JPH02140971U - - Google Patents
Info
- Publication number
- JPH02140971U JPH02140971U JP4677689U JP4677689U JPH02140971U JP H02140971 U JPH02140971 U JP H02140971U JP 4677689 U JP4677689 U JP 4677689U JP 4677689 U JP4677689 U JP 4677689U JP H02140971 U JPH02140971 U JP H02140971U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust
- pump
- air
- exhaust pump
- decompression
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000006837 decompression Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989046776U JP2520592Y2 (ja) | 1989-04-20 | 1989-04-20 | 減圧排気装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989046776U JP2520592Y2 (ja) | 1989-04-20 | 1989-04-20 | 減圧排気装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02140971U true JPH02140971U (fr) | 1990-11-26 |
| JP2520592Y2 JP2520592Y2 (ja) | 1996-12-18 |
Family
ID=31562144
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989046776U Expired - Lifetime JP2520592Y2 (ja) | 1989-04-20 | 1989-04-20 | 減圧排気装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2520592Y2 (fr) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004183096A (ja) * | 2002-12-05 | 2004-07-02 | Samsung Electronics Co Ltd | 排気経路におけるパウダ生成を防止できる原子層蒸着装置 |
| JP2012057192A (ja) * | 2010-09-06 | 2012-03-22 | Edwards Kk | 逆流防止システム及び該逆流防止システムを備えた真空ポンプ |
| JP2018031570A (ja) * | 2016-08-26 | 2018-03-01 | 東京エレクトロン株式会社 | 安全装置、安全システム及び燃焼除害装置の安全化方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6024057U (ja) * | 1983-07-27 | 1985-02-19 | 日本電子株式会社 | 電子顕微鏡等の排気装置 |
| JPS63141893U (fr) * | 1987-03-10 | 1988-09-19 | ||
| JPH01134782U (fr) * | 1988-03-07 | 1989-09-14 |
-
1989
- 1989-04-20 JP JP1989046776U patent/JP2520592Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6024057U (ja) * | 1983-07-27 | 1985-02-19 | 日本電子株式会社 | 電子顕微鏡等の排気装置 |
| JPS63141893U (fr) * | 1987-03-10 | 1988-09-19 | ||
| JPH01134782U (fr) * | 1988-03-07 | 1989-09-14 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004183096A (ja) * | 2002-12-05 | 2004-07-02 | Samsung Electronics Co Ltd | 排気経路におけるパウダ生成を防止できる原子層蒸着装置 |
| JP2012057192A (ja) * | 2010-09-06 | 2012-03-22 | Edwards Kk | 逆流防止システム及び該逆流防止システムを備えた真空ポンプ |
| JP2018031570A (ja) * | 2016-08-26 | 2018-03-01 | 東京エレクトロン株式会社 | 安全装置、安全システム及び燃焼除害装置の安全化方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2520592Y2 (ja) | 1996-12-18 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |