JPH0243134U - - Google Patents
Info
- Publication number
- JPH0243134U JPH0243134U JP11994288U JP11994288U JPH0243134U JP H0243134 U JPH0243134 U JP H0243134U JP 11994288 U JP11994288 U JP 11994288U JP 11994288 U JP11994288 U JP 11994288U JP H0243134 U JPH0243134 U JP H0243134U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electric heater
- electrically insulating
- ceramic substrate
- insulating ceramic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 2
- 239000002184 metal Substances 0.000 description 1
Description
第１図は本考案の一実施例の採用された静電チ
ヤツクを示す断面図、第２図は従来の静電チヤツ
クおよび被チヤツク物の加熱する電気ヒータを示
す断面図である。
図中、１……静電チヤツク、２……グリーンシ
ート（セラミツク基板）、３……一方の電極、４
，６……セラミツク製絶縁保護膜（セラミツク保
護膜）、５……金属製電気ヒータ、７……基板（
被チヤツク物）。
FIG. 1 is a sectional view showing an electrostatic chuck according to an embodiment of the present invention, and FIG. 2 is a sectional view showing a conventional electrostatic chuck and an electric heater for heating an object to be chucked. In the figure, 1... Electrostatic chuck, 2... Green sheet (ceramic substrate), 3... One electrode, 4
, 6... Ceramic insulating protective film (ceramic protective film), 5... Metal electric heater, 7... Substrate (
subject matter).
Claims (1)
極を配置するとともに、 前記セラミツク基板の他面に他方の電極として
の被チヤツク物を加熱する電気ヒータを配置し、 前記一方の電極および前記電気ヒータを電気絶
縁性のセラミツク保護膜で被覆し一体化した静電
チヤツク。[Claims for Utility Model Registration] One electrode is arranged on one side of an electrically insulating ceramic substrate, and an electric heater for heating the object to be heated as the other electrode is arranged on the other side of the ceramic substrate, An electrostatic chuck in which one electrode and the electric heater are coated with an electrically insulating ceramic protective film and integrated.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11994288U JPH0243134U (en) | 1988-09-13 | 1988-09-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11994288U JPH0243134U (en) | 1988-09-13 | 1988-09-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0243134U true JPH0243134U (en) | 1990-03-26 |
Family
ID=31365609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11994288U Pending JPH0243134U (en) | 1988-09-13 | 1988-09-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0243134U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04304941A (en) * | 1991-03-29 | 1992-10-28 | Ngk Insulators Ltd | Manufacture of wafer holder |
| JPH058140A (en) * | 1990-12-28 | 1993-01-19 | Ngk Insulators Ltd | Electrostatic chuck |
| JP2001189378A (en) * | 1990-12-25 | 2001-07-10 | Ngk Insulators Ltd | Wafer-chucking heating apparatus |
| JP2003347396A (en) * | 1990-12-25 | 2003-12-05 | Ngk Insulators Ltd | Wafer chucking heating apparatus and wafer chucking apparatus |
-
1988
- 1988-09-13 JP JP11994288U patent/JPH0243134U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001189378A (en) * | 1990-12-25 | 2001-07-10 | Ngk Insulators Ltd | Wafer-chucking heating apparatus |
| JP2003347396A (en) * | 1990-12-25 | 2003-12-05 | Ngk Insulators Ltd | Wafer chucking heating apparatus and wafer chucking apparatus |
| JPH058140A (en) * | 1990-12-28 | 1993-01-19 | Ngk Insulators Ltd | Electrostatic chuck |
| JPH04304941A (en) * | 1991-03-29 | 1992-10-28 | Ngk Insulators Ltd | Manufacture of wafer holder |