JPH02141951U - - Google Patents

Info

Publication number
JPH02141951U
JPH02141951U JP5153689U JP5153689U JPH02141951U JP H02141951 U JPH02141951 U JP H02141951U JP 5153689 U JP5153689 U JP 5153689U JP 5153689 U JP5153689 U JP 5153689U JP H02141951 U JPH02141951 U JP H02141951U
Authority
JP
Japan
Prior art keywords
test piece
electron beam
scanning
observation area
strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5153689U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5153689U priority Critical patent/JPH02141951U/ja
Publication of JPH02141951U publication Critical patent/JPH02141951U/ja
Pending legal-status Critical Current

Links

JP5153689U 1989-04-28 1989-04-28 Pending JPH02141951U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5153689U JPH02141951U (enrdf_load_stackoverflow) 1989-04-28 1989-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5153689U JPH02141951U (enrdf_load_stackoverflow) 1989-04-28 1989-04-28

Publications (1)

Publication Number Publication Date
JPH02141951U true JPH02141951U (enrdf_load_stackoverflow) 1990-11-30

Family

ID=31571061

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5153689U Pending JPH02141951U (enrdf_load_stackoverflow) 1989-04-28 1989-04-28

Country Status (1)

Country Link
JP (1) JPH02141951U (enrdf_load_stackoverflow)

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