JPS6219735U - - Google Patents
Info
- Publication number
- JPS6219735U JPS6219735U JP11133985U JP11133985U JPS6219735U JP S6219735 U JPS6219735 U JP S6219735U JP 11133985 U JP11133985 U JP 11133985U JP 11133985 U JP11133985 U JP 11133985U JP S6219735 U JPS6219735 U JP S6219735U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- wafer
- glass
- electrodepositing
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004070 electrodeposition Methods 0.000 claims description 5
- 239000011521 glass Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000011810 insulating material Substances 0.000 description 1
Landscapes
- Formation Of Insulating Films (AREA)
Description
第１図は本考案ガラス電着治具の正面図、第２
図はウエハのガラス電着治具への取付状態を示す
断面図、第３図はクリツプの断面図、第４図はガ
ラス電着状態を示す断面模式図である。
１……電着治具、２……ウエハ、３，３……電
極、４，４……絶縁材料、５……クリツプ。
Figure 1 is a front view of the glass electrodeposition jig of the present invention, Figure 2
The figure is a cross-sectional view showing how the wafer is attached to the glass electrodeposition jig, FIG. 3 is a cross-sectional view of the clip, and FIG. 4 is a schematic cross-sectional view showing the glass electrodeposition state. 1... Electrodeposition jig, 2... Wafer, 3, 3... Electrode, 4, 4... Insulating material, 5... Clip.
Claims (1)
おいてウエハ周囲部に接する電極と、この電極に
電圧を供給するためのリード部と、上記電極のウ
エハへの接触部以外を被う絶縁性の被覆材とから
成るガラス電着治具。 In a holder for electrodepositing glass on the wafer surface, an electrode in contact with the wafer periphery, a lead part for supplying voltage to this electrode, and an insulating coating that covers the part other than the part of the electrode that contacts the wafer. A glass electrodeposition jig consisting of materials.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11133985U JPS6219735U (en) | 1985-07-19 | 1985-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11133985U JPS6219735U (en) | 1985-07-19 | 1985-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6219735U true JPS6219735U (en) | 1987-02-05 |
Family
ID=30991170
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11133985U Pending JPS6219735U (en) | 1985-07-19 | 1985-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6219735U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04124331A (en) * | 1990-09-13 | 1992-04-24 | Sekisui Chem Co Ltd | Kitchen equipment |
-
1985
- 1985-07-19 JP JP11133985U patent/JPS6219735U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04124331A (en) * | 1990-09-13 | 1992-04-24 | Sekisui Chem Co Ltd | Kitchen equipment |