の内部に配設され、前記試料を加熱
する手段と、 前記絶縁体の表面に形成され、前記絶縁体と前
記試料との間に冷却媒体を通流せしめるための溝
部分と を備えていることを特徴とする試料台。[Claims for Utility Model Registration] A voltage is applied between an electrode covered with an insulator and a sample in contact with the surface of the insulator, and the electrostatic force generated between the two causes the sample to be brought into contact with the surface. In a sample stand configured to hold the sample, means disposed inside the insulator for heating the sample, and a means formed on the surface of the insulator for introducing a cooling medium between the insulator and the sample. A sample stand characterized by comprising a groove portion for allowing flow of water.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5140289U JPH02142526U (en) | 1989-04-28 | 1989-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5140289U JPH02142526U (en) | 1989-04-28 | 1989-04-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02142526U true JPH02142526U (en) | 1990-12-04 |
Family
ID=31570816
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5140289U Pending JPH02142526U (en) | 1989-04-28 | 1989-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02142526U (en) |
-
1989
- 1989-04-28 JP JP5140289U patent/JPH02142526U/ja active Pending